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Proceedings of SPIE Volume 5116

Smart Sensors, Actuators, and MEMS
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Volume Details

Volume Number: 5116
Date Published: 24 April 2003
Softcover: 106 papers (970) pages
ISBN: 9780819449764

Table of Contents
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SOI silicon as structural layer for NEMS applications
Author(s): Maria Villarroya; Eduard Figueras; Francesc Perez-Murano; Francesca Campabadal; Jaume Esteve; Nuria Barniol
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Fusion-bonded multilayered SOI for MEMS applications
Author(s): Kumaresa Somasundram; David Cole; Cormac McNamara; Anne Boyle; Paul McCann; Claire Devine; Andrew Nevin
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Microstructuring of Pyrex glass and polymers by excimer laser
Author(s): Bernd Keiper; Robby Ebert; Rico Bohme; Horst Exner
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Stereolithography of lead zirconate titanate ceramics for MEMS applications
Author(s): Olivier Dufaud; Herve Le Gall; Serge Corbel
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Fabrication of micromachined TiNi-based microgripper with compliant structure
Author(s): Yongqing Fu; Hejun Du
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Electroactive characteristics of hydrogels composed of poly(vinyl alcohol) and poly(N-isopropylacrylamide)
Author(s): Seon Jeong Kim; Sang Jun Park; Sun I. Kim; In Young Kim; Young Moo Lee; Hee Chan Kim; Taek Dong Chung
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Surface microstructuring of biocompatible bone analogue material HAPEX using LIGA technique and embossing
Author(s): Andreas Schneider; Susan Rea; Ejaz Huq; William Bonfield
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Modified sol-gel-derived PZT ceramics
Author(s): S. A. Ibrahim; M. S. Ahmed; R. M. Ramadan; Adel M Amer
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Smart sensors development based on a distributed bus for microsystems applications
Author(s): Carles Ferrer; Bibiana Lorente
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Low-temperature InO<sub>x</sub> thin films for O<sub>3</sub> and NO<sub>2</sub> gas sensing
Author(s): George Kiriakidis; Hassan Ouacha; N. Katsarakis; Kosmas Galatsis; Wojtek Wlodarski
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Design fabrication and test of micromachined-silicon capacitive gas sensors with integrated readout
Author(s): Jorge Amirola; Angel Rodiguez; Luis Castaner
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Development of strain sensors utilizing giant magnetoresistive and tunneling magnetoresistive devices
Author(s): Markus Loehndorf; Stefani Dokupil; Manfred Ruehrig; Joachim Wecker; Eckhard Quandt
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Hybrid neural networks for ISFET source separation
Author(s): Sergio Bermejo; Guillermo Bedoya; Joan Cabestany
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Compatibility of gas and flow sensor technology fabrication
Author(s): Neus Sabate; Isabel Gracia; Carles Cane; Jordi Puigcorbe; Judith Cerda; Joan Ramon Morante; Javier Berganzo
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Pencil probe system for electrochemical analysis and modification in nanometer dimensions
Author(s): Rainer J. Fasching; Ye Tao; Kyle Hammerick; Fritz B. Prinz
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Overview of MEMS/NEMS technology development for space applications at NASA/JPL
Author(s): Thomas George
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Adhesive wafer bonding for MEMS applications
Author(s): Viorel Dragoi; Thomas Glinsner; Gerald Mittendorfer; Bernhard Wieder; Paul Lindner
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High-performance polysilicon air-gap thin film transistor on low-temperature substrates
Author(s): Hicham Mahfoz-Kotb; Anne-Claire Salaun; Tayeb Mohammed-Brahim; Nathalie Coulon; Olivier Bonnaud; Jean-Yves Mevellec
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Soft lithographic patterning of oxide thin films
Author(s): Estefania Abad; Roger W. Whatmore; Qi Zhang; Zhaorong Huang
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Observability and exact controllability of piezoelectric medium coupled to electronic systems
Author(s): Ghouti Senouci-Bereksi; Abdelatif Benchaib
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Optical components and actuators for integrated near-field optical data storage
Author(s): Kazuhiro Hane; Yoshiaki Kanamori; Minoru Sasaki; Jong Hyeong Song
