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PROCEEDINGS VOLUME 4830

Third International Symposium on Laser Precision Microfabrication
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Volume Details

Volume Number: 4830
Date Published: 19 February 2003
Softcover: 107 papers (614) pages
ISBN: 9780819446015

Table of Contents
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Overview of laser applications: the state of the art and the future trend
Author(s): Claude R. Phipps
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Challenge to advanced materials processing with lasers in Japan
Author(s): Isamu Miyamoto
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Oxidation state control of micro metal-oxide patterns produced by using laser-induced forward transfer technique
Author(s): Kousuke Komorita; Tomokazu Sano; Hirokazu Yamada; Isamu Miyamoto
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Laser structuring method for MID
Author(s): Masahide Muto; Yoshiyuki Uchinono; Masayuki Hirota; Toshiyuki Suzuki
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Laser adjustment of beryllium copper sheet using temperature gradient mechanism
Author(s): Kosaku Kitada; Nobuyuki Asahi
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Effects of wavelengths on processing indium tin oxide thin films using diode-pumped Nd:YLF laser
Author(s): Ryuzo Tanaka; T. Takaoka; H. Mizukami; T. Arai; Y. Iwai
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Micromachining of ITO film by LD-pumped SGH YAG laser
Author(s): Yasuhiro Okamoto; Yoshiyuki Uno; Yasuyuki Hirao
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Analysis on resin removal in laser drilling of printed circuit board
Author(s): Satoru Noguchi; Etsuji Ohmura; Isamu Miyamoto
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Microwelding of ultrathin metal foil using Yb-fiber laser
Author(s): Seo-jeong Park; Etsuji Ohmura; Isamu Miyamoto
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YAG laser microwelding of stainless steel and shape memory alloy
Author(s): Keisuke Uenishi; Masanori Seki; Takeshi Kunimasa; Masaya Takatsugu; Kojiro F. Kobayashi; Takeshi Ikeda; Akihiro Tsuboi
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Clearweld laser transmission welding of thermoplastic polymers: light transmission and color considerations
Author(s): Scott Hartley; Robert A. Sallavanti
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Study and control process in laser conduction welding for millisecond pulse duration range
Author(s): Laurent Berthe; Delphine Delage; Didier Lepretre; Leonard Bacinello; Wolfgang Knapp; Nicolas Dumont; Friedrich Durand
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Modeling and investigation of melt ejection dynamics for laser drilling with short pulses
Author(s): Andreas Ruf; Detlef Breitling; Peter Berger; Friedrich Dausinger; Helmut Huegel
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Thermal analysis and quality prediction of via hole drilled on Si device by short-pulse laser
Author(s): Kiyokazu Yasuda; Masahiro Yasuda; Kozo Fujimoto
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Precision microfabrication with Q-switched CO2 lasers
Author(s): Corey M. Dunsky; Hisashi Matsumoto
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Water-jet-guided laser processing
Author(s): Bernold Richerzhagen; Muneharu Kutsuna; Haruhiku Okada; Takeshi Ikeda
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Diffractive/refractive hybrid f-theta lens for laser drilling of multilayer printed circuit boards
Author(s): Keiji Fuse; Takeshi Okada; Keiji Ebata
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Hole drilling of glass-foam substrates with YAG laser
Author(s): Makoto Emori; Yoshikazu Yoshida; Hiroshi Ogura; Shuhei Ueda
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Microdrilling of PCB substrate using DPSS third-harmonic laser
Author(s): J. G. Kim; Won Seok Chang; Kyung Ku Yoon; Sungho Jeong; Bo Sung Shin; Kyung Hyun Whang
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Microscribing of ceramics by Nd:YLF laser
Author(s): Y. Iwai; T. Arai; T. Honda; Ryuzo Tanaka; T. Takaoka
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Laser ablation of GaN/sapphire structure for LED
Author(s): Hwee Ming Lam; MingHui Hong; Shu Yuan; Tow Chong Chong
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Diagnostics of particle dynamics during deposition of optically functional thin films by laser ablation
Author(s): Tatsuo Okada; Yoshiki Nakata; Mitsuo Maeda
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Laser ablation plume of FeSi2 alloy target studied by TOF mass and optical emission spectroscopies
