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PROCEEDINGS VOLUME 5401

Micro- and Nanoelectronics 2003
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Volume Details

Volume Number: 5401
Date Published: 28 May 2004
Softcover: 96 papers (780) pages
ISBN: 9780819453242

Table of Contents
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EUV lithography: main challenges
Author(s): Vadim Banine; Josef P.H. Benschop
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Laboratory methods for investigations of multilayer mirrors in extreme ultraviolet and soft x-ray region
Author(s): M. S. Bibishkin; D. P. Chekhonadskih; N. I. Chkhalo; E. B. Kluyenkov; A. E. Pestov; Nikolai N. Salashchenko; L. A. Shmaenok; I. G. Zabrodin; S. Yu. Zuev
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EUV radiation from plasma of a pseudospark discharge in its different stages
Author(s): Yuri D. Korolev; O. B. Frants; V. G. Geyman; R. V. Ivashov; N. V. Landl; I. A. Shemyakin
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Process optimization using lithography simulation
Author(s): Andreas Erdmann
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The vortex mask design for irregular arrays of contact holes
Author(s): P. G. Serafimovich; P. S. Ahn; J. K. Shin
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Automatical optimization of pupil filters for high-resolution photolithography
Author(s): M. Machin; M. Gitlin; Nikolay G. Savinskii
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Microwave discharge on external surface of quartz plate
Author(s): Valery M. Shibkov; Vladimir A. Chernikov; Sergey A. Dvinin; Alexey P. Ershov; Andrey A. Karachev; Lidia V. Shibkova; Oleg S. Surkont; Anatoliy V. Voskanyan
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Comparative study of inductively coupled and microwave BF3 plasmas for microelectronic technology applications
Author(s): Yakov N. Sukhanov; Alexey P. Ershov; Konstantin V. Rudenko; Alexander A. Orlikovsky
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Volume and heterogeneous chemistry in Cl2/Ar inductively coupled plasma
Author(s): Alexander Efremov; Vladimir Svettsov; Chang-Il Kim
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Etching mechanism of Au thin films in Cl2/Ar inductively coupled plasma
Author(s): Alexander Efremov; Vladimir Svettsov; Chang-Il Kim
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Tomographic reconstruction of space plasma inhomogeneities in wide-aperture plasma sources under strong restriction on the points of view
Author(s): Konstantin V. Rudenko; A. V. Fadeev; Alexander A. Orlikovsky; K. A. Valiev
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Residual photoresist removal from Si and GaAs surface atomic hydrogen flow treatment
Author(s): E. Anishchenko; V. Diamant; Valerii A. Kagadei; E. Nefeyodtsev; Konstantin V. Oskomov; Dmitry I. Proskurovsky; S. Romanenko
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Dry cleaning of fluorocarbon residues by atomic hydrogen flow
Author(s): E. Anishchenko; V. Diamant; Valerii A. Kagadei; E. Nefeyodtsev; Dmitry I. Proskurovsky; S. Romanenko
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Ion beam synthesis of cobalt silicides in Si and SiGe
Author(s): G. G. Gumarov; V. Yu. Petukhov; V. A. Shustov; Oleg P. Pchelyakov; V. I. Mashanov; Il'dus B. Khaibullin
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Investigation of the dynamics of recrystallization and melting of the surface of implanted silicon at rapid thermal processing
Author(s): Yakh'ya V. Fattakhov; Mansur F. Galyautdinov; Tat'yana N. L'vova; M. V. Zakharov; Il'dus B. Khaibullin
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Phases transformation in Ti(Ta)-Ni(Co)-Si-N systems
Author(s): I. A. Horin; Alexander A. Orlikovsky; A. G. Vasiliev; A. L. Vasiliev
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Ionic synthesis of silica-based glasses: prospect, simulation and applied aspects
Author(s): Sergey A. Krivelevich; Yuri. I. Denisenko; Andrey A. Tsyrulev
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PMMA and polystyrene films modification under ion implantation studied by spectroscopic ellipsometry
