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Proceedings of SPIE Volume 4426

Second International Symposium on Laser Precision Microfabrication
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Volume Details

Volume Number: 4426
Date Published: 25 February 2002
Softcover: 106 papers (516) pages
ISBN: 9780819441379

Table of Contents
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Microstructure and properties of Fe-base alloy fabricated using selective laser melting
Author(s): Manlong Sun; Li Lu; Jerry Ying Hsi Fuh
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Optimum energy absorption of a short-pulse laser in a doped dielectric slab
Author(s): Lay-Kee Ang
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Laser cladding of copper-based materials for building electrical discharge machining electrode
Author(s): Y. Tang; Li Lu; Jerry Ying Hsi Fuh; Yoke-San Wong; M. Gupta; H. Zhu
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High-resolution laser flash photography for probing the solidification of the new double laser recrystallization process
Author(s): Ming-Hong Lee; Seung-Jae Moon; Mutsuko Hatano; Constantine P. Grigoropoulos
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Particle-enhanced near-field optical effect and laser writing for nanostructure fabrication
Author(s): Yongfeng Lu; L. Zhang; Wen Dong Song; Yuan Wei Zheng; Boris S. Luk'yanchuk
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Investigation of carbon nanoparticles converted from a polymer by UV-pulsed laser irradiation
Author(s): Sumei Huang; Yongfeng Lu; Minghui Hong; Zhuo Sun; Siew It Pang; Jian Ping Wang
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Processes in semiconductor materials after laser cutting
Author(s): Andrei R. Novoselov; Anatoly G. Klimenko
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Laser marking on IC package by micro-encapsulated tapes
Author(s): Kaidong D. Ye; Chengwu An; Yuan Yuan; Yongfeng Lu
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Hole drilling of glass-foam substrates with laser
Author(s): Yoshikazu Yoshida; Hiroyoshi Yajima; Yuji Hashidate; Hiroshi Ogura; Shuhei Ueda
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Selective photon-breaking of C-S bonds in polythiophene to form quasi-one-dimensional carbon chains in cubic nanocrystals
Author(s): ZhongMin Ren; Yongfeng Lu; H. W. Choy; Tow Chong Chong; S. C. Ng; P. Miao
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Pulsed-laser deposition of carbon nitride materials
Author(s): ZhongMin Ren; Yongfeng Lu; Z. F. He
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Laser beam bending of metallic foils
Author(s): Manfred Geiger; Frank Meyer-Pittroff
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Laser microbumping and contamination-free tagging on magnetic hard disk surfaces: techniques and applications
Author(s): DaMing Liu; Teng Soon Wee; Yuan Yuan; Yongfeng Lu; Minghui Hong; Ryan J. K. Goh
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Laser reflow plastic ball grid array
Author(s): DaMing Liu; Tao Chen; Yuan Yuan; Yongfeng Lu; Minghui Hong; Ryan J. K. Goh
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Optical and surface properties of ZnO thin films by PLD
Author(s): Yongfeng Lu; H. Q. Ni; ZhongMin Ren
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Laser ablation of Si in water and ambient air
Author(s): Sha Zhu; Minghui Hong; M. L. Koh; Yongfeng Lu
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What engineers should know about lasers
Author(s): Manfred Witt
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Laser cleaning technology and its application
Author(s): Wen Dong Song; Minghui Hong; L. Zhang; Yongfeng Lu; Tow Chong Chong
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Growth of (001)-oriented PZT thin films on amorphous SiO2 by pulsed laser deposition
Author(s): Jing Zhao; Li Lu; Carl V. Thompson; Yongfeng Lu; Wen Dong Song
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Fabrication of TiNi thin films by pulsed-laser deposition
Author(s): Xiaoyu Chen; Yongfeng Lu; ZhongMin Ren; Sha Zhu
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Composition and structure of BCN films prepared by ion beam-assisted pulsed laser deposition
Author(s): Hao Ling; Zhifeng Ying; JiaDa Wu; Jian Sun; Wei Shi; Yuancheng Du; Fuming Li
