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PROCEEDINGS VOLUME 4936

Nano- and Microtechnology: Materials, Processes, Packaging, and Systems
Editor(s): Dinesh K. Sood; Ajay P. Malshe; Ryutaro Maeda
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Volume Details

Volume Number: 4936
Date Published: 13 November 2002
Softcover: 57 papers (488) pages
ISBN: 9780819447319

Table of Contents
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Micromachined magnetometer-accelerometer for navigation systems
Author(s): Ji-Man Cho; Kyung Soo Kim; Seungdo An; HoJoon Park; Ghun Hahm
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Fabrication and characterization of resonant SOI micromechanical silicon sensors based on DRIE micromachining, freestanding release process and silicon direct bonding
Author(s): Olivier Gigan; Hua Chen; Olivier Robert; Stephane Renard; Frederic Marty
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Modeling and control of a micro magnetic bearing
Author(s): Lijiang Qin; Ronald B. Zmood; Paul E. Jones; Dinesh K. Sood
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Resonant-type microscanners fabricated by hybrid PZT deposition process on SOI wafers
Author(s): Jiunn-Jye Tsaur; Zhanjie Wang; Lulu Zhang; Masaaki Ichiki; Ryutaro Maeda; Tadatomo Suga
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Study for piezoelectricity characterization of PZT actuators deposited by RF magnetron sputtering for MEMS
Author(s): Kazuyoshi Tsuchiya; Toshiaki Kitagawa; Eiji Nakamachi
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Fabrication of microfluidic device (diffuser or mixer) using aerosol deposition method
Author(s): Jun Akedo; Maxim Lebedev
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New magnetic viscous damper with intelligent or smart fluid for the next generation
Author(s): Kunio Shimada; Hideto Kanno; Junji Ogawa; Shigemitsu Syuchi; Shinichi Kamiyama
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Nanobioceramics: synthesis, characterization, and applications
Author(s): Khiam Aik Khor; Philip Cheang; Hua Li; R. Kumar
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Innovative machining method on CVD diamond film
Author(s): Hung-Yin Tsai; Chih-Yung Cheng; Pin-Yin Liu; Tung-Chuan Wu
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Ba(Mg1/3Ta2/3)O3 substrate for BaxSr1-xTiO3 thin film used for phase shifter
Author(s): Chunlin Fu; Hongwei Chen; Chungen Huang; Jiang Hu; Wencheng Hu; Wenyuan Li; Chuanren Yang
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Characterization of TiNi, TiNiPd thin films by ion beam analysis techniques
Author(s): Vijaya Kumar Mathe; Dinesh K. Sood; Nick Dytlewski; Peter J. Evans
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Ti-Mo and Mo-W mixed oxides for gas sensing applications
Author(s): Elisabetta Comini; Giorgio Sberveglieri; Kosmas Galatsis; Wojtek Wlodarski
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High placement and leveling accuracy flip-chip assembly for MOEMS
Author(s): Christopher Quirke; Gilbert Lecarpentier
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Development of a micro hot embossing process for fabricating micro optical devices
Author(s): Xue Chuan Shan; Ryutaro Maeda; Yoichi Murakoshi
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Three-dimensional polymer MEMS with functionalized carbon nanotubes by microstereolithography
Author(s): Vijay K. Varadan; Jining Xie
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Study of hot embossed microchannels using confocal microscopy
Author(s): Irina Simdikova; Armin Kueper; Igor Sbarski; Erol C. Harvey; Jason P. Hayes
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A world-to-chip socket for microfluidic prototype development
Author(s): Zhen Yang; Ryutaro Maeda
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Novel fabrication method for 3D microstructures using surface-activated bonding and its application to micromechanical parts
Author(s): Takayuki Yamada; Mutsuya Takahashi; Takashi Ozawa; Satoshi Tawara; Takayuki Goto
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Novel low-cost fabrication of microneedle arrays for drug delivery applications
Author(s): Pei Ying Joyce Tan; Yuan Xu; Yong Tien Chew; Zongli Li; Yen Peng Kong
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Characterization of lithographically patterned monofilms by preferential adsorption of dye molecules
Author(s): Joerg Reichert; Johann Michael Koehler
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Nanometer-accurate grating fabrication with scanning beam interference lithography
Author(s): Carl G. Chen; Paul T. Konkola; Ralf K. Heilmann; Chulmin Joo; Mark L. Schattenburg
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Patterning of thin films of TiNi deposited on silicon substrate
Author(s): Vijaya Kumar Mathe; Dinesh K. Sood; Jason P. Hayes
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Real-time monitoring of excimer laser ablation of multilayer thin films by detecting acoustic emission
Author(s): Guangyu Liu; Erol C. Harvey; Dario J. Toncich; Jason P. Hayes; Choon K. Ng; Hengyi Jin; Matthew Solomon
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Fabrication of microstructure using electrochemical etching in hydrofluoric acid
Author(s): Jung-Yan Huang; Hung-Yin Tsai; Chih-Hung Wu; Chia-Ching Su; Chin-Hon Fan
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Modification of photoresist profile in lift-off process for MEMS application
Author(s): Ranganathan Nagarajan; Rakesh Kumar
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Multiple-degree-of-freedom compliant mechanism possessing nearly uncoupled dynamics: experimental findings
Author(s): Daniel C. Handley; W. J. Zhang; Tien-Fu Lu; Wei Zhao
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Investigation of ultra-low-load nanoindentation for the patterning of nanostructures
Author(s): Curtis Taylor; Robin Prince; Ajay P. Malshe; Laura Riester; Gregory J. Salamo; Seong Oh Cho