Author(s): A. V. Leontyev; V. I. Kovalev; A. V. Khomich; Fadei F. Komarov; V. V. Grigoryev; A. S. Kamishan
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The polyimides photoresist for multilevel-interconnect VLSI technology
Author(s): Nikolay G. Savinskii
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Investigation of dissolution process of implanted silicon dioxide
Author(s): Niaz I. Nurgazizov; Anastas A. Bukharaev; Roza M. Aminova; Denis V. Ovchinnikov
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Possibility of silicon on insulator structure production using wet surface treatment (chemical assembling) and smart technique
Author(s): E. P. Prokop'ev; S. P. Timoshenkov; V. V. Kalugin; V. I. Grafutin
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Features of electroforming in open sandwich-structures Si-SiO2-W for silicon of different types of conductivity
Author(s): Victor M. Mordvintsev; Sergey E. Kudrjavtsev; Valeriy L. Levin
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Investigation of influence of low-energy ion beam parameters on Reactive Ion Beam Synthesis (RIBS) of thin films
Author(s): Yuri P. Maishev; S. L. Shevchuk
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F+, B+ ion implantation into GaAs multilayer heterostructures
Author(s): M. Tigishvili; N. Gapishvili; Revaz G. Melkadze; M. Ksaverieva; T. Khelashvili
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Macroporous silicon: material science and technology
Author(s): Anatoli F. Vyatkin
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1D photonic crystals based on periodically grooved Si
Author(s): Vladimir A. Tolmachev; Ekaterina V. Astrova; Tatjana S. Perova
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Optical and photoelectrical characterization of as-deposited and annealed PECVD polysilicon thin films
Author(s): A. V. Khomich; V. I. Kovalev; A. S. Vedeneev; A. G. Kazanskii; P. A. Forsh; Deyan He; X. Q. Wang; H. Mell; I. I. Vlasov; E. V. Zavedeev
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Polycrystalline silicon for semiconductor devices
Author(s): Dmitri E. Milovzorov
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Investigation of a nucleation stage of macropore formation in p-type silicon
Author(s): V. V. Starkov; Eugene Yu. Gavrilin; Anatoli F. Vyatkin
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Transition from quasi-hexagonal to quasi-one dimensional pores distribution during deep anodic etching of uniaxial stressed silicon plate
Author(s): V. V. Starkov; Eugene Yu. Gavrilin; Anatoli F. Vyatkin; Vladimir I. Emel'yanov; K. Eremin
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Porous anodic alumina for photonics and optoelectronics
Author(s): Sergey A. Gavrilov; Davyd A. Kravtchenko; A. Zheleznyakova; Victor Yu Timoshenko; Pavel K. Kashkarov; V. Melnikov; G. Zaitsev; Leonid A. Golovan
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The strain distribution in Si lattice of the layer containing &#946;-FeSi<sub>2</sub> precipitates
Author(s): A. F. Borun; N. P. Khmelnitskaja; Yu. N. Parkhomenko; E. G. Polyakova; E. A. Vygovskaja
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Selective growth of oriented carbon nanotubes
Author(s): Sergey A. Gavrilov; N. N. Dzbanovsky; V. V. Dvorkin; E. A. Il'ichev; B. K. Medvedev; Eduard A. Poltoratsky; G. S. Rychkov; Nikolay V. Suetin
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Glass-encapsulated single-crystal nanowires and filiform nanostructures fabrication
Author(s): E. Badinter; Tito E. Huber; A. Ioisher; A. Nikolaeva; I. Starush
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Bi film growing for nanowire fabrication
Author(s): Anatoliy V. Chernykh; Aleksandr I. Il'in; Oleg V. Kononenko; Gennady M. Mikhailov
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An investigation into nano-dimensional fractal film structures
Author(s): Igor N. Serov; Gennady N. Lukyanov; Vladimir I. Margolin; Nikita A. Potsar; Inga A. Soltovskaya; Valentin S. Fantikov
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Surface morphology transitions induced by ion beam action during Ge/Si MBE
Author(s): Anatoly V. Dvurechenskii; J. V. Smagina; V. A. Zinovyev; V. A. Armbrister; S. A. Teys; A. K. Gutakovskii
