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Proceedings of SPIE Volume 5063

Fourth International Symposium on Laser Precision Microfabrication
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Volume Details

Volume Number: 5063
Date Published: 18 November 2003
Softcover: 101 papers (548) pages
ISBN: 9780819448699

Table of Contents
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Reliable laser micro-spot welding of copper
Author(s): Simone Amorosi; Thomas C. Sidler; Rene Paul Salathe; Hans Peter Schwob; Joachim Hertzberg
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Laser-induced single step micro/nanopatterning
Author(s): Dieter Baeuerle; Gerard Wysocki; Lars Landstroem; Johannes Klimstein; Klaus Piglmayer; Johannes Heitz
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Resonant infrared laser materials processing at high vibrational excitation density: applications and mechanisms
Author(s): Richard F. Haglund; Daniel M. Bubb; David R. Ermer; G. K. Hubler; Eric J. Houser; James S. Horwitz; Borislav L. Ivanov; Michael R. Papantonakis; Bradley R. Ringeisen; Kenneth E. Schriver
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Laser micro-bending for precise micro-fabrication of magnetic disk drive components
Author(s): Naohisa Matsushita
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Laser-induced diffusion for glass metallization
Author(s): Dong Jiang Wu; Ming Hui Hong; R. Ji; Kaidong D. Ye; Sumei M. Huang; Tow Chong Chong; T. C. Ma; Koji Sugioka; Katsumi Midorikawa
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Optimized ablation condition to prepare polyperinaphthalene thin films using the third harmonic wavelength of Nd:YAG laser
Author(s): Satoru Nishio; Chihiro Kanezawa; Hiroshi Fukumura
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Laser-assisted chemical cleaning of thin oxide films on carbon steel surfaces
Author(s): Hyunkyu Lim; Dongsik Kim
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Fabrication of three-dimensional microstructures by stacking laser-direct-write layers
Author(s): Sungho Jeong; Seongil Han; Jayaraman Senthil Selvan
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Comparison of the structural characteristics and surface morphology of ZnO thin films grown on various substrates by pulsed laser deposition
Author(s): J. H. Kim; Kyoung-cheol Lee; Cheon Lee
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Laser cleaning technology of the contact hole for semiconductor manufacturing
Author(s): Dae-Jin Kim; Hyun-Jung Kim; Je-Kil Ryu; Sung-Sik Pak
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Optoelectrical and optoacoustic analysis of the laser cleaning process of a photoresist on Si and ITO
Author(s): Kyoung-Cheol Lee; Cheon Lee
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Carbon nitride films synthesized by pulsed laser deposition with additional laser irradiation to plume
Author(s): Tatsuya Shinozaki; Toshihiko Ooie; Tetsuo Yano
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Surface modification of silicon and PTFE by laser surface treatment: improvement of wettability
Author(s): Dong-Yong Kim; Kyoung-cheol Lee; Cheon Lee
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Excitation – melting – ablation: theoretical investigations of key processes during ultrashort pulsed laser machining
Author(s): Baerbel Rethfeld; Klaus Sokolowski-Tinten; Dietrich von der Linde
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Material-vapor dynamics during ablation with ultrashort pulses
Author(s): Detlef Breitling; Klaus-Peter Mueller; Andreas Ruf; Peter Berger; Friedrich Dausinger
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Ablation process induced by femtosecond laser in transparent dielectrics
Author(s): Xiaoxi Li; Tianqin Jia; Donghai Feng; Zhizhan Xu
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Laser-induced sub-surface modification of the optical properties in transparent materials: nik-engineering (TM)
Author(s): David Ashkenasi; Hans-Juergen Hoffmann; Gerhard J. Mueller
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Fabrication of 3D microreactor structures embedded in photosensitive glass by femtosecond laser
Author(s): Masashi Masuda; Koji Sugioka; Ya Cheng; Masako Kawachi; Kazuhiko Shihoyama; Koichi Toyoda; Katsumi Midorikawa
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Three-dimensional micro-optical components embedded in Foturan glass by a femtosecond laser
Author(s): Ya Cheng; Koji Sugioka; Masashi Masuda; Kazuhiko Shihoyama; Koichi Toyoda; Katsumi Midorikawa
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Glass processing using microsecond, nanosecond and femtosecond pulsed lasers
Author(s): Arzu Ozkan; Leonard R. Migliore; Corey M. Dunsky; Michael W. Phaneuf
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Fabrication of diffractive phase elements by F2-laser ablation of fused silica
Author(s): Malte Schulz-Ruthenberg; Juergen Ihlemann; Gerd Marowsky; Amir H. Nejadmalayeri; Mi Li Ng; Jianzhao Li; Peter R. Herman
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Site-selective dye deposition onto micropatterns of fused silica fabricated with laser-induced backside wet etching (LIBWE)
