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Proceedings of SPIE Volume 4407

MEMS Design, Fabrication, Characterization, and Packaging
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Volume Details

Volume Number: 4407
Date Published: 30 April 2001
Softcover: 50 papers (452) pages
ISBN: 9780819441089

Table of Contents
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MEMS and mil/aero: technology push and market pull
Author(s): Thomas H. Clifford
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Model library and tool support for MEMS simulation
Author(s): Peter Schwarz; Peter Schneider
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Suspended substrate stripline structures evaluation for millimeter-wave circuits application
Author(s): Jeffrey S. Fu; Chao Lu; Boon Chim Kwok; Wendy Y. Lee
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Experimental investigation, modeling, and simulations for MEMS-based gas sensor used for monitoring process chambers in semiconductor manufacturing
Author(s): Ijaz H. Jafri; Frank DiMeo; Jeffrey W. Neuner; Sue DiMascio; James Marchetti
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Component-based assistants for MEMS design tools
Author(s): Kai Hahn; Rainer Brueck; Christian Schneider; Christian Schumer; Jens Popp
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Design of a micro-Wankel rotary engine for MEMS fabrication
Author(s): Kyle C. Jiang; Philip D. Prewett; M. C. L. Ward; Y. Tian; H. Yang
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SPICE modeling of liquid capacitance in micromachined silicon capillaries
Author(s): Paul V. Rainey; S. J. Neil Mitchell; Harold S. Gamble
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Electromechanical analysis of microelectromechanical structures and dynamic simulations of laterally vibratory microgyroscope
Author(s): Jing Fang; W. B. Zhang; C. S. Wang; Z. H. Li; D. C. Zhang
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Characterization and optimization of deep dry etching for MEMS applications
Author(s): Alexandra L. Rickard; Mark E. McNie
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Comparison of Bosch and cryogenic processes for patterning high-aspect-ratio features in silicon
Author(s): Martin J. Walker
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Fabrication of silicon sidewall profiles for fluidic applications using modified advanced silicon etching
Author(s): Chi-fu Wu; Lars Erdmann; Kaigham J. Gabriel; S. C. Yao
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Nd:YAG laser micromachining of SiC precision structures for MEMS
Author(s): Ernst-Wolfgang Kreutz; Ruth Weichenhain; Alexander Horn
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Profile control of SU-8 photoresist using different radiation sources
Author(s): Zheng Cui; Derek W.K. Jenkins; Andreas Schneider; Geoff McBride
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Computational synthesis of lithographic mask layouts for silicon microcomponents
Author(s): Stephanus Buettgenbach; Ulli Hansen; Lars Steffensen
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Advances in silicon-to-glass bonding with laser
Author(s): Michael J. Wild; Arnold Gillner; Reinhart Poprawe
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Fine-grained polysilicon films with built-in tensile strain
Author(s): Mohammed Obaidur Rahman; M. Ando
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Micro stereo lithography for fabrication of 3D polymeric and ceramic MEMS
Author(s): Vijay K. Varadan; Vasundara V. Varadan
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Novel equipment for friction force measurement on MEMS and microcomponents
Author(s): Martin Schmidt; Andreas Wortmann; Holger Luethje; Stephanus Buettgenbach
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Bio/chemical microsystem designed for wafer scale testing
Author(s): Anders M. Jorgensen; Klaus B. Mogensen; Weimin Rong; Pieter Telleman; Joerg P. Kutter
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Breakdown voltage behavior of electrostatic microactuators
Author(s): Resh S. Dhariwal; Mohamad Fizal Ahmad; Marc P.Y. Desmulliez
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3D-CSP: an innovative packaging method based on RMPD
Author(s): Helge Bohlmann; Reiner Goetzen; Andrea Reinhardt
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Method of localized and low-temperature wafer bonding for microsystem packaging
Author(s): S.C. Shen; Chengtang Pan; Hwai-Pwu Chou
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MEMS hybridization: bridging the free-space gap
Author(s): Paul Blair; Duncan McMillan; Jean Podlecki; Mark L. Begbie; Kevin Yallup
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Investigation of improved designs for rotational micromirrors using multiuser MEMS processes
Author(s): Julianna E. Lin; Feras S. J. Michael; Andrew G. Kirk
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Wafer scale packaging for a MEMS video scanner
Author(s): Mark P. Helsel; Jon Barger; David W. Wine; Thor D. Osborn