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Integrated near-field optical head for hybrid recording
Author(s): Yi Chiu; Meng-Yu Wu; Han-Ping D. Shieh; Yi Ting Sun; Hsueh-Liang Chou; Wensyang Hsu
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Optomechanical cycles of photochromic-polymer microsystems induced by laser irradiation
Author(s): Athanassia Athanassiou; Maria Kalyva; Kleanthi Lakiotaki; Savas Georgiou; Costas Fotakis
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Smart tong grippers for microparts
Author(s): Jochen Schlick; Detlef Zuehlke
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Shell-type micromechanical oscillator
Author(s): Maxim Zalalutdinov; Keith L. Aubin; Christopher Michael; Robert B. Reichenbach; Tuncay Alan; Alan T. Zehnder; Brian H. Houston; Jeevak M. Parpia; Harold G. Craighead
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Thermal actuator improvements: tapering and folding
Author(s): Michael J. Sinclair; Kerwin Wang
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Smart electrostrictive composite materials for actuators
Author(s): N. Yu; T. Somphone
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Electronic circuitry development in a micropyrotechnic system for micropropulsion applications
Author(s): Manuel Puig-Vidal; Jaime Lopez; Pere Miribel; Enric Montane; Jose M. Lopez-Villegas; Josep Samitier; Carole Rossi; Thierry Camps; Maxime Dumonteuil
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Sigma-delta microsystems for readout and servo control
Author(s): Nicolas Delorme; Cyril Condemine; Daniel Barbier
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Microfluid pump in brass with a built-in magnetic driver
Author(s): Raghied M. Atta
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Laser beam microforming as a new adjustment technology using dedicated actuator structures
Author(s): Alexander M. Olowinsky; Ludger Bosse
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Design and fabrication of a three-dimensional long-stretch microdrive by electroplating
Author(s): Chien-Tai Wu; Wen-Chuan Tai; Chen-Peng Hsu; Wensyang Hsu
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Fabrication of bead-size sorting chip for chemical array sensor
Author(s): Byung Hwa Park; Yoon Seok Park; Young-Soo Sohn; Dean Neikirk
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Polymeric mechanical sensors with integrated readout in a microfluidic system
Author(s): Montserrat Calleja; Peter A Rasmussen; Alicia Johansson; Anja Boisen
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Compact and smart laser diode systems for cancer treatment
Author(s): Viatcheslav N. Svirin; Victor V. Sokolov; Tatiana I. Solovieva
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Fluidic technology: adding control, computation, and sensing capability to microfluidics
Author(s): Tadeusz M. Drzewiecki; Narciso F. Macia
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Long-periodic grating in multimode fiber for measuring traces of chromium in water
Author(s): P. Suresh Kumar; C. P.G. Vallabhan; V. P.N. Nampoori; P. Radhakrishnan
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Resonating cantilever mass sensor with mechanical on-plane excitation
Author(s): Jordi Teva; Gabriel Abadal; Xavier Jordà; Xavier Borrise; Zachary Davis; Nuria Barniol
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Simulation of bulk micromachined vibration sensor with low noise
Author(s): Xiaowei Liu; Mingxue Huo; Weiping Chen; Qiang Chen
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A novel method for the measurement of the residual stress of surface-micromachined structures for MEMS
Author(s): Jong-Hoon Kim; Jeong-Gil Kim; Soon-Chang Yeon; Jun-Hee Hahn; Ho-Young Lee; Yong-Hyup Kim
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Contactless laser bending of silicon microstructures
Author(s): Horst Exner; Udo Loschner
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Rapid prototyping and structure generation using three-dimensional nanolithography with electron-beam-induced chemical reactions
Author(s): Hans W.P. Koops
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Fabrication of nano-interdigitated electrodes
Author(s): Luca Berdondini; Martin Kalbac; Sebastien Gautsch; Maurizio Gullo; Urs Staufer; Milena Koudelka-Hep; Nico F de Rooij
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Dynamic characterization of SiO<sub>2</sub>-Au microcantilevers using Michelson interferometer
