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Proceedings of SPIE Volume 6037

Device and Process Technologies for Microelectronics, MEMS, and Photonics IV
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Volume Details

Volume Number: 6037
Date Published: 16 January 2006
Softcover: 62 papers (568) pages
ISBN: 9780819460684

Table of Contents
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Process optimisation for compact high aspect ratio SU-8 microstructures using x-ray lithography
Author(s): K. D. Vora; B. Y. Shew; E. C. Harvey; J. P. Hayes; A. G. Peele
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Ion beam synthesis of WC-SiC nanocomposite thin layers and their electron field emission properties
Author(s): W. M. Tsang; S. P. Wong; J. K. N. Lindner
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Non-contact implant dose and energy metrology for advanced CMOS low-energy implants
Author(s): Narendra Mehta; Benjamin Moser; Ajith Varghese; Jon Holt
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Microchannel fabrication in PMMA based on localized heating using high-repetition rate femtosecond pulses
Author(s): Daniel Day; Min Gu
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μ-Device fabrication and packaging below 300°C utilizing plasma-assisted wafer-to-wafer bonding
Author(s): Herwig Kirchberger; Rainer Pelzer; Sharon Farrens
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Deep-UV LEDs: physics, performance, and applications
Author(s): R. Gaska; J. Zhang
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Enhancement of scattering and light-extraction by metal particles on silicon waveguides
Author(s): K. R. Catchpole; S. Pillai
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Effects of dielectric overcoating on the absorption enhancement of SOI LEDs with metal island films
Author(s): S. Pillai; K. R. Catchpole; T. Trupke; G. Zhang; J. Zhao; M. A. Green
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Polymer microlens with independent control of radius and focal length for an imaging fiber
Author(s): Mohammed Ashraf; Franck Chollet; Murukeshan Matham; Chun Yang
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Characterization of deep wet etching of glass
Author(s): Ciprian Iliescu; Bangtao Chen; Francis E. H. Tay; Guolin Xu; Jianmin Miao
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In-situ optical monitoring of silicon membrane etching
Author(s): Franck Chollet; Ooi Giap Hwai
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Anomalous backward scattering of light by a two-side-open subwavelength metallic slit
Author(s): M. Mechler; S. V. Kukhlevsky
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Microstructures and photocatalytic properties of nitrogen-implanted titania nanostructured films
Author(s): H. Zhou; W. Martens; T. Tesfamichael; G. Will; A. Hu; J. M. Bell
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Preparation of DNA-polymer microsphere and its optical property
Author(s): M. Wada; Y. Kagami; N. Ogata; S. Horinouchi
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Portable blood extraction device integrated with biomedical monitoring system
Author(s): S. Khumpuang; M. Horade; K. Fujioka; S. Sugiyama
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Development of micro motion sensors based on piezoresistive and thermo-resistive effects in silicon
Author(s): Dzung V. Dao; Van T. Dau; Tatsuo Shiozawa; Hideo Kumagai; Susumu Sugiyama
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Design and implementation issues for ceramic substrate micro RF relay switches for re-configurable antennas
Author(s): Michael Parker; Jason Chaffey
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Antennas miniaturization by means of optimized EBG materials
Author(s): A. Gandelli; M. Mussetta; R. E. Zich
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Concept design of a novel tactile probe tip for down scaled 3D CMMs
Author(s): H. Ji; L. X. Kong; H. Y. Hsu; A. B. Wedding; G.C. I. Lin; K. C. Fan
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Thermal and mechanical responses of the thermomechanical microprobe for high-density storage technology
Author(s): Chun-Te Lin; Kuo-Ning Chiang
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Capacitance-voltage measurement in memory devices using ferroelectric polymer