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New actuation structure for the deformation of continuous mirrors for adaptive optics
Author(s): Emmanuel Quevy; Lionel Buchaillot; Dominique Collard
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Silicon MEM technology for millimeter-wave applications
Author(s): Katia M. Grenier; D. Dubuc; Patrick Pons; Robert Plana; L. Rabbia; T. Parra; Jacques Graffeuil
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Infrastructure needs for RF MEMS production
Author(s): Henne van Heeren
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Low-cost in-line phase shifter (IPS) using electrostatic MEMS for large antenna arrays
Author(s): Seong-Hwoon Kim; Jeff Dean; Leslie D. Kramer
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Wireless surface acoustic wave and MEMS-based microsensors
Author(s): Vijay K. Varadan; Vasundara V. Varadan
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MEMS technologies for rf communications
Author(s): Qun Wu; B. K. Kim
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Electrothermal modeling of silicon PCR chips
Author(s): Zheng Cui; Zhan Zhao; Shanhong Xia
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Microfabrication and application of reservoir pins for liquid transfer in biotechnology
Author(s): Jonathan Pearson; David F. Moore; William I. Milne; Alastair J. W. Taylor; Stuart A. Elmes; Martin Davies
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Fabrication of microshutter arrays for space application
Author(s): Mary J. Li; I. S. Aslam; Audrey J. Ewin; Rainer K. Fettig; David E. Franz; Carl A. Kotecki; Alexander S. Kutyrev; Samuel Harvey Moseley; Carlos J. Monroy; David Brent Mott; Yun Zheng
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Novel fabrication process for 3D meander-shaped microcoils in SU-8 dielectric and their application to linear micromotors
Author(s): Volker Seidemann; Stephanus Buettgenbach
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Design and performance of a polysilicon surface micromachined microengine realized with arrays of asymmetrical electrothermal microactuators
Author(s): Edward S. Kolesar; Matthew D. Ruff; Simon Y. Ko; Richard J. Wilks; Jeffrey T. Howard; Peter B. Allen; Josh M. Wilken; Jorge E. Bosch
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Operation cycle modeling for electrostatic-type microrelay
Author(s): Georgy I. Efremov; Nikolay Ivanovich Mukhurov
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Modeling and simulation of a silicon microdiaphragm piezoresistive pressure sensor using finite element analysis (FEA) tools
Author(s): A. J. Pang; Marc P.Y. Desmulliez
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High-level simulation of an electrostatic micromotor
Author(s): Aitor Endemano; Matthew Dunnigan; Marc P.Y. Desmulliez
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Integrated microsystems in standard CMOS technology with applications in the field of chemical sensors
Author(s): Salvatore Baglio; Bruno Ando; Nicolo Savalli
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High-volume production cost savings methods in MEMS fabrication
Author(s): Joe Brown
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Coplanar waveguides on SOI and OPS substrates
Author(s): Harold S. Gamble; Kam On Leong; Syed H. Raza; Brian Mervyn Armstrong; S. J. Neil Mitchell; Suidong Yang; Vince Fusco; Carson Stewart
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Novel silicon bulk micromachining process for submillimeter rectangular waveguide fabrication
Author(s): Ken K. Ma; Timothy D. Drysdale; Richard J. Blaikie; David R. S. Cumming
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Development of a laser micromachining toolbox and its application to the production of 3D microstructures
Author(s): Jako Greuters; Nadeem Hasan Rizvi
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Micro-CT for nondestructive 3D reconstruction of MEMS and sensors
Author(s): Alexander Sasov
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Heterogeneous substrates for high-temperature and optical applications
Author(s): Manfred Reiche; V. Dragoi; M. Alexe; Ulrich M. Goesele; Erich Thallner; Ch. Schaefer; F. P. Lindner
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Self-parking fiber and self-latching vertical mirror for fiber optical switch array
Author(s): S.C. Shen; Cheng-Tang Pan; Hwai-Pwu Chou
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Transport in a deformable microchannel flow
Author(s): W. Kwang-Hua Chu; Jing Fang
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Microwave frequency acoustic resonators implemented on monolithic Si/AIN substrates
Author(s): Cinzia Caliendo; Enrico Verona; Alessandro Cimmino
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Vertical hall sensor of high sensitivity and excellent confinement fabricated on the (110) silicon substrate
Author(s): Hong-Wei Chiu; Sheyshi Lu; Hai Lan
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