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Proceedings of SPIE Volume 4637

Photon Processing in Microelectronics and Photonics
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Volume Details

Volume Number: 4637
Date Published: 18 June 2002
Softcover: 65 papers (614) pages
ISBN: 9780819443762

Table of Contents
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Consequences of combined chemical and radiative exposure of solid surfaces
Author(s): J. Thomas Dickinson; Mary L. Dawes; Khin Hla Nwe; Steve C. Langford
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Onset of laser ablation in CaF2 crystal under excimer laser irradiation
Author(s): Yoshizo Kawaguchi; Aiko Narazaki; Tadatake Sato; Hiroyuki Niino; Akira Yabe
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Diagnostics of nanoparticle formation process by laser ablation in a background gas
Author(s): Tatsuo Okada; Yoshiki Nakata; Mitsuo Maeda
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Ultrafast laser-induced plasma diagnostics with time-spatial-resolved shadow and interferometric techniques
Author(s): Serge V. Garnov; Alexander A. Malyutin; Olga G. Tsarkova; Vitali I. Konov; Friedrich Dausinger
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Effects of laser parameters on plume characteristics and ablation rate
Author(s): Zongli Li; Sohzeom Yow; Lena Lui; Nikolai Leopoldovich Yakovlev; Peter M. Moran
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Modeling of chemical processes in the dynamic expansion for pulsed laser deposition
Author(s): Ernst-Wolfgang Kreutz; Mirko Aden; Markus Niessen; Andreas Husmann; Reinhart Poprawe
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General concept of a surface microgeometry reconstruction based on laser technology
Author(s): Vadim P. Veiko
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Laser induced diffusible resistance: device characterization and process modeling
Author(s): Michel Meunier; Maxime Cadotte; Mathieu Ducharme; Yves Gagnon; Alain Lacourse
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Photoluminescence study of laser ablated gallium nitride thin films
Author(s): Jerzy M. Wrobel; Ewa Placzek-Popko; Jan J. Dubowski; Haipeng Tang; James B. Webb
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Excimer ablation of ITO on flexible substrates for large format display applications
Author(s): Osman A. Ghandour; Dan Constantinide; Ronald E. Sheets
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Generation of functional structures by laser pyrolysis of polysilazane
Author(s): Hans-Joachim Krauss; Andreas Otto
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Preparation of carbonous nanoparticles for anode electrodes of ultrathin lithium ion rechargeable batteries by laser ablation
Author(s): Satoru Nishio; Kazuyuki Tamura; Jun Murata; Junko Kitahara; Akiyoshi Matsuzaki; Motoyoshi Okumura; Nobuo Ando; Yukinori Hato
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Background gas effects on structural properties in thin films deposited by pulsed laser deposition
Author(s): Yuka Yamada; Nobuyasu Suzuki; Toshiharu Makino; Takehito Yoshida
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German national femtosecond technology project (FST)
Author(s): Friedrich Dausinger
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Laser ablation of nitrogen-solid films by UV ps-laser irradiation: surface modification of materials by fragments in laser ablation plume
Author(s): Hiroyuki Niino; Tadatake Sato; Aiko Narazaki; Yoshizo Kawaguchi; Akira Yabe
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TEM investigations of thermal effects on material structure induced by femtosecond and nanosecond laser processing
Author(s): Ronan Le Harzic; Serge Valette; Nicolas Huot; E. Audouard; E. Baubeau; Christian Jonin; Pierre Laporte
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Microfabrication by a high-fluence femtosecond exposure: mechanism and applications
Author(s): Mitsuru Watanabe; Saulius Juodkazis; Junji Nishii; Shigeki Matsuo; Hiroaki Misawa
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Processing multilayer systems using femtosecond, picosecond, and nanosecond laser pulses at different wavelengths
Author(s): David Ashkenasi; Arkadi Rosenfeld
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Development of dicing technique for thin semiconductor substrates with femtosecond laser ablation
Author(s): Atsushi Yokotani; Naoyuki Matsuo; Kosuke Kawahara; Yasunobu Kurogi; Norihide Matsuo; Takahumi Ninomiya; Hiroshi Sawada; Kou Kurosawa
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Waveguides produced by ultrashort laser pulses inside glasses and crystals
