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Proceedings of SPIE Volume 4557

Micromachining and Microfabrication Process Technology VII
Editor(s): Jean Michel Karam; John A. Yasaitis
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Volume Details

Volume Number: 4557
Date Published: 28 September 2001
Softcover: 56 papers (496) pages
ISBN: 9780819442857

Table of Contents
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Etching rate control of mask material for XeF2 etching using UV exposure
Author(s): Koji Sugano; Osamu Tabata
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Patterning of diamond microstructures by bulk and surface micromachining for MEMS devices
Author(s): Yongqing Fu; Hejun Du
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Fabrication of the refined MEMS-based compound grating (MCG) based on silicon micromachining
Author(s): Yahong Yao; Bai Xu; James Castracane
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Toward the micromachined vibrating gyroscope using (111) silicon wafer process
Author(s): Jerwei Hsieh; Wen-Chih Chen; Weileun Fang
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Planarization of deep trenches
Author(s): Cristina R. Rusu; Gerard Klaasse; Sherif Sedky; Heleen Esch; Brigitte Parmentier; Agnes Verbist; Ann Witvrouw
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Multilevel microstructures and mold inserts fabricated with planar and oblique x-ray lithography of SU-8 negative photoresist
Author(s): Linke Jian; Yohannes M. Desta; Jost Goettert
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Process strategies for ultradeep x-ray lithography at the Advanced Photon Source
Author(s): Derrick C. Mancini; Nicolai A. Moldovan; Ralu Divan; Francesco De Carlo; Judith Yaeger
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Stacked ultradeep x-ray lithography exposures: preliminary results
Author(s): Georg Aigeldinger; Yohannes M. Desta; Jost Goettert; Franz Josef Pantenburg
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Stiction-free release etch with anhydrous HF/water vapor processes
Author(s): Ron Hanestad; Jeffery W. Butterbaugh; Abdselem ben-Hamida; Ilaria Gelmi
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Laser microchemical etching of waveguides and quasi-optical components
Author(s): Christian Y. Drouet d'Aubigny; Christopher K. Walker; Bryan D. Jones
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Novel process for high reflectivity of Al sidewalls of optical mirrors using KrF excimer laser annealing
Author(s): Moon-Youn Jung; Hojun Ryu; Myung-Lae Lee; Chi-Hoon Jun; Youn Tae Kim
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Excimer laser surface micromachining of LiNbO3 for realization of optimized optical modulator electrode structures
Author(s): Han-Woo Chong; Arnan Mitchell; Jason P. Hayes; Michael W. Austin
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Fabrication of axisymmetric ceramic microparts using pulsed laser ablation
Author(s): Karl L. Boehlen; Phil T. Rumsby; Alfred Cerezo; Min Huang
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Prediction of particulate characteristics in an expanding laser plume
Author(s): Dustin W. Blair; Mark S. Tillack; Mofreh Zaghloul
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Mechanical gripper system for handling and assembly in MEMS
Author(s): Dragan Petrovic; Gordana Popovic; Elias Chatzitheodoridis; Oscar Del Medico; Ana Almansa; Helmut Detter; Werner Brenner
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Parallel micromanipulation method for microassembly
Author(s): Jeongsik Sin; Harry E. Stephanou
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Method of bond strength evaluation for silicon direct wafer bonding
Author(s): Alexander Spivak; Avag Avagyan; Brady R. Davies
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Wafer dicing by laser-induced thermal shock process
Author(s): Kaidong D. Ye; Chengwu An; Ming Hui Hong; Yongfeng Lu
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Integrated cavity wafer level chip size package for MEMS applications
Author(s): Danny Weiss; Doron Teomim; Avner P. Badihi; Gil Zilber
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Ultraprecision manufacturing of self-assembled microsystems
Author(s): Andre Sharon; Axel Bilsing; Gordon Lewis
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Silicon grisms fabricated by anisotropic wet etching and direct silicon bonding for high-resolution IR spectroscopy
Author(s): Elena Cianci; Vittorio Foglietti; Fabrizio Vitali; Dario Lorenzetti
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Gold damascene interconnect technology for millimeter-wave photonics on silicon
Author(s): Hiromu Ishii; Shouji Yagi; Tadashi Minotani; Yakov Royter; Kazuhisa Kudou; Masaki Yano; Tadao Nagatsuma; Katsuyuki Machida; Hakaru Kyuragi
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Micromachining of packaging materials for MEMS using lasers
Author(s): Vijay Kancharla; Kira Hendricks; Shaochen Chen
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Young's modulus measurement of aluminum thin film with cantilever structure
Author(s): ByoungChan Lee; SangHun Lee; Hwasu Lee; Hyungjae Shin
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Fluid flow in a microchannel: a stochastic approach
Author(s): Hilda Marino Black; Raja Nassar; Weizhong Dai
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Micromachined silicon slits for beam diagnostics in particle accelerators
Author(s): Elena Cianci; Andrea Notargiacomo; Alessandro Cianchi; Vittorio Foglietti
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Modeling of the comb actuator deformed by microloading effect in deep reactive ion etching
