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Micromachining and Microfabrication Process Technology X
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Volume Details

Volume Number: 5715
Date Published: 22 January 2005
Softcover: 21 papers (208) pages
ISBN: 9780819456892

Table of Contents
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Notch reduction in silicon on insulator (SOI) structures using a time division multiplex etch processes
Author(s): Shouliang Lai; Sunil Srinivasan; Russell J Westerman; Dave Johnson; John J. Nolan
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Uniformity-improving dummy structures for deep reactive ion etching (DRIE) processes
Author(s): Soren Jensen; Jonas M. Jensen; Ulrich J. Quaade; Ole Hansen
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Temperature rise of the silicon mask-PMMA resist assembly during LIGA exposure
Author(s): Aili Ting
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Polymeric microfluidic devices for the monitoring and separation of water-borne pathogens utilizing insulative dielectrophoresis
Author(s): Greg J. McGraw; Rafael V. Davalos; John D. Brazzle; John T. Hachman; Marion C. Hunter; Jeffery M. Chames; Gregory J. Fiechtner; Eric B. Cummings; Yolanda Fintschenko; Blake A. Simmons
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Spatial light modulators with monocrystalline silicon micromirrors made by wafer bonding
Author(s): Thor Bakke; Martin Friedrichs; Benjamin Voelker; Manfred Reiche; Lars Leonardsson; Harald Schenk; Hubert K. Lakner
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Bonding and deep RIE: a powerful combination for high-aspect-ratio sensors and actuators
Author(s): Karla Hiller; Matthias Kuechler; Detlef Billep; Bernd Schroeter; Marco Dienel; Dirk Scheibner; Thomas Gessner
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Fabrication of three-dimensional photonic devices using femtosecond laser pulses
Author(s): Ik-Bu Sohn; Man-Seop Lee; Sang-Man Lee; Jung-Sik Woo; Jung-Yong Jung
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Column growth mechanisms during KrF laser micromachining of Al2O3-TiC
Author(s): V. Oliveira; F. Simoes; Rui Vilar
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Surface morphology and subsurface damaged layer of various glasses machined by 193-nm ArF excimer laser
Author(s): Yunn-shiuan Liao; Ying-Tung Chen; Choung-Lii Chao; Yih-Ming Liu
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Fabrication of 3D microstructure and analysis of voxel generation by ultrafast-laser-induced two-photon absorption
Author(s): Shin Wook Yi; Seong Ku Lee; Mi Jung Cho; Hong Jin Kong; Dong-Yol Yang; Sang-hu Park; Tae-woo Lim; Ran Hee Kim; Kwang-Sup Lee
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Effects of laser-induced plasma in machining of transparent materials
Author(s): Viktor M. Kadan; Ivan V. Blonsky; Vadim O. Salnikov; Evgen V. Orieshko
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Thick single-crystal silicon MEMS with high-aspect-ratio vertical air gaps
Author(s): Pejman Monajemi; Farrokh Ayazi
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MEMS fabrication process management environment
Author(s): Jens Popp; Thilo Schmidt; Andreas Wagener; Kai Hahn
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Properties of atomic-layer-deposited Al2O3/ZnO dielectric films grown at low temperature for RF MEMS
Author(s): Cari F. Herrmann; Frank W. DelRio; Steven M. George; Victor M. Bright
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Characterization of thin films and stack in MOEMS structure with ellipsometry and reflectometry techniques
Author(s): Lianchao Sun; Ping Hou
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Small devices manufacturing by copper vapor laser
Author(s): Sergey G. Gorney; Igor V. Polyakov; Mikhail O. Nikonchuk
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Silicon-glass anodic bonding at low temperature
Author(s): Krzysztof Marcin Malecki; Francesco Giuseppe Della Corte
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Design and fabrication of giant micromirrors using electroplating-based technology
Author(s): Samir Ilias; Patrice A. Topart; Carl Larouche; Sebastien Leclair; Hubert Jerominek
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Novel applications of MOEMS display and imaging
Author(s): Ming C. Wu
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Vibrating RF MEMS overview: applications to wireless communications
Author(s): Clark T.-C. Nguyen
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Biologically inspired technologies using artificial muscles
Author(s): Yoseph Bar-Cohen
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