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PROCEEDINGS VOLUME 4601

Micromachining and Microfabrication Process Technology and Devices
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Volume Details

Volume Number: 4601
Date Published: 15 October 2001
Softcover: 75 papers (452) pages
ISBN: 9780819443403

Table of Contents
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Label-free DNA hybridization detection with molecular beacon immobilized in photopolymerized acrylamide gel microarray
Author(s): Hong Wang; Jiong Li; Quanjun Liu; Heping Liu; Zuhong Lu; Jijun Zhu
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Comparison of the silicon three main crystal planes' surface roughness after etching in aqueous potassium hydroxide solutions
Author(s): Yanfeng Jiang; Qing-An Huang
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Fiber-optic choline biosensor
Author(s): Hong Wang; Xiaojian Cao; Ke Jia; Xueting Chai; Hua Lu; Zuhong Lu
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Position sensor in micro-electro-mechanical systems using a self-mixing laser diode
Author(s): Ming Wang; Shouping Nie
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Design of thin-film-based microgrippers
Author(s): Weiming Huang; Xiangyang Gao; Jun Ping Tan
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Preparation and photoluminescence of nanowire array and films of cadmium sulfide by electrodepositing in organic solvent
Author(s): Xin Ju; Liangqiang Peng
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Polymer and glass etching by ArF and XeCl excimer lasers
Author(s): Qihong Lou; Lin Zhang
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Characterization and MEMS application of sputtered TiNi shape memory alloy thin films
Author(s): Hejun Du; Yongqing Fu
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Mechanics characteristics of an electrostatic optical switch
Author(s): Yuan Luo; Yi Zhang; Shanglian Huang
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Metallic oxide semiconductor field effect-transistor array-compound-type gas chemical microsensor
Author(s): Huang-ping Yan; Jun Guo; Yong-jian Feng
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Magnetically actuated MEMS variable optical attenuator
Author(s): Wenjun Li; Xiaolin Zhao; Bingchu Cai; Guangya Zhou; Mingsheng Zhang
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Modeling and fabrication of micro 3K-2-type planetary gear reducer utilizing SU-8 photoresist as alternative LIGA technology
Author(s): Weiping Zhang; Wenyuan Chen; Di Chen; Xiaomei Chen; Xiaosheng Wu; Zhengfu Xu
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Atomic force microscope using a diamond tip: a tool for micro/nanomachining on single-crystal silicon surface
Author(s): Qingliang Zhao; Tao Sun; Ying-Chun Liang; Shen Dong; Mingjun Chen
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High-aspect-ratio PMMA microstructures fabricated by RIE
Author(s): Aibin Yu; Guifu Ding; Chunsheng Yang; Changmin Li; Haiping Mao; Zhiping Ni
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Surface-micromachined double-sided touch mode capacitive pressure sensor
Author(s): Gaopan Xu; Guangwen Chen; Guoqing Hu
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Experiments and a new model on damping in rare air
Author(s): Hao Yin; Minhang Bao; Heng Yang; Shaoqun Shen; Bin Xiong
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Phase detection scheme of vibratory gyroscope by 2D driving operation
Author(s): Heng Yang; Minhang Bao; Hao Yin; Shaoqun Shen; Bin Xiong
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Preparation and performance of silicon microchannel plate
Author(s): Qingduo Duanmu; Jingquan Tian; Ye Li; Tangren Dan; Yaohua Lu; Delong Jiang; Lichen Fu
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Fabrication of high-aspect-ratio microstructure on metallic substrate using SU-8 resist
Author(s): Jingquan Liu; Bingchu Cai; Jun Zhu; Guipu Ding; Xiaolin Zhao; Chunsheng Yang; Di Chen
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Hydrogen-induced actuation: a new active mechanism for MEMS
Author(s): Yi Zhang; Guifu Ding; Chunsheng Yang; Aibin Yu; Bingchu Cai
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Surface-acoustic-wave device-based wireless measurement platform for sensors
Author(s): Han Tao; Wenkang Shi
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Application of liquid crystal display for binary optics
Author(s): Huijuan Zhang; Zhaoqi Wang; Hongli Liu
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Numerical modeling of a SiN beam resonant pressure sensor
Author(s): Deyong Chen; Dafu Cui; Li Wang; Zhongyao Yu
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Design and simulation of a multifinger micromechanical silicon accelerometer
Author(s): Jing-Xin Dong; Jun-Hua Qin