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Effect of electrostatic interaction between conductive cantilever and metal film on local anododic oxidation
Author(s): A. N. Bulatov; V. K. Nevolin
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Electron-beam-induced deposition of iron carbon nanostructures from iron dodecacarbonyl vapor
Author(s): M. A. Bruk; E. N. Zhikharev; E. I. Grigoriev; A. V. Spirin; V. A. Kalnov; I. E. Kardash
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Developments of terahertz wave generation technologies
Author(s): Ken Suto; Jun-Ichi Nishizawa
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10-GHz 1:2 switch MMIC for the communication and radar applications
Author(s): V. G. Mokerov; D. L. Gnatyuk; B. G. Nalbandov; E. N. Ovcharenko; A. P. Lisitskii
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FET on ultrathin SOI (fabrication and research)
Author(s): Olga V. Naumova; Irina V. Antonova; Vladimir P. Popov; Yury V. Nastaushev; Tatiana A. Gavrilova; Marina M. Kachanova; Litvin V. Litvin; Alexander L. Aseev
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Gamma radiation tolerance of 0.5-µm SOI MOSFETs
Author(s): Olga V. Naumova; A. A. Frantsuzov; Vladimir P. Popov
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Influence of cells-MOSFETs (with Schottky barrier drain contact) location in power IC on electrical device characteristics
Author(s): M. Korolev; Anton Krasukov; R. Tihonov
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Elaboration of gallium arsenide technology in Georgia for development of microelectronic devices
Author(s): Nina P. Khuchua; Zauri D. Chakhnakia; Levan V. Khvedelidze; Revaz G. Melkadze; Albert A. Tutunjan; Givi D. Kalandadzes; Nina A. Tutunjan; Roland Diehl
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AlGaAs-GaAs heterostructure &#948;-doped field-effect transistor (&#948;-FET)
Author(s): Zauri D. Chakhnakia; Levan V. Khvedelidze; Nina P. Khuchua; Revaz G. Melkadze; G. Peradze; Tatiana B. Sakharova; Z. Hatzopoulos
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The optimization of relative current sensitivity of bipolar magnetotransistor
Author(s): A. V. Kozlov; M. A. Reveleva; R. D. Tikhonov
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Electron-phonon interaction in 2D heterostructures
Author(s): J. Pozela; K. Pozela
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Spatially inhomogeneous effects at the interference of electron waves in semiconductor 1D nanostructures
Author(s): Victor A. Petrov; A. V. Nikitin
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Non-universal scaling in the integer quantum Hall effect regime in two-dimensional electron gas in InGaAs/InP heterostructures
Author(s): Balint Podor; Gy. Kovacs; G. Remenyi; I. G. Savel'ev
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New peculiarities of interband tunneling in broken-gap heterostructures
Author(s): A. Zakharova; S. T. Yen; K. A. Chao
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Spin transport in Ge/Si quantum dot array
Author(s): A. V. Nenashev; A. F. Zinovieva; Anatoly V. Dvurechenskii
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Investigation of transport mechanisms in a-SiGe:H/c-Si heterostructures
Author(s): Alexei A. Sherchenkov; Boris G. Budaguan; Alexander V. Mazurov
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The structure and electronic properties of Zr and Hf nitrides and oxynitrides
Author(s): D. I. Bazhanov; A. A. Safonov; A. A. Bagatur'yants; A. A. Korkin
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The discretization of minority carrier generation kinetics at the semiconductor surface bordering inhomogeneous insulator
Author(s): Yuri V. Gulyaev; Alexander G. Zhdan; E. I. Goldman; G. V. Chucheva
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Analysis of the metal single-electron arrays based on different materials
Author(s): I. I. Abramov; S. A. Ignatenko
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Diffusive and ballistic regimes for transfer resistances
Author(s): Valery Yu. Vinnichenko; Anatoly V. Chernikh; Gennady M. Mikhailov
