Share Email Print
cover

Proceedings of SPIE Volume 3880

MEMS Reliability for Critical and Space Applications
Editor(s): Russell A. Lawton; William M. Miller; Gisela Lin; Rajeshuni Ramesham
Format Member Price Non-Member Price
Softcover $105.00 * $105.00 *

*Available as a photocopy reprint only. Allow two weeks reprinting time plus standard delivery time. No discounts or returns apply.


Volume Details

Volume Number: 3880
Date Published: 18 August 1999
Softcover: 20 papers (182) pages
ISBN: 9780819434777

Table of Contents
show all abstracts | hide all abstracts
Statistical characterization of fracture of brittle MEMS materials
Author(s): Peter T. Jones; George C. Johnson; Roger T. Howe
Show Abstract
Failure analysis of worn surface-micromachined microengines
Author(s): Jeremy A. Walraven; Thomas J. Headley; Ann B. Campbell; Danelle M. Tanner
Show Abstract
Characterization of nonplanar motion in MEMS involving scanning laser interferometry
Author(s): Russell A. Lawton; Margaret H. Abraham; Eric Lawrence
Show Abstract
Critical point drying and cleaning for MEMS technology
Author(s): Ijaz H. Jafri; Heinz Busta; Steven T. Walsh
Show Abstract
Evaluation of micromechanical reliability of microactuator materials for hard-disk drive using the electrostatic test structure
Author(s): Se-Ho Lee; Yukeun Park; Dongil Kwon
Show Abstract
Developing a low-cost accelerometer for implantable pacemakers
Author(s): Lary R. Larson; David Ruben; Mark Henschel; Sarah A. Audet
Show Abstract
Processes and materials for creating and maintaining reliable vacuum and other controlled atmospheres in hermetically sealed MEMS packages
Author(s): Richard C. Kullberg
Show Abstract
Reliability issues of COTS MEMS for aerospace applications
Author(s): Rajeshuni Ramesham; Reza Ghaffarian; Namsoo P. Kim
Show Abstract
Resonance measurements of stresses in Al/Si3N4 microribbons
Author(s): Alexander P. Payne; Bryan P. Staker; Christopher S. Gudeman; Michael J. Daneman; Donald E. Peter
Show Abstract
Analysis of an optical energy interrupter for MEMS-based safety and arming systems
Author(s): Michael A. Beamesderfer; Steve Chen; Don L. DeVoe; Edward Litcher; Kenneth Johnson
Show Abstract
Delamination study of chip-to-chip bonding for a LIGA-based safety and arming system
Author(s): Gowrishankar Subramanian; Michael Deeds; Kevin R. Cochran; Raghu Raghavan; Peter A. Sandborn
Show Abstract
MEMS reliability for space applications by elimination of potential failure modes through testing and analysis
Author(s): Kin F. Man
Show Abstract
Characterization and reliability of CMOS microstructures
Author(s): Gary K. Fedder; Ronald D. Shawn Blanton
Show Abstract
MEMS reliability, process monitoring, and quality assurance
Author(s): Howard R. Last; Bruce W. Dudley; Robert L. Wood
Show Abstract
Reliability of microsystems based on a failure mechanism approach
Author(s): S. Cruzel; Daniel Esteve; Monique Dilhan; Jean-Yves Fourniols; Francis Pressecq; O. Puig; Jean-Jacques Simonne
Show Abstract
Development of characterization tools for reliability testing of micro-electro-mechanical system actuators
Author(s): Norman F. Smith; William P. Eaton; Danelle M. Tanner; James J. Allen
Show Abstract
Strength of polysilicon for MEMS devices
Author(s): David A. LaVan; Thomas E. Buchheit
Show Abstract
Analysis of manufacturing-scale MEMS reliability testing
Author(s): Katya M. Delak; Paul Bova; Allyson L. Hartzell; David J. Woodilla
Show Abstract

© SPIE. Terms of Use
Back to Top