Share Email Print
cover

Proceedings of SPIE Volume 6106

Photon Processing in Microelectronics and Photonics V
Format Member Price Non-Member Price
Softcover $105.00 * $105.00 *

*Available as a photocopy reprint only. Allow two weeks reprinting time plus standard delivery time. No discounts or returns apply.


Volume Details

Volume Number: 6106
Date Published: 13 February 2006
Softcover: 42 papers (424) pages
ISBN: 9780819461483

Table of Contents
show all abstracts | hide all abstracts
Review - 40 years of laser-marking - industrial applications
Author(s): Bo Gu
Show Abstract
Laser patterning of ITO in flat panel display manufacturing
Author(s): Sri Venkat; Corey Dunsky
Show Abstract
Laser processing of advanced materials with high brightness solid-state lasers at 532 nm
Author(s): T. Riesbeck; A. Binder; H. J. Eichler
Show Abstract
High quality laser milling of ceramics, dielectrics and metals using nanosecond and picosecond lasers
Author(s): Dimitris Karnakis; Graham Rutterford; Martyn Knowles; Todor Dobrev; Petko Petkov; Stefan Dimov
Show Abstract
Production excimer drilling process for producing micron exit holes in polyimide
Author(s): Todd Lizotte; Orest Ohar
Show Abstract
High power excimer laser micromachining
Author(s): Ludolf Herbst; Rainer Paetzel
Show Abstract
A neuro-fuzzy approach to failure detection and diagnosis of excimer laser ablation in microvia formation
Author(s): Ronald Setia; Gary S. May
Show Abstract
The use of lasers for semiconductor scribing/singulation applications
Author(s): Sri Venkat; Corey Dunsky
Show Abstract
New advances and steam laser cleaning of opaque and transparent critical substrates: with IR-lasers to new laser cleaning mechanism
Author(s): Shishir Shukla; Sergey Kudryashov; Kevin Lyon; Susan D. Allen
Show Abstract
Laser annealing of LTPS
Author(s): Rainer Paetzel; Ludolf Herbst; Frank Simon
Show Abstract
A hybrid approach for obtaining orientation-controlled single-crystal Si regions on glass substrates
Author(s): P. C. van der Wilt; B. A. Turk; A. B. Limanov; A. M. Chitu; James S. Im
Show Abstract
High-spatial coherence excimer laser for the production of fiber Bragg gratings
Author(s): Ralph Delmdahl
Show Abstract
Fabrication of multilayer passive electric components using inkjet printing and low temperature laser processing on polymer
Author(s): Seung Hwan Ko; Jaewon Chung; Heng Pan; Costas P. Grigoropoulos; Dimos Poulikakos
Show Abstract
Laser-induced oxidation of Zn and Zn alloy films for direct-write grayscale photomasks
Author(s): Jun Wang; Marian Chang; Yuqiang Tu; David K. Poon; Glenn H. Chapman; Chinheng Choo; Jun Peng
Show Abstract
Real-time optical characterization of laser oxidation process in bimetallic direct write gray scale photomasks
Author(s): David K. Poon; Glenn H. Chapman; Chinheng Choo; Marian Chang; Jun Wang; Yuqiang Tu
Show Abstract
Tailored excitation sequences for optimized laser-induced modifications in bulk transparent materials exposed to sub-ps irradiation
Author(s): Alexandre Mermillod-Blondin; Razvan Stoian; Mark L. Boyle; Arkadi Rosenfeld; Igor M. Burakov; Nadezhda Bulgakova; Eric Audouard; Ingolf V. Hertel
Show Abstract
Suited simulations for optimal ultrafast laser processing of metals
Author(s): J. Ph. Colombier; P. Combis; H. Huot; H. Soder; E. Audouard
Show Abstract
Generation of new nanomaterials by interfering femtosecond laser processing and its applications
Author(s): Yoshiki Nakata
Show Abstract
Fabrication of periodic arrays of top-gathering titania-organic hybrid pillars derived from multi-beam laser interference
Author(s): Hiroyo Segawa; Hiroaki Misawa; Tetsuji Yano; Shuichi Shibata
Show Abstract
