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Proceedings of SPIE Volume 4088

First International Symposium on Laser Precision Microfabrication
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Volume Details

Volume Number: 4088
Date Published: 6 November 2000
Softcover: 89 papers (426) pages
ISBN: 9780819437310

Table of Contents
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Laser precision microfabrication in Japan
Author(s): Isamu Miyamoto; Toshihiko Ooie; Shozui Takeno
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Overview of laser microprocessing: fundamentals, practical applications, and future prospects
Author(s): Vadim P. Veiko
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Surface and bulk ultrashort-pulsed laser processing of transparent materials
Author(s): Ingolf V. Hertel; Razvan Stoian; David Ashkenasi; Arkadi Rosenfeld; Eleanor E. B. Campbell
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395-nm and 790-nm femtosecond laser ablation of aluminum-doped zinc oxide
Author(s): Masayuki Okoshi; Kouji Higashikawa; Mitsugu Hanabusa
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Formation of photonic crystals by femtosecond laser microfabrication
Author(s): Hiroaki Misawa; Saulius Juodkazis; Hong-Bo Sun; Shigeki Matsuo; Junji Nishii
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Internal modification of glass materials with a femtosecond laser
Author(s): Kazuyuki Hirao
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Time-resolved dynamics of plasma self-channeling and bulk modification in silica glasses induced by a high-intensity femtosecond laser
Author(s): Sung-Hak Cho; Hiroshi Kumagai; Katsumi Midorikawa; Minoru Obara
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Observation of voids and optical seizing of voids in silica glass with infrared femtosecond laser pulses
Author(s): Wataru Watanabe; Tadamasa Toma; Kazuhiro Yamada; Junji Nishii; Ken-ichi Hayashi; Kazuyoshi Itoh
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Micromachining with high-repetition-rate femtosecond laser sources
Author(s): E. Baubeau; Ronan Le Harzic; Christian Jonin; E. Audouard; Stephane Mottin; M. Courbon; Pierre Laporte
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Laser-induced microstructuring of photonic materials: semiconductors
Author(s): Jan J. Dubowski
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Applications of pulsed lasers in low-temperature thin film electronics fabrication
Author(s): Thomas W. Sigmon; D. Toet; Paul G. Carey; Patrick M. Smith; Paul Wickboldt
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F2 laser ablation of GaN
Author(s): Toshimitsu Akane; Koji Sugioka; Shintaro Nomura; Kiyotaka Hammura; Kotaro Obata; Naoko Aoki; Koichi Toyoda; Yoshinobu Aoyagi; Katsumi Midorikawa
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Molecular dynamics simulation of ablation process with ultrashort-pulsed laser
Author(s): Etsuji Ohmura; Ichirou Fukumoto; Isamu Miyamoto
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Ultrashort-pulsed laser microstructuring of diamond
Author(s): Michael Douglas Shirk; Pal Molian; Cai Wang; Kai M. Ho; Ajay P. Malshe
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Effects of repetitive irradiation in laser ablation of aluminum in gases observed by photoacoustic and imaging techniques
Author(s): Yoshiro Ito; Isamu Oguro; Susumu Nakamura
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Novel technology for laser precision microfabrication of hard materials
Author(s): Koji Sugioka; Katsumi Midorikawa
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Novel results of laser precision microfabrication with excimer lasers and solid state lasers
Author(s): Uwe Stamm; Michael Fiebig; Sergei V. Govorkov; Eric E. Mayer; Rustem Osmanov; Michael J. Scaggs; Evgueni V. Slobodtchikov; Alexander O. Wiessner; Dirk Basting
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Excimer laser microfabrication and micromachining
Author(s): Malcolm C. Gower
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High-efficiency microdrilling of silicon wafer using excimer laser
Author(s): Shinsuke Asada; Tomokazu Sano; Isamu Miyamoto
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Micromachining using femtosecond lasers
Author(s): Hans Kurt Toenshoff; Andreas Ostendorf; Stefan Nolte; Frank Korte; Thorsten Bauer
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Micromachining with ultrafast lasers
Author(s): Kazuhiko Shihoyama; A. Furukawa; Philippe Bado; Ali A. Said
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Laser via-hole drilling of printed wiring board
Author(s): Toshiharu Okada
