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Proceedings of SPIE Volume 4274

Laser Applications in Microelectronic and Optoelectronic Manufacturing VI
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Volume Details

Volume Number: 4274
Date Published: 29 June 2001
Softcover: 55 papers (516) pages
ISBN: 9780819439529

Table of Contents
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Laser manipulation of the size and shape of supported metal nanoparticles
Author(s): Johannes Bosbach; Christian Hendrich; Frank Stietz; Tigran A. Vartanyan; Thomas Wenzel; Frank Traeger
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Laser diode (LD) imaging and photopolymers for LD imaging
Author(s): Toshiyuki Urano
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Microcomponents manufacturing for precise devices by copper vapor laser
Author(s): Sergey Gorny; Michail O. Nikonchuk; Igor V. Polyakov
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Diamond-based deep-UV sensors for lithography applications
Author(s): Michael D. Whitfield; Stuart P. Lansley; Olivier Gaudin; Robert D. McKeag; Nadeem Hasan Rizvi; Richard B. Jackman
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Surface modification of aluminum alloy 2024-T3 via femtosecond pulse laser irradiation
Author(s): Kai Dou; Robert L. Parkhill; Kenneth H. Church; Edward T. Knobbe
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Microscale bending using pulsed and cw laser
Author(s): X. Richard Zhang; Xianfan Xu; Andrew C. Tam
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Dynamics and mechanism of discrete etching of organic materials by femtosecond laser excitation
Author(s): Yoichiroh Hosokawa; Masaki Yashiro; Tsuyoshi Asahi; Hiroshi M. Masuhara
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Structuring silicon with femtosecond lasers
Author(s): Hans Kurt Toenshoff; Andreas Ostendorf; Thilo Wagner
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Time-resolved study of femtosecond microfabrication in silica glass
Author(s): Hiroaki Misawa; Saulius Juodkazis; Andrius Marcinkevicius; Mitsuru Watanabe; Vygantas Mizeikis; Shigeki Matsuo
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Submicron structuring of solid targets with femtosecond laser pulses
Author(s): Frank Korte; Stefan Nolte; Boris N. Chichkov; Carsten Fallnich; Andreas Tuennermann; Herbert Welling
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Short-pulse and short-wavelength ablation of semiconductor materials
Author(s): Andreas Ostendorf; Thorsten Bauer; Thorsten Temme; Thilo Wagner
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157-nm laser-induced modification of fused-silica glasses
Author(s): Jie Zhang; Peter R. Herman; Christian Lauer; Kevin P. Chen; Xiaoli Midori Wei
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GaN etching by simultaneous irradiation of KrF excimer laser and F2 laser
Author(s): Toshimitsu Akane; Koji Sugioka; Kotaro Obata; Shintaro Nomura; Kiyotaka Hammura; Naoko Aoki; Koichi Toyoda; Yoshinobu Aoyagi; Katsumi Midorikawa
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Multiwavelength excitation process of fused-silica by combination of F2 and KrF excimer lasers
Author(s): Kotaro Obata; Koji Sugioka; Toshimitsu Akane; Naoko Aoki; Koichi Toyoda; Katsumi Midorikawa
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UV-FEL photoelectron emission microscopy of the dynamics of nanostructures on silicon surfaces
Author(s): Woochul Yang; Harald Ade; Robert J. Nemanich
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Transfer of orbital angular momentum to metal particles confined using optical tweezers
Author(s): Anna T. O'Neil; Miles J. Padgett
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Prototype laser-activated bimetallic thermal resist for microfabrication
Author(s): Marinko V. Sarunic; Glenn H. Chapman; Richard Yuqiang Tu
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Transparent conducting indium tin oxide thin film grown on flexible substrate by pulsed-laser deposition for organic light-emitting devices
Author(s): Heungsoo Kim; James S. Horwitz; Gary P. Kushto; Zakya H. Kafafi; Alberto Pique; Douglas B. Chrisey
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Ejection of particles placed on a thin film by laser-induced forward transfer
Author(s): Yoshiki Nakata; Tatsuo Okada; Mitsuo Maeda
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Synthesis of silicon nanoparticles and impurity doping by laser ablation
Author(s): Kouichi Murakami; Tetsuya Makimura; Taiji Mizuta; Changquing Li; Daishi Takeuchi
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Laser ablation of solid nitrogen films at a cryogenic temperature
Author(s): Hiroyuki Niino; Tadatake Sato; Akira Yabe
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Thermal mechanisms of subnanosecond ablation
Author(s): David A. Willis; Xianfan Xu
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Propagation of short-pulsed laser radiation and stages of ablative deep-channel formation
Author(s): Taras V. Kononenko; Sergei M. Klimentov; Vitali I. Konov; P. A. Pivovarov; Serge V. Garnov; Friedrich Dausinger; Detlef Breitling
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Plume formation and optical breakdown on KrF excimer laser-irradiated silica glass
Author(s): Yoshizo Kawaguchi; Steve C. Langford; J. Thomas Dickinson
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Characterization of polyperinaphthalenic organic semiconductor thin films prepared by excimer laser ablation and application to anode electrodes for ultrathin rechargeable Li ion batteries
Author(s): Satoru Nishio; Kazuyuki Tamura; Yukari Tsujine; Tomoko Fukao; Jun Murata; Masyoshi Nakano; Akiyoshi Matsuzaki; Hiroyasu Sato; Nobuo Ando; Yukinori Hato
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Laser micromachining: new techniques and developments for display applications
Author(s): Nadeem Hasan Rizvi; Jako Greuters; Jason Dallimore; Keren Hamilton; Robin Clabburn; Bran Ebsworth
