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PROCEEDINGS VOLUME 6149

2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
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Volume Details

Volume Number: 6149
Date Published: 23 February 2006
Softcover: 132 papers (800) pages
ISBN: 9780819461889

Table of Contents
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Interferometric techniques applied in packaged MEMS and MOEMS measurement
Author(s): Sen Han
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Nonlinear resonance effects on thin micro structured aluminum metal gratings by high power fs-laser pulses
Author(s): E.-Bernhard Kley; Tobias Erdmann; Peter Triebel; Hans-Joerg Fuchs; Birger Horstmann; Stefan Nolte; Andreas Tünnermann
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Recent advanced in sub-aperture approaches to finishing and metrology
Author(s): Marc Tricard; Paul Dumas; Greg Forbes; Mike DeMarco
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Progress of advanced optical manufacturing technology integrated line
Author(s): Qiao Xu; Wei Li; Jian Wang; Liqun Cai
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An estimation of Z-pinch plasma radiation source for EUVL by using artificial neural networks
Author(s): C. H. Zhang; C. C. Ji; J. G. Shi; S. Katsuki; A. Kimura; H. Fukumoto; H. Akiyama
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The integration of optical thin film filters by hydrofluoric acid bonding
Author(s): L. Chen; K. Kintaka; H. Nishimura; K. Fukumi; J. Nishii; K. Hirao
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Design and fabrication of antireflection coatings on ZnS substrate
Author(s): Xianjun Su; Weiguo Sun; Qingwang Wei; Yan Xu; Jiayuan He
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Infrared durable protective/antireflection coatings with high performance on Ge and Si substrates
Author(s): XiLin Yao; ChangXin Xiong; ChangCheng Yang; NanChun Tong
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Study on cooling control of APD in the single-photon detection system
Author(s): Jinyun Zhou; Wen-yan Pei; Wei-jiang Wang; Chang-jun Liao; Song-hao Liu
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PVD SiC and PVD Si coatings on RB SiC for surface modification
Author(s): Huidong Tang; Zhengren Huang; Shouhong Tan
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Influence of Ta doping on the phase transition characteristics of VO<sub>2</sub> polycrystalline thin films
Author(s): Jinhua Li; Ningyi Yuan; Taibin Xie; Didi Dan
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Further application and amelioration of a novel CNC aspheric grinding machine
Author(s): Jianjun Hu; Junhua Pan
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Photo-written three-dimensional optical circuits in iron doped lithium niobate crystals
Author(s): Peng Zhang; Jianlin Zhao; Honglai Xu; Yanghua Ma; Dexing Yang
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Photoelectrical properties of polyaniline/polyimide complex thin film
Author(s): Jianbang Zheng; Chaoqi Hou; Jia Liu; Ju Ren; Jianlin Zhao
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Properties of carbon films by MCECR plasma sputtering
Author(s): Changlong Cai; Dongfeng Diao; Weihong Ma; Shoji Miyake
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Manufacturing of aspherical optics by ion beam and measuring techniques
Author(s): P. Médart; V. Busurin; P. Gailly; J. P. Collette; Y. Stockman
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Manufacturing of high-precision aspheres
Author(s): Uwe Birnbaum; Helmut Bernitzki; Oliver Falkenstörfer; Hans Lauth; Roland Schreiner; Thomas Waak
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Analysis and fabrication of a new two dimensional near infrared pincushion silicon based PSD
Author(s): Xunjun Qi; Bin Lin; Lu Lu; Wei Jin; Xiangqun Cao
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Research on the mathematical model of fluid jet polishing
Author(s): Hui Fang; Peiji Guo; Jingchi Yu
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Micro-phenomenon and viscosity features of magnetorheological fluids at external field
Author(s): Haobo Cheng; Guozheng Sun; Zhijing Feng; Yongtian Wang
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Subsurface damage mechanisms in diamond grinding of BK7 on tetraform 'C'
Author(s): Qingliang Zhao; Bo Wang; Shen Dong; David Stephenson; John Corbett
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Transferability of glass lens molding
Author(s): Masahide Katsuki
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Fabrication of relief gratings on high photosensitive SiO<sub>2</sub>/ZrO<sub>2</sub> gel film by UV exposure
Author(s): Xiang Xu; Bin Zhou; Chunze Liu; Chao Xu; Guangming Wu; Xingyuan Ni; Jun Shen
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A Monte-Carlo study on numerical aperture of lens and size of focal spots in turbid medium
Author(s): Jie Wang; Zhi-lie Tang; Zu-kang Lu
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Computer-aided alignment for space telescope optical system
