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Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS V

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Volume Details

Volume Number: 6111
Date Published: 21 January 2006

Table of Contents
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Stiction force estimation from attachment length and electrostatic measurements on cantilever beams
Author(s): Enakshi Bhattacharya; Souvik Basu; Anil Prabhakar
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Using periodic electrical excitation to achieve stick-release in micro-cantilevers
Author(s): Amit Savkar; Kevin D. Murphy
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Electrical breakdown across micron scale gaps in MEMS structures
Author(s): Fabian W. Strong; Jack L. Skinner; Paul M Dentinger; Norman C. Tien
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Infrared laser deposition of Teflon coatings on microstructures
Author(s): M. R. Papantonakis; R. F. Haglund
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Galvanic corrosion: a microsystems device integrity and reliability concern
Author(s): David C. Miller; William L. Hughes; Zhong Lin Wang; Ken Gall; Conrad R. Stoldt
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Fatigue of polycrystalline silicon films with thin surface oxides
Author(s): O. N. Pierron; C. L. Muhlstein
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Improvement of the elastic modulus of micromachined structures using carbon nanotubes
Author(s): Prasoon Joshi; Abhijat Goyal; Awnish Gupta; Srinivas Tadigadapa; Peter C. Eklund
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Experimental and computational study on laser heating of surface micromachined cantilevers
Author(s): Leslie M. Phinney; Olga Blum Spahn; C. Channy Wong
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Bending of aluminum alloy beams depending on irradiance and repetition rate of UV laser radiation
Author(s): Mathias Krellmann; Martin Friedrichs; Ulrike Dauderstädt; Michael Wagner; Hubert Lakner
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Reliability of MEMS for space applications
Author(s): Herbert R. Shea
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Reliability testing and qualification of the TeraVicta RF MEMS switch
Author(s): John S. McKillop
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Reliability of microcantilevers in liquid environments
Author(s): S. Mubassar Ali; Susan C. Mantell; Ellen K. Longmire
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A MEMS sensor for the measurement of density-viscosity for oilfield applications
Author(s): Christopher Harrison; Seungoh Ryu; Anthony Goodwin; Kai Hsu; Eric Donzier; Frederic Marty; Bruno Mercier
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Failure mechanisms of DC and capacitive RF MEMS switches
Author(s): Steven T. Patton; Jeffrey S. Zabinski
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Experimental and theoretical investigation of contact resistance and reliability of lateral contact type ohmic MEMS relays
Author(s): Lia Almeida; Koji Ishikawa; Q. Yu; R. Jackson; R. Ramadoss
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A transient charging model to predict actuation-voltage shift in RF MEMS capacitive switches
Author(s): Xiaobin Yuan; James C. M. Hwang; David Forehand; Charles L. Goldsmith
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Development of a mechanical model for a micromachined resonant force sensor used in passive microgripping applications
Author(s): Issam B. Bahadur; James K. Mills
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High g testing of MEMS devices
Author(s): Robert P. O'Reilly
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Experimental apparatus and software design for dynamic long-term reliability testing of a spring-mass MEMS device
Author(s): Phillip L. Reu; Danelle M. Tanner; David S. Epp; Ted B. Parson; Brad L. Boyce
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Guidelines for reliability testing of microelectromechanical systems in military applications
Author(s): Robert Mason; Larry Gintert; Marc Rippen; Don Skelton; James Zunino; Ivars Gutmanis
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The ultra fine dynamics of MEMS as revealed by the Polytec micro system analyzer
Author(s): Eric M. Lawrence; Christian Rembe; Sebastian Boedecker; Huantong Zhang
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Novel combined low-coherence interferometry spectrally resolved reflectometry compatible with high-resolution Raman spectroscopy for nondestructive characterization of MEMS structures
Author(s): Wojciech J. Walecki; Talal Azfar; Alexander Pravdivstev; Manuel Santos; Tim Wong; Aiguo Feng; Ann Koo
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High and stable Q-factor in resonant MEMS with getter film
Author(s): A. Conte; M. Moraja; G. Longoni; A. Fourrier
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Wafer bonding for 3D integration of MEMS/CMOS
Author(s): Alison Gracias; James Castracane; Bai Xu
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High-speed anisotropic etching of quartz using SF6/C4F8/Ar/O2 based chemistry in inductively coupled plasma reactive ion etching system
Author(s): Abhijat Goyal; Vincent Hood; Srinivas Tadigadapa
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Hot gas stream application in micro-bonding technique
Author(s): Daniela Andrijasevic; Ioanna Giouroudi; Walter Smetana; Stefan Boehm; Werner Brenner
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Hermeticity tests on organically sealed micro-packages using FTIR spectroscopy
Author(s): D. Veyrié; J.-L. Roux; F. Pressecq; A. Tetelin; C. Pellet
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Temperature compensation analysis of liquid lens for variable-focus control
Author(s): Shu-Jung Chen; Tsai-Lin Tai; Chih-Hsiung Shen
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A critical comparison and development of nano-mechanical characterization of MEMS/NEMS thin film materials
Author(s): Johnny H. He; H. R. Le; J. K. Luo; Y. Q. Fu; D. F. Moore
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Design and fabrication of the degradation level monitoring sensor for power transformer insulating oil
Author(s): Sunghyun Kim; Yiseok Kim; Jooran Yang; Sangjin Kwon; Sekwang Park
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A new technique for 3D profilometry of MEMS
Author(s): Igor Lyuboshenko; Alain Bosseboeuf
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Modeling and analysis of MEMS-based resonant sensor actuated by bent beam thermal actuator
Author(s): Pezhman A. Hassanpour; William L. Cleghorn; Ebrahim Esmailzadeh; James K. Mills
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