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Proceedings of SPIE Volume 4561

MOEMS and Miniaturized Systems II
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Volume Details

Volume Number: 4561
Date Published: 2 October 2001
Softcover: 37 papers (376) pages
ISBN: 9780819442895

Table of Contents
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MEMS devices for all optical networks
Author(s): Armand P. Neukermans
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MOEMS for optical communication: status of the European industrial activities and technical and economical trends for the next three years
Author(s): Eric Mounier; Jean-Christophe Eloy
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Thermal management in optical MEMS
Author(s): Joseph J. Talghader
MEMS spatial light modulators with integrated electronics
Author(s): Steven Cornelissen; Thomas G. Bifano; Paul A. Bierden
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Design optimization of an electrostatically driven micro scanning mirror
Author(s): Harald Schenk; Alexander Wolter; Hubert K. Lakner
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High-frequency raster pinch correction scanner for retinal scanning displays
Author(s): Hakan Urey; Frank A. DeWitt; Karlton D. Powell; Mircea M. Bayer
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Membrane mirrors for vision science adaptive optics
Author(s): Peter Kurczynski; J. Anthony Tyson; Bernard Sadoulet; David J. Bishop; David R. Williams
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Magnetically actuated microshutter arrays
Author(s): David Brent Mott; Shahid Aslam; Kenneth A. Blumenstock; Rainer K. Fettig; David E. Franz; Alexander S. Kutyrev; Mary J. Li; Carlos J. Monroy; Samuel Harvey Moseley; David Scott Schwinger
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PLZT-based electro-optic modules for micromachined biophotonics systems
Author(s): Yasser A. Abdelaziez; Chong Hyuk Ahn
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MOEMS: enabling technologies for large optical cross-connects
Author(s): Patrick B. Chu; Shi-sheng Lee; Sangtae Park; Ming-Ju Tsai; Igal Brener; David Peale; Robert A. Doran; Chuan Pu
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Self-assembly of surface-micromachined structures using electrostatic attraction
Author(s): Robert W. Johnstone; M. Parameswaran
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Fast 1x2 and 2x2 fiber optic switches with piezoelectric actuation
Author(s): Rolf Goering; Kay Kubitz
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Silicon-on-insulator micromechanical optical switch with postprocessed polymeric waveguides
Author(s): Thor Bakke; Chris P. Tigges; Charles T. Sullivan
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Low-cost fiber collimation for MOEMS switches by ink-jet printing
Author(s): Weldon Royall Cox; Ting Chen; Donald J. Hayes; Michael E. Grove
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Transfer of micro-optical structures into GaAs and diamond
Author(s): Mikael Karlsson; Fredrik K. Nikolajeff
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Microlens fabrication using glass transition temperature modification by the LIGA process
Author(s): Sung-Keun Lee; Kwang-Cheol Lee; Seung-Seob Lee
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Improvement on the surface roughness of microlens array in the excimer laser machining process
Author(s): Shuh-Yi Wang; Chi-Sheng Huang; Hsau-Yu Chou; Tone-Yen Lee; Rang-Seng Chang
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Integration nanometer indicating system for reducing temperature drift of interferometer
Author(s): Jian Wu; Chunyong Yin
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High-efficiency optical MEMS by the integration of photonic lattices with surface MEMS
Author(s): James G. Fleming; Seethambal S. Mani; Shawn-Yu Lin
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Light-activated self-generation and parametric amplification for MEMS oscillators
Author(s): Maxim Zalalutdinov; Alan T. Zehnder; Anatoli Olkhovets; Stephen W. Turner; Lidija Sekaric; Bojan Ilic; Dave Czaplewski; Jeevak M. Parpia; Harold G. Craighead
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Component development and integration issues for MOEMS
Author(s): James Castracane; Bai Xu; Yahong Yao; Christian Baks; Rein Lavrijsen
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Flip-chip fabrication of integrated micromirror arrays using a novel latching off-chip hinge mechanism
Author(s): M. Adrian Michalicek; Victor M. Bright
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MOEMS integrated optical monitoring
Author(s): Lawrence Anthony Hornak; Parviz F. Famouri; Jeremy M. Dawson; Limin Wang; Reza Ghaffarian
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Vertical stiffening members for flatness control of surface-micromachined structures
Author(s): B. Jeffrey Lutzenberger; David L. Dickensheets
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Control of image-shifting coils for vibration isolation of an electron microscope
Author(s): Koichi Matsuda; Yoichi Kanemitsu; Shinya Kijimoto; Sukehiro Itoh; Ryuichi Tanaka
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Optomechanical variations and control in a MOEMS switch model
Author(s): Thomas E. Plowman; Robert A. Stoll; David A. Winick; Arthur S. Morris
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Design and fabrication of micromirror arrays for UV lithography
Author(s): Hubert K. Lakner; Peter Duerr; Ulrike Dauderstaedt; Wolfgang Doleschal; Joerg Amelung
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Active-matrix-addressed micromirror array for wavefront correction in adaptive optics
Author(s): Andreas Gehner; Wolfgang Doleschal; Andreas Elgner; Reinhard Kauert; Detlef Kunze; Michael Wildenhain
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Silicon nitride biaxial pointing mirrors with stiffening ribs
Author(s): Todd J. Kaiser; B. Jeffrey Lutzenberger; Robert A. Friholm; Phillip A. Himmer; David L. Dickensheets
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Optical performance of pivoting micromirrors
Author(s): Olga Blum Spahn; Ernest J. Garcia; Victor C. Esch; Grant D. Grossetete; Fernando Bitsie; Sita S. Mani; Jerome F. Jakubczak
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Fabrication of five-level ultraplanar micromirror arrays by flip-chip assembly
Author(s): M. Adrian Michalicek; Victor M. Bright
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Development of optical MEMS carbon dioxide sensors
Author(s): Nicholas Moelders; Mark P. McNeal; Martin U. Pralle; Lisa Last; William Ho; Anton C. Greenwald; James T. Daly; Edward A. Johnson; Thomas George; Daniel S. Choi
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Optical sensors with MEMS, slit masks, and micromechanical devices
Author(s): Rainer Riesenberg; Andreas Wuttig
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Calculating the modulation transfer function of a pyroelectric infrared sensor array
Author(s): Guenter Milde; Gerald Gerlach; Joerg Drescher; Herbert Balke
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Finite element modeling of the thermo-electro-mechanical coupling in pyroelectric infrared sensor arrays
Author(s): Joerg Drescher; Herbert Balke; Hans-Achim Bahr; Guenter Milde; Gerald Gerlach
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Novel optical MEMS/micromechanical devices as field selectors for imaging spectrometry
Author(s): Rainer Riesenberg; Andreas Wuttig
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Development of advanced micromirror arrays by flip-chip assembly
Author(s): M. Adrian Michalicek; Victor M. Bright
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