Author(s): Chien A. Nguyen; Pooi See Lee
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Conductivity of self-organized silicon quantum dots embedded in silicon dioxide
Author(s): Thipwan Fangsuwannarak; Edwin Pink; Yidan Huang; Young Hyun Cho; Gavin Conibeer; Tom Puzzer; Martin A. Green
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Nanofabrication of single-crystalline flat-panel display microemitters: a plasma-building unit approach
Author(s): Kostya Ostrikov; Shuyan Xu
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Formation of thick spin-on glass (SOG) sacrificial layer for capacitive accelerometer encapsulation
Author(s): Azrul Azlan Hamzah; Burhanuddin Yeop Majlis; Ibrahim Ahmad
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Improving the sensitivity of biosensor by use of the Ag and SiO<sub>2</sub> films
Author(s): Ling-Chih Kao; Ming-Hung Chiu; Bo-Yuan Shih; Chih-Hsien Shih; Cheng-Ru Tsai; Fuh-Shyang Juang
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Nano-explosions in porous silicon
Author(s): Monuko du Plessis; Corrie Conradie
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Characterisation of nano-crystalline titanium dioxide films grown by atmospheric pressure plasma electrolytic deposition
Author(s): Thierry Paulmier; John M. Bell; Peter M. Fredericks
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Influence of dispersed carbon nanotubes on the optical and structural properties of a conjugated polymer
Author(s): Roland G. S. Goh; Eric R. Waclawik; Nunzio Motta; John M. Bell
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Nanosieves fabricated by interference lithography and electroforming
Author(s): Luis E. Gutierrez-Rivera; Edson J. de Carvalho; Maria A. da Silva; Lucila Cescato
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A new empirical model for heterojunction phototransistors
Author(s): Hongwei Liu; Pingjuan Niu; Weilian Guo
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Effect of a buffer layer on the photovoltaic properties of AZO/Cu<sub>2</sub>O solar cells
Author(s): Toshihiro Miyata; Tadatsugu Minami; Hideki Tanaka; Horotoshi Sato
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Coating materials and particle size effect of nano- and micro-sized iron powder composites
Author(s): Bok-Ki Min; In-Sung Kim; Soon-Jong Jeong; Jae-Sung Song
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Evaluation of flexible Bi<sub>2</sub>Te<sub>2.5</sub>Se<sub>0.5</sub> and Bi<sub>0.5</sub>Sb<sub>1.5</sub>Te<sub>3</sub> thermopile generator
Author(s): M. Shiozaki; S. Sugiyama; N. Watanabe; H. Ueno; K. Itoigawa
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Tuning the sensing range of silicon pressure sensor by trench etching technology
Author(s): Yu-Tuan Chou; Hung-Yi Lin; Hsin-Hua Hu
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Preparation of cyanine complex microdomes in self-organized dewetted films
Author(s): Yuichi Hashimoto; Olaf Karthaus
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Development of fabrication process for shape-control of three-dimensional submicron structure by synchrotron radiation lithography
Author(s): S. Fujinawa; F. Kato; S. Sugiyama
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Micropatterning research of silicon-based ferroelectric PMNT thin films
Author(s): Qingtao Zhang; Yanqiu Li; Yonghong Shang
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Carbon-nanotube-based nanoelectromechanical switch
Author(s): Jeong Won Kang; Ki Ryang Byun; Ki Oh Song; Ho Jung Hwang
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MEMS mechanical logic units: characterization and improvements of devices fabricated with MicraGEM and PolyMUMPs
Author(s): Sae-Won Lee; Robert W. Johnstone; Ash M. Parameswaran
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Patterning frictional differentiation to a polymer surface by atomic force microscopy
Author(s): Gregory S. Watson; Christopher L. Brown; Sverre Myhra; Nicolas C. Roch; Simon Hu; Jolanta A. Watson
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Lithography of diamond-like-carbon (DLC) films for use as masters in soft lithography
Author(s): Gregory S. Watson; Sverre Myhra; Jolanta A. Watson
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Tunable natural nano-arrays: controlling surface properties and light reflectance
