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Proceedings of SPIE Volume 5379

Design and Process Integration for Microelectronic Manufacturing II
Editor(s): Lars W. Liebmann
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Volume Details

Volume Number: 5379
Date Published: 3 May 2004
Softcover: 31 papers (330) pages
ISBN: 9780819452924

Table of Contents
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DFM: magic bullet or marketing hype?
Author(s): Joseph D. Sawicki
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High-performance circuit design for the RET-enabled 65-nm technology node
Author(s): Lars W. Liebmann; Arnold E. Barish; Zachary Baum; Henry A. Bonges; Scott J. Bukofsky; Carlos A. Fonseca; Scott D. Halle; Gregory A. Northrop; Steven L. Runyon; Leon Sigal
Manufacturability of the X Architecture at the 90-nm technology node
Author(s): Michael C. Smayling; Robin C. Sarma; Toshiyuki Nagata; Narain Arora; Michael P. Duane; Shiany Oemardani; Santosh Shah
Taking the X Architecture to the 65-nm technology node
Author(s): Robin C. Sarma; Michael C. Smayling; Narain Arora; Toshiyuki Nagata; Michael P. Duane; Santosh Shah; Harris J. Keston; Shiany Oemardani
A methodology to analyze circuit impact of process-related MOSFET geometry
Author(s): Artur Balasinski
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DFM through correct process construction
Author(s): Qi-De Qian
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Design rule optimization for 65-nm-node (CMOS5) BEOL using process and layout decomposition methodology
Author(s): K. Honda; K. Peter; Y. Zhang; B. Yu; K. Park; Xiaolei Li; K. Michaels; Shinichi Yamada; T. Noguchi
Taming pattern and focus variation in VLSI design
Author(s): Fook-Luen Heng; Puneet Gupta; Kafai Lai; Ronald L. Gordon; Jin-Fuw Lee
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Interaction of RET and MDP: optimization for reducing the mask writing time
Author(s): James Word; Steffen F. Schulze
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Merits of cellwise model-based OPC
Author(s): Puneet Gupta; Fook-Luen Heng; Mark A. Lavin
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Extending aggressive low-k1 design rule requirements for 90-nm and 65-nm nodes via simultaneous optimization of NA, illumination, and OPC
Author(s): Sabita Roy; Douglas J. Van Den Broeke; J. Fung Chen; Armin Liebchen; Ting Chen; Stephen D. Hsu; Xuelong Shi; Robert John Socha
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Mathematically describing the target contour in silicon such that model-based OPC can best realize design intent
Author(s): Christopher M. Cork; Pratheep Balasingam; Sonya Sandvik; Bill Kielhorn; Michael L. Rieger
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Designing high-performance cost-efficient embedded SRAM in deep-submicron era
Author(s): Olga Kobozeva; Ramnath Venkatraman; Ruggero Castagnetti; Franklin Duan; Arvind Kamath; Shiva Ramesh
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CMP dummy pattern insertion with reduction in power supply voltage drops
Author(s): Kiyohito Mukai; Junichi Shimada; Mitsumi Ito; Masanori Hirofuji; Hiroyuki Tsujikawa

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