Author(s): Guillaume Marinier; Stefan Dilhaire; Luis David Patino Lopez; Mohamed Benzohra
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Characterization of SU-8 as a resist for electron-beam lithography
Author(s): Arun K. Nallani; Sang Won Park; Jeong Bong Lee
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Characterization of embedded root method in UV-LIGA process
Author(s): Chien-Hung Ho; Wensyang Hsu
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Optical MEMS devices for telecom systems
Author(s): Flavio Pardo; Vladimir A. Aksyuk; Susanne Arney; H. Bair; Nagesh R. Basavanhally; David J. Bishop; Gregory R. Bogart; Cristian A. Bolle; J. E. Bower; Dustin Carr; H. B. Chan; Raymond A. Cirelli; E. Ferry; Robert E. Frahm; Arman Gasparyan; John V. Gates; C. Randy Giles; L. Gomez; Suresh Goyal; Dennis S. Greywall; Martin Haueis; R. C. Keller; Jungsang Kim; Fred P. Klemens; Paul R. Kolodner; Avi Kornblit; T. Kroupenkine; Warren Y.-C. Lai; Victor Lifton; Jian Liu; Yee L. Low; William M. Mansfield; Dan Marom; John F. Miner; David T. Neilson; Mark A. Paczkowski; C. S. Pai; A. G. Ramirez; David A. Ramsey; S. Rogers; Roland Ryf; Ronald E. Scotti; Herbert R. Shea; M. E. Simon; H. T. Soh; Hong Tang; J. A. Taylor; K. Teffeau; Joseph Vuillemin; J. Weld
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MEMS mirror array for a wavelength-selective 1xK switch
Author(s): Daniel O. Lopez; Flavio Pardo; Vladimir A. Aksyuk; M. E. Simon; Herbert R. Shea; Dan M. Marom; David T. Neilson; Raymond A. Cirelli; Fred P. Klemens; William M. Mansfield; Linus A. Fetter; E. Bower; John F. Miner; T. W. Sorsch
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MEMS variable optical attenuator for volume production
Author(s): Vladimir I. Vaganov; Sebastiaan R. in 't Hout; Nickolai Belov
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Monolithic III-V and hybrid polysilicon-III-V microelectromechanical tunable multilayer filters and vertical-cavity surface-emitting lasers
Author(s): Edward M Ochoa; James A Lott; Thomas R. Nelson; M. C. Harvey; J. A. Raley; Andreas Stintz; Kevin J Malloy
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A back-to-back micromirror device for optical add/drop multiplexer applications
Author(s): Yu-Chen Lin; Jin-Chern Chiou
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Enhancement of optical attenuation by a tunable nonsmooth mirror
Author(s): Cheng-Hsuan Lin; Wensyang Hsu
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FDTD simulation of hexagonal micropillar cavities
Author(s): Frankie Kim Lam Tung; Ning Ma; Andrew W. Poon
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Fabrication of a highly efficient optical modulator based on silicon-on-insulator
Author(s): Raghied M. H. Atta; Graham J. Ensell; Alan G. R. Evans; Jason C. E. Png; Graham T. Reed
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Polymers in RF and millimeter-wave applications
Author(s): Katia M. Grenier; Victor Lubecke; Fouad Bouchriha; Laurent Rabbia; David Dubuc; Patrick Pons; Robert Plana
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Infrared wavelength-selective micromachined microbolometers
Author(s): Jun Wan Kim; Dean Neikirk
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Finline technology for millimeter-wave MEMS
Author(s): Jeffrey S. Fu; Jiaoyun Zhou; Yilong Lu; Jianguo Ma; Zhongxiang Shen
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Laser annealing for high-Q MEMS resonators
Author(s): Keith L. Aubin; Maxim Zalalutdinov; Robert B. Reichenbach; Brian H. Houston; Alan T. Zehnder; Jeevak M. Parpia; Harold G. Craighead
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High-density multilayer connection technology for MEMS and CMOS applications
Author(s): Seoung Jai Bai; Rainer J. Fasching; Fritz B. Prinz
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Optically controlled microwave switch device
Author(s): Ari J Viitanen; Sergei A Tretyakov
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Membrane-based HEB mixer for THz applications
Author(s): Jean Baubert; Morvan Salez; Yan Delorme; Patrick Pons; Gregory Goltsman; Harald Merkel; Benoit Leconte
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Submillimeter mixers based on superconductive parallel junction arrays
Author(s): Faouzi Boussaha; Morvan C. Salez; Yan Delorme; Alexandre Feret; Benoit Lecomte; Karl Westerberg; Michel Chaubet
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Fabrication of monolithic photovoltaic minimodules using bulk micromachining techniques
Author(s): Sandra Bermejo; Pablo Rafael Ortega; Luis Castaner