Author(s): Ximing Ding; Yoshizo Kawaguchi; Tadatake Sato; Aiko Narazaki; Hiroyuki Niino
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Titanium-containing glass for laser micromachining
Author(s): Masanori Shojiya; Hirotaka Koyo; Keiji Tsunetomo
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Fabrication of micro-holes in silica glass by femtosecond laser pulses
Author(s): Y. Iga; Wataru Watanabe; T. Ishizuka; Yan Li; Junji Nishii; Kazuyoshi Itoh
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Laser microfabrication of glass substrates by pocket scanning
Author(s): B. Lan; Ming Hui Hong; Kaidong D. Ye; Z. B. Wang; Tow Chong Chong
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Laser amorphization of glass-ceramics (LAGS) laws and new possibility to form a number of micro-optical components
Author(s): Vadim P. Veiko; Q. K. Kieu; P. K. Skiba
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Selective laser micro sintering with a novel process
Author(s): Horst Exner; Peter Regenfuss; Lars Hartwig; Sascha Kloetzer; Robby Ebert
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Laser profiling of 3D microturbine blades
Author(s): Andrew S. Holmes; Mark E. Heaton; Guodong Hong; Keith R. Pullen; Phil T. Rumsby
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Laser-assisted forming of metallic micro-parts
Author(s): Alexander Bayer; Arnold Gillner; Peter Groche; Ruediger Erhardt
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Laser microprocessing: facts and trends
Author(s): Michael Schmidt; Gerd Esser
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Sapphire tools for laser-assisted microforming
Author(s): Jens P. Wulfsberg; Sven-Eric Hilpert; Andreas Ostendorf; Christian J. Kulik; Thorsten Temme; Katja Samm
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Laser adjustable actuators for high-accuracy positioning of micro components
Author(s): Gerd Esser; Michael Schmidt; Manfred Dirscherl
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Process assembly for µm-scale SLS, reaction sintering, and CVD
Author(s): Robby Ebert; Peter Regenfuss; Sascha Kloetzer; Lars Hartwig; Horst Exner
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3D micro channels in laminated resins by UV laser ablation
Author(s): Yoshikazu Yoshida
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Surface microstructuring of transparent materials by laser-induced backside wet etching using excimer laser
Author(s): Hiroyuki Niino; Ximing Ding; Ryozo Kurosaki; Aiko Narazaki; Tadatake Sato; Yoshizo Kawaguchi
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Comparison of laser induced front- and rear-side ablation
Author(s): Stefan Beyer; Vivi Tornari; Daniel Gornicki
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Surface structuring of metals with short and ultrashort laser pulses
Author(s): Michael Weikert; Christian Foehl; Friedrich Dausinger; Tobias Abeln
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Nanosecond laser micro machining using an external beam attenuator
Author(s): Johan Bosman; Henk Kettelarij; Corne J.G.M. de Kok
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Laser structuring and modification of surfaces for chemical and medical micro components
Author(s): Elke A. Bremus-Koebberling; Arnold Gillner
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Two- and three-dimensional periodic structures produced by nano-pulsed laser irradiation in Ag-doped glass
Author(s): Yuri Kaganovskii; Irena Antonov; David Ianetz; Michael Rosenbluh; Andrey A. Lipovskii
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Principles and applications of laser-induced liquid-phase jet-chemical etching
Author(s): Andreas Stephen; Simeon Metev; Frank Vollertsen
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Machining of optical microstructures with 157 nm laser radiation
Author(s): Thorsten Temme; Andreas Ostendorf; Christian J. Kulik
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Rotational micromachining tool controlled by optical radiation pressure
Author(s): Yasuhiro Hidaka; Takashi Miyoshi; Yasuhiro Takaya; Tetsuo Sasaki; Kenji Shirai
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Model for pulsed ultraviolet laser ablation
Author(s): N. Mansour; K. Jamshidi Ghaleh
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Micro sculpting technology using DPSSL
Author(s): Won-Seok Chang; Bosung Shin; Jae-gu Kim; Kyung-Hyun Whang
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Sub-wavelength grid patterns on silicon surface by pulsed CO2 laser irradiation
Author(s): Wei-Jie Wang; M. F. Tan; Ming Hui Hong; Tow Chong Chong
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Extreme ultraviolet sources and measurement tools for EUV-lithography and system development
Author(s): Kai M. Gaebel; Juergen Kleinschmidt; Guido Schriever; Uwe Stamm; Rainer Lebert; Max Christian Schuermann
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Compact electron-based EUV source
Author(s): Andre Egbert; Boris Tkachenko; Andreas Ostendorf; Stefan Becker; Boris N. Chichkov
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EUV light source develpment in Japan
