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Proceedings of SPIE Volume 4175

Materials and Device Characterization in Micromachining III
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Volume Details

Volume Number: 4175
Date Published: 11 August 2000
Softcover: 20 papers (210) pages
ISBN: 9780819438317

Table of Contents
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Characterization of LiNbO3/Ti(20 nm)/Pt(10 nm)/Au(100 nm)/Au(10 um) lithium niobate optical modulator by depth sensing nanoindentation and scratching techniques
Author(s): Lotfi Chouanine
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Passive alignment and its application in multilevel x-ray lithography
Author(s): Zhong Geng Ling; Kun Lian; Jost Goettert
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Peel-off probe: a cost-effective probe for electrical atomic force microscopy
Author(s): Thomas Hantschel; Stefan Slesazeck; N. Duhayon; Mingwei Xu; Wilfried Vandervorst
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Mounting of molded AFM probes by soldering
Author(s): Thomas Hantschel; Uwe Pape; Stefan Slesazeck; Philippe Niedermann; Wilfried Vandervorst
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Compact pressure- and structure-based gas flow model for microvalves
Author(s): Albert K. Henning
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Automatic mesh adaptivity for finite element simulation of multilayer MEMS
Author(s): Jens Mueller; Jan G. Korvink
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Microtensile tests with the aid of probe microscopy for the study of MEMS materials
Author(s): Ioannis Chasiotis; Wolfgang G. Knauss
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Auto-adhesion model for MEMS surfaces taking into account the effect of surface roughness
Author(s): W. Merlijn van Spengen; Ingrid De Wolf; Bob Puers
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Novel chemistry for surface engineering in MEMS
Author(s): Y. Jun; V. Boiadjiev; R. Major; Xiao-Yang Zhu
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Fabrication of graphite masks for deep and ultradeep x-ray lithography
Author(s): Yohannes M. Desta; Georg Aigeldinger; Kevin J. Zanca; Philip J. Coane; Jost Goettert; Michael C. Murphy
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Experimental one- and two-dimensional mechanical stress characterization of silicon microsystems using micro-Raman spectroscopy
Author(s): W. Merlijn van Spengen; Ingrid De Wolf; Roy Knechtel
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Micromachined capacitive switches at microwave frequencies
Author(s): Chee How Wong; M. J. Tan; Li Hui Guo; J.-M. Huang; Kim Miao Liew; Ai Qun Liu
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RF MEMS microswitches design and characterization
Author(s): Xavier Lafontan; Christian Dufaza; Michel Robert; Guy Perez; Francis Pressecq
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Development of a high-performance SOI-fabricated gyroscope
Author(s): S. Rajendran; Kim Miao Liew; Yee Chong Loke; Ai Qun Liu
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Characterization and design optimization for CMOS-compatible MEMS
Author(s): Tim K. Shia; Shih-I Yang; Cheng-Kuo Lee; Chih-Min Yao; Mark H. Lee
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Effect of dc bias field on resonance frequency and vibration amplitude in a magnetomechanical bimorph resonator
Author(s): Tarik Bourouina; Amalia Garnier; Hiroyuki Fujita; Jean-Claude Peuzin
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Nonlinear dynamic behavior of electrostatically actuated devices
Author(s): Yi-mang Chou; Weileun Fang
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MEMS/MOEMS for lightwave networks: Can little machines make it big?
Author(s): David J. Bishop; Vladimir A. Aksyuk; Cristian A. Bolle; C. Randy Giles; Flavio Pardo; James A. Walker
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Bulk micromachining for sensors and actuators
Author(s): Masayoshi Esashi
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Microsystems for diverse applications using recently developed microfabrication techniques
Author(s): Laurent Dellmann; Terunobu Akiyama; Danick Briand; Sebastien Gautsch; Olivier T. Guenat; Benedikt Guldimann; Philippe Luginbuhl; Cornel Marxer; Urs Staufer; Bart van der Schoot; Nico F. de Rooij
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