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Proceedings of SPIE Volume 4400

Microsystems Engineering: Metrology and Inspection
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Volume Details

Volume Number: 4400
Date Published: 23 October 2001
Softcover: 19 papers (182) pages
ISBN: 9780819440952

Table of Contents
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Application of digital holography for the inspection of microcomponents
Author(s): Wolfgang Osten; Soenke Seebacher; Werner P. O. Jueptner
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Three-dimensional device characterization by high-speed cinematography
Author(s): Claus Maier; Eberhard P. Hofer
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Microphotogrammetry for 3D strain measurement and microassembly control
Author(s): Rainer Tutsch; Reinhold Ritter; Diana Ispas; Marcus Petz; Leobaldo Casarotto
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Three-dimensional full-field dynamical characterization of micromechanical devices by stroboscopic white light scanning interferometry
Author(s): Alain Bosseboeuf; Philippe Nerin; Pascal Vabre; Sylvain Petitgrand; Reda Yahiaoui
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Inspection system for MEMS characterization on wafer level using ESPI
Author(s): Petra Aswendt; Claus-Dieter Schmidt; Dirk Zielke; Steffen Schubert
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Quantitative time-averaged microscopic interferometry for micromechanical device vibration mode characterization
Author(s): Sylvain Petitgrand; Reda Yahiaoui; Alain Bosseboeuf; Kamran Danaie
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Characterization of thin film MEMS using photo-acoustic microscopy
Author(s): Carmen M. Hernandez; Todd W. Murray; Sridhar Krishnaswamy
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Paraboloidal ellipsometer with accurate retardance and latitude
Author(s): Jiun-Yan Wu; Shuen-Chen Shiue; Chih-Kung Lee; Solomon J. H. Lee
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High-resolution measurement of thin metallic films and multilayers by femtosecond laser pulses
Author(s): Jacqueline Vollmann; Dieter Michael Profunser; Jurg Dual
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Quantitative optical measurement of microcantilever vibration: applications to near-field microsensor
Author(s): Pascal Vairac; Rodrigue Rousier; Raphail Patois; Bernard Cretin
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Resolution improvement of pulsed laser experiments with a micro-optomechanical focusing tip
Author(s): Dieter Michael Profunser; Jacqueline Vollmann; Jurg Dual
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Fabrication of multilayer GaAlAs/GaAs microtips for VCSEL-based optical near-field sensors
Author(s): Christophe Gorecki; Sabry Khalfallah
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Fully integrated on-chip laboratories for MEMS-based material and structure mechanical analysis
Author(s): Patrice Minotti
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Optical measurement methods to study dynamic behavior in MEMS
Author(s): Christian Rembe; Rishi Kant; Richard S. Muller
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Waveguide microinterferometry system for microelements investigation
Author(s): Leszek A. Salbut; Michal Jozwik; Christophe Gorecki; Seung Seoup Lee
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New measurement system for microscopic formtesting of microstructures by means of multiple-wavelength interferometry
Author(s): Karsten Schneefuss; Tilo Pfeifer
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Microfabricated ZnSe diffractive optical elements for CO2 laser
Author(s): Keiji Ebata; Keiji Fuse; Kenichi Kurisu; Takeshi Okada; Takayuki Hirai; Hirokuni Nanba
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Automated interferometric system for bulge and blister test measurements of micromachined membranes
Author(s): Reda Yahiaoui; Kamran Danaie; Sylvain Petitgrand; Alain Bosseboeuf
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Mechanical properties of polarimetric smart structures
Author(s): Witold Konopka; Tomasz R. Wolinski; Grzegorz Dymny
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