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Proceedings of SPIE Volume 5344

MEMS/MOEMS Components and Their Applications
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Volume Details

Volume Number: 5344
Date Published: 24 January 2004
Softcover: 24 papers (264) pages
ISBN: 9780819452528

Table of Contents
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Emerging MEMS technology and applications
Author(s): Bishnu P. Gogoi
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Electroactive polymers: an emerging technology for MEMS
Author(s): Roy D. Kornbluh; Ron Pelrine; Harsha Prahlad; Richard Heydt
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Curved MEMS resonators yield infrasonic resonant frequencies on single-chip in simulation study
Author(s): Carlos P. Borras; Harold L. Stalford
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Sensitivity of piezoresistive readout device for microfabricated acoustic spectrum analyzer
Author(s): Harold L. Stalford; Christopher A. Apblett; Seethambal S. Mani; W. Kent Schubert; Mark W. Jenkins
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Simulation and characterization of silicon-based 0.5-MHz ultrasonic nozzles
Author(s): Y. L. Song; S. C. Tsai; W. J. Chen; Y. F. Chou; T. K. Tseng; C. S. Tsai
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Resistively actuated micromechanical dome resonators
Author(s): Robert B. Reichenbach; Maxim K Zalaludinov; Keith L Aubin; David A Czaplewski; Bojan Ilic; Brian H Houston; Harold G Craighead; Jeevak M Parpia
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Extended tuning range RF MEMS variable capacitors using electrostatic and electrothermal actuators
Author(s): David Girbau; Antonio Lazaro; Lluis Pradell
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Development of an amorphous diamond (a-D) RF MEMS switch
Author(s): James R. Webster; Christopher W. Dyck; Thomas A. Friedmann; John P. Sullivan; Christopher D. Nordquist; Andrew J. Carton; Garth M. Kraus; Gary D. Schmidt
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Fabrication and characterization of ohmic contacting RF MEMS switches
Author(s): Christopher W. Dyck; Thomas A. Plut; Christopher D. Nordquist; Patrick S. Finnegan; Franklin Austin; Isak C. Reines; Chuck Goldsmith
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A micromachined flat plasma spectrometer (FlaPS)
Author(s): Danielle M. Wesolek; John L. Champion; Fred A. Herrero; Robert Osiander; Roy L. Champion; Ann M. Darrin
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MEMS thermal switch for spacecraft thermal control
Author(s): Matthew A. Beasley; Samara L. Firebaugh; Richard L. Edwards; Allen C. Keeney; Robert Osiander
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Piezoelectric microflextensional actuator
Author(s): Jongpil Cheong; Srinivas A. Tadigadapa; Christopher D Rahn
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Microaccelerometers using cured SU-8 as structural material
Author(s): Seok Jae Jeong; Wanjun Wang
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Accelerometer by means of a resonant microactuator
Author(s): Christian Drabe; Harald Schenk; Kai-Uwe Roscher; Detlef Kunze; Hubert Lakner
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Tether and joint design for microcomponents used in microassembly of 3D microstructures
Author(s): Nikolai Dechev; William L. Cleghorn; James K. Mills
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Low-stressed high-aspect-ratio ultrathick SU-8 UV-LIGA process for the fabrication of a micro heat exchanger
Author(s): Bo Li; Quanfang Chen
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Confirmation of large-periphery compressible gas flow model for microvalves
Author(s): Albert K. Henning
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Miniaturized proton exchange fuel cell in micromachined silicon surface
Author(s): Giuseppe D'Arrigo; Corrado Spinella; Emanuele Rimini; Loredana Rubino; Simona Lorenti
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Application of microaccelerometer in target recognition
Author(s): Jinhui Lan; Saeid Nahavandi; Tian Lan
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Accurate neural network-based modeling for RF MEMS component synthesizing
Author(s): Firas Mohamed; Bachar Affour
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Development of an all-metal electrothermal actuator and its applications
Author(s): JiKui Luo; Johnny Han He; Andrew J. Flewitt; David F. Moore; S. Mark Spearing; Norman A. Fleck; Williams I. Milne
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Investigation of microarray thermal actuator for MEMS
Author(s): Chien-Chung Tsai; Chih-Jung Hsu; Chien-Yu Hu
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Production and optimization of a MEMS-based flow direction and velocity sensor
Author(s): SungHyun Kim; Sang-geun Lee; Sekwang Park
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Analysis of the influence of electrode gap on parameters of optical microscanners
Author(s): Nikolay Ivanovich Mukhurov; Georgiy Ignat'evich Efremov
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