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Proceedings of SPIE Volume 6032

ICO20: MEMS, MOEMS, and NEMS
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Volume Details

Volume Number: 6032
Date Published: 18 January 2006
Softcover: 30 papers (238) pages
ISBN: 9780819460639

Table of Contents
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Photonics-to-electronics integration for optical interconnects in the early 21<sup>st</sup> century
Author(s): Ashok V. Krishnamoorthy
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Nano self-assembly for MEMS and microelectronics applications
Author(s): Tianhong Cui; Yuri Lvov
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Packaged MEMS and MOEMS measurement using through-transmissive-media (TTM) profiler
Author(s): Sen Han
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Tunable guided mode resonant gratings for passive and active devices: Si subwavelength MEMS structures and the combination with GaN film
Author(s): F. R. Hu; T. Kobayashi; K. Ochi; B. S. Choi; Y. Zhao; Y. Kanamori; K. Hane
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Monolithic PZT microstage wth multidegrees of freedom for high-precision positioning
Author(s): H. G. Xu; K. Okamoto; D. Y. Zhang; T. Ono; M. Esashi
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High temperature sealing of Kovar-glass-silicon for power MEMS application
Author(s): Ying Zhao; Min Miao; Yufeng Jin; Shan Xue Chuan; Wong Chee Khuen
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MEMS-based thin palladium membrane microreactors
Author(s): S.-Y. Ye; S. Tanaka; M. Esashi; S. Hamakawa; T Hanaoka; F. Mizukami
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Parameters analysis of few-modes optical fiber evanescent absorption sensor
Author(s): Xiaohong Deng; Yihui Wu; Feng Li; Lianqun Zhou; Xuan Ming
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Design research of nanopositioner based on SPM and its simulation of FEM
Author(s): Zhenyu Zhang; Hongqi Li; Hongxiu Zhou; Linan Li; Xiangjun Liu
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Novel temperature sensor based on Fabry-Perot cavity structure and micro-mechanical bi-layered membranes
Author(s): Yueming Liu; Xiaoqiang Zhao; Shaojun Zhang
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Research on micro/nano film getters for vacuum maintenance of MEMS
Author(s): Yufeng Jin; Ying Zhao
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Process simulation of Kovar-glass-silicon bonding for micromachined combustor
Author(s): Ying Zhao; Min Miao; Yufeng Jin; Xue Chuan Shan; Chee Khuen Wong
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Fabrication of optical waveguide multilayer storage devices
Author(s): Minfen Gu; Dongyan Ding; Zhongcheng Liang; Jiabi Chen; Songlin Zhuang
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Light-induced waveguide arrays in photorefractive crystals
Author(s): Peng Zhang; Jianlin Zhao; Dexing Yang; Yanghua Ma; Yidong Sun
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Negative chemical amplification process simulation in integrated circuits and microelectromechanical systems fabrication
Author(s): Zai-Fa Zhou; Qing-An Huang; Wei-Huan Li; Wei Lu
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An ICP etch model based on time multiplexed deep etching
Author(s): Jian Zhang; Qing-An Huang; Wei-Hua Li
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Study of lag effect in LPHD plasma etching of Si for MEMS applications by variable time steps in numerical methods
Author(s): Jian Zhang; Qing-An Huang; Wei-Hua Li
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System-level modeling of segmented deformable micromirror using multi-port-element network method
Author(s): Yang He; Chengyu Jiang; Weizheng Yuan; Pengfei Huo; Binghe Ma
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Theory and simulation of MEMS deformable mirror
Author(s): Jinliang Yan; Yinnv Zhao; Fen Yu; Youliang Zhu; Hongzhao Zhang
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Refractive microlensarray made of silver-halide sensitized gelatin (SHSG) etched by enzyme with SLM-based lithography
Author(s): Xiaowei Guo; Mingyong Chen; Jianhua Zhu; Yanqin Ma; Jinglei Du; Yongkang Guo; Chunlei Du
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Measurement of residual stress in multilayered thin films by a full-field optical method
Author(s): Meng Nie; Qing-An Huang; Weihua Li
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Study of micro-actuator with electrostatic actuating
Author(s): Dong-Ming Sun; Wei Dong; Guo-Dong Wang; Cai-Xia Liu; Wei-You Chen
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Measuring the profile and out-of-plane motion of microstructures using microscopic interferometry with FTM analysis
Author(s): Xiaodong Hu; Gang Liu; Tong Guo; Chunguang Hu; Xiaotang Hu
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The packaging technology of optical switch arrays
Author(s): Lina Zhao; Jingqiu Liang; Wei Dong; Anjie Ming; Weihua Lan; Xia Jin; Wangbin Zhu; Weibiao Wang; Zichun Le; Weiyou Chen; Lijun Wang
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The deflection and frequency analysis of micro silicon cantilever beam actuated by electrostatic force
Author(s): Guoqing Hu; Guangwen Chen; Wenyan Liu
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A study on high isolation RF MEMS switch
Author(s): Lingling Lin; Guoqing Hu; Zonghua Lin; Wenyan Liu
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On the architecture of the micro machine vision system
Author(s): Xudong Li; Xiaohao Wang; Zhaoying Zhou; Guanghua Zong
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Electromechanical characteristics analysis and simulation of grating light modulator
Author(s): Xu Yan; Shanglian Huang; Jie Zhang; Zhihai Zhang
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Analysis of the throughput of onboard polarization interference imaging spectrometer
Author(s): Chunmin Zhang; Baochang Zhao; Yan Yuan; Jian He
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The study on the epoxy resin compound x-ray refractive lens
Author(s): Jingqiu Liang; Zichun Le; Liangqiang Peng; Weibiao Wang; Futing Yi; Bisheng Quan; Jingsong Yao; Jun Zhang; Wen Dong; Ming Xuan
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