Author(s): Akira Endo
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EUV emission of solid targets irradiated by femto- and picosecond laser pulses
Author(s): Georg Soumagne; Tamotsu Abe; Kenichi Ikeda; Hiroshi Komori; Hiroshi Someya; Takashi Suganuma; Kazuhisa Nakajima; Akira Endo
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Development of capillary z-pinch discharge EUV light source
Author(s): Masato Watanabe; Tetsu Kasao; Mitsuo Okamoto; In Ho Song; Akitoshi Okino; Kazuhiko Horioka; Eiki Hotta
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Pseudo-elastic and bio-chemical properties of Ti-Ni shape memory alloy wires micro-welded by YAG laser
Author(s): Keisuke Uenishi; Masaya Takatsugu; Kojiro F. Kobayashi
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Micro-welding of thin foil with direct diode laser
Author(s): Nobuyuki Abe; Yoshinori Funada; Masahiro Ishide
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Microjoining of dissimilar materials for life science applications
Author(s): Hans-Joachim Herfurth; Reiner Witte; Stefan Heinemann
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Precision microwelding of thin metal foil with single-mode fibre laser
Author(s): Isamu Miyamoto; Seo-Jeong Park; Toshihiko Ooie
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Laser beam micro-welding of dissimilar metals
Author(s): Kilian Klages; Arnold Gillner; Alexander M. Olowinsky; Sandra Fronczek; Armin Studt
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Laser welding of polymer micro-fluidic devices using novel diode laser sources
Author(s): Anthony P. Hoult
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Use of pre-pulse in laser spot welding of materials with high optical reflection
Author(s): Ihor Mys; Manfred Geiger
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CO2 laser annealing with NiTi thin films deposited by sputtering
Author(s): Q. He; Weiming Huang; Minhui Hong; Tow Chong Chong; Yongqi Fu; Hejun Du
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Numerical simulation of pulsed laser ablation in air
Author(s): Bukuk Oh; Dongsik Kim; Wonseok Jang; Bosung Shin
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Direct laser diode welding system with anti-reflection unit
Author(s): Doukei Nagayasu; Jing-bo Wang
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Time-resolved measurement of surface displacement in excimer laser ablation of Si
Author(s): Toshihiko Ooie; Shinsuke Asada; Isamu Miyamoto
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Fabrication of holes and grooves on glass by a femtosecond laser
Author(s): Yoshiro Ito; Kazunori Kuroi; Kazuhide Hayakawa
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Processing HIP-zirconia with ultra-short laser pulses
Author(s): Kristian Werelius; Paul Weigl; Holger Lubatschowski
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High precision deep drilling with ultrashort pulses
Author(s): Christian Foehl; Friedrich Dausinger
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New methods to control quality and precision of micro-machining with femtosecond lasers
Author(s): Ronan Le Harzic; Nicolas Sanner; Nicolas Huot; C. Donnet; Eric Audouard; Pierre Laporte
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Experimental assessment of machining accuracy obtainable by femtosecond-laser surface structuring
Author(s): Thomas Hoeche; Tino Petsch; David Ruthe; Klaus-Peter Zimmer; Frank Syrowatka; Frank Heyroth
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Transcriptional ablation using femtosecond laser with mask
Author(s): Yoshiki Nakata; Tatsuo Okada; Mitsuo Maeda
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Effect of pulse duration on scribing of ceramics and Si wafer with ultra-short pulsed laser
Author(s): Y. Iwai; T. Arai; T. Honda; Ryuzo Tanaka; T. Takaoka
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Laser processing at solid-liquid interfaces using femtosecond pulse laser sources
Author(s): Kenji Katayama; Hideaki Yonekubo; Tsuguo Sawada
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Laser etching of indium tin oxide thin films by ultra-short pulsed laser
Author(s): Ryuzo Tanaka; T. Takaoka; H. Mizukami; T. Arai; Y. Iwai
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Direct femtosecond laser writing system for sub-micron and micron scale patterning
Author(s): Egidijus Vanagas; Dmitry Tuzhilin; Michail Zinkou; Alexander Sedunov; Nikolai Vasiliev; Igor Kudryashov; Vladimir Kononov; Shozi Suruga
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Fundamental properties of 3D microfabrication using a femtosecond laser
Author(s): Mikio Yamanoi; Satoshi Wada; Masahiro Anzai; Hitoshi Ohmori; Akitake Makinouchi
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New excimer laser marking method using MMD
Author(s): Thomas H. Kuntze; Michael Panzner; Udo Klotzbach; Eckhard Beyer
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Programmable 2D laser marking device based on a pulsed UV image coherent amplifier
Author(s): Thierry Lamarque; Ralf Nicolaus; Brigitte Loiseaux; Jean-Pierre Huignard; Gintas Slekys; Jingjun Xu