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Present status of excimer laser exposure apparatus
Author(s): Akiyoshi Suzuki
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Local annealing of shape memory alloys using laser scanning and computer vision
Author(s): Moustapha Hafez; Yves Bellouard; Thomas C. Sidler; Reymond Clavel; Rene-Paul Salathe
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Virtual engineering helps to get laser adjustment industrially accepted
Author(s): Burkhard Mueller
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High-power second harmonic generation with free-running Nd:YAG slab laser for micromachining applications
Author(s): Sebastian Favre; Thomas C. Sidler; Rene-Paul Salathe
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Ultrafast fiber lasers: alternative light sources for industrial material processing
Author(s): Gregg Douglas Sucha; Heinrich Endert
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UV laser ablative shaping of optical surface using ArF laser
Author(s): Takahisa Jitsuno; Keiu Tokumura; Hisashi Tamamura
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Nonlithographic coherent array of ultrafine particles on an irradiated material using Nd:YAG laser: influence of the laser fluence on the microstructure
Author(s): Yuji Kawakami; Eiichi Ozawa
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Laser texturing process and surface quality control
Author(s): Jianfeng Jiang; Yonghui He; Yonggen Yan; Wansheng Zhao; Yaohuan Xu
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Micromachining with a frequency-converted diode-pumped Nd:YAG laser
Author(s): Kevin Hartke; Kevin King; Dave F. Farson; Kevin Ely
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High-precision microcutting of ceramics with short-pulsed solid state lasers
Author(s): Joachim Radtke; Tobias Abeln; Michael Weikert; Friedrich Dausinger
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Laser microcaving of steel with solid state lasers
Author(s): Tobias Abeln; Joachim Radtke; Michael Weikert; Friedrich Dausinger
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Laser joining of microcomponents with fiber lasers and diode lasers
Author(s): Arnold Gillner; Luedger Bosse; Thorsten Kramer; Alexander M. Olowinsky; M. Wild
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Pulsed Nd:YAG laser welding of titanium ear implants
Author(s): Jan Gedopt; Erwin Delarbre
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Compact multisensor laser scanning head for processing and monitoring microspot welding
Author(s): Moustapha Hafez; Karin Julliard; Sylvain Grossmann; Lino Olivetta; Thomas C. Sidler; Rene-Paul Salathe; Hans-Peter Schwob; Toon Blom; Willem Hoving
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Observation of nanoparticle formation process by two-dimensional laser-induced fluorescence, UV Rayleigh scattering, and re-decomposition laser-induced fluorescence methods
Author(s): Junichi Muramoto; Takahiro Inmaru; Yoshiki Nakata; Tatsuo Okada; Mitsuo Maeda
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Influence of laser fluence on the synthesis of carbon nitride thin films by nitrogen-ion-assisted pulsed-laser deposition
Author(s): Jian Ping Zhao; Z. Y. Chen; T. Yano; Toshihiko Ooie; Masafumi Yoneda; J. Sakakibara
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Preparation of metal oxide thin films using coating photolysis process with ArF excimer laser
Author(s): Tetsuo Tsuchiya; Akio Watanabe; Yoji Imai; Hiroyuki Niino; Akira Yabe; Iwao Yamaguchi; Takaaki Manabe; Toshiya Kumagai; Susumu Mizuta
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Preparation of conducting polymer thin films by UV laser-assisted deposition
Author(s): Satoru Nishio; Motoyoshi Okumura; Yoshiaki Taketani; Akiyoshi Matsuzaki; Hiroyasu Sato
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Nanosatellites and MEMS fabrication by laser microprocessing
Author(s): Henry Helvajian; Peter D. Fuqua; William W. Hansen; Siegfried W. Janson
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Microgroove fabrication with excimer laser ablation techniques for optical fiber array alignment purposes
Author(s): Kris Naessens; An Van Hove; Thierry Coosemans; Steven Verstuyft; Luc Vanwassenhove; Peter Van Daele; Roel G. Baets
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Fabrication of Ce:YIG film for electric and magnetic field sensor by pulsed-laser deposition and laser-induced forward transfer
Author(s): Yoshiki Nakata; Yuko Tashiro; Tatsuo Okada; Mitsuo Maeda; Sadao Higuchi; Kiyotaka Ueda
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Electro-osmotic flow control in microchannels produced by scanning excimer laser ablation
Author(s): Frank Wagner; Patrik W. Hoffmann
