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Proceedings of SPIE Volume 4230

Micromachining and Microfabrication
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Volume Details

Volume Number: 4230
Date Published: 20 October 2000
Softcover: 30 papers (256) pages
ISBN: 9780819439024

Table of Contents
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Electroplated solenoid-type inductors for CMOS rf CO
Author(s): Chul Nam; Wonseo Choi; KukJin Chun
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Frequency tunable micromachined rf oscillators
Author(s): Yee Chong Loke; Kim Miao Liew; Q. Zou; Ai Qun Liu
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MEMS variable capacitor for one-chip rf front end
Author(s): Seonho Seok; Chul Nam; KukJin Chun
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High-frequency rf microswitches using MEMS-integrated fabrication process
Author(s): Ai Qun Liu; Geok Ing Ng; Yee Loy Lam; S. T. Chew; S. K. Ting
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Microfabrication technology for high-speed Si-based systems
Author(s): Hiromu Ishii; Shouji Yagi; Kunio Saito; Akihiko Hirata; Kazuhisa Kudou; Masaki Yano; Tadao Nagatsuma; Katsuyuki Machida; Hakaru Kyuragi
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Microfabrication of 32x32 uncooled IR focal plane array
Author(s): Weiguo Liu; Lingling Sun; Weiguang Zhu; Ooi Kiang Tan
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Improvements of an x-ray microcalorimeter for detecting cosmic rays
Author(s): Yuichi Yokoyama; Shuichi Shoji; Kazuhisa Mitsuda; Ryuichi Fujimoto; Toshiyuki Miyazaki; Tohru Oshima; Masahiro Yamazaki; Naoko Iyomoto; Kazuo Futamoto; Yoshinao Ishizaki; Tomohiro Kagei
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Microsensor for noncontact temperature measurement
Author(s): Xiaoping Li; W. F. Chan
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Thermal modeling of low-power micromachined solid state integrated gas sensor
Author(s): Yanju Liu; Hejun Du; Yongqing Fu
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Novel self-oscillating anemometer with capacitance-based sensing
Author(s): Yen-Peng Kong; Francis E.H. Tay; Yuan Xu
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MEMS atomizer based on Rayleigh instability-driven breakup of filaments
Author(s): Yen-Peng Kong; Francis E.H. Tay; Yuan Xu
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Micromachined muscle cell analysis chip
Author(s): Weijie Wang; Paul C. H. Li; M. Parameswaran
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New design concept for vibrating microgyroscope
Author(s): V. J. Logeeswaran; David C.K. Ng; Francis E.H. Tay
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Optimized layout generator for microgyroscope
Author(s): Francis E.H. Tay; Shifeng Li; V. J. Logeeswaran; David C.K. Ng
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Optimization methodology for low-g microaccelerometer
Author(s): Francis E.H. Tay; Xu Jun; V. J. Logeeswaran
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Preparation of crystalline TiNi shape-memory alloy thin film for MEMS applications
Author(s): Yongqing Fu; Hejun Du; Weiming Huang; Xu Huang; Jianmin Miao; Yong Liu
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High-aspect-ratio structure formation in x-ray lithography
Author(s): Vladimir A. Kudryashov; Sing Lee
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Laser patterning indium tin oxide (ITO) coated on PET substrate
Author(s): Hong-Yin Tsai; Hsiharng Yang; Chengtang Pan; Min-Chieh Chou
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Patterning of diamond microstructures on Si substrate by bulk and surface micromachining
Author(s): Yongqing Fu; Hejun Du; Jianmin Miao; Yanju Liu
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4x4 nonblocking matrix switch based on MOEMS
Author(s): Laurent Dellmann; Cornel Marxer; Nico F. de Rooij
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4x4 MEMS optical cross-connections (OXCs)
Author(s): Ai Qun Liu; Xu Ming Zhang; Yee Loy Lam
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Dynamic characteristics measurement system for optical scanning micromirror
Author(s): J.C. Chiou; Yu-Chen Lin; Yi-Cheng Chang
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Integrated WDM frequency tuner using polysilicon surface micromachining process
Author(s): Xu Ming Zhang; Yee Loy Lam; Ai Qun Liu
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Tunable Fabry-Perot cavities
Author(s): Kevin J. Winchester; Sue M.R. Spaargaren; John M. Dell
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Realization of multifiber ferrule mold inserts fabricated by the LIGA process
Author(s): Ruey Fang Shyu; Hsiharng Yang; Min-Chieh Chou
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Study on mask technology of CVD diamond thin films by RIE etching
Author(s): Chunsheng Yang; Guifu Ding; Xiang Yao; Xiaolin Zhao
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Reactive ion etching of CVD diamond films for MEMS applications
Author(s): Guifu Ding; Xiaolin Zhao; Aibin Yu; Chunsheng Yang; Bingchu Cai; Xiang Yao
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Process monitoring of LPCVD silicon nitride and polysilicon by variable-angle spectroscopic ellipsometry
Author(s): Soon Yoong Loh; Terence Kin Shun Wong; Man Siu Tse; Wang Ling Goh
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Micro-metal-forming technology using specially designed microtool
Author(s): Isamu Aoki; Masahiro Sasada
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Tools and processes for MEMS and nanotechnology
Author(s): Philip D. Prewett; Syed Ejazu Huq; M. C. L. Ward
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