Author(s): Yifan Huang; Lin Li; Yinhua Cao
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Optimal exposure distances for 3-D optical circuits induced by laser micromachining in LiNbO<sub>3</sub> crystals
Author(s): Honglai Xu; Peng Zhang; Jianlin Zhao; Yidong Sun; Dexing Yang; Zhijun Ye; Yuhan Gao
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Freeform diamond machining of complex monolithic metal optics for innovative astronomical applications
Author(s): Cornelis M. Dubbeldam; David J. Robertson
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Study of ultra-precision diamond turning of a microlens array with a fast tool servo system
Author(s): S. To; T. C. Kwok; C. F. Cheung; W. B. Lee
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The effects of RET on process capability for 45nm technology node
Author(s): Fei Zhang; Yanqiu Li
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Improving model-based optical proximity correction accuracy using improved process data generation
Author(s): Mark Lu; Dion King; Curtis Liang; Lawrence S. Melvin
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Polarization analysis in a very high resolution telescope (VHRT)
Author(s): Ying Zhang; Lin Li; Yi-fan Huang; Jia-guo Liu
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Machining characteristics and removal mechanisms of reaction bonded silicon carbide
Author(s): Wang Yao; Yu-min Zhang; Jie-cai Han
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Micro-fabrication by femtosecond laser pulses
Author(s): Yudong Li; Jianguo Tian; Qian Sun
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Design of rotation ellipsoidal cavity for detecting ultra-weak biophoton
Author(s): Ping Wu; Xiang He; Da-xing Dong; You-yi Lin
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Profilometer with sub-nanometer resolution for on-line measurement of fine optical surfaces
Author(s): Zhao-fei Zhou; Wei Huang; Tao Zhang
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Fabrication method of multiple VBGs with directly layered structure and its experimental demonstration
Author(s): Haibin Wang; Dexing Yang; Jianlin Zhao; Xiarui Guo
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Preparation of the multi-layer LiTaO<sub>3</sub> infrared-detected functional thin film
Author(s): De-Yin Zhang; Da-Gui Huang; Zheng Dong
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Defect study on infrared thin film of 3.8um
Author(s): Yao-ping Zhang; Hong Xu; Ning Ling; Yun-dong Zhang
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Polarization analysis for laser optical system
Author(s): Fan Yang; Zhiqiang Huang; Tingwen Xing
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Design of transmitting optical antenna of a terrestrial line-sight optical communication
Author(s): Jian-wen Chen; Zi-li Liu; Zai-lu Huang
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Optical design of an optical system for free space optical communication
Author(s): Chang-yu Shen; Fei Chen; Xiang-dong Yu
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Broadband distributed Raman amplifier using single pump
Author(s): Chenxia Li; Bizhi Dai; Zaixuan Zhang; Shiqing Xu; Songlin Zhuang
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Characteristics of front-illuminated visible-blind UV photodetector based on GaN p-i-n photodiodes with high quantum efficiency
Author(s): Da You; Yingwen Tang; Jintong Xu; Haimei Gong
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Detection apparatus for fluorescent microarray slides
Author(s): Liqiang Wang; Zukang Lu
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Effects of residual stresses on mechanical properties of segmented micro deformable mirrors
Author(s): Yiting Yu; Weizheng Yuan; Dayong Qiao
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Bicubic uniform B-spline wavefront fitting technology applied in computer-generated holograms
Author(s): Hui Cao; Jun-qiang Sun; Guo-jie Chen
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Method for the fabrication of isometric mesh on the concave of a spherical substrate
Author(s): Xiao-guo Feng; Lian-chun Sun
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Improvement of Schmidt system
Author(s): Peiming Hao; Hongguang Li; Baozhu Pan; Weiwei Li; Liyin Yuan; Renwang Mu
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Chip design of linear CCD drive pulse generator and control interface
Author(s): Rongtai Cai; Honghai Sun; Yanjie Wang
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Optical characterization and electrochemical behavior of electrochromic windows using magnetron sputter deposition Tungsten Oxide and&#65288;1-x&#65289;WO<sub>3</sub>xTiO<sub>2</sub> thin films
Author(s): Zhuying Li; Zuli Liu; Kailun Yao; Yusu Song
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Modeling and simulation of silicon micromechanical electrostatic comb-drive resonator
Author(s): Sumin Yin; Y. K. Zhang; Jianming Zhou