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Advanced laser microfabrication of photonic components
Author(s): Peter R. Herman; Kevin P. Chen; Paul B. Corkum; Andrei Naumov; Sandy Ng; Jie Zhang
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Laser processing of convex structures in chalcogenide glasses
Author(s): Tamihiro Gotoh; Keiji Tanaka
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Laser ablation process of quartz material using F2 laser
Author(s): Takahisa Jitsuno; Hironari Mikata; Keiu Tokumura; Nobu Kuzuu; Naoyuki Kitamura; Yoshizo Kawaguchi
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Laser surface cleaning: basic understanding, engineering efforts, and technical barriers
Author(s): Yongfeng Lu; Wen Dong Song; Minghui Hong; ZhongMin Ren; Yuan Wei Zheng
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Laser processes for precise microfabrication of magnetic disk-drive components
Author(s): Andrew C. Tam
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Optical radiation pressure micromachining using a small particle
Author(s): Hiroki Shimizu; Takashi Miyoshi; Satoshi Kiyono
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Micropeak array in the scribe line on a wafer
Author(s): Teiichirou Chiba; Ryuusuke Komura; Akira Mori
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Matrix-assisted laser transfer of electronic materials for direct-write applications
Author(s): Raymond C. Y. Auyeung; H. D. Wu; R. Modi; Alberto Pique; J. M. Fitz-Gerald; Henry D. Young; Samuel Lakeou; Russell Chung; Douglas B. Chrisey
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Transient light-induced refractive index change made by laser microfabrication in nitroaniline-doped PMMA film
Author(s): Kazuhiko Yamasaki; Saulius Juodkazis; Mitsuru Watanabe; Shigeki Matsuo; Kenji Kamada; Koji Ohta; Hiroaki Misawa
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Pulsed laser nitridation of InP
Author(s): Naoko Aoki; Toshimitsu Akane; Koji Sugioka; Koichi Toyoda; Jan J. Dubowski; Katsumi Midorikawa
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Effects of laser pulse shape on jetlike plasma formation in laser ablation of metals under atmosphere at high fluence: observation by nanosecond imaging technique
Author(s): Satoshi Kiyoku; Yuichi Kurosaki; Isamu Oguro; Susumu Nakamura; Yoshiro Ito
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Molecular dynamics analysis on physical phenomena of metal with evaporation induced by laser irradiation
Author(s): Ichirou Fukumoto; Etsuji Ohmura; Alexei G. Zhidkov; Akira Sasaki; Takayuki Utsumi; Isamu Miyamoto
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Technique of microfabrication suitable for machining submillimeter-wave components
Author(s): Wai Yip Liu; David Paul Steenson; Michael B. Steer
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High-resolution contact lithography by excimer lasers
Author(s): Huijie Huang; Dunwu Lu; Longlong Du; Yongkai Zhao; Cailai Yuan; Baocai Jiang; Runwen Wang
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Inorganic-organic hybrid material for lithography
Author(s): Lin Pang; Yingbai Yan; Guofan Jin; Minxian Wu
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Etching characteristics of the PDP barrier rib pastes by focused Ar+ laser and Nd:YAG laser
Author(s): MinYoung Ahn; KyoungCheol Lee; Hong Kyu Lee; Cheon Lee
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Thermomechanical mechanisms of laser cleaning
Author(s): Vadim P. Veiko; Elena A. Shakhno; Sergey V. Nikolaev
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N2 laser stereo-lithography
Author(s): Saburoh Satoh; Takao Tanaka; Nobuya Hayashi; Chobei Yamabe
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Hole drilling of glass substrates with a slab waveguide CO2 laser
Author(s): Yoshikazu Yoshida; Yuji Kobayashi; Tiejun Zhang; Hiroyoshi Yajima; Yuji Hashidate; Hiroshi Ogura
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Evaluation of characteristics of VUV optical materials irradiated by F2 laser
Author(s): Yasuo Itakura; Fumika Yoshida; Youichi Kawasa; Akira Sumitani; Osamu Wakabayashi; Hakaru Mizoguchi
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High-repetition-rate ArF excimer laser for microlithography
Author(s): Osamu Wakabayashi; Tatsuo Enami; Ken Ishii; Katsutomo Terashima; Yasuo Itakura; Takayuki Watanabe; Takeshi Ohta; Ayako Ohbu; Hirokazu Kubo; Hirokazu Tanaka; Satoshi Andou; Takashi Matsunga; Hiroshi Umeda; Toru Suzuki; Akira Sumitani; Hakaru Mizoguchi
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Efficient high-pulse-energy green beam generation by intracavity frequency doubling of a quasi-cw laser-diode-pumped Nd:YAG laser