Author(s): Aiko Narazaki; Tadatake Sato; Yoshizo Kawaguchi; Hiroyuki Niino
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Time-resolved monitoring of ZnO plume by ArF laser ablation: influence of surrounding gas
Author(s): Yoshizo Kawaguchi; Aiko Narazaki; Tadatake Sato; Hiroyuki Niino
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Thermal stimulation of laser processing of Si
Author(s): Naotada Okada; Ryuichi Togawa
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How to sensitively measure the rate of neutral free-radical production by photodeionization of negative ion beams
Author(s): Keiji Hayashi; Hiroshi Konno; Hideki Kojima; Makoto Minato; Takashi Oseki; Yasunori Kawamura; Kenji Kameko; Takuo Kanayama
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Ab initio molecular orbital characterization of some sources for laser-assisted radical beam epitaxy of group-III nitrides
Author(s): Takuo Kanayama; Toyohiro Shimizu; Hideki Kojima; Noriyoshi Omote; Sho Sunouchi; Keiji Hayashi
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Laser-induced melting in two-dimensional colloidal system
Author(s): Yoshihisa Enomoto; Masataka Sawa; Hidenori Itamoto
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Fabrication of 1-um patterns on fused silica plates by laser-induced backside wet etching (LIBWE)
Author(s): Ximing Ding; Yoshizo Kawaguchi; Hiroyuki Niino; Akira Yabe
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Laser-based technology of scanning near-field optical probe fabrication: study of kinetics and progress of measuring
Author(s): Vadim P. Veiko; Alexey I. Kalachev; Lev N. Kaporsky; Sergey A. Volkov; Nikolay B. Voznesensky
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Fabrication of microchannels by UV laser ablation
Author(s): Satoshi Takahashi; Yoshimasa Suzuki; Yoshikazu Yoshida
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Laser-assisted chemical vapor deposition of carbon for the growth of high-aspect-ratio microrods and direct writing of surface patterns
Author(s): Sung Ho Jeong; Jinbun Kim; Sunghoon Kim; Dongjun Lee
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Laser-induced forward transfer direct-write of miniature sensor and microbattery systems
Author(s): Alberto Pique; Craig B. Arnold; Ryan C. Wartena; David W. Weir; Bhanu Pratap; Karen E. Swider-Lyons; Richard A. Kant; Douglas B. Chrisey
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True 3D volumetric patterning of photostructurable glass using UV laser irradiation and variable exposure processing: fabrication of meso-scale devices
Author(s): Frank E. Livingston; Henry Helvajian
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Laser ablation for MEMS microfabrication on Si and Kapton substrates
Author(s): B. Lan; Ming Hui Hong; Kaidong D. Ye; Shi Xin Chen; Tow Chong Chong
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Nonlaminate microphotosterolithography using LCD live-motion mask
Author(s): Hideaki Nishino; Takashi Miyoshi; Yasuhiro Takaya; Satoru Takahashi
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Surface modification of titanium alloy using a Q-switched diode-pumped solid state laser at 355 nm
Author(s): Mingwei Li; NeShante Morris; Steven Mwenifumbo; Mark S. Keirstead; Wole Soboyejo
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Laser manipulation of bio/biomimetic materials
Author(s): Toru Takasone; Saulius Juodkazis; Shigeki Matsuo; Akira Yamaguchi; Keiji Sasaki; Jun-ichi Hotta; Hiroaki Misawa
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Toward nanoprocess applications with laser-cooled silicon atoms
Author(s): Hiroshi Kumagai; Yuichi Asakawa; Katsumi Midorikawa; Minoru Obara
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Laser-ablation-induced nanoparticles in water
Author(s): G. X. Chen; Ming Hui Hong; Xiao Hua Liu; W. J. Wang; Y. F. Lu; Tow Chong Chong
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Fabrication of well-defined silicon and titanium oxide nanoparticles by laser ablation
Author(s): Nobuhiro Aya; Seisuke Kano; Takafumi Seto; Makoto Hirasawa; Takaaki Orii; Kaname Sakiyama; Hirofumi Shimura
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Characteristics of electric devices made by direct nanoparticle spraying
Author(s): Eiichi Ozawa; Yuji Kawakami; Toshinobu Yoshida; Masaru Iwashina; Kazutoshi Takahashi
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Behavior of zinc oxide nanoparticles in pulsed-laser deposition
Author(s): Yoshiki Nakata; Agung Budi Hartanto; Mitsuhisa Kawakami; Tatsuo Okada; Mitsuo Maeda
