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PROCEEDINGS VOLUME 5641

MEMS/MOEMS Technologies and Applications II
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Volume Details

Volume Number: 5641
Date Published: 30 December 2004
Softcover: 46 papers (376) pages
ISBN: 9780819455963

Table of Contents
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Electromagnetic MEMs eight-channel variable optical attenuator array
Author(s): Xuhan Dai; Xiaolin Zhao; Guifu Ding; Bingchu Cai
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Dielectric-based distributed Bragg reflector (DBR) mirrors for tunable MOEMS applications
Author(s): Vicknesh Shanmugan; Mithilesh A. Shah; S. L. Teo; Akkipeddi Ramam
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Structure design of Si-based M-Z interference acceleration seismic geophone
Author(s): Bo Wu; Caihe Chen; Xiaoling Zhang; Yuming Cui; Guangpeng Ma; Yanjun Zhang; Juanjuan Zhong
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Design considerations for electrostatically tunable InP-based Fabry-Perot filters for WDM applications
Author(s): Mithilesh A. Shah; Vicknesh Shanmugan; Akkipeddi Ramam
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The application of laser micromachining technology in fiber optic sensing
Author(s): Desheng Jiang; Sijin Xin; Renxuan Wei; Jun Huang
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The study on the compound x-ray refractive lens using LIGA technique
Author(s): Jingqiu Liang; Zichun Le; Liangqiang Peng; Weibiao Wang; Weihua Lan; Anjie Ming; Futing Yi; Jian Ye; Bisheng Quan; Jinsong Yao; Ming Xuan; Lijun Wang
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Silicon scanning mirror with 54.74-degree slanted reflective surface for fluorescence scanning system
Author(s): Kook-Nyung Lee; Yun-Ho Jang; Jaeho Choi; Hoseoung Kim; Yoon-Sik Lee; Yong-Kweon Kim
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Origin mechanism of residual stresses in porous silicon film
Author(s): Zhenkun Lei; Yilan Kang; Ming Hu; Yu Qiu; Hao Cen
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Optical properties study of silicon oxynitride films deposited by RF magnetron sputtering
Author(s): Yong Zhu; Peifu Gu; Hui Ye; Weidong Shen
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Lumped model for the comb-finger capacitance and electrostatic force
Author(s): Xuyuan Chen; Zhichun Ma; Geir Uri Jensen
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Simulation and comparison of movable membrane design for MEMS Fabry-Perot tunable filter
Author(s): Wei Jiang; Fang Cui; Yu-nan Sun
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The deflection and frequency analysis of the inhomogeneous silicon cantilever beam for microrelay
Author(s): Huinan Hong; Guoqing Hu; Guangwen Chen; Wenyan Liu
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3D Align overlay verification using glass wafers
Author(s): Eric M. J. Smeets; Frans G. C. Bijnen; John Slabbekoorn; Henk W. van Zeijl
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A novel system to measure MEMS motion
Author(s): Changlin Leng; Guoxiong Zhang; Fusheng Yu; Chengzhi Jiang; Ying Zhong
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Analysis of the structures and characteristics for an InP-based micromechanical tunable filter
Author(s): Bin Chen; Zhen Zhou; Yongqing Huang; Xiaomin Ren
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Study on application and analysis of a microaccelerometer with magnetorheological fluids
Author(s): Zhonghua Lin; Huinan Hong; Guoqing Hu; Wenyan Liu; Huijie Zhang; Lingling Lin
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BioMEMS for high-throughput handling and microinjection of embryos
Author(s): Ralph W. Bernstein; Matthew Scott; Olav Solgaard
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Torsion-mirror optical actuators with compound driving structures
Author(s): Wengang Wu; Qinghua Chen; Guizhen Yan; Yilong Hao
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A high-g overload-protected accelerometer with a novel microstructure
Author(s): Weiping Chen; Wei Wang; Lei Tian; Xiaowei Liu; Mingxue Huo; Ruichao Zhang; Deyin Zhang
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Mechanism and experiment study on photothermally excited bilayer silicon microcantilever resonators
Author(s): Shaojun Zhang; Yueming Liu
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Polymer-derived ceramic-based fuel atomizers
Author(s): Zhichun Ma; Linan An; Xuyuan Chen; A. Hays
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Single crystalline silicon micromirror array for maskless photolithography in protein synthesis systems
Author(s): Yun-Ho Jang; Kook-Nyung Lee; Dong-Sik Shin; Yoon-Sik Lee; Yong-Kweon Kim