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Geometrical aspects of laser-drilled high precision holes for flow control applications
Author(s): Roswitha Giedl; H.-J. Helml; F. X. Wagner; Michael J. Wild
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Shadowgraphic imaging of metal drilling with a long pulse excimer laser
Author(s): Aart Schoonderbeek; Cornelis A. Biesheuvel; Ramon M. Hofstra; Klaus-Jochen Boller; Johan Meijer
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Microdrilling, -scribing and cutting with high-quality and high-power ns-Nd:YAG systems
Author(s): Alexander Binder; David Ashkenasi; Norbert Mueller; Thomas Riesbeck; Hans Joachim Eichler
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Analysis of laser drilling process for substrate by optical simulation rectified at the ablation rate
Author(s): Katsuichi Ukita; Yasuhiro Mizutnai; Daisuke Yokohagi; Koki Ichihashi; Hidehiko Karasaki
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Advanced laser optics for laser material processing
Author(s): Keiji Ebata; Keiji Fuse; Takayuki Hirai; Kenichi Kurisu
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Selection of parameters on laser cutting mild steel plates taking account of some manufacturing purposes
Author(s): Hiroshi Asano; Jippei Suzuki; Hiroshi Kawakami; Hiroshi Eguchi
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Separating and structuring of brittle material by the use of laser radiation
Author(s): Silvio Georgi
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High-power and high-beam-quality diode-pumped solid state Nd:YAG laser
Author(s): Masaki Seguchi; Shuichi Fujikawa; Tetsuo Kojima; Keisuke Furuta; Yushi Takenaka; Jun-ichi Nishimae
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Melt expulsion by a coaxial gas jet in trepanning of CMSX-4 with microsecond Nd:YAG laser radiation
Author(s): Jens Willach; Ernst Wolfgang Kreutz; Jan Michel; Markus Niessen; Wolfgang Schulz; Reinhart Poprawe
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Nano-particle laser removal from silicon wafers
Author(s): J. M. Lee; S. H. Cho; T. H. Kim; Jin-Goo Park; Ahmed A. Busnaina
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Sub-micron sized periodic 3D surface structures fabricated by femtosecond UV laser pulses
Author(s): Jan-Hendrik Klein-Wiele; Peter Simon
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Ultrafast laser nanofabrication assisted with near-field scanning optical microscopy
Author(s): Weijie Wang; Ming Hui Hong; Dongjiang Wu; Yeow Whatt Goh; Y. Lin; P. Luo; Boris S. Luk'yanchuk; Yongfeng Lu; Tow Chong Chong
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Laser induced sub-micron changes of the chemical composition of SiO<sub>2</sub>-based optical fibers
Author(s): Michael A. Fokine
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Laser induced index change and its applications to optical devices
Author(s): Isabelle F. Riant
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Fabrication of volume grating induced in silica glass by femtosecond laser
Author(s): Kazuhiro Yamada; Wataru Watanabe; Kenji Kintaka; Junji Nishii; Kazuyoshi Itoh
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Ultra short laser pulse modification of wave guides
Author(s): Arkadi Rosenfeld; David Ashkenasi
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UV-laser assisted fabrication of dispersive structures in polymeric integrated-optical components
Author(s): Carsten Wochnowski; Simeon Metev; Krassimira Meteva; Frank Vollertsen
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Femtosecond direct-write waveguide fabrication in optical materials
Author(s): Arnaud Zoubir; Martin C. Richardson; Clara Rivero; Cedric Lopez; Kathleen A. Richardson; Nicolas Ho; Real Vallee
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Preparation of channel waveguides with extremely thermally stabilized laser-induced gratings
Author(s): Hiroaki Nishiyama; Tomokazu Sano; Etsuji Ohmura; Isamu Miyamoto; Shin-ichi Matsumoto; Mitsunori Saito; Kenji Kintaka; Junji Nishii
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High-power UV laser machining of silicon wafers
Author(s): Tom M. Corboline; Edward C. Rea; Corey M. Dunsky
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High precision laser processing of sensitive materials by Microjet
Author(s): Ochelio D. Sibailly; Frank Ruediger Wagner; Laetitia Mayor; Bernold Richerzhagen
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Scribing characteristics of ceramics with Nd:YLF laser
Author(s): Y. Iwai; T. Mizuno; T. Arai; T. Honda; Ryuzo Tanaka; T. Takaoka
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Theoretical analysis of second harmonic characteristics generated by KTiOPO4 crystal
Author(s): Kazufumi Nomura; Etsuji Ohmura; Alexander Horn; Isamu Miyamoto
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Influence of temporal pulse shape on second harmonic generation
Author(s): Etsuji Ohmura; Kazufumi Nomura; Isamu Miyamoto
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New device of alarm and control of dewfall for laser optics
Author(s): Zhaogu Cheng; Rufeng Li
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