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Stress release of PECVD oxide by RTA
Author(s): Remy Charavel; Benoit Olbrechts; Jean-Pierre Raskin
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Fabrication of conductive atomic force microscope probes and their evaluation for carrier mapping
Author(s): Marc Fouchier; Pierre Eyben; David Alvarez; Natasja Duhayon; MingWei Xu; Sywert Brongersma; Judit Lisoni; Wilfried Vandervorst
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Characterization of front- to backwafer alignment and bulk micromachining using electrical overlay test structures
Author(s): Henk W. van Zeijl; John Slabbekoorn
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Modification of surface roughness by combining dry and wet etching
Author(s): Cheng-Chang Lee; Wensyang Hsu
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Matching different size masks to effectively improve stepper throughput
Author(s): Fu-Tien Weng; Hung-Jen Hsu; Chih-Kung Chang; Yu-Kung Hsiao
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Microlens design for compact lens system
Author(s): Hung-Jen Hsu; Fu-Tien Weng; Chih-Kung Chang; Yu-Kung Hsiao
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Microfabrication using selective laser sintering micron metal powder
Author(s): Jimin Chen; Xubao Wang; Tiechuan Zuo
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New method for decreasing drive voltage of torsion beam actuator for micromechanical optical switches
Author(s): Wei Dong; Xindong Zhang; Caixia Liu; Cuiping Jia; Jianxuan Pan; Ping Ji; Weiyou Chen
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Dynamic characterization of passive microstructures (SiO<sub>2</sub>-Au microcantilevers) under a controlled environment
Author(s): Guillaume Marinier; Eric Joubert; Mohamed Benzohra; Mohamed Ketata
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Systematic design methodology of bistable compliant micromechanisms
Author(s): Jinni Tsay; Cheng-Kuo Sung; Liang-Qing Su
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Circular RF MEMS resonator solutions for 100- to 10-nm SOI structures
Author(s): Sami K Myllymaki; E. Ristolainen; P. Heino; A. Lehto; K. Varjonen
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Stability of diffusion equation solution using various formulations of the finite difference method
Author(s): Michal Malachowski; Jadwiga Olesik
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Design considerations of electrostatic forces in microaccelerometers
Author(s): Jingxin Dong; Xiaochun Wu
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Advantages of p<sup>++</sup>polysilicon etch stop layer versus p<sup>++</sup> silicon
Author(s): Remy Charavel; Jean Laconte; Jean Pierre Raskin
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Characterization of mechanical properties of Ti<sub>50.6</sub>Ni<sub>19.4</sub>Pd<sub>30</sub> alloy showing different phase transformation behaviors
Author(s): Qing Chao Tian; Jian Shen Wu
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High-repetition-rate current drivers for picosecond laser modules employed in high-precision laser radars and 3D vision
Author(s): Sergey N. Vainshtein; Valentin S. Yuferev; Juha T. Kostamovaara
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High-temperature contactless position sensor based on giant magnetoresistive Agx-Co1-x alloy
Author(s): Sergio Arana; Enrique Castano; Javier Gracia
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Measurement of thermoelectric, galvanomagnetic, and thermomagnetic effects on microsamples at ultrahigh pressure
Author(s): Sergey V. Ovsyannikov; Vladimir V. Shchennikov
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MEMS-based transmission lines for microwave applications
Author(s): Qun Wu; Jiahui Fu; Xuemai Gu; Huajuan Shi; Jongchul Lee
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A four-bit digital MEMS phase shifter
Author(s): Jian Zhu; Bailing Zhou; Jinting Lin; Yuanwei Yu; Le Lu
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A simple method to fabricate buried channel optical waveguides based on porous silicon
Author(s): Zhenhong Jia; Chuzhe Tu; Jun Zhou; Rui Li
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Electrical characterizations of smart hydrogel based on alginate/poly(diallyldimethylammonium chloride) in solutions
Author(s): Seon Jeong Kim; Seoung Gil Yoon; In Young Kim; Young Hee Lee; Kay Hyeok An; Nam Gyun Kim; Chul Un Hong
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Microfluidics meets thin-film electronics: a new approach toward an integrated intelligent lab-on-a-chip
