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Proceedings of SPIE Volume 5836

Smart Sensors, Actuators, and MEMS II
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Volume Details

Volume Number: 5836
Date Published: 1 July 2005
Softcover: 76 papers (746) pages
ISBN: 9780819458315

Table of Contents
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Ge and GeOx films as sacrificial layer for MEMS technology based on piezoelectric AlN: etching and planarization processes
Author(s): J. Sangrador; J. Olivares; E. Iborra; L. Vergara; M. Clement; A. Sanz-Hervas
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Simulation, fabrication, and testing of aluminium nitride piezoelectric microbridges
Author(s): J. Olivares; M. Clement; E. Iborra; L. Vergara; J. L. Sanchez-Rojas; J. Vazquez; P. Sanz
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Collodial TiO2 rod and dot based thin films for chemical sensors based on surface plasmon resonance
Author(s): M. G. Manera; M. L. Curri; D. Cozzoli; G. Leo; L. Vasanelli; A. Agostiano; R. Rella
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BaTiO3 nanocomposite thin films as pyroelectric sensor
Author(s): Muhamad Mat Salleh; Azmi Ibrahim; Muhammad Yahaya
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Polymeric helices with submicron dimensions for MEMS devices
Author(s): Anastasia L. Elias; Kenneth D. Harris; Cees W. M. Bastiaansen; Dirk J. Broer; Michael J. Brett
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Development of a novel piezo-driven parallel-kinematics single crystal silicon micropositioning XY stage
Author(s): Qing Yao; Placid M. Ferreira; Deepkishore Mukhopadhyay
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Large displacement spring-like electro-mechanical thermal actuators with insulator constraint beams
Author(s): J. K. Luo; Y. Q. Fu; A. J. Flewitt; S. M. Spearing; N. A. Fleck; W. I. Milne
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MEMS with integrated CMOS read-out circuit based on sub-micrometric cantilevers array for multiple sensing
Author(s): Maria Villarroya; Jaume Verd; Jordi Teva; Gabriel Abadal; Eduard Figueras; Francesc Perez-Murano; Jaume Esteve; Nuria Barniol
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Smart sensors modeling using VHDL-AMS for micro instruments implementation with a distributed architecture
Author(s): B. Lorente; L. Barrachina; C. Ferrer
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Large-signal model of a resonating cantilever-based transducer for system level electrical simulation
Author(s): Jaume Verd; Jordi Teva; Gabriel Abadal; Francesc Perez-Murano; Jaume Esteve; Nuria Barniol
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High level communication interface design for integrated MEMS and microinstrument bus
Author(s): M. Rodriguez; E. Magdaleno; C. Ferrer; B. Lorente; A. Ayala
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Wafer level optoelectronic device packaging using MEMS
Author(s): Arunkumar Nallani; Ting Chen; J.-B. Lee; Donald Hayes; David Wallace
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An integrated self-masking technique for providing low-loss metallized RF MEMS devices in a polysilicon only MEMS process
Author(s): John M. Wilson; Rizwan Bashirullah; David P. Nackashi; David A. Winick; Paul D. Franzon
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Mass balancing and spring element manipulation of micromechanical silicon-gyrometers with ultrashort laser pulses
Author(s): U. Klug; B. Rahn; U. Stute; A. Ostendorf
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Laser material micro-processing of shape memory alloys
Author(s): M. Fargas; A. von Busse; J. Bunte
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Thermal-stress control of microshutter arrays in cryogenic applications for the James Webb Space Telescope
Author(s): Daniel P. Kelly; Wen-Hsien Chuang; Larry Hess; Ron Hu; Murzy Jhabvala; Todd King; Mary J. Li; James Loughlin; S. Harvey Moseley; Christopher Ray; Yun Zheng
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Plasma activated wafer bonding for MEMS
Author(s): V. Dragoi; S. Farrens; P. Lindner
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MEMS-based micro instruments for in-situ planetary exploration
