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Proceedings of SPIE Volume 5965

Optical Fabrication, Testing, and Metrology II
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Volume Details

Volume Number: 5965
Date Published: 13 October 2005
Softcover: 71 papers (698) pages
ISBN: 9780819459831

Table of Contents
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Micro-optics: manufacturing and characterization
Author(s): R. Voelkel; M. Eisner; K. J. Weible
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Replication and surface enhancement of microstructured optical components
Author(s): M. Bitzer; J. Zosel; M. Gebhardt
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Design and fabrication of refractive and diffractive micro optical elements used in holographic recording setups
Author(s): T. Kaempfe; E.-B. Kley; A. Tuennermann
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Novel fabrication technique of continuous profiles for microoptics and integrated optics
Author(s): Thomas Käsebier; Holger Hartung; Ernst-Bernhard Kley; Andreas Tünnermann
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Near-field holography with a two-dimensional phase mask for fabrication of two-dimensional structures in a single exposure step
Author(s): H. Hartung; T. Clausnitzer; E.-B. Kley; A. Tünnermann
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Characterization of resonance domain diffractive optical elements
Author(s): Michael A. Golub; Leon Eisen; Asher A. Friesem; Michael Meyklyar
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A multi sensor metrology tool for nanometer to meter measurements
Author(s): Thomas Fries
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Critical dimension metrology using optical diffraction microscopy
Author(s): Niels Agersnap; Poul-Erik Hansen; Jan Conrad Petersen; Jørgen Garnæs; Nathalie Destouches; Olivier Parriaux
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Nanopositioning and nanomeasuring machine for high accuracy measuring procedures of small features in large areas
Author(s): E. Manske; T. Hausotte; R. Mastylo; N. Hofmann; G. Jäger
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Scanning force microscopy for optical surface metrology
Author(s): M. Flemming; K. Roder; A. Duparré
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Subaperture metrology technologies extend capabilities in optics manufacturing
Author(s): Marc Tricard; Greg Forbes; Paul Murphy
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Standardization in dimensional nanometrology: development of a calibration guideline for Scanning Probe Microscopy
Author(s): Thorsten Dziomba; Ludger Koenders; Günter Wilkening
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Modern topics in standardized laser-induced damage threshold measurements
Author(s): K. Starke; H. Blaschke; M. Jupé; M. Lappschies; D. Ristau
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Digital signal processing in AFM topography and recognition imaging
Author(s): Stefan Adamsmair; Andreas Ebner; Peter Hinterdorfer; Bernhard Zagar
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Transmission measurements for the optical characterization of 2D-photonic crystals
Author(s): Martina Gerken; René Boschert; Rainer Bornemann; Uli Lemmer; Detlef Schelle; Markus Augustin; Ernst-Bernhard Kley; Andreas Tünnermann
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Classification of optical surface properties and material recognition using mutlispectral BRDF data measured with a semihemispherical spectro-radiometer in VIS and NIR
Author(s): C. Hahlweg; H. Rothe
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Manufacturing and testing of precision optical components - from substrate to coating and assembling
Author(s): Roger Netterfield; Bozenko Oreb; Achim Leistner; Katie Green; Jeff Seckold; Mark Gross
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ASPHERO5 - rapid fabrication of precise aspheres
Author(s): Rainer Boerret; Volkmar Giggel; Hexin Wang
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Optical design, manufacturing, and tests of the MUSE image slicer
Author(s): Florence Laurent; Edgard Renault; Roland Bacon; Jean-Pierre Dubois; François Hénault; Daniel Robert
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Design considerations for computer generated holograms as supplement to Fizeau interferometers
Author(s): R. Schreiner; T. Herrmann; J. Röder; S. Müller-Pfieffer; O. Falkenstörfer
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Recent advances in subaperture finishing
Author(s): Marc Tricard; Aric Shorey; Paul Dumas
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Synthesis of diamond diffractive optical elements for IR laser beam focusing
Author(s): V. S. Pavelyev; V. A. Soifer; N. L. Kazanskiy; A. V. Volkov; G. F. Kostyuk; V. V. Kononenko; V. I. Konov; S. M. Pimenov; M. S. Komlenok; M. Duparré; B. Luedge; M. Berger