Author(s): Stefan Nolte; Matthias Will; Boris N. Chichkov; Andreas Tuennermann
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Fabrication of birefringent microstructures in transparent materials with femtosecond laser pulses
Author(s): Wataru Watanabe; Kazuhiro Yamada; Daisuke Kuroda; Taishi Shinagawa; Taishi Asano; Junji Nishii; Kazuyoshi Itoh
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Ultrafast laser-induced processing of materials: fundamentals and applications in micromachining
Author(s): Taeyul Choi; Anant Chimmalgi; Constantine P. Grigoropoulos
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Femtosecond laser machining of fluidic microchannels for miniaturized bioanalytical systems
Author(s): Adela Ben-Yakar; Robert L. Byer
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Glass micromachining using the VUV F2 laser
Author(s): Peter E. Dyer; Saher M. Maswadi; Howard V. Snelling; Christopher D. Walton
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High-resolution F2-laser machining of micro-optic components
Author(s): Jianzhao Li; Peter R. Herman; Xiaoli Midori Wei; Kevin P. Chen; Juergen Ihlemann; Gerd Marowsky; Peter Oesterlin; Berthold Burghardt
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Laser processing of ion-exchange waveguides in glass
Author(s): Shlomo Ruschin; Koji Sugioka; G. Yarom; Toshimitsu Akane; Katsumi Midorikawa
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F2-laser microfabrication of buried waveguide structures in transparent glasses
Author(s): Xiaoli Midori Wei; Kevin P. Chen; Dragan Coric; Peter R. Herman; Jianzhao Li
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UV laser radiation-induced modifications and microstructuring of glass
Author(s): Marc Talkenberg; Ernst-Wolfgang Kreutz; Alexander Horn; Michael Jacquorie; Reinhart Poprawe
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Effect of laser parameters on the exposure and selective etch rate in photostructurable glass
Author(s): Frank E. Livingston; William W. Hansen; Adam Huang; Henry Helvajian
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Crack-free laser processing of glass substrate and its mechanisms
Author(s): Ming Hui Hong; Koji Sugioka; Ding Jiang Wu; L. L. Wong; Yongfeng Lu; Katsumi Midorikawa; Tow Chong Chong
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Production of innovative geometries with UV lasers
Author(s): Andreas Ostendorf; Christian Kulik; Uwe Stute
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Microscale bending of brittle materials using pulsed and CW lasers
Author(s): X. Richard Zhang; Xianfan Xu
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Development of a 100-gm-class inspector satellite using photostructurable glass/ceramic materials
Author(s): Adam Huang; William W. Hansen; Siegfried W. Janson; Henry Helvajian
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Laser micromachining of biofactory-on-a-chip devices
Author(s): Julian P.H. Burt; Andrew D. Goater; Christopher J. Hayden; John A. Tame
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Laser micromachining of polymeric mold inserts for rapid prototyping of PMMA devices via photomolding
Author(s): Wilhelm Pfleging; Thomas Hanemann; W. Bernauer; Maika Torge
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Bimetallic thermal activated films for microfabrication, photomasks, and data storage
Author(s): Richard Yuqiang Tu; Glenn H. Chapman; Marinko V. Sarunic
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Cell-by-cell construction of living tissue
Author(s): Bradley R. Ringeisen; Heungsoo Kim; Henry D. Young; Barry J. Spargo; Raymond C. Y. Auyeung; Alberto Pique; Douglas B. Chrisey; Peter K. Wu
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Direct writing of planar ultracapacitors by laser forward transfer processing
Author(s): Craig B. Arnold; Ryan C. Wartena; Bhanu Pratap; Karen E. Swider-Lyons; Alberto Pique
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Direct-write of sensor devices by a laser forward transfer technique
Author(s): Alberto Pique; David W. Weir; Peter K. Wu; Bhanu Pratap; Craig B. Arnold; Bradley R. Ringeisen; Robert Andrew McGill; Raymond C. Y. Auyeung; Richard A. Kant; Douglas B. Chrisey
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Integrated tool for fabrication of electronic components by laser direct write
Author(s): Scott A. Mathews; Chengping Zhang; Todd Kegresse; David Liu
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Laser-based sample preparation for electronic package failure analysis
Author(s): Brandon M. Frazier; Scott A. Mathews; Michael T. Duignan; Lars D. Skoglund; Zhiyong Wang; Rajen C. Dias