Author(s): Heiko Schafer; Steffen Chemnitz; Stephanie Schumacher; Volodymyr Koziy; Alexander Fischer; Alfred J. Meixner; Dietmar Ehrhardt; Markus Bohm
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Cost-effective masks for deep x-ray lithography
Author(s): Heinz-Ulrich Scheunemann; Bernd Loechel; Linke Jian; Daniel Schondelmaier; Yohannes M. Desta; Jost Goettert
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Monolithical integration of polymer-based microfluidic structures on application-specific integrated circuits
Author(s): Steffen Chemnitz; Heiko Schafer; Stephanie Schumacher; Volodymyr Koziy; Alexander Fischer; Alfred J. Meixner; Dietmar Ehrhardt; Markus Bohm
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Semiconductor gas sensor compatibility with CMOS technologies
Author(s): Maria Jesus Lopez-Bosque; Jose Antonio Plaza; Joaquin Santander; Isabel Gracia; Carles Cane; Juergen Wollenstein; Emmanuel Moretton; Armin Lambrecht; Kari Schjolberg-Henriksen
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Design and evaluation of automatic joining-assembly system of optical collimators with high efficiency
Author(s): Doo-Sun Choi; Tae-Jin Je; K.H. Hwang; J.H. Moon
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Amorphous silicon thin film for all-optical micromodulator
Author(s): Maria Arcangela M.N. Nigro; Francesca Cantore; Francesco Giuseppe Della Corte; Caterina Summonte
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Study of the thin metal film/thick lithium niobate substrate system implanted by Ar+ ions and its application for production of pyroelectric photodetectors
Author(s): Viktor O. Lysyuk; Leonid V. Poperenko; Vasiliy S. Staschuk; Mykola I. Kluy
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Fabrication of nitride thin films from laser plasma
Author(s): Bohdan K. Kotlyarchuk; Dmytro I. Popovych; Andrew Serednytski
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Influence of electric field on emission of high-energy electron from ITO layers
Author(s): Jadwiga Olesik; Michal Janusz Malachowski; Zygmunt Olesik
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Novel three-axis silicon probe with integrated circuit on chip for microsystem components
Author(s): Vladimir Nesterov; Petcharin Pornnoppadol; Uwe Brand; Ralph Wilke; M. Schmidt; Stephanus Buettgenbach
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Electromechanical microscanner efficiency enhancement using modeling results
Author(s): Nikolay Ivanovich Mukhurov; Georgy I. Efemov
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New micromachined VOA for the improvement of optical characteristics
Author(s): Sungcheon Jung; Yoonshik Hong; Junghyun Lee; Hyunkee Lee
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Low-loss wideband filters and resonator filters using high-temperature stable high-electromechanical-coupling acoustic surface wave substrates using microfabrication technology
Author(s): Kazuhiko Yamanouchi; Toru Ishii
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Influence of microstructure of tungsten oxide thin films on their general performance as ozone and NOx gas sensor
Author(s): Olena Berger; Thomas Hoffmann; Wolf-Joachim Fischer; Valeri Melev
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System approach to MEMS commercialization
Author(s): Vladimir I. Vaganov; Nickolai Belov; Sebastiaan R. in 't Hout
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Three-dimensional bonding technologies for MEMS
Author(s): Vladimir I. Vaganov; Nickolai Belov; Sebastiaan R. in 't Hout
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Three-dimensional polymer MEMS with functionalized carbon nanotubes by microstereolithography
Author(s): Vijay K. Varadan; Jining Xie
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Polymer-based MEMS accelerometer with modified organic electronics and thin film transistor
Author(s): Vijay K. Varadan
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Advanced MEMS-based infrared imager
Author(s): Ming Chen
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Layered SAW nitrogen dioxide sensor with WO3 selective layer
Author(s): Samuel James Ippolito; Kourosh Kalantar-zadeh; Adrian Trinchi; David A. Powell; Wojtek Wlodarski
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Vibration measurement of microcomponents by fringe projection method
Author(s): Tao Wu; ChoJui Tay; Chenggen Quan; Shihua Wang; HuaiMin Shang
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