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Proceedings of SPIE Volume 5858

Nano- and Micro-Metrology
Editor(s): Heidi Ottevaere; Peter DeWolf; Diederik S. Wiersma
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Volume Details

Volume Number: 5858
Date Published: 18 August 2005
Softcover: 38 papers (362) pages
ISBN: 9780819458582

Table of Contents
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Micro-optic measurement techniques and instrumentation in the European Network of Excellence for Micro-Optics (NEMO)
Author(s): Malgorzata Kujawinska; Christophe Gorecki; Heidi Ottevaere; Pawel Szczepanski; Hugo Thienpont
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International standards for metrology of microlens arrays
Author(s): Takaaki Miyashita
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Real-time in situ sag characterization of microlenses fabricated with Deep Lithography with Protons
Author(s): Virginia Gomez; Heidi Ottevaere; Bart Volckaerts; Hugo Thienpont
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Interferometric method for measuring the refractive index profile of optical waveguides directly written in glass substrates by femtosecond laser
Author(s): P. Ferraro; L. Aiello; S. De Nicola; A. Finizio; R. Osellame; N. Chiodo; V. Maselli; G. Cerullo; P. Laporta
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Application of the microinterferometric tomography setup to the reliability tests of the fiber sensors exposed to cumulated gamma radiation
Author(s): Pawel Kniazewski; Malgorzata Kujawinska; Francis Berghmans; Alberto Fernandez; Andrei Goussarov; Marco Van Uffelen
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High accuracy optoelectronic control system for near field characterization of millimeter long wave guiding structures
Author(s): L. Chassagne; S. Topcu; Y. Alayli; P. Juncar; G. Lerondel; S. Blaize; A. Bruyant; I. Stefanon; P. Royer
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Mapping of surface refractive-index distribution by reflection SNOM
Author(s): Ilya P. Radko; Valentyn S. Volkov; Sergey I. Bozhevolnyi; Jes Henningsen; Jens Pedersen
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Compact laser scanning confocal microscope
Author(s): D. Beghuin; M. vandeVen; M. Ameloot; D. Claessens; P. Van Oostveldt
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Comparison of different approaches for modelling microscope images on the basis of rigorous diffraction calculation
Author(s): Bernd Bodermann; Gerd Ehret
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Two-dimensional power spectral density measurements of x-ray optics with the Micromap interferometric microscope
Author(s): Valeriy V. Yashchuk; Andrew D. Franck; Steve C. Irick; Malcolm R. Howells; Alastair A. MacDowell; Wayne R. McKinney
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Automated fringe-pattern extrapolation for patterned surface profiling by interference microscopy with Fourier transform analysis
Author(s): Cedric Breluzeau; Alain Bosseboeuf; Sylvain Petitgrand; Xavier Leroux
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Influence of the real-life structures in optical metrology using spectroscopic scatterometry analysis
Author(s): R. Quintanilha; J. Hazart; P. Thony; D. Henry
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Determination of the optical properties of thin absorbing layers with spectroscopic ellipsometry and interferometric microscopy
Author(s): A. Kudla; L. Borowicz
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Polarimetry: measurements, error analysis, and application
Author(s): C. Flueraru; X. Cai; S. Chang
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Optical coherence tomography with a Fizeau interferometer configuration
Author(s): P. Casaubieilh; H. D. Ford; S. W. James; R. P. Tatam
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Full-field optical coherence tomography
Author(s): H. D. Ford; R. P. Tatam
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Optimisation of low-coherence speckle interferometry (LCSI) for characterisation of multi-layered materials
Author(s): Kay Gastinger; Svein Winther
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Portable interference device for roughness measurement
Author(s): Oleg V. Angelsky; Peter P. Maksimyak
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Sub-0.1µm optical track width measurement
Author(s): Richard J. Smith; Chung W. See; Mike G. Somekh; Andrew Yacoot
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Absolute distance measurement using femtosecond laser
Author(s): Seung-Woo Kim; Ki-Nam Joo; Jonghan Jin; Yun Seok Kim
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Testing a new method for small-angle rotation measurements
Author(s): A. Popiolek-Masajada; M. Borwinska; B. Dubik
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Measurement advances for micro-refractive fabrication
Author(s): Neil Gardner; Angela Davies; Brent Bergner
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Investigation of thermal expansion homogeneity by optical interferometry
Author(s): R. Schodel
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Characterization and engineering of ferroelectric microstructures by interferometric methods
Author(s): S. Grilli; P. Ferraro; M. Paturzo; D. Alfieri; P. De Natale; M. de Angelis; S. De Nicola; A. Finizio; G. Pierattini
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Displacement metrology based on grating imaging with a cylindrical lens array and a phase grating
Author(s): Toru Oka; Yoichi Ohmura; Toshiro Nakashima; Wei Gao; Kazuhiro Hane; Satoshi Kiyono
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High accuracy reflectometry technique and statistical measurements treatment method for refraction index determination
Author(s): Diego F. Pozo Ayuso; Miguel Garcia Granda; Susana Fernandez Fernandez; Jose Rodriguez Garcia
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Two methods to determine topological charge in regular net of optical vortices
Author(s): Ewa Fraczek; Wojciech Fraczek
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Optimum instrumentation of a tapping mode, non-optically regulated near-field scanning optical microscope and its applications
Author(s): Nien Hua Lu; Yu Min Chang; Din Ping Tsai
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Elimination of ‘ghost’-effect-related systematic errors in metrology of x-ray optics with a long trace profiler
Author(s): Valeriy V. Yashchuk; Steve C. Irick; Alastair A. MacDowell
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Airy-like internal reflection series applied in scatterometry and simulations of gratings
Author(s): Roman Antos; Jan Mistrik; Tomuo Yamaguchi; Masahiro Horie; Stefan Visnovsky
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Comparison of methods for the determination of the aperture correction of interference microscopes
Author(s): Rolf Kruger-Sehm
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Biological specimens analysis using dynamic speckle spectral bands
Author(s): G. H. Sendra; J. C. Salerno; C. Weber; H. J. Rabal; R. Arizaga; M. Trivi
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Investigation and evaluation of scatterometric CD metrology methods
Author(s): Matthias Wurm; Bernd Bodermann; Werner Mirande
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Analytical model of a double grating system with partial temporal and spatial coherence
Author(s): Luis Miguel Sanchez-Brea; Jose Alonso; Jose Bienvenido Saez-Landete; Eusebio Bernabeu
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Non-destructive optical system based on digital holographic microscope for quasi real-time characterization of micromechanical shunt switch
Author(s): Valerio Striano; Giuseppe Coppola; Pietro Ferraro; Domenico Alfieri; Sergio De Nicola; Andrea Finizio; Giovanni Pierattini; Romolo Marcelli; Paolo Mezzanotte
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Uncertainty analysis for phase measurement on PSM with a 193nm common-path shearing interferometer
Author(s): G. Fuetterer; J. Schwider
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Effect of the refraction index in the diameter estimation of thin metallic wires
Author(s): Luis Miguel Sanchez-Brea; Juan Carlos Martinez-Anton; Eusebio Bernabeu
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Development and test of a profilometer based on a low-cost white-light bench microscope with a linear sensor
Author(s): Milton P. Macedo; Ana G. Fernandes; Carlos M. Correia
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