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Gallium nitride films synthesized by reactive pulsed laser deposition from a GaAs target
Author(s): Jian Sun; JiaDa Wu; Hao Ling; Wei Shi; Zhifeng Ying; Xunmin Ding; Zhuying Zhou; Fuming Li
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Electron cyclotron resonance plasma-assisted pulsed laser deposition of carbon nitride thin films
Author(s): Wei Shi; JiaDa Wu; Jian Sun; Hao Ling; Zhifeng Ying; Zhuying Zhou; Fuming Li
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Influence of laser fluence and laser repetition rate on the synthesis of aluminium nitride thin films by nitrogen-ion-assisted pulsed laser deposition
Author(s): Yeow Whatt Goh; Yongfeng Lu; ZhongMin Ren; Tow Chong Chong
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Pulsed laser deposition of nanocrystalline ZnSe:N thin films
Author(s): Ning Xu; Yuancheng Du; Fuming Li; Bong Hyung Boo
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Progressive growth of tungsten microcones using nanosecond pulsed-Nd:YAG laser irradiation in various atmospheres
Author(s): Yuji Kawakami; Eiichi Ozawa
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Cutting glass by laser
Author(s): Hyoung-Shik Kang; Soon-Kug Hong; Seok-Chang Oh; Jong-Yoon Choi; Min-Gyu Song
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Laser singulation of IC packages
Author(s): Chengwu An; Kaidong D. Ye; Yuan Yuan; Minghui Hong; Yongfeng Lu
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Particle on the surface: basic physical problems related to laser cleaning
Author(s): Boris S. Luk'yanchuk; Yuan Wei Zheng; Yongfeng Lu
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Effects of interpulse and intrapulse shaping during laser percussion drilling
Author(s): David K. Y. Low; Lin Li
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Ultrafast laser ablation of dielectrics employing temporally shaped femtosecond pulses
Author(s): Razvan Stoian; Mark Boyle; Andreas Thoss; Arkadi Rosenfeld; David Ashkenasi; Georg Korn; Eleanor E. B. Campbell; Ingolf V. Hertel
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mu-BGA (ball grid array) singulation with a pulsed Nd:YAG laser
Author(s): Kwang-Yeol Baek; Cheon Lee
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Characterization of modified surface of indium tin oxide film during process of laser patterning
Author(s): JiNan Zeng; Hwee Lin Koh; ZhongMin Ren; Wen Dong Song; Yongfeng Lu
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Temperature effect for exciton dynamics in ZnCdSe/ZnSe QWs
Author(s): JiNan Zeng; Yongfeng Lu; Yasuo Oka
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Laser micromachining for Ag ion exchanged glasses
Author(s): Tadashi Koyama; Keiji Tsunetomo; Kenji Kamada; Kenichi Nakama
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Microstructures formed on silicon wafer by CO2 laser irradiation
Author(s): Weijie Wang; Yongfeng Lu; Chengwu An; Minghui Hong
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Steam-assisted laser ablation of metal substrate
Author(s): M. L. Koh; Ming Hui Hong; Sha Zhu; Yongfeng Lu
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Diagnostics and real-time monitoring of pulsed laser ablation
Author(s): Ming Hui Hong; Yongfeng Lu; Tow Chong Chong
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Observation of temporary degeneration of material transmittance under strong laser irradiation
Author(s): Chengwu An; Kok Leong Ler; Yuan Yuan; Yeow Whatt Goh; Minghui Hong; Yongfeng Lu
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Advancement in very-short-wavelength emission in solid state lasers
Author(s): Muhammad Muddassir Gualini
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Laser thinning of the thickness of a-GeS2 films
Author(s): Shuichi Kawabata; Yoshihisa Murakami; Yasunori Ozawa; Moriaki Wakaki
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Orientation dependence of kinetics of laser-induced liquid-solid phase transitions in A3B5 single crystals
Author(s): Elena I. Gatskevich; Gennadii D. Ivlev
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Fabrication of microlenses and microlens arrays using local melting of glass plate by CO2 laser
