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Proceedings of SPIE Volume 5276

Device and Process Technologies for MEMS, Microelectronics, and Photonics III
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Volume Details

Volume Number: 5276
Date Published: 2 April 2004
Softcover: 64 papers (600) pages
ISBN: 9780819451699

Table of Contents
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Fabrication of micromachined ceramic thin-film-type pressure sensors for overpressure tolerance and its characteristics
Author(s): Gwiy-Sang Chung; Jae-Min Kim
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Ferromagnetism in transition metal-implanted titanium dioxide films
Author(s): Sai-Peng Wong; Yun Gao; Kai Hon Cheng; Chi Fai Chow; Ning Ke; Wing Yiu Cheung; Quan Li; Guo Sheng Shao
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The use of titanium and titanium dioxide as masks for deep silicon etching
Author(s): Olly J. Powell; Denis Sweatman; H. Barry Harrison
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Laser patterning of thin films of TiNiPd deposited on silicon substrate
Author(s): Vijaya Kumar Mathe; Dinesh K. Sood; Jason P. Hayes
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Investigations of ohmic contacts to reactive ion-etched p-type GaN
Author(s): Giacinta Parish; L. M. Watson; Gilberto Umana Membreno; Brett Douglas Nener
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Performance of a novel non-planar diaphragm and its application to optical sensing devices
Author(s): Weijun Wang; Rongming Lin; Da Gang Guo; Tie Tun Sun
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An investigation of SU-8 resist adhesion in deep x-ray lithography of high-aspect-ratio structures
Author(s): Richard L. Barber; Muralidhar K. Ghantasala; Ralu Divan; Derrick C. Mancini; Erol C. Harvey
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Manufacturing microdroplet generators with Laser-LIGA technique
Author(s): Joeska Husny; Hengyi Jin; Erol C. Harvey; Justin J Cooper-White
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Design, modeling, and fabrication of piezoelectric polymer actuators
Author(s): Yao Fu; Erol C. Harvey; Muralidhar K. Ghantasala; Geoff Spinks
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Novel low temperature CMOS compatible full wafer bonding process for the fabrication of 3D embedded microchannels using SU-8
Author(s): Francisco J. Blanco; Maria Agirregabiria; Maria Tijero; Javier Berganzo; Jorge Garcia; Maria Arroyo; Jesus M. Ruano; Inigo Aramburu; Kepa Mayora
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Secret of formulating a selective etching or cleaning solution for boron nitride (BN) thin film
Author(s): Wing Cheong Hui
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A comparison of two multilayer microcoil fabrication techniques
Author(s): Andrew C. Hartley; Robert E. Miles; Jasmin Corda
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Patterning of SU-8 resist structures using CF4
Author(s): Kaushal Dhirendra Vora; Anthony S. Holland; Muralidhar K. Ghantasala; Arnan Mitchell
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Cooling a nanomechanical resonator using feedback: toward quantum behavior
Author(s): Asa Hopkins; Kurt A. Jacobs; Salman Habib; Keith Schwab
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Characterization of thin metal oxide films grown by atomic layer deposition
Author(s): Peter J. Evans; Kathryn Prince; Gerry Triani; Kim S. Finnie; David R. G. Mitchell; Christophe J. Barbe
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Quantum electro-mechanical systems (QEMS)
Author(s): Dian Wahyu Utami; Hsi-Sheng Goan; Gerard J. Milburn
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MEMS micromirrors for optical switching in multichannel spectrophotometers
Author(s): Adisorn Tuantranont; Tanom Lomas; Victor M. Bright
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Phase differential angular rate sensor: concept and analysis
Author(s): James D. John; Conrad F. Jakob; Thurai Vinay; Lijiang Qin
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Three-dimensional numerical simulations of synthetic jet actuator flows in a microchannel
Author(s): S. G. Mallinson; G. Johnson; M. Gaston; Guang Hong
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Large-output-force out-of-plane MEMS actuator array
Author(s): Takashi Fukushige; Seiichi Hata; Akira Shimokohbe
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Single-spin measurement by magnetic resonance force microscopy: effects of measurement device, thermal noise, and spin relaxation
Author(s): Hsi-Sheng Goan; Todd A. Brun
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Anodic bond characteristics of Si-wafer and MLCA using Pyrex #7740 glass intermediate layer
Author(s): Gwiy-Sang Chung; Jae-min Kim
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How to prevent a runaway chemical reaction in the isotropic etching of silicon with HF/HNO3/CH3COOH or HNA solution
Author(s): Wing Cheong Hui
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Reflowed sol-gel microlens for coupling a laser diode and a single-mode fiber with high efficiency: a cost-effective and high-volume fabrication solution
Author(s): Miao He; Xiaocong Yuan; Nam Quoc Ngo; Jing Bu; Shaohua Tao
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Investigation of sample behaviors inside on-chip electrophoresis microcapillary using confocal laser scanning microscopy
Author(s): Shinichi Etoh; Toshihito Higashi; Tsuyoshi Fujimura; Reiji Hattori; Yukinori Kuroki
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Atomic layer deposition (ALD) of TiO2 and Al2O3 thin films on silicon
Author(s): David R. G. Mitchell; Gerry Triani; Darren J. Attard; Kim S. Finnie; Peter J. Evans; Christophe J. Barbe; John R. Bartlett
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LIGA for Boomerang
Author(s): Ronald Albert Lawes; Graham G. Arthur
