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PROCEEDINGS VOLUME 4985

MOEMS Display and Imaging Systems
Editor(s): Hakan Urey
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Volume Details

Volume Number: 4985
Date Published: 20 January 2003
Softcover: 31 papers (348) pages
ISBN: 9780819447852

Table of Contents
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Optics and MEMS: a new opportunity for innovation
Author(s): Gary K. Starkweather
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Emerging digital micromirror device (DMD) applications
Author(s): Dana Dudley; Walter M. Duncan; John Slaughter
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Design and fabrication of microlens and spatial filter array by self-alignment
Author(s): Ren Yang; Kin Foong Chan; Zhiqiang Feng; Wenhui Mei
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High-resolution maskless lithography by the integration of micro-optics and point array technique
Author(s): Kin Foong Chan; Zhiqiang Feng; Ren Yang; Wenhui Mei
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Flexible micromirror linear array for high-resolution projection display
Author(s): Francis Picard; Celine Campillo; Timothy D. Pope; Keith K. Niall; Philipp W. Peppler; Carl Larouche; Hubert Jerominek
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Miniature high-fidelity displays using a biaxial MEMS scanning mirror
Author(s): Mark O. Freeman
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Nonlinear dynamics and control of a dual-capacitively driven torsional MEMS scanning mirror
Author(s): Margaret K. Brown; Gary Mansouri
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Improved layout for a resonant 2D micro scanning mirror with low operation voltages
Author(s): Alexander Wolter; Harald Schenk; Eric Gaumont; Hubert Lakner
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Single two-axis micromachined tilt mirror and linear array
Author(s): Michael R. Whitley; Jay A. Hammer; Zhili Hao; Brian Wingfield; Luis Nelson
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MEMS electromagnetic optical scanner for a commercial laser scanning microscope
Author(s): Hiroshi Miyajima
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MEMS raster correction scanner for SXGA resolution retinal scanning display
Author(s): Hakan Urey; Frank A. DeWitt; Peggy Ann Lopez; Jason Tauscher
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Magnetic actuation for MEMS scanners for retinal scanning displays
Author(s): Jun Yan; Selso Luanava; Vincenzo Casasanta
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Driver ASIC for synchronized excitation of resonant micromirrors
Author(s): Kai-Uwe Roscher; Uwe Fakesch; Harald Schenk; Hubert K. Lakner; Dirk Schlebusch
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Interferometric modulation: MOEMS as an enabling technology for high-performance reflective displays
Author(s): Mark W. Miles
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Micromachined acoustic sensor array with diffraction-based optical interferometric detection
Author(s): Wook Lee; Neal Hall; F. Levent Degertekin
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Assembly and testing of a grating-based electrostatic comb-drive visible microspectrometer
Author(s): Larry Christopher Heaton; Jeff A. Fisher; Michael S. Kranz
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System simulation of a GLV projection system
Author(s): Timothy P. Kurzweg; Jose A. Martinez; Steven Peter Levitan; Abhijit J. Davare; Mark Kahrs; Donald M. Chiarulli
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Characterization of spatial light modulators for microlithography
Author(s): Peter Duerr; Ulrike Dauderstaedt; Detlef Kunze; Marine Auvert; Thor Bakke; Harald Schenk; Hubert Lakner
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Operation of spatial light modulators in DUV light
Author(s): Ulrike Dauderstaedt; Peter Duerr; Mathias Krellmann; Tord Karlin; Uldis Berzinsh; Lars Leonardsson; Horst Wendrock
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Technological approaches for fabrication of elastomer-based spatial light modulators
Author(s): Serhat Sakarya; Gleb V. Vdovin; Pasqualina M. Sarro
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Off-axis variable focus and aberration control mirrors
Author(s): Phillip A. Himmer; David L. Dickensheets
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