Author(s): Moriaki Wakaki; Yuichi Komachi; Genichi Kanai; Hideo Fukumoto; Shuichi Kawabata
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Subpicosecond ion emission from transparent dielectrics
Author(s): Juergen Reif; Florenta Costache; Matthias Henyk
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All-optical full logic unit with femtosecond switching
Author(s): Reiner P. Schmid; Juergen Reif
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Polymer welding with lasers: chances and hurdles
Author(s): Friedrich G. Bachmann
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Fabrication of micropumps with Q-switched Nd:YAG-lasers
Author(s): Tuan-Anh Mai; Nam-Trung Nguyen
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Development of a high-performance UV-DPSS laser drilling system for PWB
Author(s): Daisuke Yokohagi; Yasuhiro Mizutani; Koki Ichihashi; Daiji Narita; Kenji Kawazoe; Hideaki Nagatoshi; Katsuichi Ukita; Hidehiko Karasaki
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Film growth on single MgO and SiO2 covered Si substrate by pulsed laser deposition
Author(s): Ying Su; Jing Zhao; Li Lu; Man On Lai; Wen Dong Song; Yongfeng Lu
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Laser ablation patterning of dielectric layer stacks for 193-nm mask fabricaton
Author(s): Juergen Ihlemann; Katharina Rubahn; Roland Thielsch
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Morphological characterization of various kinds of materials in femtosecond laser micromachining
Author(s): Kosuke Kawahara; Yasunobu Kurogi; Naoyuki Matsuo; Hiroshi Sawada; Atsushi Yokotani; Kou Kurosawa
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Development of laser turning using femtosecond laser ablation
Author(s): Atsushi Yokotani; Kosuke Kawahara; Yasunobu Kurogi; Naoyuki Matsuo; Hiroshi Sawada; Kou Kurosawa
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Pulsed laser deposition of ceramics and diamond-like carbon on PMMA for tribological applications
Author(s): Georg Schlaghecken; Yibran Perera; Ernst-Wolfgang Kreutz; Reinhart Poprawe
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Fabrication of Ce:YIG film with different composition by pulsed-laser deposition
Author(s): Yoshiki Nakata; Yuko Tashiro; Tatsuo Okada; Mitsuo Maeda; Sadao Higuchi; Kiyotaka Ueda
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Laser-ablation-based technique for flexible fabrication of microlenses in polymer materials
Author(s): Kris Naessens; Peter Van Daele; Roel G. Baets
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Recent progress of laser precision microfabrication in China
Author(s): Zhaogu Cheng; Guoliang Xu; Quanzhong Zhao; Cuiqing Liu
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Dry laser cleaning threshold fluence: How can it be measured accurately?
Author(s): Alanna Fernandes; Deb M. Kane
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Laser shaping of diamond for IR diffractive optical elements
Author(s): V. V. Kononenko; Vitali I. Konov; Sergej M. Pimenov; Alexander M. Prokhorov; Vladimir S. Pavelyev; Victor A. Soifer; Barbara Luedge; Michael Rudolf Duparre
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High-speed microvia formation with UV solid state lasers
Author(s): Corey M. Dunsky; Hisashi Matsumoto; Glenn Simenson
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Excimer laser crystallized poly-Si TFTs on plastic substrates
Author(s): Dharam Pal Gosain
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High-resolution 157-nm imaging for lithography and micromachining applications
Author(s): Malcolm C. Gower; Julian S. Cashmore; Michael D. Whitfield; Philipp Gruenewald
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Comparison of machining strategies for ceramics using frequency-converted Nd:YAG and excimer lasers
Author(s): Hans Kurt Toenshoff; Andreas Ostendorf; Klaus Koerber; Klaus Meyer
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Focal point images of phase-shifted laser beam using femtosecond optical polarigraphy
Author(s): Aritsune Nagamura; Hiroki Shibata; Koichi Toyoda
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Ablation deposition using phase-shifted ultrashort laser pulse
Author(s): Masanori Miyazawa; Atsushi Masagaki; Yasutaka Hanada; Koichi Toyoda