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High-intensity laser processing of thin films
Author(s): Vladislav V. Yakovlev; J. Magyar; C. Aita; A. Sklyarov; Katerina Mikhailichenko
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Production of solar cells with Om contact areas by laser processing
Author(s): Valery S. Serbezov; Peter Schindov
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Laser fabrication and assembly processes for MEMS
Author(s): Andrew S. Holmes
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Polymer microsystems by excimer laser ablation: from rapid prototyping to large-number fabrication
Author(s): Thomas Klotzbuecher; Torsten Braune; Susanne Sigloch; Jens Hossfeld; Michel Neumeier; Hans-Dieter Bauer; Wolfgang Ehrfeld
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Laser direct writing of microbatteries for integrated power electronics
Author(s): Alberto Pique; Karen E. Swider-Lyons; David W. Weir; C. T. Love; R. Modi
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Tungsten microcone arrays grown by nanosecond pulsed Nd: YAG laser irradiation
Author(s): Yuji Kawakami; Eiichi Ozawa
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Laser micromachining of mold inserts for replication techniques: state of the art and applications
Author(s): Wilhelm Pfleging; Thomas Hanemann; W. Bernauer; Maika Torge
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Laser-light delivery microtools based on laser technology: design, fabrication, and applications
Author(s): Vadim P. Veiko; Nikolay B. Voznesensky
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Microstereolithography and its application to biochemical IC chip
Author(s): Koji Ikuta; Shoji Maruo; Tadahiro Hasegawa; Takao Adachi
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Laser-assisted fabrication of electronic circuits using the ADDIMID process
Author(s): Gerd Esser; Bernd Jahrsdoerfer; Uwe Urmoneit
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Novel laser trimming technique for microelectronics
Author(s): Michel Meunier; Yves Gagnon; Yvon Savaria; Alain Lacourse; Maxime Cadotte
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Manufacture of a conformal multilayer rf antenna substrate using excimer mask imaging technology and a 6-axis robot
Author(s): Michel Charrier; Daniel Everett; Jim Fieret; Tobias Karrer; Sven Rau; Jean-Luc Valard
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Laser direct writing of copper on polyimide, FR4, and Al203 substrates from solid-metalorganic film
Author(s): Xincai Wang; HongYu Zheng; Gnian Cher Lim
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Laser processing of components for polymer mircofluidic and optoelectronic products
Author(s): Arnold Gillner; Elke A. Bremus-Koebberling; Martin Wehner; Ulrich A. Russek; Thomas Berden
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Laser polishing of GaN
Author(s): Jan J. Dubowski; S. Moisa; B. Komorowski; Haipeng Tang; James B. Webb
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Debris-reduced laser machining of polymeric waveguides for optoelectronic applications
Author(s): Thomas Berden; Ernst-Wolfgang Kreutz; Reinhart Poprawe
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Multilevel diffractive optical element manufacture by excimer laser ablation and halftone masks
Author(s): Francois Quentel; Jim Fieret; Andrew S. Holmes; Sylvain Paineau
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Preparation of CO2 lasers of the Macken type: thin gold film rings array catalyst inside the discharge capillary
Author(s): Yuzhi Wang
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Beam-shaping application in laser heat processing
Author(s): Si Lu; Deer Yi; Yingbai Yan; Lin Pang; Guofan Jin; Minxian Wu
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Comparison of microstructuring irradiated by 193-nm and 308-nm lasers
Author(s): Lin Zhang; Qihong Lou; Yunrong Wei; Jingxing Dong
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Comparison of tin oxide chemical sensors prepared by PLD and laser-assisted CVD methods
Author(s): Jan Lancok; Miroslav Jelinek; Filip Vyslouzil; Martin Vrnata; Vladimir Myslik; Antonino Santoni; Ivano Menucucci
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Fabrication of 3D interconnected network of microchannels inside silica by femtosecond irradiation and etching
Author(s): Andrius Marcinkevicius; Saulius Juodkazis; Vygantas Mizeikis; Mitsuru Watanabe; Shigeki Matsuo; Junji Nishii; Hiroaki Misawa
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ITO thin film fabrication assisted by the infrared free-electron laser
Author(s): Masato Yasumoto; Akira Ishizu; Natsuro Tsubouchi; Kunio Awazu; Takio Tomimasu
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Capacitive discharge excilamps with short duration of radiation pulse
Author(s): Victor F. Tarasenko; Mikhail V. Erofeev; Mikhail I. Lomaev; Edward A. Sosnin; Dmitrii V. Shitz
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Ablation and cleaning of wafer surface by excimer laser
Author(s): Yong-Kee Kim; Dae-Jin Kim; Je-Kil Ryu; Sung-Sik Pak
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F2 lasers: high-resolution optical processing system for shaping photonic components
Author(s): Peter R. Herman; Kevin P. Chen; Xiaoli Midori Wei; Jie Zhang; Juergen Ihlemann; Dirk Schaefer; Gerd Marowsky; Peter Oesterlin; Berthold Burghardt
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High-resolution 157-nm laser micromachining of polymers
Author(s): Philipp Gruenewald; Julian S. Cashmore; Jim Fieret; Malcolm C. Gower
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Laser-drilled microhole profiles in fiber-reinforced composites
Author(s): Frank F. Wu; Stewart W. Williams; Graeme Scott; Richard D. Pilkington
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PLD of hard ceramic coatings
Author(s): Yibran Perera; Jens Gottmann; Andreas Husmann; Thomas Klotzbuecher; Ernst-Wolfgang Kreutz; Reinhart Poprawe
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