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Proceedings of SPIE Volume 4928

MEMS/MOEMS Technologies and Applications
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Volume Details

Volume Number: 4928
Date Published: 10 September 2002
Softcover: 46 papers (312) pages
ISBN: 9780819447173

Table of Contents
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Novel device of passive and fixed alignment of optical fiber using SU-8 photoresist
Author(s): Jingquan Liu; Bingchu Cai; Jun Zhu; Di Chen; Yigui Li; Jiliang Zhang; Guipu Ding; Xiaolin Zhao; Chunsheng Yang
Optical MEMS for high-end microspectrometers
Author(s): Rainer Riesenberg; Andreas Wuttig; Guenter Nitzsche; Bernd Harnisch
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Intelligent vision systems
Author(s): Natalie Clark; Upendra N. Singh
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Nano-stepper-driven optical shutter for applications in free-space micro-optics
Author(s): Justyna Zawadzka; Lijie Li; Anartz Unamuno; Deepak G. Uttamchandani
Microgripper for handling and assembly in MEMS produced by SU-8 technology
Author(s): Dragan Petrovic; Gordana Popovic; Tatjana Petrovic; Andreas Schneider; Ejaz Huq; Helmut Detter; Friedrich Franek
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Fabrication of 1.3-um Si-based MEMS tunable optical filter
Author(s): Yuhua Zuo; Changjun Huang; Buwen Cheng; Rongwei Mao; Liping Luo; Junhua Gao; Y. X. Bai; Liangchen Wang; Jinzhong Yu; Qiming Wang
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Fabrication of integrated microlens array mold and mold insert for mass production
Author(s): Ruey Fang Shyu; Feng-Tsai Weng; Chengtang Pan; Hsiharng Yang
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Excimer laser micromachining technology in biochip
Author(s): Tao Chen; Jiming Chen; Yu Zhang; Bohua Ying; Tao Jing; Tiechuan Zuo
Fabrication of reflective micromirror in micromechanical optical switches
Author(s): Wei Dong; Weiyou Chen; Han Yang; Long Zhang; Ping Ji; Wenbin Guo; Caixia Liu; Xindong Zhang; Dongming Sun; Cuiping Jia; Jianxuan Pan
Micro mobile robot system for inspection between pipes
Author(s): Faming Liu; Jiapin Chen; Jianghua Liu; Junshi Cheng; Chen Zhang
Designing, fabrication, and test of a MEMS colloid thruster
Author(s): Zhaoying Zhou; Jijun Xiong; Xiongying Ye; Xiaohao Wang; Yanyin Feng
Wafer lever packaging for gyroscope by Au/Si eutectic bonding
Author(s): Yong Ruan; Dacheng Zhang; Zhenchuan Yang; Xiang Wang; Xiaomei Yu
Important theory of array microjet based on MEMS
Author(s): Songmei Yuan; Zhaoying Zhou; Guohui Wang; Changgeng Liu
Pd/Ni bilayer electrochemical microactuator
Author(s): Jinyuan Yao; Guifu Ding; Ying Cao; Chunsheng Yang; Tianhui Shen
Microstructures of PMMA sheet fabricated by RIE
Author(s): Longwang Huang; Chunsheng Yang; Guifu Ding
Low-voltage micromachining-based scalable optical switch
Author(s): Junfeng Bao; Ye Yuan; Zhonghui Cao; Xiaodong Wu
Error analysis of micro strain gauge with a mechanical amplifier
Author(s): Zutao Liu; Qing-An Huang; Yanfeng Jiang
Capacitive rf MEMS switch with composite beam
Author(s): Min Miao; Zhiyong Xiao; Guoying Wu; Yilong Hao; Haixia Zhang
Design and simulation of a bulk micromachined relay with lateral contact
Author(s): Zhenchuan Yang; Zhihong Li; Yilong Hao; Guoying Wu
Simulation and optimization of dynamic passive valve micropump
Author(s): Weiping Zhang; Wenyuan Chen; Xiaomei Chen; Xiaosheng Wu; Zhengfu Xu
Structural design of novel low-actuation MEMS switches for X-band application
Author(s): Weibin Zheng; Qing-An Huang; Fu-Xiao Li

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