Author(s): Jolanta A. Watson; Sverre Myhra; Gregory S. Watson
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Nitridation of thin metal layers by plasma immersion ion implantation for diffusion barrier applications
Author(s): Mukesh Kumar; Rajkumar Rajkumar; Dinesh Kumar
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Nanoparticle manipulation in plasma-assisted nanofabrication of electron field emitters based on single crystalline carbon nanotip patterns
Author(s): Paul P. Rutkevych; Kostya (Ken) Ostrikov; Shuyan Xu
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Nanostripes in superconducting REBa<sub>2</sub>Cu<sub>3</sub>O<sub>7</sub><sub>-&#948;</sub> superconductors: robust vortex pinning sites
Author(s): A. Hu; H. Zhou; J. M. Bell; P. Evans
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I-V response of a two-terminal nanodevice using tight-binding theory
Author(s): A. Alexopoulos
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Advanced simulation for shape-prediction of microstructures fabricated by PCT technique
Author(s): M. Horade; S. Khumpuang; K. Fujioka; S. Sugiyama
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Optical applications of marine DNA
Author(s): Kanji Yamaoka; Masahiro Wada; Yoshiharu Kagami; Junichi Yoshida; Naoya Ogata
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Electrical and optical properties of VO<sub>2</sub> thin films affected by preparation process
Author(s): Jie He; Li-bin Lin; Yong Lu; Tie-cheng Lu; Zhong-hua Liu; Jing Wang
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Nitrogen ion implantation and characterization of tungsten oxide films
Author(s): T. Tesfamichael; J. M. Bell
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Dynamic analysis of a compliant bistable micromechanism with one DOF system
Author(s): Jinni Tsay; Cheng-Kuo Sung
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Modelling of sacrificial spin-on glass (SOG) etching in non-straight microchannels using hydrofluoric acid
Author(s): Azrul Azlan Hamzah; Burhanuddin Yeop Majlis; Ibrahim Ahmad
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Preparation of photo functional material
Author(s): M. Ozaki; Y. Kagami; M. Waga; N. Ogata; K. Mito; T. Ishikawa; S. Horinouchi
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Fabrication of submicron three-dimensional structure by plane-pattern to the cross-section transfer method using synchrotron radiation lithography
Author(s): Fumiki Kato; Shinya Fujinawa; Makoto Tsudo; Susumu Sugiyama
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Optical scanning devices based on PZT thick films formed by aerosol deposition method
Author(s): Jae-Hyuk Park; Jun Akedo; Maxim Lebedev; Harumichi Sato
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Nanocontact printing of nonplanar substrate by using flexible h-PDMS stamp
Author(s): Jeongdai Jo; Kwang-Young Kim; Eung-Sug Lee; Byung-Oh Choi
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Combinatorial deposition by r.f. magnetron sputtering using subdivided powder targets as new development method for thin-film phosphors
Author(s): Toshihiro Miyata; Yuu Mochizuki; Tadatsugu Minami
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A micromachined hollow cathode discharge device for the flexible display
Author(s): Jeang Su Hwang; Geun Young Kim; Sang Sik Yang; Soo-ghee Oh
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Design and modeling of a high accuracy three degrees of freedom MEMS manipulator
Author(s): Shyam Venugopal; Lun-Chen Hsu; Smitha Malalur-Nagaraja-Rao; B. P. Wang; Mu Chiao; J.-C. Chiao
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KOH etching process of perfect square MEMS corrugated diaphragm
Author(s): N. Soin; Burhanudin Y. Majlis
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Silicon dry etching profile control by RIE at room temperature for MEMS applications
Author(s): D. Vrtacnik; D. Resnik; U. Aljancic; M. Mozek; S. Amon
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RF magnetron sputter deposition and analysis of strontium-doped lead zirconate titanate thin films
Author(s): Sharath Sriram; Madhu Bhaskaran; Anthony S. Holland; Ernest Fardin; Sasikaran Kandasamy
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