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Large-scale synthesis of single- and multiwalled carbon nanotubes by microwave CVD
Author(s): Vijay K. Varadan; Jining Xie
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Nickel nanoparticles dispersed in SiO2 fabricated by high-flux negative-ion implantation of 60 keV
Author(s): Hiroshi Amekura; Hideaki Kitazawa; Takashi Mochiku; Naoki Umeda; Yoshihiko Takeda; Naoki Kishimoto
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Single ion implantation in the quantum computer construction project
Author(s): David N. Jamieson; Felicity Splatt; Chris I. Pakes; Changyi Yang; Paul G. Spizzirri; Steven D. Prawer; Fay E. Stanley; Victor Chan; Andrew S. Dzurak; Robert G. Clark
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New technique for the manipulation of nanostructured metal-oxide properties
Author(s): Elisabetta Comini; Giorgio Sberveglieri
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Connection of nanostructures using nanowires grown by a self-field-emission process
Author(s): John T. L. Thong; Chin Hin Oon; Guo Feng You; Kuan Song Yeong
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Two-channel “star” fiber optic network for quantum cryptography
Author(s): Insoo S. Kim; Vladimir E. Strigalev
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Experimental investigation of the effect of the MPL (magnetic polishing liquid) on surface finishing
Author(s): Kunio Shimada; Yongbo Wu; Yat Choy Wong; Toyohisa Fujita; Toshio Miyazaki; Atsushi Shibayama
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An integrated biochip design and fabrication
Author(s): Zhan Zhao; Dafu Cui; Shanhong Xia; Zheng Cui
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Investigation of Pt/Ga2O3-ZnO/SiC Schottky-diode-based hydrocarbon gas sensors
Author(s): Adrian Trinchi; Yong Xing Li; Wojtek Wlodarski; Saulius Kaciulis; Luca Pandolfi; Sesto Viticoli
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Comparison between mechanical method and chemical-assisted mechanical method for CVD diamond film polishing
Author(s): Chun-Hao Hsieh; Hung-Yin Tsai; Hua-Tang Lai; Hung-Yi Lin
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Delineation of MEMS microstructures in silicon using CF4/O2 gas mixtures in reactive ion etching
Author(s): Ashok K. Paul; Ashok K. Dimri; Ram P. Bajpai
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Thick PZT film/stainless steel actuator fabricated by aerosol deposition method: fatigue property
Author(s): Maxim Lebedev; Jun Akedo
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Electrochemical deposition of Al on semiconductors
Author(s): Tinatin Laperashvili; Manana Khachidze; Iliy Imerlishvili
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Optimization of Au mask fabrication processes for LIGA applications
Author(s): Xue Chuan Shan; Ryutaro Maeda; Tsuyoshi Ikehara; H. Mekaru; T. Hattori
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Microfabrication of thick and bulk PZT materials for piezoelectric actuator
Author(s): Sung Ho Lee; Ryutaro Maeda; Masayoshi Esashi
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LCVD-grown microcarbon rod for MEMS applications: a study on the Raman spectroscopic characterization
Author(s): Jayaraman Senthil Selvan; Sungho Jeong
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Design on MBE material structure of GaAs-based RTD
Author(s): Wei-Lian Guo; Hui-Lai Liang; Ping-Juan Niu; Shi-Lin Zhang
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Development of position sensors for macro- and microelectronic devices
Author(s): Alan L. Harvey; Liquian Qin; Ashraf Kadri; Ron Zmood
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Capacitive microsensor for monitoring the deterioration of automobile engine oil
Author(s): Daesuk Na; Sunghyun Kim; Sekwang Park
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Selective semiconductor gas sensor based on surface photovoltage
Author(s): Guido Faglia; Camilla Baratto; Elisabetta Comini; Giorgio Sberveglieri
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Effect of argon gas pressure and substrate temperature on magnetic properties of magnetron-sputtered SmCo thin films
Author(s): Yun H. Wang; Dinesh K. Sood; Muralihar K. Ghantasala
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Patterning of magnetron sputtered SmCo films by excimer laser ablation
Author(s): Yun H. Wang; Muralihar K. Ghantasala; Dinesh K. Sood; Erol C. Harvey
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NSF-EC workshop on nanomanufacturing and processing: a summary report
Author(s): Ranga Komanduri; Julie Chen; Ajay P. Malshe; Haris Doumanidis; K. P. Rajurkar
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A nanoscale soft-ionization membrane: a novel ionizer for ion mobility spectrometers for space applications
Author(s): Frank T. Hartley; Isik Kanik
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Fabrication and testing of nanomechanical <100> silicon beam structures using a scanning probe system
Author(s): Kumar R. Virwani; Ajay P. Malshe; W. F. Schmidt; Dinesh K. Sood
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Quantum models of Parrondo's games
Author(s): Adrian P. Flitney; Derek Abbott
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Microfabricated ionic conducting polymer film actuators for aqueous micromanipulation
Author(s): Wenli Zhou; Wen Jung Li
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A modular approach for development of miniature detection systems
Author(s): Shekhar Bhansali; Chong Hyuk Ahn; H. Thurman Henderson
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Nano-film assisted anodic bonding
Author(s): J. Wei; H. Xie; C. K. Wong; L. C. Lee
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Strategy towards fusion of nano and micro systems
Author(s): Isao Shimoyama
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