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Ultrafast laser-induced crystallization of amorphous silicon films
Author(s): Taeyul Choi; David J. Hwang; Constantine P. Grigoropoulos
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Synthesis of pure C40 TiSi2 for Si wafer fabrication
Author(s): S. Y. Chen; Zexiang Shen; S. Y. Xu; Alex K. See; Lap Hung Chan; Wen Shen Li
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Dynamic observation of laser-induced damage made inside of transparent materials
Author(s): Yoshiro Ito; Satoshi Kiyoku; Tsutomu Ogura; Naotake Mohri
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Characterization of fused silica ablation by F2-KrF excimer laser multiwavelength excitation process
Author(s): Kotaro Obata; Koji Sugioka; Toshimitsu Akane; Naoko Aoki; Koichi Toyoda; Katsumi Midorikawa
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Femtosecond pulses for medicine and production technology: overview of a German national project
Author(s): Friedrich Dausinger
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Precision drilling of metals and ceramics with short- and ultrashort-pulsed solid state lasers
Author(s): Christian Foehl; Detlef Breitling; Knut Jasper; Joachim Radtke; Friedrich Dausinger
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Laser microfabrication: present to future applications
Author(s): Gnian Cher Lim; Tuan-Anh Mai
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GaN micromachining by short wavelength pulsed laser irradiation
Author(s): Toshimitsu Akane; Koji Sugioka; Kotaro Obata; Naoko Aoki; Koichi Toyoda; Katsumi Midorikawa
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Application of photosensitive GeO2-B2O3-SiO2 thin films to optical waveguide
Author(s): Hiroaki Nishiyama; Isamu Miyamoto; Kenji Kintaka; Junji Nishii
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Hole formation process in laser deep drilling with short and ultrashort pulses
Author(s): Taras V. Kononenko; Sergei M. Klimentov; Serge V. Garnov; Vitali I. Konov; Detlef Breitling; Christian Foehl; Andreas Ruf; Joachim Radtke; Friedrich Dausinger
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Highly reliable high-power 266-nm all-solid-state UV laser
Author(s): Tetsuo Kojima; Susumu Konno; Shuichi Fujikawa; Masaki Seguchi; Yushi Takenaka; Koji Yasui; Tomosumi Kamimura; Masashi Yoshimura; Yusuke Mori; Takatomo Sasaki; Mitsuhiro Tanaka; Yukikatsu Okada
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High-power high-brightness diode-pumped solid state laser for precise laser processing
Author(s): Shuichi Fujikawa; Keisuke Furuta; Masaki Seguchi; Tetsuo Kojima; Yushi Takenaka; Koji Yasui
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In-situ measurement of VUV optical materials under F2 laser irradiation
Author(s): Yasuo Itakura; Akira Sumitani; Fumika Yoshida; Youichi Kawasa; Jing Zhang; Osamu Wakabayashi; Hakaru Mizoguchi
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Precision machining of innovative materials using 157-nm excimer laser radiation
Author(s): Andreas Ostendorf; Uwe Stamm; Thorsten Temme
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Developments in laser joining and welding of plastics using high-power laser diodes
Author(s): Tony Hoult; Raymond Ong
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Uniformity initialization optical system for phase-change optical disk
Author(s): Masaaki Takita; Yoshihiro Okino; Sumio Nakahara
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Holographic optical element for laser soldering
Author(s): Sumio Nakahara; Tatsuya Hayashi; Noriyuki Sudou; Shigeyoshi Hisada; Takeyoshi Fujita
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Laser microprocessing in data storage industry
Author(s): Tow Chong Chong; Yongfeng Lu
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Laser-induced expansion and ablation mechanisms of organic materials
Author(s): Yoichiroh Hosokawa; Takashi Mito; Takuji Tada; Tsuyoshi Asahi; Hiroshi M. Masuhara
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Laser processes for MEMS manufacture
Author(s): Andrew S. Holmes
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High-accuracy laser mask repair technology using ps UV solid state laser
Author(s): Yukio Morishige
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Modeling of chemical and mechanical aspects in laser restoration of artworks
