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PROCEEDINGS VOLUME 5713

Photon Processing in Microelectronics and Photonics IV
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Volume Details

Volume Number: 5713
Date Published: 12 April 2005
Softcover: 71 papers (646) pages
ISBN: 9780819456878

Table of Contents
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Micromachining of inorganic transparent materials using pulsed laser plasma soft x-rays at 10 nm
Author(s): Tetsuya Makimura; Youichi Kenmotsu; Hisao Miyamoto; Satoshi Uchida; Hiroyuki Niino; Kouichi Murakami
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Investigation of laser ablation of CVD diamond film
Author(s): Choung-Lii Chao; W. C. Chou; Kung-Jen Ma; Ta-Tung Chen; Y. M. Liu; Y. S. Kuo; Ying-Tung Chen
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Quantum cascade lasers tuned by amorphous As2S3 claddings
Author(s): Daniel L Recht; Zhijun Liu; Khandaker R. Rahman; Claire F. Gmachl; Craig B. Arnold
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F<sub>2</sub>-laser writing of silica optical waveguides in silicone rubber
Author(s): Masayuki Okoshi; Jianzhao Li; Peter Robert Herman
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Thermal heating effects in writing optical waveguides with 0.1 - 5 MHz repetition rate
Author(s): Shane Eaton; Fumiyo Yoshino; Lawrence Shah; Alan Arai; Haibin Zhang; Stephen Ho; Peter Robert Herman
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Investigation of the process for manufacturing optoelectronic devices using nonorganic photoresists
Author(s): Sergiy Al. Kostyukevych; Andrey A. Kryuchin; Anna N. Morozovska; Viacheslav V. Petrov; Petr E. Shepeliavyi; Ekaterina V. Kostyukevich; Igor V. Tverdokhleb
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Laser technology for wafer dicing and microvia drilling for next generation wafers
Author(s): Richard F. Toftness; Adrian Boyle; David Gillen
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Laser doping of germanium
Author(s): T. J. Mahaney; Andrey V. Muravjov; Maxim V. Dolguikh; Thomas Andrew Winningham; Robert E. Peale; Zhaoxu Tian; Sachin Bet; Aravinda Kar; Mikhail Klimov
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Development of line-shaped optical system for YAG2omega laser annealing used in the manufacture of low-temperature poly-Si TFT
Author(s): Tatsuki Okamoto; Kazutoshi Morikawa; Atsuhiro Sono; Yukio Sato; Junichi Nishimae
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Surface morphology and recrystallization behavior of amorphous Si after ArF laser irradiation
Author(s): Ta-Tung Chen; Chih-Yu Chang; Choung-Lii Chao; Kung-Jen Ma; Yi-Ming Liu; Ying-Tung Chen; Chun-Wei Lin
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Microdroplet deposition by laser-induced forward transfer
Author(s): David A. Willis; Vicentiu Grosu
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Laser based hybrid inkjet printing of nanoink for flexible electronics
Author(s): Seung Hwan Ko; Jaewon Chung; Yeonho Choi; Costas P. Grigoropoulos; Nicole R. Bieri; Tae-youl Choi; Cedric Dockendorf; Dimos Poulikakos
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Scope for electric field assisted removal of ablated debris from laser machined features in silicon
Author(s): Edward Coyne; Paul Mannion; Gerard M. O'Connor; Sebastian Favre; Thomas J. Glynn
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Femtosecond versus picosecond laser ablation
Author(s): Andreas Ostendorf; Guenter Kamlage; Ulrich Klug; Frank Korte; Boris N. Chichkov
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Pulse duration and energy density influence on laser processing of metals with short and ultrashort pulses
Author(s): Ronan Le Harzic; Detlef Breitling; S. Sommer; Christian Fohl; S. Valette; Karsten Konig; Friedrich Dausinger; Eric Audouard
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Analysis of femtosecond (775nm) and nanosecond (355nm) micromachined Ni surfaces using electron backscatter diffraction (EBSD)
Author(s): William O'Neill; Matt Gill; Walter Perrie; Peter Fox; D. Prior
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New laser marking technology using ultrafast lasers
Author(s): Bo Gu
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Mechanisms and applications of femtosecond laser induced nanostructures
Author(s): Jianrong Qiu; Yasuhiko Shimotsuma; K. Miura; Peter Kazansky; Kazuyuki Hirao
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Surface nanostructuring of Ni, Ti, and 316L stainless steel using ultrafast laser interactions
Author(s): Matt Gill; Walter Perrie; Peter Fox; William O'Neill
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Femtosecond and nanosecond laser micromachining of oxidized multi-wall carbon nanotube doped morthane
Author(s): Kenneth E. Hix; Mingwei Li; Jacek Gosciniak; Kevin Hartke; Matt Rendina; Larry R. Dosser; Max Alexander
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3D microfluidic lasers embedded in glass by femtosecond laser direct writing
Author(s): Ya Cheng; Koji Sugioka; Katsumi Midorikawa
