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PROCEEDINGS VOLUME 4608

Nanostructure Science, Metrology, and Technology
Editor(s): Martin C. Peckerar; Michael T. Postek
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Softcover $105.00 * $105.00 *

*Available as a black-and-white photocopy reprint only. Allow two weeks reprinting time plus standard delivery time. No discounts or returns apply.


Volume Details

Volume Number: 4608
Date Published: 24 July 2002
Softcover: 29 papers (288) pages
ISBN: 9780819443472

Table of Contents
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Silicon technology: from micro to nano and why federal investment matters
Author(s): Kathleen Kingscott
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Nanostructures and biology: some introductory remarks
Author(s): Michael T. Postek; Martin C. Peckerar
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Nanoelectronics: a military perspective
Author(s): Gerald M. Borsuk
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The challenge of nanometrology
Author(s): Michael T. Postek
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New methods for fabricating step and flash imprint lithography templates
Author(s): Douglas J. Resnick; Todd C. Bailey; David P. Mancini; Kevin J. Nordquist; William J. Dauksher; Eric S. Ainley; A. Talin; Kathleen A. Gehoski; Jeff H. Baker; Byung Jin Choi; Stephen C. Johnson; Matthew Colburn; Mario J. Meissl; S. V. Sreenivasan; John G. Ekerdt; C. Grant Willson
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Ultrashallow p+ junctions in silicon formed by molecular-beam epitaxy using boron delta doping
Author(s): Philip E. Thompson; Joe Bennett
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Toward a retinal prosthesis for the blind: advanced microelectronics combined with a nanochannel glass electrode array
Author(s): Dean A. Scribner; Mark S. Humayun; Brian L. Justus; Charles D. Merritt; Richard B. Klein; J. Grant Howard; Martin C. Peckerar; F. Keith Perkins; Lee J. Johnson; W Bassett; P Skeath; J Weiland; Eugene de Juan; James A. Finch; Roger W. Graham; Walter C. Trautfield; Scott M. Taylor
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Fabrication of photonic crystals in multilayer organic films
Author(s): Janusz A. Murakowski; Dennis W. Prather
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The critical role of metrology in nanotechnology
Author(s): Mark L. Schattenburg; Henry I. Smith
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Clusters on semiconductor surfaces
Author(s): Orest J. Glembocki; Sharka M. Prokes; Thomas A. Kennedy; A. K. Rajagopal
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Chemical modification of surfaces utilizing noncovalent interactions
Author(s): Mu-San Chen; Walter J. Dressick; Terence L. Schull; Susan L. Brandow
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Calibrated displacement actuator for nanometer metrology
Author(s): Alson E. Hatheway
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Nanometer-scale metrology: meeting the nanotechnology measurement challenges
Author(s): Michael T. Postek
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Low-cost nanostructure patterning using step and flash imprint lithography
Author(s): S. V. Sreenivasan; C. Grant Willson; Norman E. Schumaker; Douglas J. Resnick
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On-the-spot laser therapy using a smart tissue-activated fiber probe
Author(s): Ilko K. Ilev; Ronald W. Waynant
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Scan linearity: a hidden factor in SEM magnification calibration
Author(s): Albert Sicignano; Arkady V. Nikitin; Dmitriy Y. Yeremin; Matthew Sandy; E. Tim Goldburt
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Nano- and microscale manipulation of biological particles by laser-guided direct writing
Author(s): Bruce Zhi Gao; Joseph N. Fass; Michael J. Renn; David J. Odde
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Optical energy conversion in crystalline nanowires
Author(s): Samuel S. Mao; Richard E. Russo; Peidong Yang
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Fractal characterization of nanoscale powder agglomerates
Author(s): Siva Manickavasagam; Craig Saltiel; M. Pinar Menguec; Martin L. Sadowski; Zbigniew M. Drozdowicz
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Facility for nanoscience research: an overview
Author(s): J. A. Stroscio; E. W. Hudson; S. R. Blankenship; Robert J. Celotta; A. P. Fein
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Effects of etching time and wafer miscut on the morphology of etched Si(111) surfaces
Author(s): Hui Zhou; Joseph Fu; Sotoshi Gonda; Richard M. Silver
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New design and uncertainty budget for a metrology UHV-STM used in direct measurements of atom spacings
Author(s): Satoshi Gonda; Hui Zhou; Joseph Fu; Richard M. Silver
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Power actuators for nanotechnology
Author(s): Vadim I. Rakhovsky
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Performance of a nanocrystalline tungsten composite in ballistic impacts
Author(s): Lee S. Magness; L Kecskes; Francis S. Biancaniello; Stephen D. Ridder; M Chung; D Kapoor
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Nanoscience: a new thrust for science in the 21st century?
Author(s): Martin C. Peckerar
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Facilities for fabricating nanostructures
Author(s): Christie R. Marrian
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Report from the military sciences working group
Author(s): - -
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Nanoscience research for advanced military electronics
Author(s): Delores M. Etter
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Metrology break-out group
Author(s): - -
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Notes from the NIST/NRL/SPIE workshop on nanostructure science, metrology, and technology: microelectronics group
Author(s): - -
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Biology and nanoscience: summary of discussions of the biology and nanoscience panel of the SPIE workshop on nanotechnology
Author(s): Thomas W. LeBrun
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Sensing macromolecules with microelectronics
Author(s): F. Keith Perkins; L M Tender; S J Fertig; Martin C. Peckerar
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Nanomedicine (Viewgraphs Only)
Author(s): Kaveh Zamani

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