Author(s): T. George; E. Urgiles; R. Toda; J. Z. Wilcox; S. Douglas; C.-S. Lee; K. Son; D. Miller; N. Myung; L. Madsen; G. Leskowitz; R. El-Gammal; D. Weitekamp
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Silicon-nitride based micro optical components for optical pickup application
Author(s): Chi-Hung Lee; Yi Chiu; Chung-Hao Tien; Han-Ping D. Shieh
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MEMS/NEMS mechanical characterization on different thin film materials by scanning along micro-machined cantilevers
Author(s): J. H. He; J. K. Luo; H. R. Le; D. F. Moore
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Optical monitoring and cooling of a micro-mechanical oscillator to the quantum limit
Author(s): Michel Pinard; Olivier Arcizet; Tristan Briant; Pierre-Francois Cohadon; Antoine Heidmann
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Suspended-gate thin film transistor as highly sensitive humidity sensor
Author(s): A.-C. Salaun; H. M. Kotb; T. Mohammed-Brahim; F. Le Bihan; H. Lhermite; F. Bendriaa
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Non-selective NDIR array for gas detection
Author(s): R. Rubio; J. Santander; S. Marco; L. Fonseca; J. Fonollosa; M. Moreno
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Gas microsensing system with a FGMOS on a MEM structure
Author(s): Jose Luis Gonzalez-Vidal; Alfredo Reyes-Barranca; M. de la L. Olvera; Arturo Maldonado; Wilfrido Calleja-Arriaga
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Cheap silicon technology integrated sol-gel combustion sensor
Author(s): Luca Francioso; Dominique Sara Presicce; Mauro Epifani; Pietro Siciliano; Antonio Ficarella
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High speed simultaneous optical and impedance analysis of single particles
Author(s): Hywel Morgan; David Holmes; Nicolas Green
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Development of a flexible tag microlab
Author(s): Estefania Abad; Vittoria Simona Raffa; Barbara Mazzolai; Santiago Marco; Angelika Krenkow; Thomas Becker
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PCR device with integrated thermal cycling and fluorescence detection elements
Author(s): M. Bahrami; T. Melvin; J. S. Wilkinson; A. G. R. Evans
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SIGEM, low-temperature deposition of poly-SiGe MEMs structures on standard CMOS circuits
Author(s): Juan Ramos-Martos; Joaquin Ceballos-Caceres; Antonio Ragel-Morales; Jose Miguel Mora-Gutierrez; Alberto Arias-Drake; Miguel Angel Lagos-Florido; Jose Maria Munoz-Hinojosa; Anshu Mehta; Agnes Verbist; Bert du Bois; Kersten Kehr; Christina Leinenbach; Steven Van Aerde; Jorg Spengler; Ann Witvrouw
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Advanced 3D micromachining techniques using V-UV laser sources in the nanosecond regime
Author(s): J. L. Ocana; C. Molpeceres; S. Lauzurica; M. Morales
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CAD tool environment for MEMS process design support
Author(s): T. Schmidt; A. Wagener; J. Popp; K. Hahn; R. Bruck
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Model building, control design and practical implementation of a high precision high dynamical MEMS acceleration sensor
Author(s): Heiko Wolfram; Ralf Schmiedel; Karla Hiller; Torsten Aurich; Wolfgang Gunther; Steffen Kurth; Jan Mehner; Wolfram Dotzel; Thomas Gessner
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Post-processing gap reduction in a micromachined resonator for vacuum pressure measurement
Author(s): Detlef Billep; Karla Hiller; Jorg Fromel; Dirk Tenholte; Danny Reuter; Wolfram Dotzel; Thomas Gessner
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Testing of a prototype velocity sensor with an internal feedback control loop
Author(s): Marco Gavagni; Alessandro Ronzoni; Paolo Gardonio; Stephen J. Elliott
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A novel suspended gate MOSFET pressure sensor
Author(s): Jose A. Segovia; Montserrat Fernandez-Bolanos; Jose M. Quero
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Amorphous Si deposition method thanks traditional PECVD insulator equipments for seed layers performing
