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Proceedings of SPIE Volume 5717

MEMS/MOEMS Components and Their Applications II
Editor(s): Albert K. Henning
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Volume Details

Volume Number: 5717
Date Published: 22 January 2005
Softcover: 28 papers (284) pages
ISBN: 9780819456915

Table of Contents
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Status of the MEMS industry
Author(s): J. C. Eloy; E. Mounier
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Compact and high-accuracy RF MEMS capacitive series devices
Author(s): Xavier Rottenberg; Bart Nauwelaers; Walter De Raedt; Harrie A. C. Tilmans
Benzocyclobutene (BCB)-based spiral inductor for wireless application
Author(s): Kee-Keun Lee; Bruce C. Kim
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Frequency response of piezoresistive-based MASA resonators with electrostatic vertical comb-drive actuation
Author(s): Harold L. Stalford; David S. Epp
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Optical MEMS: boom, bust, and beyond
Author(s): Richard S. Payne
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Design and fabrication of micromirror for MOEMS devices by CMOS-MEMS common process
Author(s): Chien-Chung Tsai; Pao-Ting Cheng; Yao-Chen Tseng
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Design and fabrication of pitch-tunable blaze grating
Author(s): Yu-Sheng Yang; Cheng-Hsien Liu
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Fabrication of out-of-plane refractive concave and convex microlens arrays
Author(s): Ren Yang; Steven A. Soper; Wanjun Wang
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Fabrication options and operation principle for single-crystal silicon vibratory ring gyroscope
Author(s): Shih-Chia Chang; Michael W. Putty
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Investigation of actuation behavior for microarray thermal actuator based upon electrical analysis
Author(s): Chien-Chung Tsai; Tsa-Hsien Yang; Yi-Chao Huang
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UV-LIGA fabrication of microscale two-level mold inserts for MEMS applications
Author(s): Ren Yang; Jing Jiang; Wanjun Wang; Wen Jin Meng
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Latching shock sensors for health monitoring and quality control
Author(s): Michael R. Whitley; Michael S. Kranz; Roy Kesmodel; Sherrie J. Burgett
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Development of robust self-assembled microvalves for robust hydraulic actuators
Author(s): Bo Li; Sal Gerace; Quanfang Chen
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Novel high-Q torsion microresonator
Author(s): Prakash R. Apte; Anand Gawarikar; G. Ajishna; Sanjib K. Sahoo
Compensation of model eye’s aberration by using deformable mirror
Author(s): Hiroyuki Kawashima; Michiko Nakanishi; Noriko Takeda; Isao Minegishi; Akio Kobayashi
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Design of a micropower generator
Author(s): Zhong-quan Wen; Zhi-yi Wen; Xia Li; Xue-hua Liu; Gang Chen
Electrostatic microrelays with adjustable parameters
Author(s): Nikolay Ivanovich Mukhurov; Georgiy Ignatievich Efremov
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