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Refractive index analysis of graded index coatings prepared by reactive magnetron sputtering
Author(s): Zicai Shen; Shijie Liu; Wiejin Kong; Jian Shen; Jianda Shao; Zhengxiu Fan
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Comparative study on different types of segmented micro deformable mirrors
Author(s): Dayong Qiao; Weizheng Yuan; Kaicheng Li; Xiaoying Li; Fubo Rao
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Optical properties of SiO<sub>2</sub>/Si<sub>3</sub>N<sub>4</sub> films prepared on sapphire
Author(s): Liping Feng; Zhengtang Liu; Qiang Li; QinQin Lu
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Structure and properties of diamond-like carbon coatings on large area infrared elements
Author(s): Qiantao Li; Changxin Xiong; Mi Zhu
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Optical properties of light-emitting porous silicon
Author(s): Fengcheng Teng; Shuxin Qiao; Yanan Cai; Zhiquan Li
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ZnS thin films fabricated by electron beam evaporation with glancing angle deposition
Author(s): Sumei Wang; Guodong Xia; Jianda Shao; Zhengxiu Fan
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Design of multi-layer dielectric grating film with non-quarter wave coatings
Author(s): Shijie Liu; Zicai Shen; Weijing Kong; Jian Shen; Hongbo He; Jianda Shao; Zhengxiu Fan
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Simulation study on the influence of interface asymmetry on soft x-ray reflectivity of Mo/Si multilayers
Author(s): Junling Qin; Kui Yi; Jianda Shao; Zhengxiu Fan
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Research on infrared non-polarizing beam splitters
Author(s): Zheng Ping Wang; Jin Hui Shi; Zongjun Huang
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Fabrication of low-cost polymer microlens array
Author(s): Tonghai Li; Baowen Hu; Guohua Jiao; Xiaoyi Guo; Lili Wang; Yulin Li
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Factors affecting the surface shape and removal rate of workpiece in CMP
Author(s): Quantang Fan; Jianqiang Zhu; Baoan Zhang; Weixing Shen
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Study on formula design about graded reflectivity mirror used in the single transverse mode Nd:YAG laser resonator
Author(s): Xiao-Dan Gao; Xiao-Hui Zhang
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Transmission characteristic in random medium thin film
Author(s): Liang Liang; Y. C. Wang; Zhou Chao
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Study of the optical properties of ZnO thin films prepared by laser molecular beam epitaxy
Author(s): Zhongfeng Xu; Kairu Ju; Qing'an Xu
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Principle of a new deformable mirror actuated by liquid drops
Author(s): Hao Wang; Xiangang Luo; Hanmin Yao; Chunlei Du
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Novel nano-scale overlay alignment method for room-temperature imprint lithography
Author(s): Li Wang; Yucheng Ding; Bingheng Lu; Zhihui Qiu
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Investigation of photoelectron properties in cubic AgCl emulsion with uniformly doped formate ions
Author(s): Guang-Sheng Fu; Xian Zhou; Shao-Peng Yang; Xiao-Wei Li; Xiao-Dong Tian; Li Han
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Research of an integrated LiTaO3 pyroelectric infrared fire detector
Author(s): Zheng Dong; Da-Gui Huang; De-Yin Zhang
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Fabrication of microstructured polymer optical fiber preform
Author(s): Yani Zhang; Lili Wang; Liyong Ren; Tonghai Li; Xuezhong Wang; Wei Zhao; Runcai Miao
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Study of a new portable x-ray source with micro-beam
Author(s): Kaige Wang; Ji Li; Qinlao Yang; Jinchuan Guo; Baoping Guo; Xiaomei Kuo; Junlan Zhou; Hanben Niu
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Determination of optical constants and thickness of Nb<sub>2</sub>O<sub>5</sub> optical films from normal incidence transmission spectra
Author(s): Limei Lin; Fachun Lai; Zhiago Huang; Yan Qu; Rongquan Gai
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New method for the fabrication of pulse compression grating
Author(s): Wei Zhang; Jianhong Wu; Jianqiang Zhu; Chaoming Li
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Optimization study on optical system to homogenize powerful laser beam
Author(s): Chongguang Li; Zhengrong Wang; Junchang Li
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Temperature field simulation of thin plate heated by CO2 laser beam
Author(s): Chongguang Li; Junchang Li; Zebin Fan
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Computer simulation for the principle of a new optical acceleration sensor
Author(s): Weijun Kong; Shuhai Jia; Jia Yang
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Research on the technology of laser machining interior contour
Author(s): Yao Bin; Kejian Jiang
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Research on complex grinding and lapping of micro-aspheric surface
