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Proceedings of SPIE Volume 5641

MEMS/MOEMS Technologies and Applications II
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Volume Details

Volume Number: 5641
Date Published: 30 December 2004
Softcover: 46 papers (376) pages
ISBN: 9780819455963

Table of Contents
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Electromagnetic MEMs eight-channel variable optical attenuator array
Author(s): Xuhan Dai; Xiaolin Zhao; Guifu Ding; Bingchu Cai
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Dielectric-based distributed Bragg reflector (DBR) mirrors for tunable MOEMS applications
Author(s): Vicknesh Shanmugan; Mithilesh A. Shah; S. L. Teo; Akkipeddi Ramam
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Structure design of Si-based M-Z interference acceleration seismic geophone
Author(s): Bo Wu; Caihe Chen; Xiaoling Zhang; Yuming Cui; Guangpeng Ma; Yanjun Zhang; Juanjuan Zhong
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Design considerations for electrostatically tunable InP-based Fabry-Perot filters for WDM applications
Author(s): Mithilesh A. Shah; Vicknesh Shanmugan; Akkipeddi Ramam
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The application of laser micromachining technology in fiber optic sensing
Author(s): Desheng Jiang; Sijin Xin; Renxuan Wei; Jun Huang
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Silicon scanning mirror with 54.74-degree slanted reflective surface for fluorescence scanning system
Author(s): Kook-Nyung Lee; Yun-Ho Jang; Jaeho Choi; Hoseoung Kim; Yoon-Sik Lee; Yong-Kweon Kim
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Optical properties study of silicon oxynitride films deposited by RF magnetron sputtering
Author(s): Yong Zhu; Peifu Gu; Hui Ye; Weidong Shen
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The deflection and frequency analysis of the inhomogeneous silicon cantilever beam for microrelay
Author(s): Huinan Hong; Guoqing Hu; Guangwen Chen; Wenyan Liu
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3D Align overlay verification using glass wafers
Author(s): Eric M. J. Smeets; Frans G. C. Bijnen; John Slabbekoorn; Henk W. van Zeijl
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A novel system to measure MEMS motion
Author(s): Changlin Leng; Guoxiong Zhang; Fusheng Yu; Chengzhi Jiang; Ying Zhong
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Analysis of the structures and characteristics for an InP-based micromechanical tunable filter
Author(s): Bin Chen; Zhen Zhou; Yongqing Huang; Xiaomin Ren
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Study on application and analysis of a microaccelerometer with magnetorheological fluids
Author(s): Zhonghua Lin; Huinan Hong; Guoqing Hu; Wenyan Liu; Huijie Zhang; Lingling Lin
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Torsion-mirror optical actuators with compound driving structures
Author(s): Wengang Wu; Qinghua Chen; Guizhen Yan; Yilong Hao
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A high-g overload-protected accelerometer with a novel microstructure
Author(s): Weiping Chen; Wei Wang; Lei Tian; Xiaowei Liu; Mingxue Huo; Ruichao Zhang; Deyin Zhang
Mechanism and experiment study on photothermally excited bilayer silicon microcantilever resonators
Author(s): Shaojun Zhang; Yueming Liu
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Single crystalline silicon micromirror array for maskless photolithography in protein synthesis systems
Author(s): Yun-Ho Jang; Kook-Nyung Lee; Dong-Sik Shin; Yoon-Sik Lee; Yong-Kweon Kim
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Microfluidic dye laser integration in a lab-on-a-chip device
Author(s): Qingli Kou; Ilker Yesilyurt; Guilhem Escalier; Jean Christophe Galas; Laurent Coureau; Yong Chen
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Two new types of microneedle array fabricated by x-ray lithography
Author(s): Yigui Li; Susumu Sugiyama
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Fabrication of anisotropic structures with large aspect ratio and minimal roughness by using black silicon method
Author(s): Yue Zhao; Jianjun Lai; Hong Zhou; Xinjian Yi
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Electrochemical etching of deep-macropore array on p-type silicon wafers
Author(s): Yanjun Gao; Guozheng Wang; Qingduo Duanmu; Jingquan Tian
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Fabrication of grating waveguides based on nano-imprint lithography and silicon-mould replication techniques
Author(s): Yueming Liu; Masayoshi Esashi; Weijian Tian
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Microfabrication assisted by laser-trapped microparticle tools
Author(s): Jian Bai; Zen-rong Zhu-ge; Xiao-na Wang; Xiyun Hou; Guoguang Yang
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Parallel valveless micropump with two flexible diaphragms
Author(s): Yufeng Su; Wenyuan Chen; Feng Cui; Weiping Zhang
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Theoretical analysis of grating light valve
Author(s): J. Zhang; H. Fu; Y. Zhu; W. Chen; S. Huang
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Preparation of multimode fiber grating by microprocessing modification and their temperature-sensing properties
Author(s): Sijin Xin; Desheng Jiang; Jianzhi Li; Jun Huang
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X-ray lithography mask fabricated by excimer laser process
Author(s): Yigui Li; Susumu Sugiyama
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Extraction of exposure modeling parameters of thick resist
Author(s): Chi Liu; Jinglei Du; Shijie Liu; Xi Duan; Boliang Luo; Jianhua Zhu; Yongkang Guo; Chunlei Du
Silicon microhole array prepared by ICP
Author(s): Qingduo Duanmu; Anping Zhang; Guozheng Wang; Yanjun Gao; Ye Li; Delong Jiang; Lichen Fu; Jingquan Tian
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