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Proceedings of SPIE Volume 4984

Micromachining Technology for Micro-Optics and Nano-Optics
Editor(s): Eric G. Johnson
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Volume Details

Volume Number: 4984
Date Published: 17 January 2003
Softcover: 30 papers (304) pages
ISBN: 9780819447845

Table of Contents
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Additive lithography for refractive micro-optics
Author(s): Mahesh Pitchumani; Heidi Hockel; Jeremiah Brown; Waleed S. Mohammed; Eric G. Johnson
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Zone-plate array lithography (ZPAL): a maskless fast-turnaround system for micro-optic device fabrication
Author(s): Rajesh Menon; Dario Gil; David J. D. Carter; Amil Patel; Henry I. Smith
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Hybrid phase and amplitude modulation proximity printing mask fabricated on DLC and SiO2 substrates
Author(s): Luiz Goncalves Neto; Giuseppe Antonio Cirino; Ronaldo Domingues Mansano; Patricia S.P. Cardona; Patrick Verdonck
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Applications of spin-on glass for waveguide and micro-optical systems
Author(s): Patrick J. Moyer; Ramazan Benrashid; Pascal Dupriez; Faramarz Farahi
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UV-assisted rotational molding of microstructures using a conventional flexographic printing machine
Author(s): Lars Rene Lindvold; Jan Stensborg; Torben P. Rasmussen
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Replication of micro-optical elements in hybrid organic-inorganic materials
Author(s): Patrice A. Topart; Rene M. Beaulieu; Sebastien Leclair; Michel Poirier; Jeremy Pelletier; M. Bernier; Hubert Jerominek
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Replication of micro-optical components by UV-molding process
Author(s): Seok-min Kim; Dongmook Kim; Shinill Kang; Suhoo Ahn
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Fabrication of arbitrary three-dimensional photonic crystals by four-plane-wave interference
Author(s): Yuzo Ono; Kiyokatsu Ikemoto
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Nanofabrication of integrated diffractive optical elements
Author(s): Laurent Vaissie; Waleed Mohammed; Eric G. Johnson
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Novel fabrication methods for 2D photonic crystals in silicon slab waveguides
Author(s): Dennis W. Prather; Janusz A. Murakowski; Sriram Venkataraman; Yao Peng; Anita Balcha; Thomas Dillon; David Pustai
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Fabrication of infrared antennas using electron-beam lithography
Author(s): Michael A. Gritz; Francisco J. Gonzalez; Glenn D. Boreman
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Overview of grey-scale photolithography for micro-optical elements fabrication
Author(s): Zheng Cui; Jinglei Du; Yongkang Guo
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Novel type of micromachined retroreflector
Author(s): Axel Lundvall; Tomas Lindstroem; Fredrik K. Nikolajeff
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New fabrication of highly dense electromagnetic field microactuators and micro-optics for MOEMS applications
Author(s): Sheng-Chih Shen; Cheng-Tang Pan; Hwai-Pwu Chou; Ying-Ruel Huang
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Optical performance of a diode laser circularizer microlens
Author(s): Randy F. Crouse; J. Larry Pezzaniti; Art Caneer
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Nanofabrication and diffractive and microrefractive optics element applications in compact sensor systems
Author(s): Boris I. Constantinov
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Direct-write optical waveguides
Author(s): Michael N. Nguyen; Robert L. Parkhill; Kenneth H. Church
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Optical filter design with holographic photopolymer materials and selectively buried ion exchange optical waveguides
Author(s): Raymond K. Kostuk; Atsushi Sato; James Carriere; Jesse Frantz; Miodrag Scepanovic
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Space-variant polarization-state manipulation with computer-generated subwavelength gratings
Author(s): Erez Hasman; Vladimir Kleiner; Gabriel Biener; Avi Niv
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Phase scanning in ruling engine for the fabrication of subnanometer varied line-space diffraction gratings
Author(s): Lun Shi
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Three-dimensional structuring of glass by ultrashort laser pulses
Author(s): Stefan Nolte; Matthias Will; Jonas Burghoff; Andreas Tuennermann
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Time-tailored laser pulses: a new approach for laser micromachining and microfabrication processing
Author(s): Michelle Lynn Stock; Heinrich Endert; Rajesh S. Patel
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High-speed gray-scale laser direct-write technology for micro-optic fabrication
Author(s): John M. Tamkin; Brett Bagwell; Bradley T. Kimbrough; Ghassan Jabbour; Michael R. Descour
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Laser ablation patterning of layered systems: a method to fabricate dielectric masks and diffractive phase elements
Author(s): Juergen Ihlemann; Dirk Schaefer
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Direct writing of 40-nm features inside fused silica glass with oscillator ultrafast lasers
Author(s): Sheng Wu; Zhaozhi Wan
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Microfabrication of controlled angle diffusers used for resolution enhancement in microlithography
Author(s): Marc D. Himel; Menelaos K. Poutous; Jared D. Stack; Jerry L. Leonard
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Very deep fused silica etching
Author(s): Ingo Steingoetter; Axel Grosse; Henning Fouckhardt
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Novel approaches to maximizing micromachining throughput by minimizing positioner inertia, servo following errors, and unobservable resonant responses
Author(s): Scott Jordan
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Plastic micro-optical components with LIGA technology
Author(s): Laurence Singleton; Peter Detemple; I. Frese; Thomas Klotzbuecher; Hans-Dieter Bauer
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Novel method of fabrication of diffractive mocrolens arrays
Author(s): Sihai Chen; Xinjian Yi; Hong Ma; Guang Huang; Hongchen Wang; Tao Xiong; Xiong Li; Xiongwei Li
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