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DEM microfabrication technique and its applications in bioscience and microfluidic systems
Author(s): Di Chen; Fan Yang; Min Tang; Yigui Li; Jun Zhu; Dacheng Zhang
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Numerical analysis of a composite diaphragm microactuator
Author(s): Jian Chen; Bingchu Cai; Li Wang; Dong Xu; Xiulan Cheng
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Electrochemical studies of electrodeposition of nickel for LIGA microstructures
Author(s): Guifu Ding; Yi Zhang; Jingquan Liu; Xiaolin Zhao; Bingchu Cai; Tianhui Shen
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Electrochemical microactuator based on hydrogen-absorbing film: the principle and first results
Author(s): Guifu Ding; Yi Zhang; Chunsheng Yang; Xiaolin Zhao; Aibin Yu; Tianhui Shen
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Study of signal process of gas sensor array with nonlinear principal component analysis
Author(s): Guangfen Wei; Zhenan Tang; Jun Yu; Philip C.H. Chan
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Measurement of heat capacity of SnO2 thin films using micro-hotplate
Author(s): Jun Yu; Zhenan Tang; Guangfen Wei; Philip C.H. Chan
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Adaptive modeling of MEMS system-level simulation based on evolutionary computation
Author(s): Daoheng Sun; Chengzhi Wang; Wenwang Li
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Absorption and emission properties of F-center-OH- defect pairs in cesium halides
Author(s): Chunyang Kong; Y. Ma; M. D. Dong; Wanlu Wang; Kejun Liao; J. Xu
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LD array end-pumped Nd:YVO4 laser with an optical isolator
Author(s): Yuanqing Huang; Yongming Chen; Limiao Zhu; Jinghua Zeng
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Gray-scale mask fabrication system for diffractive micro-optics
Author(s): Shengyi Li; Zhe-hui Lin; Bing Luo; Yi-fan Dai
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Driving property of twist-roller friction mechanism in ultraprecision positioning system
Author(s): Bing Luo; Zhe-hui Lin; Shengyi Li; Yi-fan Dai
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Structural optimization of NiTi/Si diaphragm used in micropumps
Author(s): Li Wang; Jian Chen; Dong Xu; Bingchu Cai
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Development of microflowmeters and microlenses using a new 3D microfabrication-DEM technique
Author(s): Di Chen; Min Tang; Zhimin Wang; Changmin Li; Zhiping Ni; Di Zhou
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Effect of annealing on mechanical and optical properties of in-situ doped SiC thin films
Author(s): Hoa Thi Mai Pham; Charles R. de Boer; Cassan C. C. Visser; Pasqualina M. Sarro
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Novel silicon-micromachined gyroscope with high Q at atmosphere
Author(s): Bin Xiong; Yuelin Wang; Lufeng Che; Weiyuan Wang
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MEMS-based variable optical attenuator
Author(s): Xuhan Dai; Xiaolin Zhao; Wenjun Li; Bingchu Cai
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Forces balance of micromachined accelerometer
Author(s): Yulie Wu; Xuezhong Wu; Shengyi Li
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Parallel manipulator for micro-assembly and micromachining
Author(s): Xuezhong Wu; Yulie Wu; Shengyi Li
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Novel CMOS two-dimensional integrated gas flow sensor
Author(s): Zhao-Yong Zhang; Ming Qin; Qing-An Huang
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Capacitive humidity sensor in CMOS technology
Author(s): Xian-Wei Yan; Ming Qin; Qing-An Huang
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Micromachined variable capacitors with laterally positioned suspended plates
Author(s): Qingquan Liu; Qing-An Huang
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Capacitance-coupling micromechanical filter
Author(s): Binking Zhang; Qing-An Huang
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Integrated pressure-sensing microsystem by CMOS IC technology for barometal applications
Author(s): Minxin Zhou; Qing-An Huang
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Novel technique of laser shocking fine partial forming of metal sheet
Author(s): Yongkang Zhang; Ming Zhou; Lan Cai; Youyi Xu
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Novel micromachined thermal anemometer based on lateral polysilicon diode flow sensor
Author(s): Ming Qin; Qing-An Huang; Zhao-Yong Zhang; Xianwei Yan
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Effect of microstructure of TiNi/Si diaphragm on thermal-actuating performance
Author(s): Xiulan Cheng; Dong Xu; Jian Chen; Bingchu Cai; Guifu Ding
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Surface relief of TiNiCu thin films
