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Proceedings of SPIE Volume 5346

MOEMS and Miniaturized Systems IV
Editor(s): Ayman El-Fatatry
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Volume Details

Volume Number: 5346
Date Published: 24 January 2004
Softcover: 23 papers (276) pages
ISBN: 9780819452542

Table of Contents
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An SOS NEMS interferometer
Author(s): Francisco Tejada; Danielle M. Wesolek; John Lehtonen; Joseph A. Miragliotta; Andreas G Andreou; Robert Osiander
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A MEMS-based correlation radiometer
Author(s): Michael B. Sinclair; Kent B Pfeifer; Michael A Butler; Stephen D. Senturia; Erik R. Deutsch; Dan Youngner; Eugen Cabuz; G. Benjamin Hocker
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Nanocrystalline mesoporous SMO thin films prepared by sol gel process for MEMS-based hydrogen sensor
Author(s): Jianwei Gong; Weifeng Fei; Sudipta Seal; Quanfang Chen
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Measurement of a laterally deformable optical MEMS grating transducer
Author(s): Dustin W. Carr; Bianca E. N. Keeler; John P. Sullivan; Thomas A. Friedmann; Joel R. Wendt
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Fabrication and optical packaging of an integrated Mach-Zehnder interferometer on top of a moveable micromirror
Author(s): Lukasz Nieradko; Christophe Gorecki; Andrei Sabac; Rolf Hoffmann; Andreas Bertz
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Artificial compound eyes: different concepts and their application for ultraflat image acquisition sensors
Author(s): Jacques W Duparre; Peter Schreiber; Peter Dannberg; Toralf Scharf; Petri Pelli; Reinhard Voelkel; Hans-Peter Herzig; Andreas Braeuer
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Optical MEMS at Silex Microsystems
Author(s): Magnus Rimskog; Edvard Kaelvesten; Niklas Svedin
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MEMS tunable optical filter based on photonic crystal
Author(s): Huibing Mao
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An optical switch using a replicated polymer optical waveguide
Author(s): Toshiyuki Takahashi; Hayami Hosokawa
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Optical switches for large-core-diameter optical fibers (POF and PCF)
Author(s): Md. Moinul Islam Bhuiyan; Yoichi Haga; Masayoshi Esashi
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Packaging and characterization of miniaturized spectral sensing devices
Author(s): Thomas Otto; Ray Saupe; Volker Stock; Uwe Fritzsch; Reinhard F. Bruch; Thomas Gessner
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Modeling and simulation of fiber image guide multichip modules for MOEMS applications
Author(s): Steven P. Levitan; Timothy P Kurzweg; Jose A Martinez; Mark A Kahrs; Jason Bakos; Craig Windish; Jason Boles; John Hansson; Michael Weisser; Charles Kuznia; Donald M. Chiarulli
Fabrication of out-of-plane SU-8 refractive microlens using direct lithography method
Author(s): Ren Yang; Wanjun Wang
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Packaging considerations for reliability of electrically controlled MEMS VOA
Author(s): Yeong Gyu Lee; Seok Kee Hong; Moo Youn Park; Sung Cheon Jung; Seong Hun Lee
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Industrial packaging and assembly infrastructure for MOEMS
Author(s): Henne van Heeren
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Low-voltage 256-electrode membrane mirror system for adaptive optics
Author(s): Peter L. Kurczynski; Harold M. Dyson; Bernard Sadoulet; J. Eric Bower; Warren Y-C. Lai; William M. Mansfield; J. Ashley Taylor
Electrostatic micromirror fabricated using CMP and anodic bonding
Author(s): Kunnyun Kim; Wonseok Choi; Kwangbum Park; Joon-Shik Park; Hyo-Derk Park; Hoon Heo
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Closed-loop adaptive control for torsional micromirrors
Author(s): Ke-Min Liao; Yi-Chih Wang; Chih-Hsien Yeh; Rongshun Chen
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Bulk micromachined quasistatic torsional micromirror
Author(s): Torsten Kiessling; Alexander Wolter; Harald Schenk; Hubert Lakner
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