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Proceedings of SPIE Volume 5145

Microsystems Engineering: Metrology and Inspection III
Editor(s): Christophe Gorecki
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Volume Details

Volume Number: 5145
Date Published: 3 October 2003
Softcover: 23 papers (220) pages
ISBN: 9780819450159

Table of Contents
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Application of microscopic interferometry techniques in the MEMS field
Author(s): Alain Bosseboeuf; Sylvain Petitgrand
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Micromotion analysis by deep-UV speckle interferometry
Author(s): Petra Aswendt
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Active microelement testing by interferometry using time-average and quasi-stroboscopic techniques
Author(s): Leszek A. Salbut; Krzysztof Patorski; Michal Jozwik; Jacek Marcin Kacperski; Christophe Gorecki; Alain Jacobelli; Thierry Dean
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Simultaneous mapping of phase and amplitude of MEMS vibrations by microscopic interferometry with stroboscopic illumination
Author(s): Sylvain Petitgrand; Alain Bosseboeuf
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Interferometry system for out-of-plane microdisplacement measurement: application to mechanical expertise of scratch drive actuators
Author(s): Michal Jozwik; Christophe Gorecki; Patrice Le Moal; Eric Joseph; Patrice Minotti
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Mechanical characterization of thin membranes with picosecond ultrasound
Author(s): Dieter Michael Profunser; Jacqueline Vollmann; Jurg Dual
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MEMS optical switch control and integrated packaging
Author(s): Hong Cai; Chong Wei Chan; Yixin Wang; Chao Lu; Anand Krishna Asundi; Ai Qun Liu
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Interferometric measuring device with 2D analyzing for real-time and in situ plasma etching in the production of microsystem components
Author(s): Claus Westermann; Mai Chen; Gottfried Frankowski; Wilfred John; Harald Wittrich
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MEMS deep-RIE fabrication process and device characterization
Author(s): Jing Li; Qing Xin Zhang; Anand Krishna Asundi; Ai Qun Liu
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Optimizing deep lithography with protons for the fabrication of 2D fiber alignment structures
Author(s): Rafal G. Krajewski; Bart Volckaerts; Heidi Ottevaere; Pedro Vynck; Jan Watte; Daniel Daems; Malgorzata Kujawinska; Alex Hermanne; Hugo Thienpont
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Photonic bandgap crystals: a breakthrough for new-generation integrated optical device
Author(s): Ai Qun Liu; Anand Krishna Asundi
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Microinterferometric tomography of photonics phase elements
Author(s): Pawel Kniazewski; Witold Gorski; Malgorzata Kujawinska
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High-speed temperature measurements using novel optical-fiber-based systems
Author(s): Frederic A. Bezombes; David R Allanson; David Robert Burton; Michael Joseph Lalor
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Detection of patch debonding in composite repaired cracked metallic specimens, using optical fibers and sensors
Author(s): George J. Tsamasphyros; George N Kanderakis; Nikolaos K. Furnarakis; Zaira P. Marioli-Riga
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Miniaturized sensor head for distal holographic endoscopy
Author(s): Reiner Klattenhoff; Ervin Kolenovic; Wolfgang Osten; Christoph von Kopylow; Werner P. O. Jueptner
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Investigation of silicon MEMS structures subjected to thermal loading by digital holography
Author(s): Pietro Ferraro; Sergio De Nicola; Andrea Finizio; Giuseppe Coppola; Mario Iodice; Simonetta Grilli; Carlo Magro; Giovanni Pierattini
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Micro/nano moire methods
Author(s): Anand Krishna Asundi; Haixia Shang; Huimin Xie; Biao Li
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In-plane optical measurement of vibrations of MEMS: gradient methods using interferometry and image processing
Author(s): Bernard Cretin; Bruno Serio; Pascal Vairac
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Study of subpixel image processing algorithms for MEMS in-plane vibration measurements by stroboscopic microscopy
Author(s): Adel Hafiane; Sylvain Petitgrand; Olivier Gigan; Samia Bouchafa; Alain Bosseboeuf
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Ultrasonic wave propagation phenomena at material interfaces of microstructures
Author(s): Jacqueline Vollmann; Dieter Michael Profunser; Andreas H Meier; Juerg Dual; Max Doebeli
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Integrated optomechanical sensor for in situ characterization of MEMS: the implementing of a readout architecture
Author(s): Christophe Gorecki; Andrei Sabac; P. Bey; K. Gut; Alain Jacobelli; Thierry Dean
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Nanoscale displacement measurement of MEMS devices using fiber optic interferometry
Author(s): Chee Wei Lee; Xuming Zhang; Swee Chuan Tjin; Ai Qun Liu
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Testing optical surfaces by high-precision diffractive null lenses with integrated reference surface
Author(s): Alexander G. Poleshchuk; Vadim Cherkashin; Jean-Michel Asfour
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