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Proceedings of SPIE Volume 6175

Testing, Reliability, and Application of Micro- and Nano-Material Systems IV
Editor(s): Robert E. Geer; Norbert Meyendorf; George Y. Baaklini; Dietmar W. Vogel
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Volume Details

Volume Number: 6175
Date Published: 16 March 2006
Softcover: 9 papers (88) pages
ISBN: 9780819462282

Table of Contents
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Metrology (including materials characterization) for nanoelectronics
Author(s): A. C. Diebold; J. Price; P. Y. Hung
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Nanoscale deformation measurements for reliability assessment of material interfaces
Author(s): Jürgen Keller; Astrid Gollhardt; Dietmar Vogel; Bernd Michel
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FIB-based measurement of local residual stresses on microsystems
Author(s): Dietmar Vogel; Neus Sabate; Astrid Gollhardt; Juergen Keller; Juergen Auersperg; Bernd Michel
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Micro/meso scale fatigue damage accumulation monitoring using nonlinear acoustic vibro-modulation measurements
Author(s): Andrei Zagrai; Dimitri Donskoy; Alexander Chudnovsky; Edward Golovin; Vinod S. Agarwala
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Determination of deformation fields by atomic force acoustic microscopy
Author(s): Beatrice Bendjus; Bernd Köhler; Henning Heuer; Ute Rabe; André Striegler
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Nanomaterials produced by laser ablation techniques. Part II: High spatially resolved nondestructive characterization of nanostructures
Author(s): Bernd Koehler; Paul Murray; Eunsung Shin; Sebastian Lipfert; Juergen Schreiber
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Nanomaterials produced by laser ablation techniques. Part I: Synthesis and passivation of nanoparticles
Author(s): P. T. Murray; B. Koehler; S. Lipfert; J. Kaspar; J. Schreiber
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The resistance to chloride penetration of concrete containing nano-particles for pavement
Author(s): Mao-hua Zhang; Hui Li
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STEAM: a software tool based on empirical analysis for micro electro mechanical systems
Author(s): Archana Devasia; Ajay Pasupuleti; Ferat Sahin
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