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Proceedings of SPIE Volume 5878

Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies II
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Volume Details

Volume Number: 5878
Date Published: 18 August 2005
Softcover: 41 papers (416) pages
ISBN: 9780819458834

Table of Contents
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Sub-pixel spatial resolution micro-roughness measurements with interlaced stitching
Author(s): James T. Mooney; H. Philip Stahl
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Application of a positioning and measuring machine for metrological long-range scanning force microscopy
Author(s): T. Hausotte; G. Jaeger; E. Manske; N. Hofmann; N. Dorozhovets
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Determination of sub-micrometer high aspect ratio grating profiles
Author(s): J. Garnaes; P.-E. Hansen; N. Agersnap; I. Davi; J. C. Petersen; A. Kuehle; J. Holm; L. H. Christensen
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3D surface profilometry for both static and dynamic nanoscale full field characterization of AFM micro cantilever beams
Author(s): Liang-Chia Chen; Kuang-Chao Fan; Chi-Duen Lin; Calvin C. Chang; Ching-Fen Kao; Jung-Tsung Chou
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In-line characterization of silicon nano-crystals grown on high-K tunnel dielectrics
Author(s): E. Nolot; P. Mur; S. Favier
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Characterizing lateral resolution of interferometers: the Height Transfer Function (HTF)
Author(s): B. Doerband; J. Hetzler
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Multifunctional interferometric platform for static and dynamic MEMS measurement
Author(s): Jacek Kacperski; Malgorzata Kujawinska
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Phase shifting mask as a precision instrument for characterizing image-forming optical systems
Author(s): Gregory McIntyre; Garth Robbins; Andrew Neureuther
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Traceable multiple sensor system for absolute form measurement
Author(s): Michael Schulz; Joachim Gerhardt; Ralf D. Geckeler; Clemens Elster
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Monte Carlo analysis for the determination of conic constant of an aspheric micro lens based on a scanning white light interferometric measurement
Author(s): Solomon A. Gugsa; Angela Davies
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Vibration measurement of MEMS by digital laser microinterferometer
Author(s): Sheng Liu; Dan Thomas; Praveen R. Samala; Lian Xiang Yang
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Uncertainties in aspheric profile measurements with the geometry measuring machine at NIST
Author(s): Ulf Griesmann; Nadia Machkour-Deshayes; Johannes Soons; Byoung Chang Kim; Quandou Wang; John R. Stoup; Lahsen Assoufid
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Investigating the ArF laser stability of CaF2 at elevated fluences
Author(s): A. Burkert; Ch. Muehlig; W. Triebel; D. Keutel; U. Natura; L. Parthier; S. Gliech; S. Schroeder; A. Duparre
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A fast genetic algorithm to fully characterize transparent-film-absorbing-substrate systems using ellipsometry
Author(s): A. R. M. Zaghloul; Y. A. Zaghloul
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New configuration of channeled spectropolarimeter for snapshot polarimetric measurement of materials
Author(s): Hiroshi Okabe; Kenichi Matoba; Masayuki Hayakawa; Atsushi Taniguchi; Kazuhiko Oka; Hitoshi Naito; Nobuo Nakatsuka
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Thin film thickness determination using reflected spectrum sampling
Author(s): Justin Henrie; Stephen M. Schultz; Aaron R. Hawkins
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Application of the photoelastic tomography to three-dimensional measurement of birefringence in anisotropic microobjects
Author(s): Pawel Kniazewski; Tomasz Kozacki; Malgorzata Kujawinska
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Improvement in total measurement uncertainty for gate CD control
Author(s): Benjamin D. Bunday; Osman Sorkhabi; Youxian Wen; Ajit Paranjpe; Paul Terbeek; John Allgair; Amy Peterson
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Polarization of diffraction by reflection gratings
Author(s): Soe-Mie F. Nee; Tsu-Wei Nee
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Lifetime estimation of InGaAlP lasers under different operating conditions
Author(s): Yajun Li
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Light scatter metrology of diamond turned optics
Author(s): John C. Stover
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Automated three-axis gonioreflectometer for computer graphics applications
Author(s): Hongsong Li; Sing Choong Foo; Kenneth E. Torrance; Stephen H. Westin
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Scatter analysis of optical components from 193 nm to 13.5 nm
Author(s): Sven Schroeder; Mathias Kamprath; Stefan Gliech; Angela Duparre
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Rough surface characterization and comparison of scatter measurements and models
Author(s): John C. Stover
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An experimental study of the correlation between surface roughness and light scattering for rough metallic surfaces
Author(s): Hongsong Li; Kenneth E. Torrance
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Spectral redistribution from the interference of a Collett-Wolf source
Author(s): Zu-Han Gu
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Young’s interference pattern formed with symmetrical partially coherent sources
Author(s): Zu-Han Gu
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Transmission of light through a metal film with two corrugated surfaces
Author(s): Rosa M. Fitzgerald; Tamara A. Leskova; Alexei A. Maradudin
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Pseudo-nondiffraction from the interference of a pair of symmetric Collett-Wolf beams
Author(s): Zu-Han Gu; E. R. Mendez; M. Ciftan; A. A. Maradudin; T. A. Leskova
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Characterization of drop-on-demand printed conductive silver tracks
Author(s): Hendrik Rothe; Anna Usbeck; Dominik Cibis; Klaus Krueger
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Surface texture investigation of ultra-precision optical components
Author(s): Sven Schroeder; Juliane Ratteit; Stefan Gliech; Angela Duparre
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Structural characterisation of semiconductors by computer methods of image analysis
Author(s): M. A. Hernández-Fenollosa; D. Cuesta-Frau; L. C. Damonte; M. A. Satorre Aznar
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Surface QC by low-cost far-field nanoscopy
Author(s): Lionel Baker
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Amplitude contrast image enhancement in digital holography for particles analysis
Author(s): Vijay Raj Singh; Anand Krishna Asundi
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Radiation thermometry for silicon wafers
Author(s): T. Iuchi; Y. Ikeda; K. Hiraka
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Specific photometer for large coated optics
Author(s): Gael Gaborit; Eric Lavastre; Isabelle Lebeaux; Jean-Christophe Poncetta
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Measurement of point-spread function (PSF) for confocal fluorescence microscopy
Author(s): InCheon Song; HongKi Yoo; Jaebum Choo; Dae-Gab Gweon
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Design and implementation of high-performance and cost-effective white-light interferometric profile measurement systems
Author(s): Gao-Wei Chang; Yu-Hsuan Lin; Chi-Cheng Kuan
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Design and development of multifunctional confocal laser scanning microscope with UV/VIS laser source
Author(s): Yoshikazu Kanai; Yousuke Kanzaki; Moriaki Wakaki; Norihide Takeyama
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Effect of exposure intensity on the photochemical reaction speed of the lithography for thick film resists
Author(s): Yongkang Guo; Xionggui Tang; Jianhua Zhu; Jinglei Du
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Calculation of effective impedance of polycrystals in weak magnetic fields
Author(s): I. M. Kaganova
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