Author(s): Costas Fotakis; Athanassia Athanassiou; Efi Andreou; Vivi Tornari; Antonia Bonarou; Laura Antonucci; Dmitrios Anglos; Savas K. Georgiou; Vassilis Zafiropulos
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Novel ultrashort-pulse fiber lasers and their applications
Author(s): Heinrich Endert; Almantas Galvanauskes; Gregg Douglas Sucha; Rajesh S. Patel
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History and future prospects of excimer lasers
Author(s): Dirk Basting; Klaus D. Pippert; Uwe Stamm
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Scattering of evaporation particles in ultrashort-pulse laser ablation
Author(s): Etsuji Ohmura; Ichirou Fukumoto; Isamu Miyamoto
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Temperature dependence of SHG conversion efficiency of nonlinear optical crystal
Author(s): Etsuji Ohmura; Tatsuya Taniguchi; Isamu Miyamoto
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Ultra-line-narrowed F2 laser for microlithography
Author(s): Hiroshi Komori; Tatsuya Ariga; Hidenori Watanabe; Takahito Kumazaki; Naoki Kitatochi; Kotaro Sasano; Yoshifumi Ueno; Toshihiro Nishisaka; Ryoichi Nohdomi; Kazuaki Hotta; Hakaru Mizoguchi; Kiyoharu Nakao
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Laser-induced rear ablation of metal thin films
Author(s): Tomokazu Sano; Hirokazu Yamada; Takayuki Nakayama; Isamu Miyamoto
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Generation of periodic microstructures with femtosecond laser pulses
Author(s): Hans Kurt Toenshoff; Andreas Ostendorf; Frank Korte; J. Serbin; Thorsten Bauer
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Precise laser-assisted 3D microstructuring of metals and alloys
Author(s): Gerd Sepold; Andreas Stephen; Thorsten Lilienkamp; Simeon Metev
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Wavelength dependence of laser cleaning for field emitter arrays
Author(s): Mikio Takai; Naoki Suzuki; Oguz Yavas; Akihiko Hosono; Soichiro Okuda
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Laser cleaning of silicon wafers: mechanisms and efficiencies
Author(s): Mario Mosbacher; M. Bertsch; H.-J. Muenzer; V. Dobler; B.-U. Runge; Dieter Baeuerle; Johannes Boneberg; Paul Leiderer
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Liquid-assisted pulsed laser cleaning with near-infrared and ultraviolet pulsed lasers
Author(s): Constantine P. Grigoropoulos; Dongsik Kim
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Peculiarities of steam laser cleaning
Author(s): Vadim P. Veiko; Elena A. Shakhno; Boris V. Volkovyski
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Model for discoloration effect in pigments in laser cleaning of artworks by laser ablation
Author(s): Boris S. Luk'yanchuk; Vassilis Zafiropulos
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Laser cleaning of particles from surfaces: issues relating to sample preparation
Author(s): Deb M. Kane; Alanna Fernandes
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Optical near-field effects in surface nanostructuring and laser cleaning
Author(s): H.-J. Muenzer; Mario Mosbacher; M. Bertsch; Oliver Dubbers; F. Burmeister; A. Pack; Reinhold Wannemacher; B.-U. Runge; Dieter Baeuerle; Johannes Boneberg; Paul Leiderer
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Dynamic particle removal by nanosecond dry laser cleaning: theory
Author(s): Nikita Arnold; G. Schrems; T. Muehlberger; M. Bertsch; Mario Mosbacher; Paul Leiderer; Dieter Baeuerle
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Laser-induced surface cleaning from diamond particles
Author(s): Vitali I. Konov; V. V. Kononenko; A. M. Lomonosov; V. G. Mihalevich; Sergej M. Pimenov; K. V. Zhuk
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Comparison of ITO ablation characteristics using KrF excimer laser and Nd:YAG laser
Author(s): KyoungCheol Lee; Cheon Lee
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Inazuma: 12 watts of UV at 355 nm
Author(s): Dafydd T. Thomas; Mark S. Keirstead; Norman Hodgson
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Laser microfabrication by ultrashort UV pulses
Author(s): I. Zergioti; D. G. Papazoglou; Nikos A. Vainos; Costas Fotakis
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