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Proceedings of SPIE Volume 4559

MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication
Editor(s): Henry Helvajian; Siegfried W. Janson; Franz Laermer
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Volume Details

Volume Number: 4559
Date Published: 1 October 2001
Softcover: 23 papers (218) pages
ISBN: 9780819442871

Table of Contents
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MEMS programs at DARPA
Author(s): William C. Tang
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Single-layer silicon-on-insulator MEMS gyroscope for wide dynamic range and harsh environment applications
Author(s): Michael S. Kranz; Tracy Dean Hudson; Paul R. Ashley; Paul B. Ruffin; Sherrie J. Burgett; Mark Temmen; Jerry Tuck
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MEMS safety switch for controlling critical software operations
Author(s): J. Arlin Cooper; Marie-Elena C. Kidd; Larry J. Dalton
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Single-crystal silicon triple-torsional micro-oscillators for use in magnetic resonance force microscopy
Author(s): Michelle Diane Chabot; Troy C. Messina; Vladimir Mancevski; Casey W. Miller; John T. Markert
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Optimization, simulation, and fabrication of a microgyroscope
Author(s): Shifeng Li; Shaochen Chen
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Simple wireless powering scheme for MEMS devices
Author(s): Jie Wu; Victor Quinn; Gary H. Bernstein
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Laser micromachining for manufacturing MEMS devices
Author(s): Malcolm C. Gower
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Novel MEMS devices and silicon micromachined components for high-frequency circuits
Author(s): Linda P.B. Katehi
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MEMS antennas for millimeter-wave applications
Author(s): Dan Neculoiu; Patrick Pons; Robert Plana; Pierre Blondy; Alexandru Mueller; Dan Vasilache
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Industrial applications for LIGA-fabricated micro heat exchangers
Author(s): Kevin W. Kelly; Chad Harris; Lyndon S. Stephens; Christophe Marques; Dan Foley
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Gryphon M3 system: integration of MEMS for flight control
Author(s): Adam Huang; Chris Folk; Chih-Ming Ho; Z. Liu; Wesley W. Chu; Yong Xu; Yu-Chong Tai
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Piezoelectric aluminum nitride thin films for ultrasonic transducers
Author(s): Laurie Valbin; Laure Sevely
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Micromachined pressure gauge for the vacuum range based on damping of a resonator
Author(s): Steffen Kurth; Karla Hiller; Norbert Zichner; Jan Mehner; Thomas Iwert; Steffen Biehl; Wolfram Doetzel; Thomas Gessner
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Modeling of rf MEMS switches
Author(s): Barbara Robertson; Fat Duen Ho; Tracy Dean Hudson
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MEMS multisensor system for flight testing
Author(s): Minas H. Tanielian
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Fabrication and performance of d33-mode lead-zirconate-titanate (PZT) MEMS accelerometers
Author(s): Han Geun Yu; Richard Wolf; Kan Deng; Lichun Zou; Srinivas Tadigadapa; Susan Troilier-McKinstry
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Large-displacement microactuators in deep reactive ion-etched single-crystal silicon
Author(s): Gabriel L. Smith; John M. Maloney; Lawrence Fan; Don L. DeVoe
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High-efficiency microscale power using a fuel processor and fuel cell
Author(s): Jamie Holladay; Evan O. Jones; Max Phelps; Jianli Hu
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GaAs-membrane-supported millimeter-wave filters
Author(s): George Konstantinidis; Alexandru Mueller; George Deligiorgis; Ioana Petrini; Dan Vasilache; Dan Neculoiu; Michalis Lagadas; Cristina Buiculescu; Viorel Avramescu; Sergiu A. Iordanescu; Pierre Blondy
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Microengineered cold gas thruster system for a co-orbiting satellite assistant (COSA)
Author(s): Adam Huang; William W. Hansen; Siegfried W. Janson; Henry Helvajian
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Analysis of inertia forces influence on operation voltage of electrostatic microrelays
Author(s): Georgy I. Efremov; Nikolay Ivanovich Mukhurov
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Magnetostatic straight edge resonators on micromachined silicon membrane
Author(s): George Sajin; Romolo Marcelli
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Micro brands manufacturing by copper vapor laser
Author(s): Mikhail Nikontchouk; Igor V. Polyakov; Sergey Gorny
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