Author(s): Yinbiao Guo; Feilong Lin
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Rapid generating and machining locus optimization of aspheric surface
Author(s): Yinbiao Guo; Cefu Hong; Zhenzhong Wang
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Optimization method for transparent conducting oxide films prepared by DC magnetron sputtering
Author(s): Jun Wang; Jianbo Cheng; Hui Lin; Quan Jiang; Gang Yang; Yadong Jiang
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Optical fiber transmission of Q-switched Nd:YAG pulses of 10MW peak power: mechanism of damage to the fiber
Author(s): Xinyan Fan; Jinjiao Liu; Lijun Wang; Yi Tang; Wei Chen; Yingyuan Zhang
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Research on axisymmetric aspheric surface numerical design and manufacturing technology
Author(s): Zhen-zhong Wang; Yin-biao Guo; Zheng Lin
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Optical properties and electrochromic performance tungsten trioxide thin films doped with terbium prepared by magnetron sputtering deposition
Author(s): Linfeng Yang; Zuli Liu; Kailun Yao
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Preparation of silicon coating on SiC mirror by EB-PVD
Author(s): Yumin Zhang; Yufeng Zhou; Jiecai Han; Jianhan Zhang; Wang Yao; Yuanyuan Han
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Geometric models of the new diamond turning for large off-axis aspheric mirrors
Author(s): C. S. Han; P. M. Xu; L. J. Zhang; S. Dong
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Optical and electrical properties of some optical thin film materials
Author(s): Z. Y. Zhong; Y. D. Jiang; Wei Zhi Li; X. Yang
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Design and investigation of gradient-index planar waveguide coupler
Author(s): Xiaojian Kong; Dexiu Huang; Yuling Lu
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Research on deterministic precision grinding on large-scale K9 optics
Author(s): Xiang yang Lei; Jian Wang; Qiao Xu; Zhao zhou Guo
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Laser-induced damage of transmissive optics at 1064 nm
Author(s): Jianping Hu; Wenhui Zhang; Ping Ma; Qiao Xu
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Simulation design and guided-mode resonance analyses of compressor grating
Author(s): Chunlin Yang
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A novel manufacturing method of off-axis parabola
Author(s): Xianhua Chen; Jian Wang; Qiao Xu; Yu Wang
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Characterization system for the backscattering of thin films on super-smooth optical surfaces
Author(s): Weiguo Liu; Wengang Qin; Changjie Xu; Aihua Gao; Qian Mi; Lingxia Hang
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New design of the low crosstalk and low-loss AWG with optimal waveguide separations and orientation angle of slabs
Author(s): Jun Zhou; Zhenhong Jia; Charles K. F. Ho; Huiru Zhen; Feng Zhao; Nam Q. Ngo
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Surface quality of large KDP crystal fabricated by single-point diamond turning
Author(s): Jing Hou; Jianfeng Zhang; Jinlin Chen; Xiaoli Zhang; Dezhi Hu
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AlN thin films prepared by DC arc deposition
Author(s): Hai-feng Liang; Yi-xin Yan; Shu-fan Miao
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Novel technique of antireflection coatings for semiconductor laser diodes
Author(s): Mingju Nie; Deming Liu; Bichun Hu
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Preparation of Si-based films by pulse laser deposition and luminescence properties
Author(s): Dekai Zhang; Xiaoyun Hu; Ting Li
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The design of UV/IR cut-off filter for silicon solar cell
Author(s): Wenhua Yang; Guangjun Xie
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Study on in situ and real-time observation during process of SCN crystal growth
Author(s): Songhe Lei; Changle Chen; Mengmeng Duan
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Hydrogen-free carbon thin films prepared by unbalanced magnetron sputtering
Author(s): Junqi Xu; Lingxia Hang; Weiguo Liu; Huiqing Fan; Yingxue Xing
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Study on optics integrated manufacture technology based on Windows DNA-OM
Author(s): Min Yu; Li Yang; Yong-jan Wang
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ZnO thin films prepared by ion beam enhanced deposition method
Author(s): Ningyi Yuan; Jinhua Liao; Lining Fan; Xiuqing Wang; Yi Zhou
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Study on control strategy of wafer stage and reticle stage of EUVL
Author(s): Tao Zhu; Yanqiu Li
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New three-dimensional shape measurements based on the function of modulation
Author(s): Shuangyun Shao
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Research on the mechanism of shaping an aspherical mirror
Author(s): Chunmei Zeng; Jingchi Yu
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Study of high transmittance shield film for microwave sulfur light
