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Proceedings of SPIE Volume 4075

Micro-Opto-Electro-Mechanical Systems
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Volume Details

Volume Number: 4075
Date Published: 1 September 2000
Softcover: 20 papers (200) pages
ISBN: 9780819437129

Table of Contents
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Quick-response dynamic focusing lens using multilayered piezoelectric bimorph actuator
Author(s): Takashi Kaneko; K. Ohba; Naoki Mitsumoto; Nobuaki Kawahara
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Micro-optical devices in a Japanese national project
Author(s): Kimihide Nakatsu; Naoki Mitsumoto; Kiyoshi Nemoto; Yuichi Ishikawa; Takayuki Hirano
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Microfabrication and packaging of deformable mirror devices
Author(s): Alan W.S. Ross; Stephen C. Graham; Alan M. Gundlach; J. Tom M. Stevenson; William J. Hossack; David G. Vass; Georg K.H. Bodammer; Euan Smith; Kevin Ward
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Hybrid liquid crystal Solc/Fabry-Perot filter for wavelength demultiplexing: optimum design parameters
Author(s): Serge Meyer; Badr-Eddine Benkelfat; Qin Zou
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1D and 2D laser line scan generation using a fiber optic resonant scanner
Author(s): David A. Roberts; Richard R. A. Syms
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Electrically controlled optoelectronic Y-switch based on a BMFET device
Author(s): Giuseppe Coppola; Andrea Irace; Giovanni Breglio; Antonello Cutolo
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Bottlenecks of opto-MEMS
Author(s): Dan Haronian
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Optical pressure sensor for an aeronautical application using white light interferometry
Author(s): John Greenwood; George M. Dobre
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Dynamic measurements of a micropump using a fiber-optic-based interferometer
Author(s): Claire E. Davis; David J. Booth; Erol C. Harvey; P. Cadusch; Alexander Mazzolini; S. Askraba
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Novel aspects of interferometric testing of silicon microelement properties
Author(s): Leszek A. Salbut; Michal Jozwik
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Micromachining in silicon for passive alignment of optical fibers
Author(s): Ylva Baecklund
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Microstructuring in LiNbO3: a route to MEMS devices in piezoelectric crystal media
Author(s): Robert William Eason; Ian E. Barry; Graeme W. Ross; Peter G. R. Smith; Corin B.E. Gawith
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Passive coupling of InGaAs/InP p-i-n detector and single-mode fiber using InP bulk micromachining
Author(s): Nandita DasGupta; Vangala Naveen Kumar; Kuna V.S.R. Kishore; Tejaswi Indukuri Kumar; Rajkumar Sankaralingam; Amitava DasGupta
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Fabrication and packaging of optical components and microsystems
Author(s): Juha T. Rantala; Janne K. Aikio; Pentti Karioja; Michael R. Descour; Harri K. Kopola; Jorma Lammasniemi
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Excimer laser ablation used for the fabrication of micro-optic phase and diffraction elements
Author(s): Erol C. Harvey; Jason P. Hayes; Brian C. Dempster; Tracy R. Mackin; Robert E. Scholten
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3D microstructuring with F2 lasers
Author(s): Hans Kurt Toenshoff; Ferdinand von Alvensleben; Andreas Ostendorf; Klaus Koerber; Christian Kulik
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Focused ion beam direct micromachining of DOEs
Author(s): Chantal Khan Malek; Frank T. Hartley; Jayant Neogi
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Tolerance and precision study for solder self-assembled MEMS
Author(s): Kevin F. Harsh; Paul E. Kladitis; Yanhang Zhang; Martin L. Dunn; Victor M. Bright; Y. C. Lee
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Adaptive materials for optical applications: example of polymer/liquid crystal microcomposites
Author(s): Pierre Sixou
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Micro-opto-electro-mechanical systems: recent developments and LETI's activities
Author(s): Eric Ollier; Patrick Louis Mottier
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