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Proceedings of SPIE Volume 3891

Electronics and Structures for MEMS
Editor(s): Neil W. Bergmann; Olaf Reinhold; Norman C. Tien
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Volume Details

Volume Number: 3891
Date Published: 29 September 1999
Softcover: 47 papers (436) pages
ISBN: 9780819434920

Table of Contents
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Wide-bandgap materials for novel electronic devices and MEMS
Author(s): Alex Hariz
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Silicon surface micromachining over active devices
Author(s): Ekalak Chaowicharat; Chee Yee Kwok; Graham A. Rigby
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Sensor system for heart sound biomonitor
Author(s): Jarrad L. Maple; Leonard T. Hall; John Agzarian; Derek Abbott
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New sensor-on-chip technology for micromechanical acceleration-threshold switches
Author(s): Michael Wycisk; Josef Binder; Sven Michaelis; Hans-Joerg Timme
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Micromachined accelerometer based on electron tunneling
Author(s): Yongjun Yang; Lijie Li; Yongqing Xu; Yanjun Zhao; Chun-Guang Liang; Tongli Wei
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Vertically sensitive accelerometer and its realization by deep-UV-lithography-supported electroplating
Author(s): Wenmin Qu; Christian Wenzel; Norbert Urbansky; Andreas Jahn
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MEMS-IDT-based microaccelerometers and gyroscopes
Author(s): Vijay K. Varadan; Vasundara V. Varadan
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Synthetic jet actuators for flow control
Author(s): Samuel G. Mallinson; John A. Reizes; Guang Hong; M. Buttini
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Characteristics of a monolithic microvalve with a large-displacement electrostatic actuator
Author(s): Jafar Haji-Babaei; Chee Yee Kwok
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Microengineered open tubular columns for GC analysis
Author(s): Goib Wiranto; Malcolm R. Haskard; Dennis E. Mulcahy; David E. Davey; Ernest F. Dawes
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Huber effect and its application to micromotors
Author(s): Yullia Shen; Boon Kain Tay; Benjamin Thompson; Wen L. Soong; Bruce R. Davis; Derek Abbott
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Detailed balance of the Feynman micromotor
Author(s): Derek Abbott; Bruce R. Davis; Juan M. R. Parrondo
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Versatile microsensor for micromachine applications
Author(s): Pei Lin Yu; Ronald B. Zmood
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Design of a micromagnetic bearing actuator
Author(s): LiJiang Qin; Ronald B. Zmood
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Micromagnetic bearing for friction minimization in micromachines
Author(s): Muralihar K. Ghantasala; Dinesh K. Sood; Ronald B. Zmood
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Trade-offs for quenched avalanche photodiode (QAPD) sensors for imaging turbid media
Author(s): Scott Jeffrey Hill; Mark L. Perkins; Samuel P. Mickan; Derek Abbott; Jesper Munch; Timothy van Doorn
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Analysis of system trade-offs for terahertz imaging
Author(s): Samuel P. Mickan; Derek Abbott; Jesper Munch; Xi-Cheng Zhang; Timothy van Doorn
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Experimental and theoretical study of the single-beam optical fiber trap
Author(s): Kozo Taguchi; Kentaro Atsuta; Takeshi Nakata; Masahiro Ikeda
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Fabrication of vertical-spring-type micromirror with SiO2 shielding screen and composite-layered mirror plate
Author(s): TaeSun Lim; Yong-Kweon Kim
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Semiconductor-polymer-based rf MEMS
Author(s): Vijay K. Varadan; Vasundara V. Varadan; K. A. Jose
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Collision avoidance for nanosatellite clusters using millimeter-wave radiometric motion sensors
Author(s): David C. Goodfellow; Derek Abbott
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Phase-locked loop-based microdisplacement/capacitance measurement and control system and its application to MEMS
Author(s): Shi-Bin Chang; Bruce C. S. Chou; J. J. Chang
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CMOS low-noise capacitance measurement circuit for micromachined gyroscope
Author(s): Wen Yu; Yong Ching Lim; Francis E.H. Tay; Yung C. Liang
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Self-biased transconductance amplifier
Author(s): Gilles Amendola; Yves Blanchard; Anne Exertier; Serge Spirkovitch; Guo Neng Lu; George Alquie
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Micro tactile sensor with capacitive-inductive function for discrimination of object property
Author(s): Katsunori Shida; Ryo Sato; Katsuya Higa; Tanemasa Asano
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Four-channel readout integrated circuit for imaging laser radar systems
Author(s): Terence C.W. Yeow; Brian I. Craig; Rodney J. Watson
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Fabrication of TiNi shape memory actuator for micropump
Author(s): Eiji Makino; Takashi Mitsuya; Takayuki Shibata
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Design and fabrication of diamond probe for atomic force microscope
Author(s): Takayuki Shibata; Tae Nakatsuji; Kazuya Unno; Eiji Makino
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Stress analysis of a standard CMOS process
Author(s): Ulrich Munch; V. Ziebart; Henry Baltes; Oliver Paul; Elko Doering
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Fabrication of stator winding of electromagnetic micromotor with 1-mm diameter
Author(s): Xiaolin Zhao; Chunsheng Yang; Guifu Ding; Mingsheng Zhang
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Biological applications of fiber optic trap
Author(s): Kozo Taguchi; Kentaro Atsuta; Takeshi Nakata; Masahiro Ikeda
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Novel micropump actuated by thin film shape memory alloy
Author(s): Dong Xu; Bingchu Cai; Guifu Ding; Yong Zhou; Aibin Yu; Li Wang; Xiaolin Zhao
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Micromechanical structure development for chemical analysis: study of porous silicon as an adsorbent
Author(s): Silvana Gasparotto de Souza; Elisabete Galeazzo; Maria Lucia Pereira da Silva; Rogerio Furlan; Francisco Javier Ramirez Fernandez
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Novel fiber-to-waveguide coupling method using silicon-on-insulator micromachining techniques
Author(s): Nam Quoc Ngo; Michel A. Rosa; Denis R. Sweatman; Sima Dimitrijev; H. Barry Harrison; Andrew Titmarsh
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Surface-micromachined electrostatic diaphragm micropump
Author(s): Won-Ick Jang; Yong Il Lee; Chang-Auck Choi; Chi-Hoon Jun; Youn Tae Kim
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Micropump technology and applications
Author(s): Frank T. Hartley
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Development and terrestrial applications of a nano-g accelerometer
Author(s): Frank T. Hartley
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Flip-chip process development using recessed bonding pads for laser/MEMS integration
Author(s): Michel A. Rosa; Decai Sun
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MEMS packaging and microassembly challenges
Author(s): Robert Mehalso
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Review of the history and technology of micromachined miniature displays using foundry-produced silicon backplanes
Author(s): Anthony J. Walton; David G. Vass; Ian Underwood; Georg K.H. Bodammer; David Calton; Kris Seunarine; J. Tom M. Stevenson; Alan M. Gundlach
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Nonvolatile high-density high-performance phase-change memory
Author(s): Guy C. Wicker
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Integration of MEMS devices
Author(s): Patrick J. French
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Advanced rf CMOS technology
Author(s): Hiroshi Iwai; Tatsuya Ohguro; Eiji Morifuji; Takashi Yoshitomi; Hideki Kimijima; Hisayo S. Momose; Kazumi Inoh; Hideaki Nii; Yasuhiro Katsumata
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High-efficiency silicon solar cells
Author(s): Martin A. Green
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