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Preparation of polyperinaphthlenic organic semiconductor nanoparticles by excimer laser ablation and application of a few electronic devices
Author(s): Satoru Nishio; Kazuyuki Tamura; Jun Murata; Hirokuni Matsukawa; Junko Kitahara; Teruhiko Kan; Akiyoshi Matsuzaki; Nobuo Ando; Yukinori Hato
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Refractive index of SiO2 thin films deposited by pulsed-laser deposition with silicone targets for fabricating waveguide devices
Author(s): Masayuki Okoshi; Masaaki Kuramatsu; Hiromitsu Takao; Narumi Inoue
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Diamond-like carbon films by pulsed-laser deposition with additional laser irradiation to plume
Author(s): Tatsuya Shinozaki; Zhi Ying Chen; Toshihiko Ooie; Tetsuo Yano
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Deposition of LiNbO3 waveguide by pulsed-laser deposition
Author(s): Yoshiki Nakata; Soichiro Gunji; Youhei Shimizu; Tatsuo Okada; Mitsuo Maeda
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Decomposition of methylene blue with photocatalytic TiO2 thin films deposited by pulsed-laser deposition
Author(s): Masayuki Okoshi; Yusuke Kosuge; Narumi Inoue; Tsugito Yamashita
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Optical properties of ZnxCd1-xS mixed-crystal thin film produced by PLD
Author(s): Hisashi Sakai; Mahiko Watanabe; Ken Takiyama; Bruno Ullrich
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Development of multilayer ceramic capacitor by pulsed-laser deposition
Author(s): Satoshi Tsuyuguchi; S. Mustofa; Takao Araki; Minoru Nishida; Takanori Hino
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Optical properties of N-doped diamond-like carbon films synthesized by pulsed-laser deposition
Author(s): Zhi Ying Chen; Jian Ping Zhao; Tatsuya Shinozaki; Toshihiko Ooie; Tetsuo Yano
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300-W XeCl excimer laser annealing and sequential lateral solidification in low-temperature polysilicon technology
Author(s): Burkhard Fechner; Mark Schiwek; Hans-Jurgen Kahlert; Naoyuki Kobayashi
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Laser-induced shock wave removal of chemical-mechanical polishing slurries from silicon wafers
Author(s): J. M. Lee; S. H. Cho; J. G. Park; S. H. Lee; Y. P. Han; S. Y. Kim
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Physical mechanisms of liquid-assisted laser cleaning
Author(s): J. Lee; Deoksuk Jang; D. Kim
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Crystalization of sol-gel-derived precursor zinc oxide film during KrF excimer laser irradiation
Author(s): Kazuyuki Hayashi; Toshihiko Ooie; Toshimi Nagase; Tatsuya Shinozaki; Takao Araki
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Development of low-absorption AR coatings for CO2 laser by ion-assisted deposition
Author(s): Hiromi Iwamoto; Keiji Ebata; Hirokuni Nanba
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Influence of laser absorption by nonlinear optical crystal on SHG efficiency
Author(s): Etsuji Ohmura; Kazufumi Nomura; Isamu Miyamoto
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Beamsplitting ZnSe diffractive optical element
Author(s): Kenichi Kurisu; Takayuki Hirai; Toshihiko Ushiro; Keiji Fuse; Takeshi Okada; Keiji Ebata
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ConoProbe and ConoLine: two new three-dimensional measurement systems
Author(s): Gabriel Y. Sirat; Freddy Paz; May Kleinman; Michael Doherty
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Development of beam-pointing compensating optical system for aspheric beam shaper of PWB laser drilling system
Author(s): Koki Ichihashi; Daiji Narita; Yasuhiro Mizutani; Katsuichi Ukita; Hidehiko Karasaki
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Theoretical analysis of SHG conversion efficiency of nonlinear optical crystal with Gaussian beam irradiation
Author(s): Kazufumi Nomura; Etsuji Ohmura; Isamu Miyamoto
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A-few-hundred-femtosecond FEL with a-few-kW average and one GW peak power for academic and industrial applications
Author(s): Eisuke J. Minehara; Ryoichi Hajima; Masaru Sawamura; Ryoji Nagai; Nobuyuki Nishimori; Nobuhiro Kikuzawa; Masayoshi Sugimoto; Toshihiko Yamauchi; Taketo Hayakawa; Toshiyuki Shizuma
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Picosecond laser system for photomask repair with nanometer accuracy
Author(s): Takuya Togawa; Atsushi Ueda; Yukio Morishige; Yoshikazu Suzuki
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Temporal pulse shaping using fiber laser technology: nanoscaling for flexible industrial laser material processing