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Microfluidic dye laser integration in a lab-on-a-chip device
Author(s): Qingli Kou; Ilker Yesilyurt; Guilhem Escalier; Jean Christophe Galas; Laurent Coureau; Yong Chen
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Development of microfabrication technology for MEMS/MOEMS applications
Author(s): Zheng Cui
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Two new types of microneedle array fabricated by x-ray lithography
Author(s): Yigui Li; Susumu Sugiyama
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Fabrication of anisotropic structures with large aspect ratio and minimal roughness by using black silicon method
Author(s): Yue Zhao; Jianjun Lai; Hong Zhou; Xinjian Yi
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Electrochemical etching of deep-macropore array on p-type silicon wafers
Author(s): Yanjun Gao; Guozheng Wang; Qingduo Duanmu; Jingquan Tian
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The microfabrication using powder materials with excimer laser
Author(s): Jimin Chen; Canfu Yue; Yu Zhang; Xubao Wang; Tiechuan Zuo
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Fabrication of grating waveguides based on nano-imprint lithography and silicon-mould replication techniques
Author(s): Yueming Liu; Masayoshi Esashi; Weijian Tian
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Microfabrication assisted by laser-trapped microparticle tools
Author(s): Jian Bai; Zen-rong Zhu-ge; Xiao-na Wang; Xiyun Hou; Guoguang Yang
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Fabrication of PDMS (poly-dimethyl siloxane) molding and 3D structure by two-photon absorption induced by an ultrafast laser
Author(s): Shin Wook Yi; Seong Ku Lee; Mi Jung Cho; Hong Jin Kong; Dong-Yol Yang; Sang-hu Park; Tae-woo Lim; Ran Hee Kim; Kwang-Sup Lee
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Analysis on the optical MEMS pressure sensors based on circular multilayer diaphragm
Author(s): Ming Li; Ming Wang; Tinting Wang; Hua Rong; Xuxing Chen
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Theoretical calculation of light-induced forces and torques on complex microrotors
Author(s): Yuxiang Liu; Anding Zhu; Wenhao Huang
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Design of electrostatically levitated micromachined rotational gyroscope based on UV-LIGA technology
Author(s): Feng Cui; Wenyuan Chen; Yufeng Su; Weiping Zhang; Xiaolin Zhao
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Parallel valveless micropump with two flexible diaphragms
Author(s): Yufeng Su; Wenyuan Chen; Feng Cui; Weiping Zhang
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Theoretical analysis of grating light valve
Author(s): J. Zhang; H. Fu; Y. Zhu; W. Chen; S. Huang
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Microfluid oscillator based on thermocapillarity
Author(s): Teng-chao Huang; Yi-bing Shen; Xu Liu; Jian Bai; Xiyun Hou; Hui Ye; Di Lou
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Preparation of multimode fiber grating by microprocessing modification and their temperature-sensing properties
Author(s): Sijin Xin; Desheng Jiang; Jianzhi Li; Jun Huang
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Optimization of torque on an optically driven micromotor by manipulation of the index of refraction
Author(s): Frank M. Wing; Satish Mahajan; Walter Collett
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Fabrication and application of a novel freestanding stencil bi-material cantilever structure
Author(s): Weibing Wang; Dapeng Chen; Tianchun Ye; Liang Pan; Qingchuan Zhang; Xiaoping Wu
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X-ray lithography mask fabricated by excimer laser process
Author(s): Yigui Li; Susumu Sugiyama
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Study on optical parts of MOEMS optical switch with low insertion loss
Author(s): Anjie Ming; Jingqiu Liang; Weihua Lan; Wei Dong; Jinsong Yao; Weibiao Wang; Zichun Le; Weiyou Chen; Lijun Wang
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Extraction of exposure modeling parameters of thick resist
Author(s): Chi Liu; Jinglei Du; Shijie Liu; Xi Duan; Boliang Luo; Jianhua Zhu; Yongkang Guo; Chunlei Du
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Silicon microhole array prepared by ICP
Author(s): Qingduo Duanmu; Anping Zhang; Guozheng Wang; Yanjun Gao; Ye Li; Delong Jiang; Lichen Fu; Jingquan Tian
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Progress in large-range and nanoscale micromotion stage
Author(s): Benyong Chen; Junru Wang; Yong Lei
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A model for the microfabrication with selective laser sintering metal powders
Author(s): Canfu Yue; Jimin Chen; Tiechuan Zuo
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