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The equation of two-dimensional island growth on the incommensurable monocrystalline substrate
Author(s): Yu. N. Devyatko; S. V. Rogozhkin; A. V. Fadeev
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First principles calculations of interactions of ZrCl<sub>4</sub> precursors with the bare and hydroxylated ZrO<sub>2</sub> surfaces
Author(s): I. M. Iskandarova; A. A. Knizhnik; A. A. Bagatur'yants; B. V. Potapkin; A. A. Korkin
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Optimization of double-barrier-doped heterostructure AlGaAs/GaAs/AlGaAs/GaAs for ultra high frequency FET
Author(s): G. B. Galiev; V. E. Kaminskii; Vladimir A. Kul'bachinskii
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Electronic band structure and semimetal-semiconductor transition in InAs/GaSb quantum wells
Author(s): I. Lapushkin; A. Zakharova; S. T. Yen; K. A. Chao
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The influence of classical and quantum-mechanical regions interaction on IV-characteristics of RTD based on different materials
Author(s): I. I. Abramov; Igor A. Goncharenko; N. V. Kolomejtseva
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Surface scattering in thin films: wave guide strategy
Author(s): S. D. Ananiev; V. V. V'yurkov; Alexander A. Orlikovsky
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Approach to terabit density for magnetic data storage using direct optical patterning of Fe(Co)-based thin films
Author(s): Nikolay I. Polushkin; B. A. Gribkov; A. Ya. Lopatin
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Magnetization reversal and current hysteresis due to spin injection in magnetic junction
Author(s): Roger J. Elliott; Ernest M. Epshtein; Yuri V. Gulyaev; Peter E. Zilberman
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Research of optical and structural properties in multilayer films (Ni22ACo75A) x20L
Author(s): G. Bauhuis; J. Gerristen; A. Keen; H. von Kempen; A. Matvienko; A. Ostroukhova; A. Pogorely; Theo Rasing
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The investigations of ferroelectric thin films in virtual measuring system
Author(s): Eugeny Ph. Pevtsov; Alexander S. Sigov; A. Pyzhova; A. Gorelov
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Ferromagnetic resonance investigation of permalloy particles array structures
Author(s): Yu. A. Filimonov; A. V. Butko; A. V. Kozhevnikov; A. A. Veselov; S. L. Vysotsky; Sergei A. Nikitov
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Magnetic properties of direct current magnetron sputtered thin nickel films
Author(s): A. V. Butko; A. S. Dzhumaliev; Yu. A. Filimonov; A. V. Kozhevnikov; S. L. Vysotsky; S. N. Vasiltchenko
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Influence of growth temperature on the easy magnetization axis switch and domain structure in Fe/GaAs(100) structures
Author(s): Yu. A. Filimonov; A. S. Dzhumaliev; A. V. Kozhevnikov; S. L. Vysotsky
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Structural diagnostics of quantum layers by x-ray diffraction and standing waves
Author(s): M. A. Chuev; A. M. Afanas'ev; Rafik M. Imamov; E. Kh. Mukhamedzhanov; E. M. Pashaev; S. N. Yakunin
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Magnetic force microscopy of magnetization reversal of microstructures in situ in the external field of up to 2000Oe
Author(s): Anastas A. Bukharaev; Dmitrii A. Biziaev; Pavel A. Borodin; Denis V. Ovchinnikov
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Local optical diagnostics of nanostructures: SNOM investigation of the electromagnetic field interaction with the nanostructures
Author(s): Maxim V. Bashevoy; Alexander A. Ezhov; Sergey A. Magnitskii; Dmitry A. Muzychenko; Vladimir I. Panov; Jarkyn S. Toursynov
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X-ray diagnostics of heterostructures with quantum dots
Author(s): S. N. Yakunin; E. M. Pashaev; A. A. Zaitsev; A. G. Sutyrin; V. G. Mokerov
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Photoluminescence characterization of resonant-tunneling diodes based on the GaAs/AlGaAs long-period superlattices in the process of fabrication
Author(s): A. A. Belov; Yu. A. Efimov; Alexandr L. Karuzskii; Igor P. Kazakov; Yu. A. Mityagin; V. N. Murzin; Anatolii V. Perestoronin; A. A. Pishchulin; S. S. Shmelev
