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Proceedings of SPIE Volume 4977

Photon Processing in Microelectronics and Photonics II
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Volume Details

Volume Number: 4977
Date Published: 18 July 2003
Softcover: 72 papers (706) pages
ISBN: 9780819447777

Table of Contents
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Surface analysis by laser-induced desorption time-of-flight mass spectrometry
Author(s): Susan Davis Allen; Jinmei Fu; Yamini Surapaneni; Adam J. Hopkins; Phillip Davis
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Dynamics study of multiwavelength excitation process using F2 and KrF excimer lasers
Author(s): Kotaro Obata; Koji Sugioka; Takahiro Inamura; Hiroshi Takai; Koichi Toyoda; Katsumi Midorikawa
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Autonomous production cell for um- and nm-processing
Author(s): Ernst-Wolfgang Kreutz; Lars Boeske; Stefan Kaierle; Stefan Mann; Juergen Ortmann; Jens Willach
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Novel beam delivery system for microvia drilling using holographic and refractive optics
Author(s): Todd E. Lizotte; Orest P. Ohar
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New fiber lasers with temporal pulse shaping of nanosecond pulses for tailoring flexible laser material processing
Author(s): Michelle Lynn Stock; Heinrich Endert; Rajesh S. Patel
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High-brightness solid state laser systems with fiber phase conjugate mirrors for micro material processing
Author(s): Thomas Riesbeck; Hans Joachim Eichler; Enrico Risse; Alexander Binder; David Ashkenasi; Gerhard J. Mueller
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New developments in laser processing of silicon devices
Author(s): Manfred Dirscherl; Gerd Esser; Stefan Kaufmann; Manfred Geiger
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High-speed cutting of thin materials with a Q-switched laser in a water-jet versus conventional laser cutting with a free running laser
Author(s): Frank Ruediger Wagner; Christophe Boillat; Jean-Marie Buchilly; Akos Spiegel; Nandor Vago; Bernold Richerzhagen
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Water jet guided laser versus saw dicing
Author(s): Natalia M. Dushkina; Frank Ruediger Wagner; Christophe Boillat; Jean-Marie Buchilly; Bernold Richerzhagen
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Laser bending of silicon
Author(s): Udo Loeschner; Horst Exner; Eva Gaertner; Joachim Fruehauf
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Three-dimensional recording by femtosecond pulses in dielectrics
Author(s): Saulius Juodkazis; Toshiaki Kondo; Vygantas Mizeikis; Shigeki Matsuo; Hiroyuki Murata; Hiroaki Misawa
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Ultrashort-pulse laser micromachining testbed development
Author(s): Jeff G. Thomas; J. T. Schriempf; Randy Gilmore
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Femtosecond laser machining of steel
Author(s): Michelle L. Griffith; Mark T. Ensz; Daryl E. Reckaway
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Femtosecond laser processing tailored for biomedical materials and laser power delivery through optical fibers
Author(s): Minoru Obara; Kazue Ozono; Makoto Kanai; Hitoshi Sekita; Peter A. Atanasov
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Femtosecond pulsed laser induced phase transition in iron
Author(s): Tomokazu Sano; Hiroaki Mori; Etsuji Ohmura; Isamu Miyamoto
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Laser-assisted nanofabrication
Author(s): Ming Hui Hong; Su Mei Huang; Boris S. Luk'yanchuk; Zeng Bo Wang; Yong Feng Lu; Tow Chong Chong
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Laser-promoted nanostructure evolution and nanoparticle alignment
Author(s): Anthony J. Pedraza; Jason D Fowlkes; Stephen Jesse; Yingfeng Guan
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Holographic fabrication of micron structures using interfered femtosecond laser beams split by diffractive optics
Author(s): Yoshiki Nakata; Tatsuo Okada; Mitsuo Maeda
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Preparation of thin film GaAs on glass by pulsed-laser deposition
Author(s): Bruno Ullrich; Artur Erlacher; Satoshi Yano; Raoul Schroeder; Timofey G. Gerasimov; Heather J. Haugan
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Laser micromachining in the microelectronics industry: emerging applications
Author(s): Pradeep K. Subrahmanyan
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CAD/CAM software for an industrial laser manufacturing tool
Author(s): Ines Stassen Boehlen; Jim Fieret; Andrew S. Holmes; Kin Wei Lee
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Micromachining of liquid crystal polymer film with frequency converted diode-pumped Nd:YVO4 laser
Author(s): Mingwei Li; Ken Hix; Larry R. Dosser; Kevin Hartke; Jim Blackshire
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Femtosecond laser micromachining of silicon for MEMS
Author(s): Mohammed El-Bandrawy; Mool C. Gupta
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Subsurface 3D structures by laser-induced modification of the optical properties of transparent materials
Author(s): David Ashkenasi; Hans-Juergen Hoffmann; Dieter Krause; Gerhard J. Mueller