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Bi-Ti-O thin films for piezoelectric pressure sensors
Author(s): Cheong Wei Chong; Muhammad B. Yahaya; Muhamad Mat Salleh
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Two-way actuation of bilayer cantilever of nickel titanium and silicon nitride thin films by shape memory effect and stress relaxation
Author(s): Edi Wibowo; Chee Yee Kwok; Nigel H. Lovell
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Identification and elimination of trench crystal defects in sub-0.13-um era
Author(s): Chun-Chen Yeh; Chung-Chen Chen; Tser-Hua Lu; Chia-Ming Shen; Jong-Hsian Chuang; Jon Lee; Chiang Fu; Ya-Dien Sheu
Lens design issues for the optical structure of a holographic free space optical switch
Author(s): Kungmeng Lo; Daryoush Habibi; Viet Quoc Phung
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Fabrication of thin-film transistors on plastic substrates by spin etching and device transfer process
Author(s): Shuo-Cheng Wang; Chung-Ti Hsu; Ching-Fa Yeh; Jen-Chung Lou
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Comprehensive analysis of InGaP/GaAs heterojunction bipolar transistors (HBTs) with different thickness of setback layers
Author(s): Shiou-Ying Cheng; Chun-Yuan Chen; Jing-Yuh Chen; Hung-Ming Chuang; Wen-Chau Liu; Wen-Lung Chang; Hsi-Jen Pan; Pao-Chuan Chen
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Mass-production fabrication of miniaturized plastic chip devices for biochemical applications
Author(s): Tsuyoshi Fujimura; Shinichi Etoh; Akihiro Ikeda; Reiji Hattori; Yukinori Kuroki
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Formation and its characteristics of PLZT layered film structure for transducers
Author(s): Masaaki Ichiki; Takeshi Kobayashi; Yasushi Morikawa; Yosuke Mabune; Takeshi Nakada; Kazuhiro Nonaka; Chiaki Endo; Ryutaro Maeda
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Apparent positive resistance and temperature effect on I-V characteristics of RTD
Author(s): Changyun Miao; Weilan Guo; Ping-Juan Niu; Hongwei Liu; Hong-Qiang Li; Dan Qu; Zhe Xu
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Preparation of PZT films derived by hybrid processing for MEMS application
Author(s): Lijun Yan; Zhan Jie M. Wang; Hiroyuki Kokawa; Ryutaro Maeda
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Electrochromic sensor using porphyrins thin films to detect chlorine
Author(s): Muhammad B. Yahaya; Muhamad Mat Salleh; N. Yusniza N. Yusoff
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High-aspect-ratio fabrications of micro journal air bearings for micro gas turbine engine
Author(s): Xue Chuan Shan; Yoichi Murakoshi; Zhenfeng Wang; H. J. Lu; Yufeng Jin; Tsuyoshi Ikehara; Ryutaro Maeda; C. K. Wong
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Chemical structure of low-temperature plasma-deposited silicon nitride thin films
Author(s): Martin T.K. Soh; Nick Savvides; Charles A. Musca; John M. Dell; Lorenzo Faraone
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Influence of synthetic jet location on boundary layer separation control
Author(s): Chester Lee; Guang Hong; S. G. Mallinson
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Determination of residual stress in low-temperature PECVD silicon nitride thin films
Author(s): Mariusz P. Martyniuk; Jarek Antoszewski; Charles A. Musca; John M. Dell; Lorenzo Faraone
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A novel 2D MEMS-based optical crossconnect with greatly reduced complexity
Author(s): Xiaohua Ma; Geng-Sheng Kuo
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New method of vibration isolation of scanning electron microscope
Author(s): Koichi Matsuda; Yoichi Kanemitsu; Shinya Kijimoto
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Area-changed capacitive accelerometer using 3-mask fabrication process
Author(s): Yeop Majlis Burhanuddin; Bais Badariah; Agus Santoso Tamsir
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Micromachined crystal plane on (100) and (110) silicon for optical mirror applications
Author(s): Drago Resnik; Danilo Vrtacnik; Uros Aljancic; Slavko Amon
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Development of surface connectors for microfluidic systems
Author(s): Tony C. Liu; Syed Masood; Pio Iovenitti; Erol C. Harvey
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Down conversion of high-energy photons in anatase-based TiO2 solar cells
Author(s): Hyun-Ju Kim; Jae-Sung S. Song; Boo-Kun Koo; Dong-Yun Lee; Won-Jae Lee; Jung-Hyuk Koh
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Sol-gel deposition of PZT thick film on Pt/Ti/SOI substrate and application to 2D micro scanning mirror
Author(s): Takeshi Kobayashi; Jiunnjye Tsaur; Masaaki Ichiki; Ryutaro Maeda
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Micro hot embossing for high-aspect-ratio structure with materials flow enhancement by polymer sheet
Author(s): Yoichi Murakoshi; Xue-Chuan Shan; Toshio Sano; Masaharu Takahashi; Ryutaro Maeda
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Theoretical analysis of initially buckled thermally actuated snapping bimorph microbridge
Author(s): Aron Michael; Kevin Yu; Chee Yee Kwok
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Modeling mobility degradation in scanning capacitance microscopy for semiconductor dopant profile measurement
Author(s): Yang D. Hong; Yew Tong Yeow
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Challenges in the development of precise positioning systems for MEMS/nanotechnology
Author(s): Shao Zhao; Kok Kiong Tan
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Optical excitations in novel conjugated organic materials for electronics
Author(s): Theodore G. Goodson
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Carbon nanotube transistors: an evaluation
Author(s): Leonardo C. Castro; David L. John; David L. Pulfrey
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