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Structural characterization of undoped and Si-doped AlGaAs/GaAs double quantum wells separated by a thin AlAs layer
Author(s): Andrei A. Lomov; Mikhail A. Chuev; Galib B. Galiev
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Tilted-axes YBCO thin films: from vicinal range to step bunching
Author(s): P. B. Mozhaev; J. E. Mozhaeva; I. K. Bdikin; T. Donchev; E. Mateev; T. Nurgaliev; C. S. Jacobsen; J. Bindslev Hansen; Sergei A. Zhgoon; A. E. Barinov
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Room temperature photoreflectance investigation of undoped and doped GaAs/AlGaAs quantum well structures
Author(s): Lev P. Avakyants; Pavel Y. Bokov; Anatoly V. Chervyakov; Galib B. Galiev; Evgeny A. Klimov
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Linear electrostatic micromotors for nano- and micro-positioning
Author(s): I. L. Baginsky; Edvard G. Kostsov
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A self-consistent modeling of the leakage current through thin oxides
Author(s): A. S. Arkhipov; E. A. Burovski; I. Ya. Polishchuk
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Initiated tunnel current through thin gate oxide generation of minority carriers in Si-MIS-structures
Author(s): G. V. Chucheva; A. S. Dudnikov; E. I. Goldman; N. A. Zaitsev; Alexander G. Zhdan
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Ensemble Monte Carlo simulation of submicron n-channel MOSFETs with account of hot electron effects
Author(s): Vladimir M. Borzdov; Vadim Galenchik; Oleg Zhevnyak; Fadei F. Komarov; A. Zyazulya
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Computer simulation application for improving correctness of data obtained by magnetic force microscope
Author(s): Denis V. Ovchinnikov; Anastas A. Bukharaev
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Simulation of technological process of microstructures etching in high-voltage gas discharge plasma
Author(s): Nikolay L. Kazanskiy; Vsevolod A. Kolpakov
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Application of modified moments method for kinetics description of nano-, micro-particles formation in gas phase
Author(s): A. Durov; M. Deminsky; M. Strelkova; B. V. Potapkin
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Modeling diffusion of ion-implanted impurity in silicon under a temperature gradient
Author(s): Valery I. Rudakov; Vladimir V. Ovcharov; Alexander V. Bashmakov
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Modeling of phosphorous diffusion in ion-implanted Si at dopant transient enhanced out-diffusion during vacuum rapid thermal annealing
Author(s): Valerii A. Kagadei; Alexey B. Markov
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Modeling atomic hydrogen diffusion in GaAs
Author(s): Valerii A. Kagadei; E. Nefyodtsev
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Multilevel clustering fault model for IC manufacture
Author(s): Yu. I. Bogdanov; N. A. Bogdanova; A. V. Rudnev
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Regularities of power consumption in quasi-adiabatic logical gates
Author(s): Vladimir V. Losev; Victor I. Staroselsky
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Dynamics of entangled states of nuclear spins in solids
Author(s): Serge I. Doronin
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Noise-resistant quantum key distribution protocol
Author(s): Boris A. Grishanin; Denis V. Sych; Victor N. Zadkov
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Interaction-induced decoherence of solid state quantum computer
Author(s): Maxim Yanchenko; Leonid E. Fedichkin
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About parallel computing on spatial rotations in spin mesomorphic structures
Author(s): Michal M. Nesterov; Victor I. Tarkhanov
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Quantum states estimation: root approach
Author(s): Yu. I. Bogdanov
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The scanning single ion implanter for solid state quantum computer
Author(s): Valery A. Zhukov
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