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Proceedings of SPIE Volume 3933

Laser Applications in Microelectronic and Optoelectronic Manufacturing V
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Volume Details

Volume Number: 3933
Date Published: 7 June 2000
Softcover: 56 papers (526) pages
ISBN: 9780819435507

Table of Contents
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Investigations of laser desorption from modified surfaces of ionic single crystals
Author(s): Christos Bandis; Mary L. Dawes; Y. Kawaguchi; Steve C. Langford; J. Thomas Dickinson
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Dynamical Stark effect in small quantum dots
Author(s): Joseph Thomas Andrews; Pratima Sen
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Explosive femtosecond ablation from ionic crystals
Author(s): Juergen Reif; Matthias Henyk; Dirk Wolfframm
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Interaction of shock electromagnetic waves with transparent materials: classical approach
Author(s): Anastasia S. Gruzdeva; Vitali E. Gruzdev
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Analysis of laser ablation process in semiconductor due to ultrashort-pulsed laser with molecular dynamics simulation
Author(s): Koji Watanabe; Yuri Ishizaka; Etsuji Ohmura; Isamu Miyamoto
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Laser technologies for manufacturing of advanced materials and devices
Author(s): Jan J. Dubowski
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Nonlinear optical characterization of silicon wafers: in-situ detection of stacking faults and external stress
Author(s): Juergen Reif; Thomas Schneider; Reiner P. Schmid; Dirk Wolfframm
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Influences of hydrogen in precursor Si films on excimer laser crystallization
Author(s): Michiko Takahashi; Masakazu Saitoh; Kenkichi Suzuki; Kiyoshi Ogata
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Laser chemical process for clean applications of semiconductor manufacturing
Author(s): David Yogev; Michael Y. Engel; Shaike Zeid; Izhack Barzilay; Boris Livshits
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Present status and future aspects of high-power diode laser materials processing under the view of a German national research project
Author(s): Friedrich G. Bachmann
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Direct writing of electronic materials using a new laser-assisted transfer/annealing technique
Author(s): Alberto Pique; J. M. Fitz-Gerald; Douglas B. Chrisey; Raymond C. Y. Auyeung; H. D. Wu; Samuel Lakeou; Robert Andrew McGill
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Laser-induced temperature-rise measurement by infrared imaging
Author(s): Jianhui Gu; Siu Chung Tam; Yee Loy Lam; Qiguang Zheng; Xueqin Wei
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Stress measurements in silicon microstructures
Author(s): Sherwin Amimoto; Dick J. Chang; Andra D. Birkitt
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Pulsed-laser deposition of electronic oxides: superconductor and semiconductor applications
Author(s): David P. Norton; Chan Park; Y. E. Lee; J. D. Budai; M. F. Chisholm; D. T. Verebelyi; D. K. Christen; D. M. Kroeger
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Optical and electronic properties of amorphous WO3 thin film irradiated by laser in air
Author(s): H. Qiu; Yongfeng Lu
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Effect of film thickness on the properties of indium tin oxide thin film grown by pulsed-laser deposition for organic light-emitting diodes
Author(s): Heungsoo Kim; James S. Horwitz; Alberto Pique; Gary P. Kushto; Zakya H. Kafafi; C. M. Gilmore; Douglas B. Chrisey
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Developments of laser processing technologies in the Japanese MITI project
Author(s): Takehito Yoshida; Toshio Sato; Yoshiaki Yoshida; Ken-ichi Matsuno
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TiN growth by hybrid radical beam-PLD for Si barrier metal
Author(s): Kotaro Obata; Koji Sugioka; Koichi Toyoda; Hiroshi Takai; Katsumi Midorikawa
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Laser ablation of solid films at a cryogenic temperature
Author(s): Hiroyuki Niino; Tadatake Sato; Akira Yabe
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Pulsed-laser deposition of AlN thin films
Author(s): Yongfeng Lu; ZhongMin Ren; H. Q. Ni; Yeow Whatt Goh; B. A. Cheong; S. K. Chow; Jian Ping Wang; Tow Chong Chong
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Production of photoluminescent Si-based nanostructures by laser ablation: effects of ablation and postdeposition conditions
Author(s): Andrei V. Kabashin; M. Charbonneau-Lefort; Michel Meunier; Richard Leonelli
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Pulsed-laser deposition growth of SBN and correlation study of structure and optical properties
Author(s): Felix E. Fernandez; Yelitza Gonzalez; Huimin Liu; Edgardo Rodriguez; Victor Rodriguez; Weiyi Jia
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Electric signal diagnostics of plasma dynamics at an early stage of laser ablation
Author(s): Ming Hui Hong; Yongfeng Lu; A. Foong
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KrF-excimer-laser-induced ohmic metallization of ZnO substrate
Author(s): Toshimitsu Akane; Koji Sugioka; Katsumi Midorikawa
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Achievements in near-field investigations in Russia (IFMO SPb)
Author(s): Vadim P. Veiko; Nikolay B. Voznesensky; Tatyana V. Ivanova
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Scribing blue LED wafer using laser-induced plasma-assisted ablation with a Q-switched Nd:YAG laser
Author(s): JongMoo Lee; Jun-Ho Jang; Tae-Kyung Yoo
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Microfabrication by femtosecond laser irradiation
Author(s): Hiroaki Misawa; Hong-Bo Sun; Saulius Juodkazis; Mitsuru Watanabe; Shigeki Matsuo
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Laser micromachining: new developments and applications
Author(s): Nadeem Hasan Rizvi; David K. Milne; Phil T. Rumsby; Malcolm C. Gower
