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Proceedings of SPIE Volume 6109

Micromachining and Microfabrication Process Technology XI
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Volume Details

Volume Number: 6109
Date Published: 21 January 2006
Softcover: 26 papers (230) pages
ISBN: 9780819461513

Table of Contents
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Injection molded microfluidic devices for biological sample separation and detection
Author(s): Alfredo M. Morales; Blake A. Simmons; Thomas I. Wallow; K. Jeffery Campbell; Seethambal S. Mani; Brita Mittal; Robert W. Crocker; Eric B. Cummings; Rafael V. Davalos; Linda A. Domeier; Marion C. Hunter; Karen L. Krafcik; Gregory J. McGraw; Bruce P. Mosier; Shane M. Sickafoose
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Nanofabrication of electrochemical planar probes for single cell analysis
Author(s): R. J. Fasching; S.-J. Bai; T. Fabian; F. B. Prinz
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Fabrication of three-dimensional near-IR photonic crystals using deep-UV contact photolithography and silicon micromachining
Author(s): Bhargav S. Citla; Sriram Venkataraman; Janusz Murakowski; Garrett J. Schneider; Dennis W. Prather
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Assembled Fourier transform micro-spectrometer
Author(s): Jeongsik Sin; Woo Ho Lee; Dan Popa; Harry E. Stephanou
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A polymer-based Fabry-Perot filter integrated with 3-D MEMS structures
Author(s): Ping (Cerina) Zhang; Kevin Le; Smitha Malalur-Nagaraja-Rao; Lun-Chen Hsu; J.-C. Chiao
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An optical scanner based on electromagnetically actuated optical fiber
Author(s): Hans P. Hu; Kevin D. Le; J.-C. Chiao
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Enhancement of structural stiffness in MEMS structures
Author(s): Samir Ilias; Francis Picard; Patrice Topart; Carl Larouche; Hubert Jerominek
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Process design and tracking support for MEMS
Author(s): A. Wagener; T. Schmidt; J. Popp; K. Hahn; R. Brück; D. Ortloff
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Fabrication of integrated light guiding plate for backlight system
Author(s): Chao Heng Chien; Zhi Peng Chen
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Advancing three-dimensional MEMS by complimentary laser micromanufacturing
Author(s): Jeremy A. Palmer; John D. Williams; Tom Lemp; Tom M. Lehecka; Francisco Medina; Ryan B. Wicker
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Microstereolithography production of integrated Hadamard mask structures
Author(s): Christopher J. Robinson; Larinn M. Southwell; Jeremy A. Palmer; Mark W. Smith; Michael B. Sinclair; Bart D. Chavez; Brent E. Stucker; Francisco Medina; Ryan B. Wicker
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Optical analysis of scanning microstereolithography systems
Author(s): Suhas P. Deshmukh; Shashikant Dubey; P. S. Gandhi
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High aspect ratio plasma etching of bulk lead zirconate titanate
Author(s): Srimath S. Subasinghe; Abhijat Goyal; Srinivas A. Tadigadapa
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Fabrication of micro-chambers and enclosures using synchronous localized electro-deposition
Author(s): R. A. Said
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Enhancing filling of interconnect deep trenches using forced convection magneto-electroplating
Author(s): R. A. Said
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Anisotropic etching of single crystalline SiC using molten KOH for SiC bulk micromachining
Author(s): Katsuhiko Fukunaga; Jun Suda; Tsunenobu Kimoto
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Zero-crossing edge detection for visual force measurement in assembly of MEMS devices
Author(s): Yasser H. Anis; James K. Mills; William L. Cleghorn
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Endpoint detection method for time division multiplex etch processes
Author(s): Russ Westerman; Dave Johnson; Shouliang Lai; Mike Teixeira
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Combined low-coherence interferometry and spectrally resolved reflectometry for nondestructive characterization of small-diameter high-aspect ratio micro-fabricated and micro-machined structures and multilayer membranes
Author(s): Wojciech J. Walecki; Talal Azfar; Alexander Pravdivstev; Manuel Santos; Ann Koo
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On the out-of-plane deformation of freestanding micro-rings for tensile stress measurements
Author(s): Yang-Che Chen; Max Ti-Koung Hou; Rongshun Chen
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Ni-electroplating of double-width micro-cantilever
Author(s): Yifang Liu; Daoheng Sun; Mingliang Wang; WenLong Lv
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Investigation on overplating high-aspect-ratio microstructure
Author(s): Yuhua Guo; Gang Liu; Yangchao Tian
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Characterization of nonlinear optical polymers fabricated from dye doped UV curing epoxy
Author(s): Kevin Le; Ping Zhang; Hans Hu; J.-C. Chiao
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A curled-hinge comb micro-mirror using CMOS-MEMS process
Author(s): Y. R. Huang; H. M. Tai; H. P. Chou
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5~10 GHz surface acoustic wave resonators and low-loss wide band filters using submicron fabrication technology
Author(s): K. Yamanouchi; Y. Satoh; H. Isono; D. Kawasaki
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Development of fabrication techniques for high-density integrated MIM capacitors in power conversion equipment
Author(s): M. Brunet; P. Dubreuil; E. Scheid; J-L. Sanchez
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