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Short-pulse-width micromachining of hard materials using DPSS Nd:YAG lasers
Author(s): Michael Heglin; Sergei V. Govorkov; Michael J. Scaggs; Haris Theoharidis; T. Schoelzel
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Laser-assisted manufacture for performance-optimized dielectrically loaded GPS antennas for mobile telephones
Author(s): Oliver Leisten; Jim Fieret; Ines Stassen Boehlen; Phil T. Rumsby; Patrick McEvoy; Yiannis Vardaxoglou
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Laser plasma emission of small particles in different gas atmospheres
Author(s): Alexander A. Andreev; Toshitsugu Ueda; Muneaki Wakamatsu
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Xe(He,Kr)-I2(Cl2) glow, barrier and capacitive discharge excilamps
Author(s): Victor F. Tarasenko; Mikhail I. Lomaev; Dmitrii V. Shitz; Victor S. Skakun
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Pulsed laser deposition of silicon dioxide thin films with silicone targets for fabricating waveguide devices
Author(s): Masayuki Okoshi; Masaaki Kuramatsu; Narumi Inoue
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Application and observation of laser-induced forward transfer process
Author(s): Yoshiki Nakata; Tatsuo Okada; Mitsuo Maeda
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Physical and chemical aspects of laser-materials interactions relevant to laser processing
Author(s): J. Thomas Dickinson
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Laser-material processing: an industrial view of packaging applications
Author(s): James H. Brannon
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Plasma behavior during high-brightness (DPSS) laser-materials interaction
Author(s): Jyotirmoy Mazumder; Mark Douglass; Peng Li
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Water-jet guided laser: possibilities and potential for singulation of electronic packages
Author(s): Frank Ruediger Wagner; Akos Spiegel; Nandor Vago; Bernold Richerzhagen
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Laser joining of glass with silicon
Author(s): Reiner Witte; Hans-Joachim Herfurth; Stefan Heinemann
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Processing of silicon by Nd:YAG lasers with harmonics generation
Author(s): Michael Panzner; Jorg Kasper; Hendrik Wust; Udo Klotzbach; Eckhard Beyer
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Laser welding of polymers using high-power diode lasers
Author(s): Friedrich G. Bachmann; Ulrich A. Russek
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Laser microwelding of electronic components
Author(s): Hans Kurt Toenshoff; Klaus Koerber; Christian Kulik; K. Schafer
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Laser welding of plastics transparent to near-infrared radiation
Author(s): Kimitoshi Sato; Yasuo Kurosaki; Takushi Saito; Isao Satoh
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Study and process control in laser conduction welding for millisecond-pulse duration range
Author(s): Laurent Berthe; Delphine Delage; Didier Lepretre; Leonard Bacinello; Wolfgang Knapp; Nicolas Dumont; Friedrich Durand
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SHADOW: a new welding technique
Author(s): Thorsten Kramer; Alexander M. Olowinsky; Friedrich Durand
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Overview and future prospects of the use of lasers for packaging by the microelectronics and photonics industry in Japan
Author(s): Kunihiko Washio; Hikaru Kouta
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Laser beam microwelding in the watch industry
Author(s): Alexander M. Olowinsky; Thorsten Kramer; Friedrich Durand
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Laser applications in integrated circuit packaging
Author(s): Yongfeng Lu; Wen Dong Song; ZhongMin Ren; Chengwu An; Kaidong D. Ye; DaMing Liu; Weijie Wang; Ming Hui Hong; Tow Chong Chong
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Pulsed laser ablation of IC packages for device failure analyses
Author(s): Ming Hui Hong; ZhiHong Mai; G. X. Chen; Thomas Thiam; Wen Dong Song; Yongfeng Lu; Chye Eng Soh; Tow Chong Chong
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Laser penetration spike welding: a welding tool enabling novel process and design opportunities
Author(s): Durandus K. Dijken; Willem Hoving; J. Th. M. De Hosson
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The potential of ultrashort laser pulses (<10ps) in future material processing: mode-locked Ti:sapphire vs. q-switch Nd:YAG applications
Author(s): David Ashkenasi
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