Author(s): O. De Sagazan; E. Prodhome; D. Gaudin; M. Denoual; P. Guil; O. Bonnaud
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Nanocrystalline Bi4Ti3O12 thin film for pressure sensor
Author(s): Chong Cheong Wei; Muhammad Yahaya; Muhamad Mat Salleh
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TiNi shape memory alloy based micropumps
Author(s): Y. Q. Fu; J. K. Luo; M. Hu; H. J. Du; A. J. Flewitt; W. I. Milne
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Integrable silicon microsystem for three-dimensional flow focusing
Author(s): Antonio Luque; Jose M. Quero; Alfonso M. Ganan-Calvo; Jaume Esteve; Silvia Gonsalve
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3D deformation analysis of flow and gas sensors membranes for reliability assessment
Author(s): Neus Sabate; Juergen Keller; Astrid Gollhardt; Dietmar Vogel; Isabel Gracia; Carles Cane; Joan Ramon Morante; Bernd Michel
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AC electric field microfluidic control in microsystems
Author(s): Nicolas G. Green; Hywel Morgan; Antonio Ramos
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Highly sensitive suspended-gate ion sensitive transistor for the detection of pH
Author(s): F. Bendriaa; F. Le Bihan; A. C. Salaun; T. Mohammed-Brahim; O. Bonnaud
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Adsorption induced differential surface stress versus adsorption induced resonance frequency change: a comparison
Author(s): J. Amirola; A. Rodriguez; L. Castaner; J. Lozano; F. J. Gutierrez; M. C. Horrillo
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A highly sensitive IR-optical sensor for ethylene-monitoring
Author(s): S. Hartwig; J. Hildenbrand; M. Moreno; J. Fonollosa; L. Fonseca; J. Santander; R. Rubio; C. Cane; A. Lambrecht; J. Wollenstein
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Self-assembly layer of amino fluorenone derivative as optical receptor to detect cyclohexane vapour
Author(s): Muhammad Yahaya; Muhamad Mat Salleh; Akrajas Ali Umar
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Design and simulation of comb-drive actuators incorporating gray-scale technology for tailored actuation characteristics
Author(s): Brian Morgan; Reza Ghodssi
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Chemical and mechanical sensing in electrochemical actuators
Author(s): T. F. Otero; M. T. Cortes; G. Vazquez Arenas
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Thermopneumatic actuator for tactile displays and smart actuation circuitry
Author(s): F. Vidal-Verdu; Manuel J. Madueno; Rafael Navas
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Molecular orientation control for thermal and UV-driven polymer MEMS actuators
Author(s): Kenneth D. Harris; Ruud Cuypers; Patrick Scheibe; Grietje N. Mol; Johan Lub; Cees W. M. Bastiaansen; Dirk J. Broer
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MEMS above IC technology applied to a compact RF module
Author(s): K. Grenier; L. Mazenq; D. Dubuc; E. Ojefors; P. Lindberg; A. Rydberg; J. Berntgen; W.-J. Rabe; E. Sonmez; P. Abele; H. Schumacher; R. Plana
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High-Q micro-machined piezoelectric mechanical filters using coupled cantilever beams
Author(s): Meiling Zhu; Paul B. Kirby
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A current density distribution approach to the optimisation of RF-MEMS variable capacitors
Author(s): Suat Ayoz; Hatice M. Tuncer; Florin Udrea; Adrian Ionescu; Raphael Fritschi
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Efficient topology and design methodology for RF MEMS switches
Author(s): B. Ducarouge; D. Dubuc; S. Melle; K. Grenier; L. Mazenq; L. Bary; R. Plana
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Micromachined IR-source with excellent blackbody like behaviour
Author(s): W. Konz; J. Hildenbrand; M. Bauersfeld; S. Hartwig; A. Lambrecht; V. Lehmann; J. Wollenstein
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Design of infrared wavelength-selective microbolometers using planar multimode detectors
Author(s): Sang-Wook Han; Dean P. Neikirk
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Development of MEMS based safe electro-thermal pyrotechnic igniter for a new generation of microfuze