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Fabrication of diffractive optical elements by ArF-laser ablation of fused silica
Author(s): Jozsef Bekesi; Dirk Schaefer; Juergen Ihlemann; Peter Simon
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Laser processing of photonic and microelectronic components using multiple visible and UV wavelength source
Author(s): Elizabeth K. Illy; Graham Rutterford; Martyn R. H. Knowles
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Subsurface photorefractive effect in LiNbO3 under high-power 248 nm laser irradiation
Author(s): Alexander M. Razhev; Sergei N. Bagayev; Iosif B. Barkan; Dmitry V. Petrov; Andrey A. Zhupikov
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Single step direct-write photomask made from bimetallic Bi/In thermal resist
Author(s): Glenn H. Chapman; Richard Yuqiang Tu
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Surface microfabrication of silica glass by excimer laser irradiation of toluene solution
Author(s): Hiroyuki Niino; Yoshimi Yasui; Ximing Ding; Aiko Narazaki; Tadatake Sato; Yoshizo Kawaguchi; Akira Yabe
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Diode-pumped TEM00 mode solid state lasers and their micromachining applications
Author(s): Norman Hodgson; Mingwei Li; Andy Held; Arnd K. Krueger
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High-quality laser microdrilling of metals and ceramics with maximum aspect ratio
Author(s): Alexander Binder; Thomas Metzger; Holger Kern; David Ashkenasi; Gerhard J. Mueller; Thomas Riesbeck; Hans Joachim Eichler
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Laser-based manufacturing of high-accuracy electrodes into brittle materials
Author(s): Christian Kulik; Andreas Ostendorf; Frank Meyer
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3D microstructuring inside photosensitive glass by use of a femtosecond laser for lab-on-chip applications
Author(s): Ya Cheng; Koji Sugioka; Masashi Masuda; Katsumi Midorikawa; Masako Kawachi; Kazuhiko Shihoyama; Koichi Toyoda
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Fabrication of microstructures in FOTURAN using excimer and femtosecond lasers
Author(s): Joohan Kim; Halil Berberoglu; Xianfan Xu
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Thermal and fluid processes of a thin melt zone during femtosecond laser ablation of glass
Author(s): Adela Ben-Yakar; Anthony Harkin; Jacqueline Ashmore; Mengyan Shen; Eric Mazur; Robert L. Byer; Howard A. Stone
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Direct laser-assisted processing of polymers for microfluidic and micro-optical applications
Author(s): Wilhelm Pfleging; Johannes Boehm; Steffi Finke; E. Gaganidze; Thomas Hanemann; Roland Heidinger; Karsten Litfin
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Modeling electrical characteristics of laser tuned silicon microdevices
Author(s): Michel Meunier; Mathieu Ducharme; Jean-Sebastien Bernier
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Synthesis of metal oxide nanoparticles by laser ablation: nanoparticle-assisted deposition of nanostructured ZnO
Author(s): Tatsuo Okada; Mitsuhisa Kawakami; Agung Budi Hartanto; Yoshiki Nakata
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Effect of VUV F2 laser irradiation on fluoride crystal
Author(s): Yoshizo Kawaguchi; Aiko Narazaki; Tadatake Sato; Hiroyuki Niino
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Semiconductor laser crystallization of a-Si:H
Author(s): B. K. Nayak; J. McLeskey; A. Selvan; B. Eaton; Mool C. Gupta; R. Romero; G. Ganguly
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Femtosecond laser interferometric processing of Nd:GGG planar optical waveguide
Author(s): Ken Oi; Minoru Obara; Tetsumi Sumiyoshi
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Femtosecond laser ablation processing of x-cut LiNbO3 substrates for optical communication devices
Author(s): Riichi Kitano; Kazue Ozono; Minoru Obara; Hiroyuki Tsuda
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Optical waveguide fabrication inside transparent materials by use of plasma channeling induced by tailored femtosecond laser
Author(s): Masanao Kamata; Kosuke Ohta; Minoru Obara; Hiroshi Sekita
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F2-laser micropatterning of chrome-coated CaF2 for vacuum-ultraviolet masks
Author(s): Andrew Yick; Jianzhao Li; Peter R. Herman
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Direct laser marking on ROM media for identification
Author(s): Sumio Nakahara; Yoshihiro Okino; Masaaki Takita; Shigeyoshi Hisada; Takeyoshi Fujita
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Heat-affected zone of metals ablated with femtosecond laser pulses
Author(s): Yoichi Hirayama; Minoru Obara
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Excimer and femtosecond pulsed laser induced forward transfer process of metal thin film
Author(s): Hirokazu Yamada; Tomokazu Sano; Etsuji Ohmura; Isamu Miyamoto
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Spontaneous UV radiation source based on pulsed discharge in xenon
Author(s): Mikhail I. Lomaev; D. V. Rybka; Victor F. Tarasenko; A. A. Lisenko
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Opportunities and challenges for laser technology in microelectronics and photonics
Author(s): Willem Hoving