Author(s): Xinhua Fu; Lianhe Dong; Peng Lu; Weibo Duan; Xiumin Li
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Light erasing method for fabricating planar waveguide volume holographic gratings in LiNbO<sub>3</sub>:Fe crystal
Author(s): Dexing Yang; Haibin Wang; Jianlin Zhao; Xiaoli Wu; Rongguang Tong
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New method for inking-up on-line monitoring with ultrasonic sensor
Author(s): Jiwen Lu; Erhu Zhang; Yajun Chen
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The amendment of the removal function model in edge effect
Author(s): Wenjin Shang; Yifan Dai; Xusheng Zhou
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A blind deconvolution method in a LCSM system
Author(s): Lin Huang; Cunkan Tao; Maohai Hu
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Fabrication of quartz microlens array
Author(s): Lianhe Dong; Yu Dong; Yanjun Sun
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Hysteresis compensation for piezoelectric actuators in single-point diamond turning
Author(s): Haifeng Wang; Dejin Hu; Daping Wan; Hongbin Liu
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Precise processing of transparent material with femtosecond laser pulses
Author(s): Lin Ma; Shunxiang Shi; Guanghua Cheng; Wei Zhao; Guofu Chen
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Crafts research for ITO glass used in OLED with orthogonal analysis method
Author(s): Jianjun Yang; Junjian Li; Yourun Zhang; Jun Wang; Jianbo Cheng
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Different deposition technology affecting structure and performance of Si film
Author(s): Xiuhua Fu; Peng Lu; Baoxue Bo; Xiumin Li; Ruojing Yin; Weibo Duan
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Characterization and photocatalytic activity of lanthanon-doped nano-TiO<sub>2</sub>
Author(s): Zhang Zong Wei; Fan Jun; Zhang Qian; Hu Xiao Yun; Li Zhen Dong; Chen Guo Liang
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LCD backlight light-guide plate design
Author(s): Feng-li Li; Zhe Chen; Qin Ye; Zhen-fang Tang
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Simulation of paraxial pinhole photon sieves model based on Fresnel zone plates
Author(s): Zi Lin; Haiyan Wang; Changli Song; Wei Ji; Biao Qi
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Wide-field imaging design and image restoration with optical sparse-aperture system
Author(s): Dayong Wang; Jun Chang; Hancheng Liu; Hongfeng Guo; Shiquan Tao
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Fast qualitative analysis of textile fiber in near infrared spectroscopy based on support vector machine
Author(s): Donghui Wang; Shangzhong Jin; Bin Gan; Hongnian Feng
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An experimental study on the image quality loss of an objective caused by assemblage stress
Author(s): Xueting Duan; Jaguang Bai; Renkui Zhou
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Conformal interpolating algorithm based on B-spline for aspheric ultra-precision machining
Author(s): Chenggui Li; Dan Sun; Min Wang
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Investigation on the fabrication of femtosecond laser induced waveguides and gratings inside quartz crystals
Author(s): Yanshen Wang; Shen Dong; Yanqiang Yang; Yingchun Liang; Huimin Zou
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Measurement of material mechanical properties in microforming
Author(s): Wang Yun; Zhenying Xu; Huang Hui; Jianzhong Zhou
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Analysis of micro lens fabrication via femtosecond laser
Author(s): Shizhou Xiao; Rui Guo; Wenhao Huang; Andong Xia
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A pretreatment method of identifying infrared target using FPGA
Author(s): Chuang Zhang; Lianfa Bai; Weixian Qian
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Sensitive characteristics of cyanine dye J-aggregates in the film of silver chloride microcrystals
Author(s): Xiaowei Li; Jixian Zhang; Rongxiang Zhang; Xiaohui Zhao; Weidong Lai
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Study on novel light absorption layer of LCLV
Author(s): Lei Zhang; Quan Jiang; Gang Yang; Jianbo Chen
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Simulation and analysis of magnetic field in aspheric magnetorheological finishing
Author(s): Jiang Guo; Yin-biao Guo; Yi Zhang
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The research and construction of the aspheric optics ultra-precision machining system
Author(s): Songbao Luo; Jianming Zhang; Hui Yang
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Optical surfacing of reflecting SiC mirrors of 520mm R-C system
Author(s): Lvjun Yuan; Bin Wang
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Study on grating coupling very long wavelength GaAs/AlGaAs QWIP
Author(s): F. Guo; N. Li; S. Yu; J. Lin; Y. Hou; D. Xiong; Y. He; H. Zeng; X. Xu; Z. Zhu; W. Lu; Q. Huang; J. Zhou
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