Author(s): Xiulan Cheng; Dong Xu; Bingchu Cai; Li Wang; Jian Chen; Gang Li; Shi Xu
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Design, fabrication, and characteristics of microheaters with low consumption power using SDB SOI membrane and trench structures
Author(s): Gwiy-Sang Chung; Sung-Kyu Choi; Hoy-Duck Nam
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Micromachined optical switch with a vertical SU-8 mirror
Author(s): Suyan Liu; Minqiang Bu; Xiongying Ye; Zhaoying Zhou; Dacheng Zhang; Ting Li; Yilong Hao; Zhimin Tan
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Fabrication of InGaAs/InGaAsP microcylinder by wet chemical etching
Author(s): Yuzhai Pan; Yongqiang Ning; Li Qin; Hui Suo; Yun Liu; Lijun Wang
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Design, simulation, and evaluation of novel corrugated diaphragms based on backside sacrificial layer etching technique
Author(s): Jing Chen; Li-Tian Liu; Zhijian Li
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Angular-dependent magnetoresistance characteristics in Si(001)/NiO(300 A)/NiFe(t) bilayer system
Author(s): Won Jae Lee; Jae Sung Song; Bok Ki Min; Gwiy-Sang Chung
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Wheastone-bridge-type MR sensors of Si(001)/NiO(300 A)/NiFe bilayer system
Author(s): Jae Sung Song; Won Jae Lee; Bok Ki Min; Gwiy-Sang Chung
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Microsensors and actuator arrays based on Pb(Zr,Ti)O3 thin film for AFM data-storage
Author(s): Jiaru Chu; Junfeng Lu; Yicheng Wu; Wenhao Huang; Ryutaro Maeda; Toshihiro Itoh; Tadatomo Suga
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Phase-shifting profilometer for measurement of the physical parameters of the fiber connector endface
Author(s): Feng Qian; Xiangzhao Wang; Xuefeng Wang
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All-fiber sinusoidal phase-modulating laser diode interferometer insensitive to the intensity change of the light source
Author(s): Xuefeng Wang; Xiangzhao Wang; Caini Zhang; Danyang Yu; Gaoting Chen
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Fabrication of a micromold using negative PMER
Author(s): Young Ah Kwon; Kyoung-Soo Chae; Dae Sok Jeoung; Jong Yong Kim; Sung Moon
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Analysis of a novel MEMS electrostatic comb actuator for optical switching
Author(s): Pei-dong Yu; Guozhong Wang; Minghua Chen; Shizhong Xie
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Micromachined tunable rf capacitor with comb structure
Author(s): Yufeng Jin; Haixia Zhang; Min Miao; Kun Tang; Zhihong Li
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Optimization of two-photon excitation for 3D optical data storage
Author(s): DeQiang Chen; YongJun Zhou; Wenhao Huang; Andong Xia
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Bulk micromachined vibrating wheel rate gyroscope
Author(s): Rong Zhang; Zhongyu Gao; Zhiyong Chen
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Synchrotron light source and microlithography in Hefei National Synchrotron Radiation Laboratory
Author(s): Congliang Guo; Siyuan Huang; Yingui Zhou; Shinan Qian
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Earthworm-based miniature robot for intestinal inspection
Author(s): Dongxiang Chi; Guozheng Yan
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Fabrication of microstamps used for oligonucleotide array synthesis
Author(s): Pengfeng Xiao; Nongyao He; Zhengchun Liu; Quanguo He; Jiqing Xu; Zuhong Lu
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Hydrophilic surface formation on PDMS stamp by microwave plasma-induced grafting
Author(s): Quanguo He; Zhengchun Liu; Nongyao He; Pengfeng Xiao; Zuhong Lu
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Fabrication of polyurethane molecular stamps for the synthesis of DNA microarray
Author(s): Zhengchun Liu; Quanguo He; Pengfeng Xiao; Nongyao He; Zuhong Lu; Liang Bo
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Peptide nucleic acid (PNA) biosensors for DNA recognition
Author(s): Jiong Li; Hong Wang; Lu Cheng; Yujie Zhao; Heping Liu; Nongyao He; Zuhong Lu
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High-sensitivity stress-sensitive differential amplifier with gain control and temperature compensation
Author(s): Jingjing Li; Ruifeng Yue; Li-Tian Liu
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Design and fabrication of a novel micromechanical variable optical attenuator
Author(s): Cong-Shun Wang; Hongju Li; Jing Fang; Dacheng Zhang; Sheng Chang
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Polysilicon micromachined switch
Author(s): Zhengyuan Zhang; Zhiyu Wen; Shilu Xu; Kaicheng Li; Zhengfan Zhang; Shanglian Huang
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Nanofluidics: enabling processes for biotech
Author(s): Umberto Ulmanella; Chih-Ming Ho
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