Author(s): Rajesh S. Patel; Michelle Lynn Stock; Zaza Sartania; Jim M. Bovatsek; Alan Y. Arai; Heinrich Endert
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Mode-locked and noise characteristics of fiber grating semiconductor laser
Author(s): Nuran Dogru; Muhittin Sayin
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Athermal optical waveguide filter fabricated by short-pulse laser irradiation
Author(s): Junji Nishii; Kenji Kintaka; Yasushi Kawamoto; Masahide Takahashi
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Improvement of PET/aluminum adhesion after an excimer laser irradiation or a low-pressure plasma
Author(s): Patricia Laurens; S. Petit; M. Tatoulian; F. Arefi-Khonsari
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High-speed and efficient control of refractive index change of fused silica by multiwavelength excitation process using F2 and KrF excimer lasers
Author(s): Kotaro Obata; Koji Sugioka; Tatsuya Kono; Hiroshi Takai; Koichi Toyoda; Katsumi Midorikawa
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Surface-activated bonding for copper plate by excimer laser irradiation
Author(s): Takashi Suzuki; Takao Araki; Minoru Nishida
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Photo- and thermo-induced refractive index change of GeO2-B2O3-SiO3 thin films fabricated by PECVD: fabrication of extremely thermally stabilized gratings
Author(s): Hiroaki Nishiyama; Isamu Miyamoto; Kenji Kintaka; Junji Nishii
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Selective thermo/photochemical treatment of materials: a new trend in laser microtechnology
Author(s): Simeon Metev; Andreas Stephen; Jorg Schwarz; Carsten Wochnowski
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Laser photochemical modification of polymers and applications in optical information technology
Author(s): Carsten Wochnowski; Krassimira Meteva; Simeon Metev
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Excimer laser annealing of NiTi shape memory alloy thin film
Author(s): Qiong Xie; Weimin Huang; Ming Hui Hong; Wendong Song; Tow Chong Chong
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Laser-induced plasma-assisted ablation and its applications
Author(s): Ming Hui Hong; Koji Sugioka; Dong Jiang Wu; K. J. Chew; Y. F. Lu; Katsumi Midorikawa; Tow Chong Chong
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Microprocessing using UV solid state laser systems with high repetition rate
Author(s): Andreas Ostendorf; Klaus Koerber; Christian Kulik; Frank Otte
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Color printing on plastics using a slab RF-excited CO2 laser
Author(s): Masaru Kawarazaki; Noriyo Sakurada; Yoshio Ishii; Yuzuru Kubota; Kazuhiro Watanabe
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Experimental study on ceramics processing by using high-power CO2 laser beam
Author(s): Atsuki Yamamoto; Hiroyuki Hayashikawa; Hitoshi Hongu
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Laser micromanufacturing of molds and forming parts
Author(s): Arnold Gillner; Li-La Yeh; A. Dohrn; A. Bayer
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Advanced ultrafast laser material processing using temporal pulse shaping
Author(s): Razvan Stoian; Mark Boyle; Andreas Thoss; Arkadi Rosenfeld; Georg Korn; Ingolf V. Hertel
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Femtosecond laser ablation of copper
Author(s): Yeow-Whatt Goh; Yong-Feng Lu; Ming-Hui Hong; Tow Chong Chong
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Study of optical properties of ultrashort-pulse laser-heated material
Author(s): Hitoki Yoneda; Satoru Ohta; Ken-ichi Ueda; Richard M. More
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Femtosecond laser ablation of metals: precise measurement and analytical model for crater profiles
Author(s): Masaki Hashida; Masayuki Fujita; Masahiro Tsukamoto; Alexandre F. Semerok; Olivier Gobert; Guillaume Petite; Yasukazu Izawa; J.-F. Wagner
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Cluster ion control by femtosecond laser ablation with pre-irradiation of low-intensity UV laser pulse
Author(s): Y. Hiratani; Koichi Toyoda
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Molecular dynamics analysis of picosecond pulse laser ablation
Author(s): Etsuji Ohmura; Ichirou Fukumoto; Isamu Miyamoto
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Electron emission at an early stage of femtosecond pulsed laser ablation
Author(s): Makoto Murai; Tomokazu Sano; Etsuji Ohmura; Isamu Miyamoto
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Femtosecond technology for precision manufacturing: fundamental and technical aspects
Author(s): Friedrich Dausinger