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Laser beam welding of thermoplastics
Author(s): Ulrich A. Russek; A. Palmen; H. Staub; J. Poehler; C. Wenzlau; G. Otto; M. Poggel; A. Koeppe; H. Kind
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Laser beam soldering: an attractive alternative to conventional soldering technologies
Author(s): Luedger Bosse; Andreas Koglin; Alexander M. Olowinsky; Volker Kolauch; Michael Nover
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Out of the SHADOW: watch parts in the spotlight -- laser beam microwelding of delicate watch components
Author(s): Thorsten Kramer; Alexander M. Olowinsky
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Process spread reduction of laser microspot welding of thin copper parts using real-time control
Author(s): Antoon Blom; Par Dunias; Piet van Engen; Willem Hoving; Janneke de Kramer
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3D-MID and process monitoring for microjoining applications
Author(s): Andreas Ostendorf; Wilhelm Specker; Matthias Stallmach; Jeihad Zeadan
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Laser droplet weld: an innovative joining technology opens new application possibilities
Author(s): Bernd Jahrsdoerfer; Gerd Esser; Manfred Geiger; Edvard Govekar
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Application of melt ejection criterion in simulation of micromachining with laser
Author(s): Vladimir V. Semak; J. T. Schriempf; G. A. Knorovsky; D. O. MacCallum
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Laser processing of ceramic and crystalline wafer substrates for microelectronic applications
Author(s): David Ashkenasi; Alexander Binder; Houssam Jaber; Holger Kern; Norbert Mueller; Andreas Ziegert
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Precision drilling of fused silica with 157-nm excimer laser radiation
Author(s): Thorsten Temme; Andreas Ostendorf; Christian Kulik; Klaus Meyer
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High-speed singulation of electronic packages using a frequency-doubled Nd:YAG laser in a water jet and realization of a 200-W green laser
Author(s): Frank Ruediger Wagner; Wentao Hu; Akos Spiegel; Nandor Vago; Bernold Richerzhagen
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Optical interconnection optimization based on a classical approach
Author(s): Vadim P. Veiko; Nikolay B. Voznesensky; Andrew Petrov; Valery F. Pashin; Natalya N. Voznesenskaya; Simeon M. Metev; Carsten Wochnowski
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Laser metallization for microelectronics and bio-applications
Author(s): Lucien Diego Laude; Konstantin Kolev; Claudio Dicara; Catherine Dupas-Bruzek
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Excimer laser lift-off for packaging and integration of GaN-based light-emitting devices
Author(s): Timothy D. Sands
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Laser direct-write of metal patterns for interconnects and antennas
Author(s): Alberto Pique; Craig B. Arnold; Bhanu Pratap; Ray C. Y. Auyeung; Heung Soo Kim; David W. Weir
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Femtosecond laser ablation of gold in aqueous biocompatible solutions to produce colloidal gold nanoparticles
Author(s): Andrei V. Kabashin; Michel Meunier; John H. T. Luong
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Fullerene synthesis from carbon powder using CW-CO2 laser
Author(s): Seisuke Kano; Masamichi Kohno; Kaname Sakiyama; Shinya Sasaki; Hirofumi Shimura
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Optical patterning of individual organic/inorganic nanoparticles in solution at ambient temperature
Author(s): Syoji Ito; Hiroyuki Yoshikawa; Hiroshi M. Masuhara
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Porous nanostructured layers on germanium produced by laser optical breakdown processing
Author(s): Andrei V. Kabashin; Vincent-Gabriel Pilon Marien; D.-Q. Yang; F. Magny; Michel Meunier
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Resonance energy of surface plasmon of nickel nanoparticles in silica glasses
Author(s): Hiroshi Amekura; Yoshihiko Takeda; Hideaki Kitazawa; Naoki Kishimoto
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In situ optical absorption spectroscopy, incandencence, and light scattering characterization of single-wall carbon nanotube synthesis by the laser vaporization technique
Author(s): Alexander A. Puretzky; David B. Geohegan; C. Henrik Schittenhelm
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Synthesis of multifunctional single-wall carbon nanotube-amorphous diamond thin film composites
Author(s): David B. Geohegan; C. Henrik Schittenhelm; Alexander A. Puretzky; M. J. Lance; Gerald E. Jellison; Philip F. Britt
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Formation of periodic structures on glass with laser irradiation
Author(s): Ying Zi Peng; Cheng Wu An; Dong Jiang Wu; Ming Hui Hong; Yong Feng Lu; Tow Chong Chong
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Iron-carbon nanocomposite obtained by laser-induced gas-phase reactions
Author(s): Florian V. Dumitrache; Ion G. Morjan; Rodica Alexandrescu; B. Rand; Victor Ciupina; G. Prodan; Ion N. Voicu; Ioan C. Sandu; I. Soare; M. Ploscaru; C. Fleaca; R. Brydson; Eugen Vasile
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