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Modeling of solid-state and excimer laser processes for 3D micromachining
Author(s): Andrew S. Holmes; Alexander I. Onischenko; David S. George; James E. Pedder
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Laser micromachining techniques for industrial MEMS applications
Author(s): Heather J. Booth; Charles E. Abbott; Ric M. Allott; Karl L. Boehlen; Jim Fieret; Jako Greuters; Paul Trimble; James Pedder
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Laser material processing in microelectronics manufacturing: status and near-term opportunities
Author(s): Corey M. Dunsky
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Invisible display in aluminum
Author(s): Jan Phuklin Prichystal; Hans Norgaard Hansen; Henrik Henriksen Bladt
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Laser direct-write of embedded electronic components and circuits
Author(s): Alberto Pique; Bhanu Pratap; Scott A. Mathews; B. Javis Karns; Ray C. Auyeung; Moshe Kasser; Mike Ollinger; Heungsoo Kim; Sam Lakeou; Craig B. Arnold
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Coincident multiwavelength irradiation of polymers with UV and VUV laser
Author(s): Thorsten Temme; Andreas Ostendorf; Uwe Stute
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Particle-free semiconductor cutting using the water jet guided laser
Author(s): Delphine Perrottet; Akos Spiegel; Frank Wagner; Roy Housh; Bernold Richerzhagen; John Manley
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Creating precise 3D microstructures using laser direct-write bimetallic thermal resist grayscale photomasks
Author(s): Glenn H. Chapman; James Dykes; David Poon; Chinheng Choo; Jun Wang; Jun Peng; Yuqiang Tu
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Laser processing of dental hard tissues
Author(s): Daniel Fried
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Surface microfabrication of silica glass by LIBWE using DPSS-UV laser
Author(s): Hiroyuki Niino; Yoshizo Kawaguchi; Tadatake Sato; Aiko Narazaki; Ryozo Kurosaki
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Spatial distribution of the species laser-ablated from the target submerged in liquid
Author(s): Tetsuo Sakka; Kouichi Hirata; Satoru Masai; Yukio H. Ogata
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Heat damage-free laser-microjet cutting achieves highest die fracture strength
Author(s): Delphine Perrottet; Roy Housh; Bernold Richerzhagen; John Manley
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The influence of laser beam-width and focusing angle about the precision of cutting metallic materials
Author(s): Claudiu Isarie; Ilie Isarie; Toderita Nemes; Susu Lucian
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Optical properties of pulsed-laser deposited BaTiO<sub>3</sub> thin films
Author(s): Jie Xu; Daniel P. Durisin; Gregory W. Auner
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Mechanism of laser ablation in liquid media investigated by using long-lasting lanthanide emission as a probe
Author(s): Kouichi Hirata; Satoru Masai; Tetsuo Sakka; Yukio H. Ogata
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Fabrication and characterization of hexagonally assembled ZnO and ZnO:N thin films with buffer layer by pulsed-laser deposition
Author(s): Takenori Osada; Takeshi Okato; Minoru Obara
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Laser ablation of TiO<sub>2-2x</sub>N<sub>x</sub> targets for efficient N-doping into anatase TiO<sub>2</sub> photocatalytic films
Author(s): Tatsunori Sakano; Takeshi Okato; Minoru Obara
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Hybrid light-laser welding for microelectronics
Author(s): Georgy M. Alekseev; Valentin K. Sysoev; Yuri N. Bulkin
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Fundamentals of energy cascade during ultrashort laser-material interactions
Author(s): Hai-Lung Tsai; Lan Jiang
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Thermal, mechanical, and structural phenomena in laser material interaction by large-scale atomistic modeling
Author(s): Xinwei Wang
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Industrial applications of ultrahigh precision short-pulse laser processing
Author(s): Xinbing Liu
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Laser separation of flat glass in electronic-, optic-, display-, and bio-industry
Author(s): Christoph Hermanns; Julietta Middleton
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High-precision high-speed separation of semiconductor substrates
Author(s): Jeffrey Patrick Sercel
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Measurement techniques for laser parameters relevant to materials processing
Author(s): Mark Alan Arbore; David Balsley; James Morehead; Frank Adams; Werner Wiechmann; Jeffrey Kmetec; Yidong Zhou; William M. Grossman
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New laser patterning technology with dynamic focus control for 3D MIDs
Author(s): Toshiyuki Suzuki; T. Shindo; Shingo Yuasa
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Review of laser-based applications advancing magnetic-recording hard-disk-drive technology
