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Proceedings of SPIE Volume 4700

Smart Structures and Materials 2002: Smart Electronics, MEMS, and Nanotechnology
Editor(s): Vijay K. Varadan
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Volume Details

Volume Number: 4700
Date Published: 11 July 2002
Softcover: 37 papers (368) pages
ISBN: 9780819444486

Table of Contents
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Three-dimensional MEMS with functionalized carbon nanotubes
Author(s): Vijay K. Varadan; Jining Xie
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Electronic noise in nanoelectronic building elements for nanoMEMS and bioMEMS
Author(s): Laszlo B. Kish
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Novel scheme for a higher bandwidth sensor readout
Author(s): Ashok Srivastava; Harish N. Venkata; Pratul K. Ajmera
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Laterally movable gate FET (LMGFET) as a resonant gate device
Author(s): In-Hyouk Song; Tinghui Xin; Pratul K. Ajmera
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Development of micromachined RF switches with piezofilm actuation
Author(s): Colin H.J. Fox; Xuesheng Chen; Hong Wen Jiang; Paul B. Kirby; Stewart McWilliam
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On-chip dome-shape spiral micro-inductor for high-frequency applications
Author(s): Nimit Chomnawang; Jeong-Bong Lee
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RF MEMS phase shifter by microstereolithography on silicon
Author(s): Taeksoo Ji; K. J. Vinoy; Vijay K. Varadan
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Development of a MEMS-rate sensor with PZT actuation and sensing
Author(s): Christopher M. Royle; Colin H.J. Fox
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Design concept and preliminary experimental demonstration of MEMS gyroscopes with 4-DOF master-slave architecture
Author(s): Cenk Acar; Andrei M. Shkel
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Micromachined cochlear-like acoustic sensor
Author(s): Robert D. White; Karl Grosh
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Integrated MOSFET-based hydrophone device for underwater applications
Author(s): Bei Zhu; Vijay K. Varadan
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MEMS-based sensor arrays for military applications
Author(s): Paul B. Ruffin
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Active skin for turbulent drag reduction
Author(s): Othon K. Rediniotis; Dimitris C. Lagoudas; Raghavendran Mani; George Karniadakis
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Hierarchical model for MEMS device performance simulation
Author(s): Kee Park; Kishore Pochiraju
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Vertical electrostatic actuator with extended digital range via tailored topology
Author(s): Yanhang Zhang; Martin L. Dunn
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Identification of anisoelasticity for electrostatic trimming of rate-integrating gyroscopes
Author(s): Chris C. Painter; Andrei M. Shkel
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Numerical simulation of a surface acoustic wave (SAW) gyroscope using HP EEsof
Author(s): Anshu Mehta; K. A. Jose; Vijay K. Varadan
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Application of composite particles to electronic devices
Author(s): Mikihiko Kobayashi; Mitsuru Egashira; Kyoko Saito; Takehiro Dan; Norio Shinya
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Novel technique for fabrication of multilayered microcoils in microelectromechanical systems (MEMS) applications
Author(s): Hung-Pin Chang; Jiangyuan Qian; Mark Bachman; Philip Congdon; Guann-pyng Li
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Carbon and ceramic microcoils for MEMS by microwave CVD
Author(s): Jining Xie; Chiauling Ong; Vijay K. Varadan
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Fabrication of microgaps in electroplated metallic structures for MEMS
Author(s): Qingzhou Xu; Mark Bachman; Guann-pyng Li
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Rectenna performances for smart membrane actuators
Author(s): Sang H. Choi; Kyo D. Song; Glen C. King; Charles Woodall
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Simulation and optimization of a smart reconfigurable aperture antenna
Author(s): Gregory N. Washington; Hwan-Sik Yoon; Wilhelmus H. Theunissen
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Power systems and requirements for the integration of smart structures into aircraft
Author(s): Allen J. Lockyer; Christopher A. Martin; Douglas K. Lindner; Paramjit S. Walia
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Self-configurable digital controllers for smart structural systems using FPGAs
Author(s): Venkat R. Satagopan; Vittal S. Rao; Kyle Mitchell; Hardy Joseph Pottinger
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Implemetation of local area wireless sensor networks using Bluetooth
Author(s): Vibha Ravindran; Vijay K. Varadan
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Optimized multilayered graded fractal FSS: microgenetic algorithm and comparison with experiment
Author(s): Yanan Sha; K. J. Vinoy; K. A. Jose; C. Neo; Vijay K. Varadan
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Vacuum packaging of microresonators by rapid thermal processing
Author(s): Mu Chiao; Liwei Lin
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Front-end wafer-level microsystem packaging technique with micro-cap array
Author(s): Yuh-Min Chiang; Mark Bachman; Guann-pyng Li
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Thermomechanical optimization of thermally actuated cantilever arrays
Author(s): David Bullen; Ming Zhang; Chang Liu
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Evaluation of micromachined actuators based on electrostrictive P(VDF-TrFE) polymers
Author(s): Tian-Bing Xu; Zhong-Yang Cheng; Qi Ming Zhang
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Microminiature temperature-compensated magnetoelastic strain gauge
Author(s): Steven W. Arms; Christopher P. Townsend
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High-yield microfabrication process for biomimetic artificial haircell sensors
Author(s): Junjun Li; Zhifang Fan; Jack Chen; Jun Zou; Chang Liu
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Microelectrooptical DNA array sensor
Author(s): Samuel K. Kassegne; H. Reese; P. Swanson; J. M. Yang; Daniel D. Smolko; Dalibor Hodko; D. Raymond; Marc J. Madou
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Lessons learned about wireless technologies for data acquistion
Author(s): Kyle Mitchell; Vittal S. Rao; Hardy Joseph Pottinger
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Wireless health monitoring of cracks in structures with MEMS-IDT sensors
Author(s): Jae-Sung Kim; K. J. Vinoy; Vijay K. Varadan
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Characterization of nanocrystalline silicon films
Author(s): Hongyi Lin; Jian Zhu
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