Author(s): Pierre Pennarun; Carole Rossi; Daniel Esteve; Veronique Conedera
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Wearable human movement monitoring device aimed at providing personalized support in healthcare
Author(s): Manuel Prado; Laura M. Roa; Javier Reina-Tosina; Manuel Rovayo
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2.4 GHz wireless sensor network for smart electronic shirts
Author(s): J. P. Carmo; P. M. Mendes; C. Couto; J. H. Correia
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Advanced optical metrology aimed at part inspection and reverse engineering for Mems and Nems
Author(s): Tilo Pfeifer; Robert Schmitt; Ubaldo Aleriano
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A superparamagnetic bead driven fluidic device
Author(s): Benjamin Husband; Tracy Melvin; Alan G. R. Evans
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Microextractor controlled
Author(s): Carmen Aracil; Juan Garcia; Jose M. Quero
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MEMS-based method of polymer bead handling for chemical array sensors
Author(s): Byunghwa Park; Yoon S. Park; Jun Wan Kim; Young-Soo Sohn; Dean P. Neikirk
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Impedance based flow sensor
Author(s): Nicolas G. Green; Sun Tao; David Holmes; Hywel Morgan
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Smart sensor for environmental applications
Author(s): Guillaume Saint-Pierre; Michael M. Malecha; Selwayan Saini; Steven J. Setford
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A linearly tunable capacitor fabricated by the post-CMOS process
Author(s): Ching-Liang Dai; Mao-Chen Liu; Yu-Ren Li
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A self-supported polypyrrole artificial muscle: design optimization
Author(s): E. Ochoteco; J. A. Pomposo; H. Grande; J. Rodriguez
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Optical microlenses for MOEMS
Author(s): Roberto Carasco; Jan A. Dziuban; Ignacio Moreno; Christophe Gorecki; Lukasz Nieradko; Rafal Walczak; Malgorzata Kopytko; Michal Jozwik
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CMOS degradation effects due to electron beam lithography in smart NEMS fabrication
Author(s): Francesca Campabadal; Sara Ghatnekar-Nilsson; Gemma Rius; Celeste Fleta; Joan Marc Raf; Eduard Figueras; Jaume Esteve
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A low-g bulk micromachined silicon accelerometer with area-changed differential capacitance
Author(s): Badariah Bais; Ali Ahanchian; Yeop Majlis Burhanuddin
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Microhotplate-based silicon gas sensor arrays with linear temperature gradient for wine quality monitoring
Author(s): Andrea Adami; Leandro Lorenzelli; Vittorio Guarnieri; Mario Zen; Luca Francioso; Pietro Siciliano; A. Forleo; A. M. Taurino; Giuseppe Agnusdei
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The influence of light on the gas sensitive properties of microstructured metal oxide thin films
Author(s): E. Moretton; J. Hildenbrand; A. Lambrecht; J. Wollenstein
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Gold/titania nanocomposites thin films for optical gas sensing devices
Author(s): C. de Julian Fernandez; M. G. Manera; J. Spadavecchia; D. Buso; G. Pellegrini; G. Mattei; A. Martucci; R. Rella; L. Vasanelli; M. Guglielmi; P. Mazzoldi
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Thermoelectric properties of bismuth telluride thin films deposited by radio frequency magnetron sputtering
Author(s): J. Tan; K. Kalantar-zadeh; W. Wlodarski; S. Bhargava; D. Akolekar; A. Holland; G. Rosengarten
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Actuator design using electroactive polymers
Author(s): Diego Fernandez; Luis Moreno; Juan Baselga
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Surface effects at polymeric interfaces in capillary driving process
Author(s): Ilenia Viola; Anna Zocco; Alessandra Fischetti; Barbara Foglieni; Laura Cremonesi; Maurizio Ferrari; Roberto Cingolani; Giuseppe Gigli
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3D capacitive tactile sensor using DRIE micromachining
Author(s): Chiehtang Chuang; Rongshun Chen
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