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Excimer lamp stereolithography
Author(s): Saburoh Satoh; Takao Tanaka; Satoshi Ihara; Chobei Yamabe
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New infrared stereolithography: control of the parameters of the localized curing thermosensitive materials
Author(s): Marco A. F. Scarparo; Andre L. J. Munhoz; Gilson Marinho; Djalma S. Salles; Susan Davis Allen
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Custom specific fabrication of integrated optical devices by excimer laser ablation of polymers
Author(s): Thomas Klotzbuecher; Martin Popp; Torsten Braune; Jens Haase; Anne Gaudron; Ingo Smaglinski; Thomas Paatzsch; Hans-Dieter Bauer; Wolfgang Ehrfeld
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Laser-based microscale bending for microelectronics fabrication
Author(s): Xianfan Xu
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Fabrication of microgrooves with excimer laser ablation techniques for plastic optical fiber array alignment purposes
Author(s): Kris Naessens; An Van Hove; Thierry Coosemans; Steven Verstuyft; Heidi Ottevaere; Luc Vanwassenhove; Peter Van Daele; Roel G. Baets
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Spectroscopic investigation of SiO2 surfaces of optical materials for high-power lasers
Author(s): Stavros G. Demos; Lynn Matthew Sheehan; Mark R. Kozlowski
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Excimer laser micromachining for fabrication of diamond diffractive optical elements
Author(s): Vitali I. Konov; V. V. Kononenko; Sergej M. Pimenov; Alexander M. Prokhorov; Vladimir S. Pavelyev; Victor A. Soifer; Peter F. Muys; E. Vandamme
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Microprocessing of glass materials by laser-induced plasma-assisted ablation using nanosecond pulsed lasers
Author(s): Jie Zhang; Koji Sugioka; Katsumi Midorikawa
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Novel technique for high-quality microstructuring with excimer lasers
Author(s): Stephan Roth; Manfred Geiger
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Micromachining by laser ablation of liquid: superheated liquid and phase explosion
Author(s): Jun Wang; Hiroyuki Niino; Akira Yabe
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Analysis of excimer laser patterning process of Cu thin film
Author(s): Tomokazu Sano; Isamu Miyamoto; Hideaki Hayashi; Humihiro Ochi
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Laser beam joining of optical fibers in silicon V-grooves
Author(s): Stefan Kaufmann; Andreas Otto; Gerhard Luz
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CO2 laser drilling of printed wiring boards and development of in-process monitoring system
Author(s): Takayuki Nakayama; Tomokazu Sano; Isamu Miyamoto; Kenichiro Tanaka; Yuichi Uchida
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Pulsed x-ray emission by laser-plasma-triggered electron beam
Author(s): Yuzo Nagumo; Shigeki Hayashi; Takashi Yagi; Takeshi Matsumura; Susumu Yamazaki; Kazumasa Honda; Isao Kojima
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Light scattering by rough dielectric surface
Author(s): Vitali E. Gruzdev; Anastasia S. Gruzdeva
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Capacitive discharge excilamps
Author(s): Edward A. Sosnin; Mikhail V. Erofeev; Alexei N. Panchenko; Mikhail I. Lomaev; Victor S. Skakun; Dmitrii V. Shitz; Victor F. Tarasenko
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Optimization of nanosecond UV laser illumination for semiconductor materials (Si, HgCdTe, InSb)
Author(s): Andrew R. Novoselov; Anatoly G. Klimenko; Evgeny V. Fedosenko; A. E. Plotnikov
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Reprography method of nondestructive testing of micro-cracks inside the wall of a pinhole micromanufactured by laser
Author(s): Chenbo Zhou; Wenying Yu; Jinzuo Sun; Hengfu Chen
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Model predicting the microhole profiles of laser drilling processes in carbon fiber composites
Author(s): Frank F. Wu; Richard D. Pilkington
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Microscopic observation of laser-induced forward transfer process by two-dimensional laser-induced fluorescence technique
Author(s): Yoshiki Nakata; Tatsuo Okada; Mitsuo Maeda
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Ion-source-assisted pulsed-laser deposition of carbon nitride thin films
Author(s): Z. F. He; Yongfeng Lu; ZhiHong Mai; ZhongMin Ren
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Pulsed-laser deposition of hydrogenated amorphous carbon films from a polymeric target
Author(s): Sumei Huang; Yongfeng Lu; Zhuo Sun
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Preparation of polyperinaphthalenic organic semiconductor thin films by excimer laser ablation and application to anode electrodes for ultrathin rechargable lithium ion batteries
Author(s): Satoru Nishio; Sigenori Kuriki; Yukari Tsujine; Akiyoshi Matsuzaki; Hiroyasu Sato; Nobuo Ando; Yukinori Hato; Kazuyoshi Tanaka
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Novel thin-film deposition method and system with IR-FEL
Author(s): Masato Yasumoto; Norimasa Umesaki; Takio Tomimasu; Akira Ishizu; Kunio Awazu
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Structure and properties of porous PZT ceramics synthesized by selective laser sintering method
Author(s): Ekaterina Yu. Tarasova; Galina V. Kryukova; Alexei L. Petrov; Igor V. Shishkovsky
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Selectively deposited copper on laser-treated polyimide using electroless plating
Author(s): Gang Zhao; Harvey M. Phillips; HongYu Zheng; Siu Chung Tam; Wen Qing Liu; Gongling Wen; Zhiben Gong; Yee Loy Lam
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High-accuracy microdrilling of steel with solid state UV laser at a rate of 10 mm/sec
Author(s): Sergei V. Govorkov; Evgueni V. Slobodtchikov; Alexander O. Wiessner; Dirk Basting
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Femtosecond pulse laser machining of InP wafers
Author(s): Jerzy M. Wrobel; Joern Bonse; Joerg Krueger; Wolfgang Kautek
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