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Megajoule laser project and polishing processes for high laser induced damage threshold at 351 nm
Author(s): J. Néauport; P. Cormont; N. Darbois; A. During; N. Ferriou; E. Lavastre; I. Legoff; D. Leschuitta; C. Maunier; C. Pellegrini; D. Taroux; D. Valla
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From VLT to GTC and the ELTs
Author(s): Roland Geyl
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Big OptiX ultra precision grinding/measuring system
Author(s): P. Shore; P. Morantz; X. Luo; X. Tonnellier; R. Collins; A. Roberts; R. May-Miller; R. Read
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Recent advances in the control of form and texture on free-form surfaces
Author(s): D. D. Walker; A. T.H. Beaucamp; V. Doubrovski; C. Dunn; R. Freeman; G. Hobbs; G. McCavana; R. Morton; D. Riley; J. Simms; X. Wei
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Machining and Measuring of an Off-axis Paraboloid
Author(s): Uwe Birnbaum; Roland Schreiner
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Stitching oil-on interferometry of large fused silica blanks
Author(s): Dörte Schönfeld; Thomas Reuter; Ralf Takke; Stephan Thomas
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Dynamic holography for the space qualification of large reflectors
Author(s): C. Thizy; Y. Stockman; D. Doyle; P. Lemaire; Y. Houbrechts; M. Georges; A. Mazzoli; E. Mazy; I. Tychon; G. Ulbrich
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Wavefront measurement of space infrared telescopes at cryogenic temperature
Author(s): Hidehiro Kaneda; Takashi Onaka; Takao Nakagawa; Keigo Enya; Hiroshi Murakami; Ryoji Yamashiro; Tatsuhiko Ezaki; Yasuyuki Numao; Yoshikazu Sugiyama
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Measuring wavefront tilt using shearing interferometry
Author(s): Horst Schreiber
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Limitations of iterative least squares methods in phase shifting interferometry in presence of vibrations
Author(s): Joanna Schmit; Florin Munteanu
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Contact-free on-axis metrology for the fabrication and testing of complex optical systems
Author(s): Alain Courteville; Rainer Wilhelm; Marie Delaveau; Fabrice Garcia; François de Vecchi
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Visible and infrared wave-front metrology by Quadri-Wave Lateral Shearing Interferometry
Author(s): S. Velghe; J. Primot; N. Guérineau; M. Cohen; B. Wattellier
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Wavefront sensing with varying transmission filters: past, present, and future
Author(s): François Hénault
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Interferometric asphere testing in a spherical test setup
Author(s): Thomas Blümel; Markus Bosse
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Characterization of complex optical systems based on wavefront retrieval from point spread function
Author(s): B. Boehme; H. Gross
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Traceable measurements with wavefront sensors
Author(s): S. D. Knox; S. R.G. Hall; R. F. Stevens
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Colorimetric method for phase evaluation in optical testing
Author(s): Antonin Miks; Jiri Novak; Pavel Novak
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Dos and don'ts in characterizing and cleaning optical surfaces
Author(s): Jean M. Bennett
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Design of a full-hemispherical spectro-radiometer with high dynamic range for characterization of surface properties using multispectral BRDF data from VIS to NIR
Author(s): C. Hahlweg; H. Rothe
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Angle resolved scatter measurements on optical components
Author(s): P. Kadkhoda; H. Mädebach; D. Ristau
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Sensitive and flexible light scatter techniques from the VUV to IR regions
Author(s): Sven Schröder; Stefan Gliech; Angela Duparré
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Ellipsometry of scattering patterns from optical inhomogeneities
Author(s): Carole Deumié; Gaelle Georges; Olivier Gilbert; Claude Amra
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Tailored properties of optical glasses
Author(s): Ralf Jedamzik; Bernhard Hladik; Peter Hartmann
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Implementing a prototyping network for injection moulded imaging lenses in Finland
Author(s): K. Keränen; J.-T. Mäkinen; E.J. Pääkkönen; M. Koponen; M. Karttunen; J. Hiltunen; P. Karioja
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Low CTE glass, SiC & Beryllium for lightweight mirror substrates
Author(s): Roland Geyl; Marc Cayrel
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Angular dependent specular reflectance in UV/Vis/NIR
Author(s): I. Stemmler
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DUV-microscope objectives: technology driver that forces the production to switch from the micrometer scale to the nanometer scale