Author(s): June-Young Lee; Seong-Hyok Kim; Hyung-Taek Lim; Che-Heung Kim; Yong-Kweon Kim
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Real-time in-situ microscopic observation of bubbles and roughening in KOH etching of silicon
Author(s): Alvimar S. Louro; Jose Roberto Senna
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Mechanical and structural properties of in-situ doped PECVD silicon carbide layer for post-processing surface micromachining
Author(s): Hoa Thi Mai Pham; Charles R. de Boer; Kees Kwakernaak; Wim G. Sloof; Pasqualina M. Sarro
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Novel bonding method for polymer-based microfluidic platforms
Author(s): Siyi Lai; Yeny Hudiono; Ly James Lee; Sylvia Daunert; Marc J. Madou
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Comparative analysis of silicon wafers micromachining versus nonconventional technology
Author(s): Dumitru Gh. Ulieru
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Micromachining of ultrananocrystalline diamond
Author(s): Nicolai A. Moldovan; Orlando H. Auciello; Anirudha Sumant; John Carlisle; Ralu Divan; Dieter M. Gruen; Alan R. Krauss; Derrick C. Mancini; A. Jayatissa; John Tucek
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Progress on 300-mm wafer lithography equipment and processes
Author(s): Karl E. Mautz; John G. Maltabes
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Direct spray coating of photoresist for MEMS applications
Author(s): Nga Phuong Pham; Tom L.M. Scholtes; Ruud Klerk; Bernhard Wieder; Pasqualina M. Sarro; Joachim N. Burghartz
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Engineering in- and out-of-plane stress in PECVD silicon nitride for CMOS-compatible surface micromachining
Author(s): Rhodri R. Davies; Mark E. McNie; Kevin M. Brunson; David Combes
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Conformal deposition of LPCVD TEOS
Author(s): Paul McCann; Kumar Somasundram; Stephen Byrne; Andrew Nevin
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Applications of shape memory alloys: advantages, disadvantages, and limitations
Author(s): A. David Johnson; Valery Martynov; Vikas Gupta
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Photochemical selective surface modification using micromirror array for biochip fabrication
Author(s): Kook-Nyung Lee; Dong-Sik Shin; Woo-Jae Chung; Yoon-Sik Lee; Yong-Kweon Kim
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Heterogeneous catalysis in a microscale reactor fabricated from a biologically active polymer
Author(s): Bill B. Elmore; Ronald S. Besser; Zonghuan Lu; Andrea Forrest; Rui Jiang; Francis Jones
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Lamb waves generated by laser
Author(s): Yihui Wu; Hongguang Jia; Hui Ju
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Binary optic diffuser design
Author(s): Adam S. Fedor
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New structure and fabrication process for thermal-type microsensors
Author(s): Han Ji-song; Tadashi Kadowaki; Kazuo Sato; Mitsuhiro Shikida
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Fabrication of electromagnetic micromirror array
Author(s): YunHo Jang; Yong-Kweon Kim
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Micromachined thermal actuated microlegs for an insectlike microrobot
Author(s): Agnes Bonvilain; Jean-Rene Coudevylle; Pascal Blind; Nicolas Chaillet
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Fabrication of highly sensitive thermal microflow sensor with surface-micromachined vacuum platform for gas and liquid applications
Author(s): Chi-Hoon Jun; Chang-Auck Choi; Won-Ick Jang; Youn Tae Kim
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Integrated microreactor and its components for dehydrogenation of cyclohexane to benzene
Author(s): Adam Reppond; Yu Liang; Ji Fang; Tianhong Cui
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Method to achieve large displacements using comb drive actuators
Author(s): Guangya Zhou; Duongsin Low; Philip Dowd
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Properties of (311) planes anisotropically etched in (100) silicon by TMAH
Author(s): Drago Resnik; Danilo Vrtacnik; Uros Aljancic; Matej Mozek; Slavko Amon
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Improved microwave performance on low-resistivity Si substrates by introducing an oxidized porous Si interlayer
Author(s): Ziqiang Zhu; Yanling Shi; Yongfu Long; Peisheng Xin; Zongsheng Lai
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Optimization of EDP solutions for feature-size-independent silicon etching
Author(s): Kunchinadka Narayana Bhat; Chandana Yellempalle; Nandita DasGupta; Amitava DasGupta; Parimi Ramaseshagiri Rao
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Orthogonal method for processing of SU-8 resist in UV-LIGA
Author(s): Jingquan Liu; Jun Zhu; Guipu Ding; Xiaolin Zhao; Bingchu Cai
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Anodic alumina as a basis for various-purpose micro-electro-mechanical devices
Author(s): Georgy I. Efremov; Nikolay Ivanovich Mukhurov
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Mechanism of enzyme-etching dichromated gelatin and swelling of gelatin
Author(s): Hongbo Li; Xiaoyang Huang
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Design and fabrication of micromachined microwave transmission lines
Author(s): Yanling Shi; Zongsheng Lai; Peisheng Xin; Li Shao; Ziqiang Zhu
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Progress and profit through microtechnologies: commercial applications of MEMS/MOEMS
Author(s): Wolfgang Ehrfeld; Ursula Ehrfeld
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MEMS/MOEMS application to optical communication
Author(s): Hiroyuki Fujita
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