Author(s): Susumu Konno; Yoko Inoue; Tetsuo Kojima; Shuichi Fujikawa; Koji Yasui
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Thermohydrodynamics analysis on the mechanism of bump formation in laser texturing
Author(s): Etsuji Ohmura; Rina Murayama; Isamu Miyamoto
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Kinetic study of nanofabrication on gold films by atomic force microscope tips under laser irradiation
Author(s): B. Hu; Yongfeng Lu; ZhiHong Mai; Wen Dong Song; Wai Kin Chim
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Laser surface annealing of Ni-base superalloy for enhancement of material performance in hydrogen environment
Author(s): Akio Hirose; Liufa Liu; Kojiro F. Kobayashi
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New interferometric method to measure the complete geometry of the keyhole
Author(s): Muhammad Muddassir Gualini; Hans Steinbichler
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Plasma behaviors in laser cutting
Author(s): Hideyuki Horisawa; Masataka Tamura; Seiichiro Kimura
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Microsoldering using a YAG laser: on lead-free solder
Author(s): Sumio Nakahara; Tatsuya Kamata; Noriyuki Yoneda; Shigeyoshi Hisada; Takeyoshi Fujita
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Fundamental study about molten metal of laser cutting
Author(s): Takashi Fushimi; Hiromasa Nakajima; Hideyuki Horisawa; Shigeru Yamaguchi; Nobuo Yasunaga; Tomoo Fujioka
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Fundamental study about CO2 laser welding of titanium aluminide intermetallic compound
Author(s): Gaku Kuwahara; Shigeru Yamaguchi; Kenzo Nanri; Masanori Ootani; Masato Tetsuka; Sachio Seto; Mikiya Arai; Tomoo Fujioka
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Effect of nozzle shape on surface integrity in microcutting with pulsed YAG laser
Author(s): Yasuhiro Okamoto; Yoshiyuki Uno; Naoki Miyanagi
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Method to evaluate Nd:YAG laser microscopic spot welding process using reflected laser power
Author(s): Seo-jeong Park; Ryuichi Honma; Isamu Miyamoto
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Optical emission of plasmas in ultraviolet and infrared laser ablation of graphite by time-resolved spectroscopy
Author(s): Tatsuya Shinozaki; Toshihiko Ooie; Tetsuo Yano; Masafumi Yoneda
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Three-dimensional microassembling technique applying laser trapping
Author(s): Daisuke Sawaki; Junich Ikeno; Osamu Horiuchi; Toshio Kasai
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Optical diagnostics in laser-induced plasma-assisted ablation of fused quartz
Author(s): Minghui Hong; Koji Sugioka; Yongfeng Lu; Katsumi Midorikawa; Tow Chong Chong
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Photo-induced refractive-index changes in filaments formed in glass with femtosecond laser pulses
Author(s): Kazuhiro Yamada; Tadamasa Toma; Wataru Watanabe; Junji Nishii; Kazuyoshi Itoh
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In-vivo results of corneal surface measurement with optical methods
Author(s): Muhammad Muddassir Gualini; Hans Steinbichler; Wajid Ali' Khan
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Removal process of metal thin films during laser rear patterning
Author(s): Tomokazu Sano; Isamu Miyamoto
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Laser method for marking bar codes on glass substrates
Author(s): Hirotoshi Hayakawa
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Laser processing system for microdrilling of printed circuit boards
Author(s): Junichi Nishimae; Yukio Satoh; Tetsuo Kojima; Tsukasa Fukushima
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Development of the enhanced concurrent in-line inspection system for CO2 laser drilling machine
Author(s): Hideaki Nagatoshi; Kazuhide Isaji; Tsutomu Sugiyama; Hidehiko Karasaki; Makoto Kato
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Selective laser sintering with heat of formation by using reactive materials
Author(s): Takayuki Kamitani; Osamu Yamada; Yoji Marutani
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Laser microprocessing unit and its application
Author(s): Kenshi Fukumitsu; Tomonori Oie
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Micro materials processing with high-power diode lasers
Author(s): Friedrich G. Bachmann; Reiji Takahashi; Susumu Fujishima
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Micromachining of transparent materials by laser ablation of organic solution
Author(s): Jun Wang; Hiroyuki Niino; Akira Yabe
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