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Advanced irradiation methods of femtosecond laser for embedded microfabrication of transparent materials
Author(s): Y. Cheng; Koji Sugioka; Masashi Masuda; Masako Kawachi; Kazuhiko Shihoyama; Koichi Toyoda; Katsumi Midorikawa
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Enhancement of debris attachment and atomic redistribution of femtosecond laser ablation using phase-shifted Gaussian beams
Author(s): Hiroki Murata; Masanori Miyazawa; Koichi Toyoda
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Fabrication of micro and cyclic structure by using diffractive optics and femtosecond laser
Author(s): Yoshiki Nakata; Tatsuo Okada; Mitsuo Maeda
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Surface texturing of metals with submicron precision using a short-pulse UV laser
Author(s): Jozsef Bekesi; Jan-Hendrik Klein-Wiele; Dirk Schaefer; Juergen Ihlemann; Peter Simon
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Surface structuring of metals with ultrashort laser pulses
Author(s): Michael Weikert; Christian Foehl; Friedrich Dausinger
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Ultrafast laser microstructuring for x-ray optics
Author(s): D. G. Papazoglou; Alexandra Manousaki; I. Zergioti; Eva Majkova; Stefan Luby; Costas Fotakis
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Femtosecond laser ablation of Cr-SiO2 binary mask
Author(s): Tomohiro Okamoto; Yukio Morishige; Etsuji Ohmura; Tomokazu Sano; Isamu Miyamoto
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Role of gas environment in the process of deep-hole drilling by ultrashort laser pulses
Author(s): Sergei M. Klimentov; Taras V. Kononenko; P. A. Pivovarov; Serge V. Garnov; Vitali I. Konov; Detlef Breitling; Friedrich Dausinger
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Femtosecond-laser-induced nanostructures formed on hard coatings of TiN and DLC
Author(s): Naoki Yasumaru; Kenzo Miyazaki; Junsuke Kiuchi; Hiroyuki Magara
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Development of dicing technique for thin semiconductor substrates with femtosecond laser ablation
Author(s): Kosuke Kawahara; Yasunobu Kurogi; Naoyuki Matsuo; Takafumi Ninomiya; Hiroshi Sawada; Atsushi Yokotani; Kou Kurosawa
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Speed-rate improvement for microcutting of thin silicon with femtosecond laser pulses
Author(s): Hans Kurt Toenshoff; Andreas Ostendorf; Klaus Koerber; Niko Baersch
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Medical and biological applications for ultrafast laser pulses
Author(s): Holger Lubatschowski; Alexander Heisterkamp; Fabian Will; Ajoy I. Singh; Jesper Serbin; Andreas Ostendorf; Omid Kermani; R. Heermann; Herbert Welling; Wolfgang Ertmer
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Laser processing of polytetrafluoroethylene (Teflon) in air
Author(s): Z. B. Wang; Ming Hui Hong; Yong Feng Lu; Tow Chong Chong
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Nano- and microprocessing in glass using a femtosecond laser
Author(s): Kazuyoshi Itoh
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In-situ observation of dynamics of plasma formation and refractive index modification in silica glasses excited by a femtosecond laser
Author(s): Sung-Hak Cho; Hiroshi Kumagai; Katsumi Midorikawa
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Microhole drilling on glass plates by femtosecond laser pulses
Author(s): Noriyuki Kuriyama; Yoshiro Ito
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Control of positions and shapes of voids in transparent materials with femtosecond laser
Author(s): Wataru Watanabe; Kazuhiro Yamada; Daisuke Kuroda; Taishi Shinagawa; Kazuyoshi Itoh; Junji Nishii
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3D microfabrication in photosensitive glass by femtosecond laser
Author(s): Masashi Masuda; Koji Sugioka; Y. Cheng; Naoko Aoki; Masako Kawachi; Kazuhiko Shihoyama; Koichi Toyoda; Katsumi Midorikawa
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Polarization dependence of refractive-index change in silica glass induced by self-trapped filament of femtosecond laser pulses
Author(s): Kazuhiro Yamada; Wataru Watanabe; Taishi Asano; Junji Nishii; Kazuyoshi Itoh
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Machining of micro-through-holes on glass plate by femtosecond laser pulses
Author(s): Motohiro Yasui; Hikoharu Aoki; Isamu Miyamoto
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Femtosecond studies of highly excited electrons and surface modification in metals
Author(s): Kai Dou; B. Irwin; Robert L. Parkhill; Edward T. Knobbe
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