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Proceedings of SPIE Volume 4180

MEMS Reliability for Critical Applications
Editor(s): Russell A. Lawton
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Volume Details

Volume Number: 4180
Date Published: 10 August 2000
Softcover: 16 papers (152) pages
ISBN: 9780819438362

Table of Contents
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Electrostatic discharge/electrical overstress susceptibility in MEMS: a new failure mode
Author(s): Jeremy A. Walraven; Jerry M. Soden; Danelle M. Tanner; Paiboon Tangyunyong; Edward I. Cole; Richard E. Anderson; Lloyd W. Irwin
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Fracture tests of etched components using a focused ion beam machine
Author(s): Jonathan L. Kuhn; Rainer K. Fettig; Samuel Harvey Moseley; Alexander S. Kutyrev; Jon Orloff
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Failure analysis of tungsten-coated polysilicon micromachined microengines
Author(s): Jeremy A. Walraven; Seethambal S. Mani; James G. Fleming; Thomas J. Headley; Paul G. Kotula; Alejandro A. Pimentel; Michael J. Rye; Danelle M. Tanner; Norman F. Smith
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Ultrasonic actuation for MEMS dormancy-related stiction reduction
Author(s): Ville Kaajakari; Shyi-Herng Kan; Li-Jen Lin; Amit Lal; M. Steven Rodgers
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Effects of temperature on surface adhesion in MEMS structures
Author(s): Jeffrey M. Jennings; Leslie M. Phinney
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Characterization of Kovar-Pyrex anodically bonded samples: a new packaging approach for MEMS devices
Author(s): Stephen E. Vargo; Amanda A. Green; Juergen Mueller; David P. Bame; Robert H. Reinicke
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Mechanical reliability of surface-micromachined self-assembling two-axis MEMS tilting mirrors
Author(s): Arman Gasparyan; Vladimir A. Aksyuk; Paul A. Busch; Susanne Arney
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Electrical and environmental reliability characterization of surface-micromachined MEMS polysilicon test structures
Author(s): Carolyn D. White; Herbert R. Shea; Kimberly K. Cameron; Flavio Pardo; Cristian A. Bolle; Vladimir A. Aksyuk; Susanne Arney
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Micro nano technology visualization (MNTV) of micromachined MEMS polysilicon structures
Author(s): Russell A. Lawton; Gisela Lin; Joanne Wellman; Leslie M. Phinney; Jose Uribe; Edward Griffith; Ingrid De Wolf; Eric Lawrence
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Mechanical effects of fatigue and charge on CMOS MEMS
Author(s): Kevin M. Frederick; Gary K. Fedder
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Anodic oxidation and reliability of MEMS polysilicon electrodes at high relative humidity and high voltages
Author(s): Herbert R. Shea; Arman Gasparyan; Carolyn D. White; Robert B. Comizzoli; David Abusch-Magder; Susanne Arney
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Effect of storage life and drive signals on the reliability of the Sandia Microengine
Author(s): Chad B. O'Neal; Ajay P. Malshe; William P. Eaton
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Diagnosis of microcrack initiation and estimation fracture toughness for micromachined silicon comb device with prenotch actuated by electrostatic force
Author(s): Se-Ho Lee; Jae Sug Kim; Y. Eugene Pak; Jong up Jeon; Dongil Kwon
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MEMS/MOEMS for lightwave networks: Can little machines make it big?
Author(s): David J. Bishop; Vladimir A. Aksyuk; Cristian A. Bolle; C. Randy Giles; Flavio Pardo; Jim A. Walker
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Bulk micromachining for sensors and actuators
Author(s): Masayoshi Esashi
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Microsystems for diverse applications using recently developed microfabrication techniques
Author(s): Laurent Dellmann; Terunobu Akiyama; Danick Briand; Sebastien Gautsch; Olivier T. Guenat; Benedikt Guldimann; Philippe Luginbuhl; Cornel Marxer; Urs Staufer; Bart van der Schoot; Nico F. de Rooij
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