Laser-induced transient stress field studied by time-resolved photoelasticity technique
Author(s): Yoshiro Ito
Show Abstract
The cross-beam pulsed laser deposition
Author(s): Andre Gorbunoff
Show Abstract
Laser treatment of micro-components’ surface for improved tribological applications
Author(s): Kaidong Ye; Yeow-Whatt Goh; Cheow-Tong Cheng; Ching-Biing Yeo; Minghui Hong
Show Abstract
CW-laser induced modification in glasses by laser backside irradiation (LBI)
Author(s): M. Yoshioka; H. Hidai; H. Tokura
Show Abstract
Micro/nanoscale surface modification and structuring using lasers
Author(s): Y. F. Lu
Show Abstract
Femtosecond laser lithography and applications
Author(s): B. N. Chichkov; E. Fadeeva; J. Koch; A. Ostendorf; A. Ovsianikov; S. Passinger; C. Reinhardt
Show Abstract
In situ crystal growth imaging during explosive crystallization
Author(s): M. Rogers; S. H. Ko; C. Grigoropoulos
Show Abstract
Nitrogen-doped TiO<sub>2</sub> thin films grown on various substrates
Author(s): Tatsunori Sakano; Takeshi Okato; Minoru Obara
Show Abstract
Nucleation and growth of single-walled carbon nanotubes in the laser ablation products
Author(s): Andre Gorbunoff; Oliver Jost
Show Abstract
Active control of the ablation plume for laser ablation atomic fluorescence spectroscopy
Author(s): Dasisuke Nakamura; Takayuki Takao; Yuji Oki; Mitsuo Maeda
Show Abstract
A study of angular dependence in the ablation rate of polymers by nanosecond pulses
Author(s): James E. A. Pedder; Andrew S. Holmes
Show Abstract
Lateral melt expulsion and debris deposition during small-scale femtosecond laser ablation
Author(s): Sergey I. Kudryashov
Show Abstract
Surface microfabrication of silica glass by LIBWE using DPSS-UV laser
Author(s): H. Niino; Y. Kawaguchi; T. Sato; A. Narazaki; R. Kurosaki
Show Abstract
Inspection of defects and metallic contamination in SiGe:B CMOS using an in-line photoluminescence monitor
Author(s): Chin I Liao; Andrzej Buczkowski; C. C. Chien; K. T. Huang; Zhiqiang Li; Tom Walker; Steve G. Hummel; S. F. Tzou
Show Abstract
High repetition rate excimer laser
Author(s): Hans-Gerd Esser; Helmut Schillinger
Show Abstract
Design, fabrication, and characterization of nanometer-scale ridged aperture optical antennae
Author(s): Xianfan Xu; Eric X. Jin; Liang Wang; Sreemanth Uppuluri
Show Abstract
A study of binding biotinylated nano-beads to the surface of (001) GaAs
Author(s): Ximing Ding; Khalid Moumanis; Jan J. Dubowski; Eric H. Frost
Show Abstract
Second harmonic generation from centrosymmetric arrays of gold nanoparticles
Author(s): Matthew D. McMahon; Christopher T. Bowie; René Lopez; Leonard C. Feldman; Richard F. Haglund
Show Abstract
Production of dichroitic 3D structures by fs laser irradiation in composite glass containing Ag nanoparticles
Author(s): Gerhard Seifert; Alexander Podlipensky; Amin Abdolvand; Heinrich Graener
Show Abstract
Ferrocene-based monolayers: self-assembly via rigid bidentate anchor groups
Author(s): Tobias Weidner; Bianca Krohn; Marta Trojtza; Clemens Bruhn; Dag Rother; Ulrich Siemeling; Frank Träger
Show Abstract
The effect of tip-enhancement in near-field Raman scattering of C-60
Author(s): Prabhat Verma; Kouhei Yamada; Yasushi Inouye; Satoshi Kawata
Show Abstract
Sub-wavelength ripple formation on dielectric and metallic materials induced by tightly focused femto-second laser radiation
Author(s): J. Gottmann; R. Wagner
Show Abstract
Micrometer sized immobilization of protein molecules onto quartz, silicium and gold.
Author(s): Steffen B. Petersen; Maria Teresa Neves-Petersen; Søren Klitgaard; Meg Crookshanks Duroux
Show Abstract

© SPIE. Terms of Use
Back to Top