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Proceedings of SPIE Volume 4440

Lithographic and Micromachining Techniques for Optical Component Fabrication
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Volume Details

Volume Number: 4440
Date Published: 9 November 2001
Softcover: 35 papers (334) pages
ISBN: 9780819441546

Table of Contents
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Roadmap for micro-optics fabrication
Author(s): Thomas J. Suleski; Robert D. TeKolste
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Fabrication of organic photonic crystals for optical wavelengths
Author(s): Janusz A. Murakowski; Dennis W. Prather
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Thick refractive beam shaping elements applied to laser diodes
Author(s): Matthias Cumme; Holger Hartung; Lars-Christian Wittig; Ernst-Bernhard Kley
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Beam shaping for multimode beams
Author(s): Lars-Christian Wittig; Matthias Cumme; Stefan Nolte; Ernst-Bernhard Kley; Andreas Tuennermann
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Fabrication of aspherical microlenses in fused silica and silicon
Author(s): Reinhard Voelkel; Martin Eisner; Kenneth J. Weible
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Double-sided hybrid micro-optical elements combining functions of multistage optical systems
Author(s): Uwe D. Zeitner; Peter Dannberg
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Quality assurance of HARMS and MOEMS surface structures using confocal white light microscopy
Author(s): Hans-Joachim Jordan; Rainer Brodmann; Marcus Grigat; Juergen Valentin
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Lithographic simulation: a review
Author(s): Chris A. Mack
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Fabrication of gray-scale masks and diffractive optical elements with LDW glass
Author(s): Victor Pavlovich Korolkov; Anatoly I. Malyshev; Alexander G. Poleshchuk; Vadim V. Cherkashin; Hans J. Tiziani; Christof Pruss; Thomas Schoder; Johann Westhauser; Chuck Wu
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Fabrication of glass lenses by melting technology
Author(s): Ernst-Bernhard Kley; Hans-Joerg Fuchs; Arnd Kilian
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Development of static phase control elements for high-power solid state lasers
Author(s): Thomas H. Bett; Andrew R. Barnes; N. W. Hopps; Mohammad R. Taghizadeh; Andrew J. Waddie; P. Rudman; M. Thompson; Michael C. Rushford; Jerald A. Britten; Curly R. Hoaglan; Sham N. Dixit
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Fabrication and applications of large-aperture diffractive optics
Author(s): Sham N. Dixit; Jerald A. Britten; Roderick A. Hyde; Curly R. Hoaglan; Michael C. Rushford; Leslie J. Summers; John S. Toeppen
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Testing of aspheric surfaces
Author(s): Hans J. Tiziani; Stephan Reichelt; Christof Pruss; M. Rocktaeschel; U. Hofbauer
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Testing aspheric surfaces with CGH of different accuracy in industrial manufacturing environs
Author(s): Thomas Herrmann
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Interferometrical measurement of cylindrical lenses with the help of computer-generated holograms
Author(s): Norbert Lindlein; Juergen Lamprecht; Klaus Mantel; Johannes Schwider
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Investigation of large null-CGH realization
Author(s): Ernst-Bernhard Kley; Werner Rockstroh; Holger Schmidt; Andreas Drauschke; Frank Wyrowski; Lars-Christian Wittig
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Precision cutting processes for manufacturing of optical components
Author(s): Manfred Weck; Jan Hennig; Robert Hilbing
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Cutting of optical materials by using femtosecond laser pulses
Author(s): Stefan Nolte; Matthias Will; Markus Augustin; Peter Triebel; Karsten Zoellner; Andreas Tuennermann
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Polar-coordinate laser writing systems: error analysis of fabricated DOEs
Author(s): Alexander G. Poleshchuk; Victor Pavlovich Korolkov; Vadim V. Cherkashin; Stephan Reichelt; James H. Burge
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High-resolution digital integral photography using a scanning microlens array
Author(s): Lars Erdmann; Kaigham J. Gabriel
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Circular dielectric gratings acting as resonators for solid state polymer lasers
Author(s): Christian Bauer; Harald W. Giessen; Bernd Schnabel; Ernst-Bernhard Kley; Christopher Schmitt; Ullrich Scherf; Rainer Friedbert Mahrt
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Minimizing Fizeau fringes during the contact printing of diffraction gratings
Author(s): Dino R. Ciarlo; Michael C. Rushford; Paul J. Kuzmenko; Jian Ge
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Microelectronics planar technologies for the manufacturing of high spatial frequency gratings: sub-angstroem assessment of spatial coherence
Author(s): Olivier M. Parriaux; Y. Jourlin; Florent Pigeon; G. Bouchet; Paul W.L. Van Dijk; Rudy J. M. Pellens; Suat Topcu; Yasser Alayli; Marc Bonis
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Ion beam and plasma jet etching for optical component fabrication
Author(s): Axel Schindler; Thomas Haensel; Dieter Flamm; Wilfried Frank; Georg Boehm; Frank Frost; Renate Fechner; Frieder Bigl; Bernd Rauschenbach
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Farbrication of diffractive optical elements on a Si chip by an imprint lithography using nonsymmetrical silicon mold
Author(s): Yoshihiko Hirai; Masato Okano; Takayuki Okuno; Hiroshi Toyota; Tsutomu Yotsuya; Hisao Kikuta; Yoshio Tanaka
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On-chip replication of micro-optical structures for VCSEL to fiber coupling
Author(s): Thomas Ammer; Michael T. Gale; Markus Rossi
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Requirements and approaches to adapting laser writers for fabrication of gray-scale masks
Author(s): Victor Pavlovich Korolkov; Ruslan Shimansky; Alexander G. Poleshchuk; Vadim V. Cherkashin; Andrey A. Kharissov; Dmitry Denk
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Precise proximity correction for fabricating chirped diffraction gratings with direct-writing electron-beam lithography
Author(s): Masato Okano; Tsutomu Yotsuya; Yoshihiko Hirai; Hisao Kikuta; Kazuya Yamamoto
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Microrotators fabricated by photolithography
Author(s): Takashi Katsuhara; Yasushi Ueda; Daisuke Miyazaki; Kenji Matsushita; Kenji Yamada; Tsutomu Yotsuya
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Illumination by subwavelength grating with antireflection effect
Author(s): Shigeto Omori; Masato Okano; Hiroshi Toyota
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Microretarder array for imaging polarimetry in the visible wavelength region
Author(s): Tetsuya Hamamoto; Hiroshi Toyota; Hisao Kikuta
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Production of high-order micromachined silicon echelles on optically flat substrates
Author(s): Oleg A. Ershov; Daniel T. Jaffe; Jasmina P. Marsh; Luke D. Keller
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Phase crystallization on the charged surface of viscous media
Author(s): Boris I. Constantinov; Teodosie I. Pasechnic; Valentina Bocan
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Surface cleaning mechanisms utilizing VUV radiation in oxygen-containing gaseous environments
Author(s): Zoran Falkenstein
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