Author(s): Thomas Sure; Tobias Bauer; Joachim Heil; Joachim Wesner
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A novel instrument for measurement of low-level scattering from optical components in the UV region
Author(s): A. Krasilnikova; J. Bulir
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Application of the laser-induced deflection (LID) technique for low absorption measurements in bulk materials and coatings
Author(s): W. Triebel; C. Mühlig; S. Kufert
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Nondestructive optical characterization of KH2PO4 crystals heterogeneities and adapted excimer laser conditioning process
Author(s): Matthieu Pommiès; David Damiani; Bertrand Bertussi; Jérémie Capoulade; Jean-Yves Natoli; Hervé Piombini; Hervé Mathis
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VUV spectrophotometry for photomasks characterization at 193 nm
Author(s): Minghong Yang; Jork Leiterer; Alexandre Gatto; Norbert Kaiser; Ingo Höllein; Silvio Teuber; Karsten Bubke
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Self-organized antireflective nanostructures on PMMA by ion etching
Author(s): A. Kaless; U. Schulz; N. Kaiser
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Optical properties of stochastic subwavelength surface structures
Author(s): Robert Leitel; Jörg Petschulat; Antje Kaless; Ulrike Schulz; Olaf Stenzel; Norbert Kaiser
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Theoretical and experimental investigation of optical fiber coatings removal by laser irradiation
Author(s): Ciming Zhou; Xinglin Tong; Desheng Jiang; Renxiang Peng
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Optical metrology of binary arrays of holes in semiconductor media using microspot spectroscopic ellipsometry
Author(s): Roman Antos; Ivan Ohlidal; Jan Mistrik; Tomuo Yamaguchi; Stefan Visnovsky; Shinji Yamaguchi; Masahiro Horie
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Off axis microspectrophotometer for optical coating characterization on complex surfaces
Author(s): Hansjörg Niederwald; Lothar Deisenroth; Sebastian Nunnendorf
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Azimuthal ellipsometry of subsurface layer stresses of specular metallic ribbons
Author(s): L. V. Poperenko; M. V. Ozerov
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Spectral characterisation of scattering losses in r. f. sputtered oxide coatings
Author(s): M. L. Grilli; A. Krasilnikova; F. Menchini; A. Piegari
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Spatially resolved spectroscopy for non-uniform thin film coatings: comparison of two dedicated set-ups
Author(s): A. Krasilnikova; A. Piegari; M. Dami; L. Abel-Tiberini; F. Lemarquis; M. Lequime
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Development of a nanoscale linewidth-standard for high-resolution optical microscopy
Author(s): Uwe Huebner; W. Morgenroth; R. Boucher; W. Mirandé; E. Buhr; Th. Fries; Nadine Schwarz; G. Kunath-Fandrei; R. Hild
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Investigations on process parameters influencing the quality of optical lenses formed by non-isothermal embossing of inorganic glasses
Author(s): Mario Hug; Daniel Rieser; Peter Manns; Günter Kleer
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Surface microroughness characterisation of amorphous metallic ribbons during their relief modification
Author(s): Leonid Poperenko; Kateryna Vinnichenko
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A new optical metrology tool for measuring aspheres
Author(s): Gerd Jakob; Matthias Meyer; Thomas Fries
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Active shape adjustable polishing tools
Author(s): C. T. Weber; J. Weiser; V. Galazky; C. Weber; V. Herold; St. Eckner
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Synchrotron radiation mirror prototype made of monocrystalline tungsten
Author(s): Volker Herold; Heiner Lammert; Axel Schindler; Rainer Schwennicke; Frank Siewert
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Light scattering techniques for measurement of precision laser optical surfaces and highly reflective mirrors
Author(s): Valentina Azarova; Yuriy Golyaev; Georgy Kolodnyy
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Optical system alignment via optical state estimation using wavefront measurements
Author(s): Norbert Sigrist; David C. Redding; John Z. Lou; Yan Zhang; Scott Basinger
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New measurement tool to measure scattering of materials for 2D/3D scattered light measurements and BRDF/BTDF measurements
Author(s): Audrey Le Lay
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Comparison of different magnetorheological polishing fluids
Author(s): Markus Schinhaerl; Elmar Pitschke; Andreas Geiss; Rolf Rascher; Peter Sperber; Richard Stamp; Lyndon Smith; Gordon Smith
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