Author(s): Gurinder P. Singh; Peter Baumgart; Eric Baugh; Chie Poon; Timothy Strand
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Backside sample preparation with laser-enhanced chemical etching for infrared photon imaging
Author(s): Qin Deng; Zhihong Mai; Ran He; Tawei Tao; Jeffrey Lam; Yongfeng Lu
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Monitoring steam laser cleaning using optical probe techniques
Author(s): Nagaraj Batta; Yongfeng Lu; Xinwei Wang; Jing Shi; Daniel W. Thompson; David W. Doerr; Dennis R. Alexander
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LIPAA technique and its possible impact on microelectronics
Author(s): Yasutaka Hanada; Koji Sugioka; Iwao Miyamoto; Katsumi Midorikawa
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Synthesis of advanced materials by pulsed-laser deposition
Author(s): Ionela Vrejoiu; Dan Gheorghita Matei; Johannes David Pedarnig; Dieter Bauerle; Cornel Ghica; Maria Dinescu
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Near-field enhanced laser-assisted deposition
Author(s): Jing Shi; Yongfeng Lu; Xiaoyu Chen; R. S. Cherukuri; Kiran K. Mendu; Nagaraj Batta
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High-speed single-pulse welding with Nd:YAG lasers
Author(s): Ronald Holtz; Matthias Jokiel; David Lavoie; Rene Liebers; Ulrich Duerr
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Laser-assisted welding of transparent polymers for microchemical engineering and life science
Author(s): Wilhelm Pfleging; Oliver Baldus; M. Bruns; Alessandro Baldini; Edoardo Bemporad
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F2-laser microwelding of optical fibers and glass substrates
Author(s): Stephen Ho; J. Stewart Aitchison; Peter Robert Herman
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Laser-based microprocesses using diffraction-free beams generated by diffractive axicons
Author(s): Jun Amako; Kazuto Yoshimura; Daisuke Sawaki; Tatsuya Shimoda
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New mechanism of ultra-deep drilling of solids by high-power lasers
Author(s): Sergey I. Kudryashov; Andrew V. Pakhomov; Susan D. Allen
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Comparison of drilling rates and material removal dynamics for nanosecond and femtosecond laser pulses
Author(s): Vladimir V. Semak; Jeffrey G. Thomas; Benjamin Reed Campbell
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The new technology of the materials process: microvia formation by CO2 laser drilling machine
Author(s): Ming-Fei Chen; Yu-Pin Chen
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Viscous drag force effect on transportation of submicron particle contaminants during dry and steam laser cleaning
Author(s): Sergey I. Kudryashov; Susan D. Allen
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Analysis of laser engraving image inside crystal and PMMA
Author(s): Yongjin Shin; Sohee Park; Youngseop Kim; Jangwoen Lee; Woonggyu Jung; Zhongping Chen; John Stuart Nelson
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Time-resolved and spectrally resolved 5D multiphoton microscopy for analysis and nanoprocessing of materials
Author(s): Karsten Konig; Iris Riemann; Herbert Schuck; Daniel Sauer; Thomas Velten; Ronan Le Harzic
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Formation of nanoparticles from ultrafast laser condensates of metal targets
Author(s): Matt Gill; Walter Perrie; A. Papworth; Peter Fox; William O'Neill
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Two-dimensional hexagonally arrayed nanohole fabrication on silicon substrate using a femtosecond laser pulse
Author(s): Hiroto Takada; Minoru Obara
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Optical and electrical properites of ZnO nanorods synthesized by nanoparticle assisted pulsed-laser deposition
Author(s): Tatsuo Okada; Kou Kawashima; Minoru Ueda; Yoshiki Nakata
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Nitrogen-doped ZnO thin films by use of laser ablation of ZnO(1-x)Nx targets
Author(s): Takeshi Okato; Takenori Osada; Minoru Obara
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Improved near-infrared luminescence of Si-rich SiO2 with buried Si nanocrystals grown by PECVD at optimized N2O fluence
Author(s): Chia-Yang Chen; Chun-Jung Lin; Hao-Chung Kuo; Gong-Ru Lin; Yu-Lun Chueh; Li-Jen Chou; Chih-Wei Chang; Eric Wei-Guang Diau
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High-dispersion amorphous quartz nanopowder received by CO2 laser radiation
Author(s): Valentin K. Sysoev; Yuri Nickolaevich Bulkin
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Phosphorus-doped diamond-like carbon films deposited by plasma-assisted free electron and ArF laser ablation method
Author(s): Kaoru Suzuki
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Laser microstructuring of silicon in dry and wet environments
Author(s): Sergey I. Kudryashov; Jacob M. Small; Susan D. Allen
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Surface passivation of (001) GaAs with self-assembled monolayers of long-chain thiols
Author(s): Ximing Ding; Jan J. Dubowski
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