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Proceedings of SPIE Volume 5525

Laser Beam Shaping V
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Volume Details

Volume Number: 5525
Date Published: 29 September 2004
Softcover: 23 papers (242) pages
ISBN: 9780819454638

Table of Contents
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Requirements and designs of illuminators for microlithography
Author(s): Paul Michaloski
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Optical systems for laser thermal printing
Author(s): Andrew F. Kurtz
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Diffractive laser beam shaping for material processing using a CO2 laser
Author(s): Kurt Kanzler
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Beam shaping with high-NA cylindrical vector beam illumination in SIL systems
Author(s): Yiqiong Zhao; Qiwen Zhan; Yong-Ping Li
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Using a Newport refractive beam shaper to generate high-quality flat-top spatial profiles from a flashlamp-pumped commercial Nd:YAG laser
Author(s): Darrell J. Armstrong; Arlee V. Smith
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A reflective field-mapping beam shaper for creating a Gaussian intensity distribution from a uniform intensity high-energy laser beam
Author(s): Stephen A. Hanes; Steven M. Long
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Segmented mirror beam shapers for creating a Gaussian intensity distribution from uniform intensity high-energy laser beams
Author(s): Stephen A. Hanes; Steven M. Long; Fred M. Dickey
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An experimental and computational study of the COIL resonators for the development of the COIL thermal image marker system to the far-field objects
Author(s): Akira Akiyama; Minoru Doshida; Akiyoshi Hayakawa; Tomohito Takada; Hiroki Nagaoka; Fumio Wani; Eiichiro Mutoh; Masamori Endo; Hideo Kumagai; Hidenori Okuzaki; Hiromitsu Ishii
Beam shaping by superposition of fundamental mode Gaussian beam
Author(s): Yajun Li
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Bi-prism-like optical elements for intracavity mode selection
Author(s): Boris Spektor; Yurij Parkhomenko; Joseph Shamir
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A new simulated annealing algorithm applied to the design of diffractive optical elements used in uniform illumination
Author(s): Hongliang Liu; Yiqiong Zhao; Yong-Ping Li
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Fabrication of microlens using CO2 laser and characterization of formation process
Author(s): Hiroshi Murotani; Moriaki Wakaki; Shuichi Kawabata; Kenji Nakamoto
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